LNL Introduction Course v5[1].2

Version 5.2 updated 2011-09-29

Lund Nano Lab: cleanroom and safety education

1 Ivan Maximov, Lund Nano Lab


The course outline

�  Theoretical cleanroom and safety course (2-2.5 h) �  Laboratory tour (about 1 h per group) �  Discussion of research projects with the lab staff, registration in

LIMS system, activation of access cards Lab access granted Further steps (in order to use equipment and wet benches): �  Study of Material Safety Data Sheets (MSDS) of chemicals �  Chemical risk assessment forms �  Equipment education

Ivan Maximov, Lund Nano Lab 2


The theory part

Part 1

�  Purpose and structure of the Lund Nano Lab �  Cleanroom basics. Cleanroom behavior in the Lund Nano Lab.

Part 2 �  Chemical safety in the lab

Part 3

�  Emergency situations. Alarms in the lab.

�  Lab buddy system and night/weekend work.

�  The LIMS system. Work with equipment.



Part 1

�  Purpose and structure of the Lund Nano Lab

�  Cleanroom basics. Cleanroom behavior in the Lund Nano Lab.



The purpose and structure of the lab

Main applications of the Lund Nano Lab:

�  epitaxial growth and processing of nanostructures, mostly III-Vs �  high resolution characterization of structures and devices �  fabrication of prototype devices (external companies) Structure of the laboratory:

�  Nano-process lab, level 1 (ISO 5 cleanroom class) �  Nano-epitaxy lab, level 2 (ISO 7) �  Berzelius cleanroom, level 2, integrated with the Nano-epitaxy lab



Features of the lab

�  designed capacity: up to 20 persons (level 1, Nano-process lab) and 20 persons (level 2, Nano-epi and Berzelius lab)

�  two-level cleanroom (ISO 5 and 7) with a cleanroom staircase

�  climate control in the cleanrooms: T=20±0.5 °C and humidity 40±5%

�  cleanroom type: unidirectional air-flow, 70% re-circulated, 30% fresh air. Air change: 12.7 per hour (level 1), 11.2 per hour (level 2).

�  three independent anti-vibration plates (UVL- and EBL-labs). EBL Raith150 stands on a double platform.

�  integration with existing Berzelius lab via level 2



Nano-process lab (ISO 5 cleanroom)


UV-lithography lab (UVL)

Chemical storage

Evaporation lab (EVA)

EBL-lab (EBL)

Changing room/lab entrance


Nano-epitaxy and Berzelius labs


Old part (formally not classified, but about ISO 8) New part (ISO 7)


Outline: �  What is cleanroom (CR)? �  Contamination control �  Cleanroom construction, ventilation �  Behavior in cleanroom �  Gowning

Cleanroom basics



Definition

A cleanroom is laboratory with a controlled environment, where

products are manufactured.

A room in which the concentration of airborne particles is

controlled, and which is constructed and used in a manner to

minimize the introduction, generation and retention of particles

inside the room and in which the other relevant parameters e.g.

temperature, humidity and pressure are controlled as necessary (ISO

14644-1)


Version 5.2 updated 2011-09-29 Ivan Maximov, Lund Nano Lab

Number of particles >0.5 µm generated/min from the human body Action Ordinary clothes Cleanroom clothes Sitting 500,000 15,000 Standing up 2,500,000 80,000 Walking slowly 5,000,000 150,000 Running 10,000,000 300,000

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Contamination from personnel

Version 5.2 updated 2011-09-29 Ivan Maximov, Lund Nano Lab 12

W. Whyte, Cleanroom Technology, John Wiley and Sons, 2003

Particle generation is proportional to speed: walk slow!


Cleanliness through air flow


•  Unidirectional air flow (0.4 m/s)

•  High Efficiency Particulate Air

(HEPA) filters

•  Large amount of supplied air

•  Overpressure in cleanroom

HEPA filters


Lund Nano Lab ventilation system


Principle of air filtration in the Lund Nano Lab

HEPA filters in a Fan Filter Unit (FFU)

Perforated floor

Version 5.2 updated 2011-09-29 Ivan Maximov, Lund Nano Lab 15

Cleanroom at Danchip, Copenhagen


Plenum

Media basement

”Fan tower” HEPA filter

16 Ivan Maximov, Lund Nano Lab

MC2 cleanroom ventilation system, Göteborg


To consider before entering the CR

�  A proper personal hygiene is a condition for working in the cleanroom �  Persons suffering from a cold should not enter the cleanroom �  Cosmetics have to be removed before entering the gowning area �  Contact lenses complicate eye rinsing �  Glasses must be clean when entering the gowning area �  Men with a beard should use a beard cover �  Smokers should wait at least 10 minutes after smoking before entering

the cleanroom �  Smokers and snuff users should rinse their mouth before entering the

cleanroom

�  No food (including chewing gum) or beverages are allowed in the cleanroom.

�  Only cleanroom compatible materials/items are allowed after cleaning

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To consider inside the CR

�  All movements should be slow and well planned �  Avoid crowding as this concentrates the contamination �  Avoid talking near any product or equipment �  Position yourself correctly with respect to your sample, e.g do not lean

over it �  Do not carry items close to your body �  Avoid touching your face and your or other people's garments.

�  Doors should be opened and closed slowly �  Garments that are wet or stained have to be exchanged as quickly as

possible due to reduced filtering effect �  Do not leave your samples, wafers, tools on the tables or benches.

Clean up after yourself, remove paper and cleanroom wipes. �  Do not use "permanent" pens on a paper surface – it results in stains

on the tables/wet benches.

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Gowning in the CR


General information: �  Cleanroom garments filter particles generated by the human body

Gowning procedure: �  Remove any street clothes or other excessive garments �  Choose the correct size �  The garments should be worn properly sealed �  Gowning procedure: from top to bottom (hood, coverall, booties) �  Removing garments: bottom to top (booties, coverall, hood) �  Do not touch floor with the cleanroom garments


Use of cleanroom garments in Lund Nano Lab


�  Nano-process lab (level 1), class ISO 5: �  Hood �  Coverall �  Booties �  Gloves

�  Nano-epitaxy lab, “Blue area” (level 2), class ISO 7: �  Blue hair cover �  Blue lab coat �  Lab shoes

�  Berzelius lab, “Green area” (level 2) �  Blue hair cover �  Green lab coat �  Lab shoes


Before entrance to the change area:


�  Remove street clothes or other excessive garments (e.g. pullover, jacket etc), put them in lockers outside the lab.

�  Remove watches and (if possible) rings. Wrist watches tend to accumulate dirt and particles. The watches can be in pockets, or left in offices.

�  Mobile phones are NOT allowed in the Nano-process lab, level 1, so leave the phone in your office or switch it off and put in a pocket. On level 2 (Nano-epi and Berzelius labs) it is OK to take the phones inside after cleaning.

�  It is recommended to visit a rest room before going into the clean room. Remove cosmetics since any additions to a human body can be regarded as contaminants.


Entering the changing room, Nano-process lab


�  Leave your outer shoes in the rack just outside the entrance to the changing room.

�  Put on hairnet and a pair of disposable shoe covers (an option) as you step into the changing room

�  Use you access card and a code to enter the changing room.


Entering the changing room, Nano-process lab


�  If inner cleanroom shoes are to be used, put them on immediately after entering the changing room.

�  Make a couple of steps on the sticky mat, step over the bench to enter the clean area of the changing room


Gowning procedure


�  Select the garments to be used. If a fresh garment is used, make sure it is of the right size and that the packaging is not damaged. Coverall and hood are packed together in the same bag.

�  Always use scissors (carefully!) to open the plastic bags in order to avoid generation of electrostatic charges!

�  Please do not take garments from the hangers marked with names of the lab staff.


Gowning procedure


�  Unpack the package and put on the hood first. If the garment is re-used, pick up a hood (it is stored together with a coverall on a hanger), put it on.

�  Make sure that the hair is tucked in and ties at the back of the hood are adjusted for comfort.


Gowning procedure


�  The coverall should be removed from the package or taken from the hanger without touching the floor.

�  The garment should be put on without touching the floor.


Gowning procedure


�  Make sure that the hood is properly fitted inside the coverall. �  Zip the coverall all the way up; fasten the snap-on button on the top.


Gowning procedure


�  Put on booties, one at a time. �  Make sure the footwear is adjusted for comfort and security.


Gowning procedure


�  Take a pair of clean room gloves by dragging them out of a package. Try not to touch other gloves with your bare hand.

�  Put the gloves on, making sure they cover cuffs of the coverall.


Gowning procedure


�  Look in a mirror to check that the garments are worn correctly. �  Proceed into the clean room, stepping at least 3 times on a sticky mat.


Exit from the cleanroom


�  Remove the booties, put them on a shelf. �  Take off the coverall and hang it on the hanger. Do not let the coverall

parts touch the floor. �  Remove the hood and place it together with the coverall. �  Step over the bench, dispose of the gloves. �  Collect your personal items from lockers.

�  Leave the changing room, dispose of the hairnet and the shoe covers.


Part 2


�  Chemical safety in the lab


The goals of safety education


First goal is:

�  To prevent accidents in our labs by appropriate safety precautions and understanding of safety hazards

But since no system is perfect, the second goal is:

�  To minimize the effects of an accident by educating lab users how to act in an emergency situation


Safety Philosophy


�  Safety is an overriding concern in all activity

�  Operating safely is more important than getting the project done

�  Primary responsibility for safety rests with the individual user

�  A majority of safety problems are the result of haste. If you don’t

have time to do things correctly and safely, please stay home.

�  Before you do anything in the lab, estimate the possible risks of

your actions


Why is it important?


�  More than 150 people use the Lund Nano Lab

�  Different backgrounds of the lab users (physics, chemistry, biology)

�  The Lund Nano Lab is available all the time, "24/7" principle

�  Potentially harmful chemicals (solvents, resists, acids etc)

�  Clean room environment


Laboratory hazards


�  Liquid chemicals (flammable, toxic, corrosive)

�  Compressed gases (toxic, explosive)

�  Electricity (240/400 V, high tension in equipment)

�  Heat (ovens, hot plates)

�  Other hazards (UV, electromagnetic radiation)


Liquid chemicals hazards


Liquid chemical hazard classes:

�  Corrosive (acids, e.g. H2SO4, HNO3, HF etc, bases, e.g. KOH, NaOH

etc).

�  Oxidizer (e.g. H2O2)

�  Air/water reactive (e.g. concentrated acids)

�  Flammable (e.g. acetone, iso-propanole etc)

�  Toxic/poisonous (e.g. trichloroethylene, chlorobenzene etc)

�  Non-toxic (water)


Commonly used symbols of chemical hazards


�  Corrosive

�  Toxic

�  Explosive

�  Environmental hazard

�  Flammable

�  Irritant / Harmful

"Most people think that accidents only ever happen to somebody else. Until they happen to you. For your own safety and the safety of those you work with, each time you use a chemical, pause for a moment and read the label.“

Quote from a leaflet produced by the Health and Safety Executive


Principles of a safe work with chemicals


It is essential that all Lund Nano Lab users:

�  Study Material Safety Data Sheets (MSDS) of the chemicals they use,

�  Write own Risk Assessment Forms (RAF) for any new chemical

process,

�  Get a practical education of usage of wet benches and handling of

chemicals


Material Safety Data Sheets (MSDS)


Documents describing the known hazards associated with a material,

indicating safe handling procedures and recommending responses to

accidents.

Where do I find the MSDS information?

�  in the Laboratory Information Management System (LIMS), http://booking.ftf.lth.se (login required)

�  on the Internet (use a search engine, e.g. Google)

�  also supplied by the manufacturer of the product

�  in binders in the Data Preparation Lab (room Q120, next to the Level 1 changing room)


Example of acetone MSDS (not complete)



Risk Assessment Forms (RAF)


The Risk Assessment Form is a document which gives step-by-step

description of a chemical process and evaluation of its potential risks.

RAF must be completed and approved by the lab staff before the actual

work in the lab is started.

How do I write the RAF?

�  Download a RAF template from the LIMS server

�  Fill the template with the step-by-step description of the process

�  Supply the RAF to the lab staff for approval


Risk Assessment Forms example of a lift-off



Introduction of new chemicals


Any new chemical can only be introduced after approval of the lab staff.

How do I introduce a new chemical?

�  Check in LIMS if the chemical is already permitted.

�  If not, obtain a MSDS of the chemical and send it to the lab responsible person for approval.

�  After the approval, supply a RAF of the process to be used.

�  The chemical process can be used in the lab only after approval of the RAF.


Personal chemical protection in the lab


General principles:

�  personal protection gear (e.g. faceshield, apron etc) must be used all the time when working with chemicals,

�  type of the protective gear depends on chemical work,

�  failure to use a suitable chemical protection gear may result in temporary or permanent ban from the lab


Chemical protection: solvents


Flammable (e.g. acetone, iso-propanole etc). Above a critical temperature (flash point), the vapors from a flammable liquid can ignite and explode when mixed with air. Avoid open heat, flame, sparks.

Very dangerous in combination with hot plates/oven!

Use of acetone + hot plate for e.g. lift-off very carefully! Take the smallest possible amount of liquid. Do not leave the liquid unattended, switch the hot plate off immediately after use.

Toxic/poisonous (trichloroethylene, chlorobenzene etc) Harmful effects to living organisms.


Chemical protection: solvents


�  Faceshield (recommended) and/or goggles

�  Apron (optional)

Attention to people wearing contact lenses:

It is potentially more dangerous in case of spillage in the eyes. The chemical substance can go under the contact lenses, making it more difficult to remove the contact lenses, creating more damage to the cornea.


Chemical protection: acids, bases and oxidizers


Corrosive and toxic. Acids: e.g. H2SO4, HNO3, HF Bases: e.g. KOH, NaOH, developers for photoresists Oxidizers: H2O2, strong acids Corrosive chemicals destroy living tissues, vapors affect lungs. Treatment: flush with plenty of water and seek medical help. Special treatment for hydrofluoric acid (HF) and fluoride containing chemicals (buffered solutions): flush the affected area with plenty of water, apply calcium glucanate gel immediately (“HF-antidote”), seek medical help. HF is a small molecule, it diffuses rapidly through the skin and into tissues binding Ca and Mg ions into insoluble salts. Extremely dangerous!


Chemical protection: acids, bases and oxidizers


�  Faceshield

�  Apron

�  Chemical gloves

�  Sleeves (optional)

Check the chemical gloves before use, inspect them for holes, if needed, use new gloves. After the chemical work, rinse the gloves with water and dry them using cleanroom tissues.


Wet benches in the Lund Nano Lab


�  Wet benches are dedicated to particular types of processes, e.g. working with solvents (organic wet bench) or working with acids and bases (acid wet bench).

�  Do not work with solvents on an acid bench and vice versa. �  Do not obstruct the holes in the bench they are part of the

ventilation system.


Working with wet benches


�  Plan your work well in advance. Check that the chemical process you want to use has an approved risk assessment form.

�  Visually inspect the wet bench for spillage, traces of chemicals (e.g. resists) and pieces of samples. The wet bench must be clean and dry. Contact the lab personnel immediately if the bench is dirty. Do not use the bench until it is cleaned.

�  Check that the personal safety equipment (goggles/faceshields, aprons, chemical gloves etc) is available and clean. Never use dirty equipment: it may result in personal injury.

�  In case you want to use HF-based solutions, check availability of (a) HF antidote (calcium gloconate gel), (b) special plastic ware for use with HF and (c) sign “HF in use”. It is strictly forbidden to use the HF solutions without having HF-antidote in the lab.


How to handle chemicals


Reminder on safety with chemicals:

�  Work under the special hood with air extraction when using chemicals producing fumes.

�  Inspect the chemical gloves for possible holes before use.

�  Rinse the chemical gloves under water after use (increase the lifetime of the gloves).

�  Use appropriate protection (goggles/faceshield, apron, gloves) when working with chemicals.

�  Rinse the glassware/plasticware thoroughly after use and place it in the basin dedicated to dirty glassware. Do not leave glassware on the bench or in the sink.


How to handle chemicals


Rules for leaving chemicals on the bench

Leave a visible note (not under the beaker!!) with:

�  Name of chemical

�  Name of user and contact information

�  Date and time

Place the beaker close to the wall, so that other people can use the bench

here


How to label your "personal" bottles


Rules for labeling of the "personal" chemical bottles:

The following information MUST be typed on the bottles (use the labeling machine):

�  Content: XXXXXXXXXXXXXX

�  Filling date: XXXX-XX-XX

�  Expiration date: XXXX-XX-XX

�  Your name: XXXXXXX XXXXXXXXX

�  Colored year label: (Available in the “nanobar”)


Chemical waste handling


�  There are solvent drains on top of the organic benches, they should only be used for acetone, propanol, remover S-1165 and MIBK.

�  All other waste is collected in waste bottles. Nothing should be poured down the normal drain.

�  The waste bottles must be well marked. Ready-made waste bottles are available on the top shelf of the chemical storage cabinets in EVA-lab. Speak to the lab staff if you have any doubt or question. As a general rule do not mix chemicals in a waste bottle.

�  Minimize the waste by using the smallest possible amount of chemical!


Solvent waste drains


Left: Solvent drains installed in EBL,

EVA and UVL labs in the Nano-

process lab. The level of the waste is

indicated by a red LED above the

drain. Contact the lab staff if the LED

is on. Only for Acetone, Propanol, remover S1165 and MIBK


Collecting waste in bottles


�  Waste bottles in use are stored in one of the storage spaces under the bench.

�  Do not fill the bottles to the top, leave sufficient space for any gas produced. Contact the lab staff when the waste bottles are full.

�  Do NOT close the waste bottles tightly! Leave the cap loose. Particularly important for mixtures containing H2O2.

Maximum filling level of waste bottles for safe handling


Empty bottles


�  Empty bottles (from EVA, EBL and UVL rooms): �  Unique storage place for empty bottles coming from all these

rooms �  Close the cap and leave the bottle in the basket situated in the

EVA room, close to the material air-lock (picture below). �  Lab personnel will take care of these bottles appropriately.

Left: place to collect empty chemical bottles.


Transfer of chemicals inside the cleanroom


�  Transfer of chemicals to and from the cleanroom is normally done by the lab staff

�  All chemicals for the Nano-process lab (level 1) are stored in dedicated storage cabinets and in refrigerator in the EVA-lab.

�  Chemicals are then transferred from this storage to point-of-use in EBL, EVA and UVL-labs by the lab staff or users of the lab.

�  In the Nano-epitaxy and Berzelius labs (levle 2), there are storage places in the ALD-room (solvents) and in the "Norcon" room (acids and bases). Besides, some amount of chemicals is stored under corresponding wet benches.




Storage cabinets (EVA-lab) with ready-made empty waste bottles

To EBL, EVA and UVL-labs

Chemicals are supplied to the storage cabinets by the lab staff




How to transfer the chemicals inside the lab:

Use the white transport basket (stored in the cupboard between the cleanroom and the material airlock), the round basket or the stainless steel cart, see pictures below.

If carried by hand (small or empty bottle), carry only 1 bottle at a time!


Typical mistakes in handling chemicals


�  Hot plate left unattended with a solvent or acid/base solution. Risk of fire/spillage.

�  Use of chemicals without personal protection (faceshield, apron). Risk for personal.

�  Beaker with chemical is not marked or dirty glassware is left on wet bench. Risk for personal.

�  Waste bottle is too full. Risk of chemical spillage.

�  Contaminated (in, for example, acetone) cleanroom gloves are not changed. Risk for further contamination.


Summary of the safety rules


�  Always use appropriate protection for chemicals you are using.

�  Use of any chemical other than “approved chemicals” (the list is available at LIMS server) must be approved by lab staff.

�  All work with chemicals should be done using clean glassware (and/or plasticware) supplied for all users.

�  The wet benches must be left clean and dry for the next user. Do not leave dirty glassware on the chemical bench – ring them in water and place in a dedicated basin.

�  Only one person at a time is allowed to work on a wet bench for safety reasons.

�  Hot plates MUST be attended during heating of chemical (lift-off process, cleaning etc). Always switch them OFF when not in use.


Part 3


�  Emergency situations. Alarms in the lab.

�  Lab buddy system and night/weekend work.

�  The LIMS system. Work with equipment.


Emergency situations: a chemical spillage


�  The spillage of chemicals in the cleanroom is a serious accident because chemical vapors will spead by ventilation inside the lab. Too high concentration of vapors may be dangerous for lab users.

�  Of special concern spillage of strong acids (especially HF) and poisonous solvents (e.g. TRI).

�  Any work to remove spillage must be performed with extreme caution, using all available protection (chemical gloves, apron, face shield etc).

�  In case of a chemical spillage, the lab staff must be informed immediately.


Small chemical spillage (≈0.2 l or less)


Spillage on the wet bench or on the floor

�  Depending on the nature of the chemical:

�  Solvent or diluted acid/base: Take sufficient ordinary cleanroom wipe to absorb the liquid.

�  H2SO4, other concentrated acid or HF: You may want to dilute the spillage with some water, depending on the amount of acid. Use sufficient ordinary cleanroom wipe to absorb the liquid. (Work with extreme caution! Use chemical gloves!)

�  Dispose of the wet paper in the bin under the wet bench.

�  Contact the lab staff to report the spillage. We might need to supply a new plastic bag for the bin if it is full.


Larger chemical spillage (more than 0.2 l)


�  Inform all users present in the lab (all rooms on the same floor) that they have to leave the lab, in a calm fashion via the changing room. Leave the lab youself. The amount of vapour makes the lab a dangerous place to be since air is re-circulated.

�  Contact lab staff to report the spillage, they will take over. Remain in the vicinity to answer questions that the lab staff might have regarding the spillage.

�  If the lab staff is not readily available, contact Rädningstjänsten (Emergency Service) by calling 0-112 (112 from any mobile phone). Inform them about (a) the chemical, (b) amount of spilled liquid, (c) lab users affected by the spillage.

�  The lab will reopen when it is safe again.

�  Note: in case of personal exposure, contact Rädningstjänsten directly!


Emergency situation: a small fire


�  Fire blankets are provided in each room on levels 1 and 2.

�  Pull on the blue straps to release the blanket. Cover the fire.

�  If the fire is big, it can be too risky to extinguish the fire by the blanket. In this case manually activate evacuation alarm and leave the room immediately!


Actions in case of an accident


In case of a serious accident (e.g. acid and HF-burns, a chemical spillage etc) do the following:

�  Give initial medical help to the affected person (e.g. HF-antidote)

�  Call 0-112 (112 from any mobile phone) to inform Rädningstjänsten (Emergency Service). The following information is to be provided:

�  what has happened and number of people involved

�  the address for ambulance: Professorsgatan 3, 22363, Lund

�  in case of a chemical accident: (a) name of the chemical, (b) CAS number, (c) quantity and concentration, (d) type of exposure (skin contact, inhalation etc), (e) duration of exposure.

�  Contact the lab staff immediately after by calling mobile phones.


Alarms in the lab


Two types of alarms in the Lund Nano Lab:

�  visual (lamp posts)

�  sound (buzzers, bells and sirens)

The alarm lamp posts installed in the cleanroom show the status of the Lund Nano Lab, e.g. ventilation, power etc.


Alarms in the lab


Local sound alarms at:

�  wet benches (exhaust air flow)

�  lamp posts (connected to process gas detection system)


Alarms in the lab


Activation of sound alarms (bells and sirens) means:

IMMEDIATE EVACUATION!


Manual activation of alarms


Action: open cover (or break the glass) and press the activation knob

When? Only if automatic fire/gas safety system does not work.


What to do in case of an alarm


Lamp Reason for the alarm What to do

Blue Power failure. Most likely process ventilation will be off as well (yellow lamp)

Leave the lab. Contact I. Maximov, P. Ramvall or S. Jeppesen.

Yellow Process ventilation malfunction (wet benches will make a continious alarm sound)

Not safe to work with chemicals. Switch off hot plates or other equipment on wet benches, leave the lab. Contact I. Maximov, P. Ramvall or S. Jeppesen.

Orange Gas ventilation malfunction Contact P. Ramvall, S. Jeppesen or I. Maximov. Be prepared to leave the lab.

Red + a local sound from lamp post

Process gas detected, low concentration.

Contact P. Ramvall, S. Jeppesen or I. Maximov. Go to corridor Q267, check gas detection system. Be prepared to leave the lab.

Red + bell or siren sound (Evacuation)

Smoke, fire, manual alarm activation and/or high concentration of process gas

DANGER! Leave the lab immediately! No time to change clothes!


Evacuation from the Nano-process lab


Emergency exits

Remember: no time to change clothes, leave the building through the nearest EMERGENCY exit!


Evacuation from the Nano-epi and Berzelius labs



Meeting point after evacuation


Hus Q

What to do in case of evacuation alarm: �  stay calm �  leave the lab immediately. Do NOT

change clothes, go throught the nearest emergency exit.

�  go directly to the meeting point �  inform other people on the way

Remember that the fire-fighting brigade is on the way. Be prepared to inform them about the accident.


Lab buddy system and night/weekend work


Between ≈19.00 and ≈07.00 Monday-Friday and all time on Saturday-Sunday and holidays a “buddy system” must be used. Principles of the “buddy system” Nobody is allowed to work alone in the Lund Nano Lab after ≈19.00 Monday - Friday and all time on Saturdays-Sundays and holidays . A second experienced person (“lab buddy”) must be in the cleanroom or close to the lab with direct visual and sound contact. Safety in the Lund Nano Lab can be greatly improved by using the lab video system! Two camera stations are installed in "k-space" and "rest-space" (area with green arm-chairs outside the CR). Check Information page in the LIMS system to obtain logins to the video cameras.


Lab buddy system and night/weekend work


What to do if there is a need to work late at night or week-end? �  Check in LIMS if somebody else has planned to work the same time

("Verify nighshift booking") �  Contact this person and inform him/her about your plans �  When in the cleanroom, use a “walkie-talkie” radio to communicate

with your buddy. Check that you know how to use the radio. �  Your lab buddy is preferably to be inside the cleanroom during your

work, but it is OK if the lab buddy stays in the office. ATTENTION!

Please note that for any chemical work the lab buddy must be physically in the cleanroom. It is strictly forbidden to use wet benches without a lab buddy present in the same lab!


The LIMS system. Work with equipment.


All equipment is available for users of the lab after appropriate training �  The database of the equipment can be found in the equipment

booking system (LIMS), http://booking.ftf.lth.se. Look in “Tools” to get a complete list.

�  The responsible persons (1-st and 2-nd) are eligible to issue licenses to run the equipment

�  Training how to use the machines is arranged on individual basis by the responsible persons.

Ivan Maximov is responsible for managing the booking system. Bengt Bengtsson is a back-up person regarding the computer database.


The LIMS system. Work with equipment.


�  30 min rule: if a user does not show up after his/her time starts, another user can take the equipment

�  in case of equipment failure, contact the equipment responsible (1-st responsible in LIMS). Do not try to fix the machine!

�  all machines with Compulsory booking (see LIMS) must be booked prior to use

�  equipment logbook must be filled after use. Red pen should be used if there is a problem with the machine. Green pen is used by the equipment responsible. Some machines use electronic logs in LIMS. Use of equipment logbooks is compulsory.

�  equipment manuals can be downloaded from LIMS, detailed equipment information, including technical data are stored in Labstore server (http://labstore.ftf.lth.se)


The Lund Nano Lab computer network


�  The Lund Nano Lab network consists of about 40 computers, protected by a firewall. Lund University ID needed to connect to the university resources via VPN (iMacs computers).

�  Files saved on equipment PCs (e.g. SEM images) should be transfered to a Lund Nano Lab server "Labstore" (http://labstore.ftf.lth.se). The uploaded files can then be downloaded to office PCs

�  The cleanroom video system (totally 12 network cameras) is used to improve safety in the lab and for demonstration purposes.

�  Telephones are installed in all three rooms in the Nano-process lab and there are two phones in the Nano-epi and Berzelius labs.

�  Login information to the lab PCs, cameras and phone numbers are available in LIMS.


Organization of the Lund Nano Lab


Lars Samuelson

Director of research nmC@LU

Peter Ramvall

Lab Manager

•  Customer contacts

•  Epitaxy

•  General issues

Ivan Maximov

Process Manager

•  Process development

•  Education and training

•  Cleanroom technology

LNL steering group


Organization of the Lund Nano Lab


Nano-processing and epitaxy group members:

•  Mariusz Graczyk (opt. lithography, evaporators, plasma, ovens)

•  Lena Timby (orders, chemicals, cleanroom garments)

•  Peter Blomqvist (RIE, AFMs, RTP, sputterer, profiler)

•  Søren Jeppesen (CBE, vacuum equipment and gases)

•  Bengt Mueller (epitaxial equipment, vacuum)

•  Anders Kvennefors (works 25%, EBL Raith150, F-SEM and LEO SEM)

•  Georg Rydnemalm (technical service, wet benches)

•  Håkan Lapovski (chemicals, cleanroom service, orders)


Our contact information


•  In case of a routine question (supply of chemicals, gloves, cleanroom

wipes, etc), send e-mail to the equipment responsible.

•  The lab staff is normally available 8-17 weekdays.

•  In case of an emergency, call our mobile phones any time (numbers

available in the Lund Nano Lab and in LIMS).

LNL Introduction Course v5[1].2

Documents

Transcript of LNL Introduction Course v5[1].2