Liquid Chemicals North America TC Chapter Meeting Summary...

Liquid Chemicals North America TC Chapter 1 April 2, 2019 Meeting Minutes Milpitas, CA

Liquid Chemicals North America TC Chapter

Meeting Summary and Minutes Spring 2019 Standards Meetings

April 2, 2019 14:00–17:00

SEMI HQ, Milpitas, California

TC Chapter Announcements

Next TC Chapter Meeting

July 9, 2019 14:00 – 17:00

Moscone Center, San Franciso, CA

General Announcement

None

Table 1 Meeting Attendees Italics indicate virtual participants Co-Chairs: Don Hadder (Intel); Steve Rogers (KMG Chemicals); Laura Ledenbach (PeroxyChem) SEMI Staff: Inna Skvortsova

Company Last First Company Last First

Intel Hadder Don SEMI Skvortsova Inna Mega Fluid Systems Kandiyeli David KMG Chemicals Rogers Steve GF Piping Systems McIntosh Bob Suez Dale Chuck SACHEM Schleisman Tony Intel Tregub Alex Air Liquide Fuhe Li

Table 2 Leadership Changes

WG/TF/SC/TC Name Previous Leader New Leader

NONE

Table 3 Committee Structure Changes

Previous WG/TF/SC Name New WG/TF/SC Name or Status Change

NONE


Table 4 Ballot Results

Document # Document Title Committee Action 6085 Revision to SEMI F57- 0314, Specification for High Purity Polymer Materials and

Components Used in Ultrapure Water and Liquid Chemical Distribution Systems. Failed

6316 Revision of SEMI C79-0113, Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems

Passed

#1 Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.

#2 Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.

Table 5 Activities Approved by the GCS between meetings of the TC Chapter

# Type SC/TF/WG Details

6488 SNARF CAM TF New Standard: Guide for Chemical Mechanical Planarization (CMP) Particle Size Distribution (PSD) Measurement and Reporting used in Semiconductor Manufacturing Approved by GCS 01/02/2019

6489 SNARF HPPM&C TF New Standard: Guide for Reporting Chemical Mechanical Planarization (CMP) Polishing Pad Hardness used in Semiconductor Manufacturing Approved by GCS 01/02/2019

6490 SNARF UPW TF Revision to SEMI C93- 0217: Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water System Approved by GCS 01/02/2019

Table 6 Authorized Activities Listing of all revised or new SNARF(s) approved by the Originating TC Chapter.

# Type SC/TF/WG Details

TBD SNARF CAM TF Revision to SEMI C64-0308 (Reapproved 1214), SEMI Statistical Guidelines for Ship to Control, with title change to: Statistical Guide for Ship to Control New SNARF distributed for 2-week member review and approved at TC meeting

TBD SNARF UPW TF Line Item Revision to SEMI F61-0617, Guide to Design and Operation of a Semiconductor Ultrapure Water System New SNARF approved at TC meeting

TBD SNARF UPW TF Line Item Revision to SEMI F63-0918, Guide for Ultrapure Water Used in Semiconductor Processing New SNARF approved at TC meeting

TBD SNARF UPW TF Line Item Revision to SEMI F75-0617, Guide for Quality Monitoring of Ultrapure Water Used in Semiconductor Manufacturing New SNARF approved at TC meeting

TBD SNARF CAM TF Reapproval to SEMI C19-0514, Specification for Acetone New SNARF approved at TC meeting

TBD SNARF CAM TF Reapproval to SEMI C51-0114, Specification for Xylenes New SNARF approved at TC meeting

TBD SNARF CAM TF Reapproval to SEMI C84-0214, Guide for Cyclopentanone New SNARF approved at TC meeting

TBD SNARF CAM TF Reapproval to SEMI C85-0214, Guide for Methyl Isobutyl Carbinol (MIBC) New SNARF approved at TC meeting

#1 SNARFs and TFOFs are available for review on the SEMI Web site at: http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF

http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF

http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF


Table 8 SNARF(s) Granted a One-Year Extension

# TF Title Expiration Date

NONE

Table 9 SNARF(s) Abolished

# TF Title

NONE

Table 10 Standard(s) to receive Inactive Status

Standard Designation Title NONE

Table 11 New Action Items

Item # Assigned to Details

#1 Apr2019 (Inna S) Japan Stds staff to get clarification from JA LChem TC Ultrapure Liquid Evaluation Study Group for “POP”. NA team is interested to collaborate. In progress

#2 Apr2019 (Inna S) Share Ballots Critical Dates schedule for 2019 with Alex T. (Intel) DONE #3 Apr2019 (Slava L)

To present IRDS Update at SEMICON West LChem TC meeting

#4 Apr2019 (Inna S.)

To provide access to SEMI C10 to Tony Schliemann DONE

#5 Apr2019 (Don H.) To present at SEMICON West Stds meetings background/industry drivers for the need to revise C64. Postponed, Steve will communicate with Don.

#6 Apr2019 (Steve R.) To review and make recommendation for C18 and C23 due for 5 year review. DONE #7 Apr2019

(Don H. Steve R.)

Decision how to address missing section in C36 (PM Table 10 requirement). Need to discuss at NARSC meeting for solution that will cover all similar LChem specifications. In progress

Table 7 Authorized Ballots

# When TF Details

6085A Cycle 5-2019 HPPM&C TF Revision to SEMI F57- 0314, Specification for High Purity Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems.

6488 Cycle 5-2019 CAM TF New Standard: Guide for Chemical Mechanical Planarization (CMP) Particle Size Distribution (PSD) Measurement and Reporting used in Semiconductor Manufacturing

TBD Cycle 5-2019 CAM TF Reapproval to SEMI C19-0514, Specification for Acetone

TBD Cycle 5-2019 CAM TF Reapproval to SEMI C51-0114, Specification for Xylenes

TBD Cycle 5-2019 CAM TF Reapproval to SEMI C84-0214, Guide for Cyclopentanone

TBD Cycle 5-2019 CAM TF Reapproval to SEMI C85-0214, Guide for Methyl Isobutyl Carbinol (MIBC)


Table 12 Previous Meeting Action Items

Item # Assigned to Details

#01Nov2018 (Inna Skvortsova)

Distribute SNARF for revision to SEMI C93, and New Standards proposals for 2-week member review and GCS approval and ballot authorization. DONE


Organize follow up training for new co-Chairs focused on ballots preparation (templates, structure/type of documents, Letter vs Ratification). Conduct training in conjunction with Spring TC Meetings during LChem Leadership Meeting. DONE

#03Nov2018 (Laura Ledenbach, Don Hadder

Prepare NA LChem TC/TFs project tracking document by Spring 2019 TC/Leadership Training Session OPEN

#04Nov2018 (Steve Rogers)

To review and recommend action plan for the following documents: SEMI C51, SEMIC84, SEMI C85, SEMI C19 by Spring 2019 TC Meeting. DONE


SEMI C80-0214 ownership transfer from EU LCh&Gases TC to NA Gases TC (notify relevant Standards staff). DONE

1) Welcome, Reminders, and Introductions Don Hadder (Intel) called the meeting to order at 14:02 PM. The meeting reminders on antitrust issues, intellectual property issues and holding meetings with international attendance were reviewed. Attendees introduced themselves.

Attachment 01: SEMI Standards Required Meeting Elements.ppt

2) Review of Previous Meeting Minutes 2.1 The TC Chapter reviewed and approved the minutes of the previous Fall 2018 Standards meeting.

Motion: To approve minutes as written By / 2nd: Steve Rogers (KMG Chemicals) / Bob McIntosh (GF Piping) Discussion: None Vote: 6Y/0. Motion passed.

Attachment 02: NA Liquid Chemicals TC Meeting Minutes (Nov 2018).pdf

3) SEMI Staff Report Inna Skvortsova (SEMI) gave the SEMI Staff Report. Of note:

SEMI Global 2019 Calendar of Events

o SEMICON Southeast Asia (May 7-9, Kuala Lumpur, Malaysia)

o SEMICON West (July 9-11, San Francisco, California)

o SEMICON Europa (November 12-15, 2019, Munich, Germany)

o SEMICON Japan (December 11-13, 2019, Tokyo, Japan)

Upcoming North America Meetings

o SEMICON West 2019 Meetings (July 8-11, 2019, San Francisco, California)


Standards Meetings will NOT be at the Marriott but will be at MOSCONE South Hall this year.

Meeting room details will be available on the web

o NA Standards Fall 2019 Meetings (November 4-7, 2019, SEMI HQ, Milpitas, California)

o NA Standards Spring 2020 Meetings (March 30 – April 2, 2020, SEMI HQ, Milpitas, California)

o

Letter Ballot Critical Dates for NA Standards meetings

o Cycle 3-19: due March 12 / Voting Period: March 26-April 25

o Cycle 4-19: due April 16 / Voting Period: April 30 - May 30

o Cycle 5-19: due May 10 / Voting Period: May 24 – June 24

o Cycle 6-19: due July 19 / Voting Period: July 31 – August 30

o Cycle 7-19: due August 22 / Voting Period: September 4 - October 4

o Cycle 8-19: due October 11 / Voting Period: Oct 25 – Nov 25

o Cycle 9-19: due Nov 14/ Voting Period: Nov 26 – Dec 26

http://www.semi.org/en/Standards/Ballots

• SEMI Standards Publications

Cycle New Revised Reapproved Withdrawn

November 2018 1 0 2 0

December 2018 0 7 6 0

January 2019 2 0 0 0

February 2019 1 3 4 0

Total SEMI Standards in portfolio: 1000. Includes 268 Inactive Standards

Cycle Designation Title Committee Region

November 2018 SEMI C97 Specification for Determination of Particle Levels of Gases Delivered as Pipeline Gas or by Pressurized Gas Cylinder

Gases NA

January 2019 SEMI M88

Practice for Sample Preparation Methods for Measuring Minority Carrier Diffusion Length in Silicon Wafers by Surface Photovoltage Methods

Silicon Wafer JA




January 2019 SEMI T23 Specification for Single Device Traceability for the Supply Chain Traceability NA

February 2019 SEMI PV89

Test Method for Current-Voltage Measurement in Indoor Lighting for Dye-Sensitized Solar Cell and Organic Photovoltaic

Photovoltaic TW

• Connected@SEMI Community

o Web link - https://connect.semi.org

Login using Standards account (username and password)

o Program Member

Join any task forces

Post discussion thread

o TF Leader/Community Admin

Add member

Upload meeting minutes

Communicate TF members

Contact your staff if a TF Site is desired

o Details: www.semi.org/standards → Committee Info → Collaboration Community

• New Forms, Regulations & Procedure Manual

o Regulations (Feb 28, 2019)

Latest version clarifies procedures applicable for Copyrighted Items and trademarks

o Procedure Manual (Feb 28, 2019)

o SNARF (Feb 2019)

o www.semi.org/standards

Bottom left, under Resources!

• Style Manual Update (New version 6 issued March 25, 2019)

• Additions and revisions to harmonize with updated Regulations and Procedure Manual

• Updates

o Company or Organization Trademarks (Table 1, #1-24)

o Active vs. Passive Voice (Table 4, #4-4)

o Word Usage (Table 4, #4-5)

o New Safety Guideline Conformance Notice (Table 8, #8-1)

• www.1semi.org/standards/standardspublications : Under Document Authoring Tools

https://connect.semi.org/

https://connect.semi.org/

http://www.semi.org/standards




http://www1.semi.org/en/Standards/StandardsPublications

http://www1.semi.org/en/Standards/StandardsPublications


• SNARF(s) and TFOF approved by GCS in between TC Chapter Meetings

o New Standard: Guide for Chemical Mechanical Planarization (CMP) Particle Size Distribution (PSD) Measurement and Reporting used in Semiconductor Manufacturing

Approved by GCS 01/02/2019

SNARF #6488

o New Standard: Guide for Reporting Chemical Mechanical Planarization (CMP) Polishing Pad Hardness used in Semiconductor Manufacturing


SNARF # 6489

o Revision to SEMI C93- 0217: Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water System


SNARF # 6490

• SNARF 3 year status TC Chapter may grant a one-year extension:

o None

• Nonconforming Titles

o SEMI C33-0213 - Specifications for n-Methyl 2-Pyrrolidone

o SEMI C36-1213 - Specifications for Phosphoric Acid

o SEMI C64-0308 (Reapproved 1214) - SEMI Statistical Guidelines for Ship To Control

o SEMI F104-0312 - Particle Test Method Guide for Evaluation of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems

NOTE: Refer to Procedure Manual (PM) Appendix Table A4-1 and A4-2

• SNARFs to abolish at TC meeting:

• Documents due for 5 Year Review

Name Due for Review

Title

**SEMI F104-0312 3/1/2017 Particle Test Method Guide for Evaluation of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems

SEMI C79-0113 1/31/2018 Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems

SEMI C36-1213 12/30/2018 Specifications for Phosphoric Acid

SEMI C51-0114 1/10/2019 Specification for Xylenes

SEMI C84-0214 2/28/2019 Guide for Cyclopentanone

SEMI C85-0214 2/28/2019 Guide for Methyl Isobutyl Carbinol (MIBC)


SEMI C18-0714 7/31/2019 Specification for Acetic Acid

SEMI C19-0514 5/16/2019 Specification for Acetone

SEMI C23-0714 7/31/2019 Specifications for Buffered Oxide Etchants

SEMI C10-1109 (Reapproved 1114)

11/25/2019 Guide for Determination of Method Detection Limits

SEMI F48-0600 (Reapproved 1214)

12/5/2019 Test Method for Determining Trace Metals in Polymer Materials


12/5/2019 SEMI Statistical Guidelines for Ship To Control

Attachment 03: SEMI Staff Report Liquid Chemicals TC (April 2019).ppt

4) Liaison Reports 4.1 Liquid Chemicals Europe TC Chapter – no update, next meeting November 2018

• Staff Contact: James Amano ([email protected])

4.2 Liquid Chemicals Japan TC Chapter

Inna Skvortosva (SEMI) reported for the Liquid Chemicals Japan TC Chapter. Of note: o Committee Co-chairs

• Hiroshi Tomita (Toshiba) • Hiroyuki Araki (SCREEN Semiconductor Solutions)

o Last Meeting: December 12, 2018 at SEMICON Japan 2018, Tokyo, Japan o Next Meeting: April 15, 2019 during Japan Spring Meetings at SEMI Japan, Tokyo, Japan o Authorized Activities:

o Activities Approved by CGS between Meetings

o Ballot Results – NONE

o Authorized Ballots

mailto:[email protected]



o Five-Year Review

o Task Force / Study Group Reports: o Diaphragm Valve Task Force

• No activities o Welding Fitting Task Force

• No activities o Liquid Filter Task Force

• #6197 - Reapproval to SEMI F110-0712 • SNARF was approved at Liquid Chemical Japan TC Chapter meeting on April 21, 2017 • Ballot submitted for Cycle 5-2017, passed at Liquid Chemical Japan TC Chapter on

December 13, 2017 during SEMICON Japan 2017. o Editorial Change was proposed as report (separately from #6197) and passed at

LC Japan TC Chapter meeting on December 13, 2017 o Passed A&R in January 2018 o Editorial change also passed A&R in January o Published as F110-0712(Reapproved 0618)

o Liquid-Borne Particle Counter (LPC) Task Force • 6196 - Reapproval to SEMI C77-0912 • SNARF was approved at Liquid Chemical Japan TC Chapter meeting on April 21, 2017

o Ballot submitted for Cycle 7-2017and passed at Liquid Chemical Japan TC Chapter on December 13, 2017 during SEMICON Japan 2017

o Passed A&R in January 2018 o Published as C77-0912(Reapproved 0618)

o Ultrapure Liquid Evaluation Study Group

• Considering to standardize the particle measurement at POP in future. • Asking a cooperation by Interfacial Nano Electrochemistry for seeking the solution to the

issues concerned to analyzing metals of organic solvent including IPA.


o The results of the experiment and analysis at INE were reported by Mr. Yoshida from KANTO KAGAKU on LC Japan TC Chapter on April 23, 2018.

INE found out the cause of difference between the amount of the Fe contamination in the DI water and the amount of the Fe contamination which pours the DI water over the Si wafer surface.

• Ultrapure Liquid Chemical Evaluation Study Group will be discharged at next committee meeting since the report was provided.

• To consider the future standardization • To discuss an establishment of a Task Force on April 15, 2019

For more information, please contact: Mizue Iwamura, SEMI Japan, [email protected]

Attachment 04: Japan Liquid Chem Liaison Report (April 2019)

5) Ballot Review NOTE 1: TC Chapter adjudication on ballots reviewed is detailed in the Audits & Review (A&R) Subcommittee Forms for procedural review. The A&R forms are available as attachments to these minutes. The attachment number for each balloted document is provided under each ballot review section below.

Ballot #6316

The TC Chapter reviewed the Document #6316, Revision of SEMI C79-0113, Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems

The ballot passed TC review and will be submitted to the ISC A&R for procedural review. Details can be found in the attached Procedural Review file.

Motion: Document # 6116 is not a Safety Document, when all safety-related information is removed, Document is still technically sound and complete.

By / 2nd: Steve Rogers (KMG Chemicals) /Chuck Dale (Suez) Discussion: None. Vote: 6-0. Motion passed.

Motion: Forward Document # 6316 to the ISC A&R for procedural review as written. By / 2nd: Tony Schleisman (Sachem) / Steve Rogers (KMG Chemicals) Discussion: None. Vote: 6-0. Motion passed.

Attachment 05: 6316_Procedural Review

Ballot #6085

The TC Chapter reviewed the Document #6085 Revision to SEMI F57- 0314, Specification for High Purity Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems).

Liquid Chemicals TC accepted the HPPM&C Task Force recommendation to find Reject #1-1 submitted by Eric Sklar (Safety Guru) related and technically persuasive. The ballot failed and will be reworked by the Task Force and resubmitted. Motion: To find Reject #1-1 submitted by Eric Sklar (Safery Guru) for SEMI Draft Document 6085 to be

related and technically persuasive. The Task Force will rework and resubmit the document. By / 2nd: Bob McIntosh (GF Piping) / David Kandiyeli (Mega Fluid Systems)




Discussion: None Vote: 5-0. Motion passed.

6) Subcommittee and Task Force Reports

6.1 Chemical Analytical Methods Task Force Report

Don Hadder reported for the CAM Task Force. Of note:

• Leadership Change

– None

• Ballot Adjudication

– None

• New SNARFS

– Revision to SEMI C64-0308 (Reapproved 1214), SEMI Statistical Guidelines for Ship to Control, with title change to: Statistical Guide for Ship to Control

• New SNARF distributed for 2-week member review and approved at TC meeting

– Reapproval to SEMI C19-0514, Specification for Acetone

– Reapproval to SEMI C51-0114, Specification for Xylenes

– Reapproval to SEMI C84-0214, Guide for Cyclopentanone

– Reapproval to SEMI C85-0214, Guide for Methyl Isobutyl Carbinol (MIBC)

• Upcoming Ballots

– 6488, New Standard: Guide for Chemical Mechanical Planarization (CMP) Particle Size Distribution (PSD) Measurement and Reporting used in Semiconductor Manufacturing

• Cycle 5-2019

– 6465, Line-item Revision for SEMI C36-1213, Specifications for Phosphoric Acid, to correct nonconforming title to: Specification for Phosphoric Acid

• Cycle 5-2019

– # TBD, Reapproval ballots to SEMI C19, C51, C84, C85

– 6433, New Standard: Test Method for CMP Conductivity (Slurry and pCMP Cleaning Chemicals)

– 6388, Revision to SEMI C44-0618 Specification and Guide for Sulfuric Acid

• Doc 6488 (New Standard: Guide for Chemical Mechanical Planarization (CMP) Particle Size Distribution (PSD) Measurement and Reporting used in Semiconductor Manufacturing)

– Technology experts from Integrated Device Manufacturers (IDMs), CMP material suppliers, manufacturers of CMP distribution systems and instrumentation manufacturers, are all actively participating in the development of Draft Document 6488. The goal for ballot Cycle 5 2019.

– The CMP PSD working group consists of 22 members plus SEMI standards staff.

– First meeting took place at the end of January 2019, and thanks to very active participation TF have completed the first draft of this new Standard/

– Section 9 contains the information that should now appear on a CoA for the Particle Size Distribution measurement for CMP slurries delivered to customers.


– Related Information section 1 contains what the CMP PSD working group would like to see on a full CMP CoA in the future. Some of these line items, density, conductivity and particle size distribution are either completed SEMI documents, or are work in progress.

– Related Information section 2 details what the working group would like to see in a future CMP PSD CoA.

Attachment 06: CAM TF Report (April 2019)

6.2 Ultrapure Water Task Force Report

Bob McIntosh reported for the UPW Task Forces. Of note:

• Leadership change:

– None

• Ballot Adjudication:

– Ballot #6316 for Revision to SEMI C79-0113, Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in UPW Distribution System

• Ballot passed, 100% accepts, no rejects, one comment.

• New SANRFs

– Line-Item Revision to SEMI F63 – Guide for Ultrapure Water Used in Semiconductor Processing

– Line-Item Revision to SEMI F61 – Guide to Design and Operation of a Semiconductor Ultrapure Water System

– Line-Item Revision to SEMI F75 – Guide for Quality Monitoring of Ultrapure Water Used in Semiconductor Manufacturing

• These documents are updated to align with the IRDS publication on a bi-annual basis

• Upcoming Ballots

– #6490 Revision to SEMI C93- 0217, Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water System

• Preparing 4th Annual IRDS Yield Workshop, San Francisco, July 2019. Tentatively scheduled for Wednesday July 10th, at Moscone Center

– Will review the progress of the 1st year proactive development

• Good progress with Liquid chemicals, UPW, and critical components used in delivery systems

– Will develop plan for additional measures required to address risks

• Reliance of SEMI standards

• When metrology is insufficient, drive contamination reduction independently of the measurement (particles – primary concern)

Attachment 07: UPW Task Force Report April 2019.pdf

6.3 High Purity Polymer Materials & Components (HPPM&C) Task Force Report

Bob McIntosh reported for HPPM&C Task Force. Of note:

• Leadership change:


– None • Ballot Adjudication:

– #6085 Revision to SEMI F57- 0314, Specification for High Purity Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems.

• Ballot failed and will return to the TF for rework prior resubmission in Cycle 5-2019 • New SANRFs

– None • Ballots in Cycle 5-2019

– SEMI F104-0312, Particle Test Method Guide for Evaluation of Components Used in Ultrapure Water and Liquid Chemical Distribution systems

– SEMI F57-0314, Specification For Polymer Materials And Components Used in Ultrapure Water and Liquid Chemical Distribution Systems

• Upcoming Activities – New SNARF will be proposed for the Line Item Revision to SEMI F40 - to include more

proscriptive guidance for testing of raw material pellets. – New SNARF will be proposed to align the list of metals to F57 a d F63

Attachment 08: HPPM&C Task Force Report (April 2019)

6.4 High Purity Liquid Assemblies and Systems (HPLA&S) Task Force Report

No meetings/current business for HPLA&S TF.

7) Old Business 7.1 Standards due for Five-Year Review.

Inna Skvortsova addressed the TC Chapter on this topic. Of note:

Name *Due Title Status / Action required

**SEMI F104-0312 3/1/2017 Particle Test Method Guide for Evaluation of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems

Revision ballot planned in 2019 by HPM&C TF

SEMI C79-0113 1/31/2018 Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems

Ballot issued in Cycle 8-2018. Pending adjudication at TC.

SEMI C51-0114 1/10/2019 Specification for Xylenes SNARF #6465 for reapproval/title correction no longer sufficient. CAM TF to provide recommendation.

SEMI C84-0214 2/28/2019 Guide for Cyclopentanone Ballot issued in Cycle 2-2019, rejects to be addressed

SEMI C85-0214 2/28/2019 Guide for Methyl Isobutyl Carbinol (MIBC)

Steve R. to review and recommend rev/reapproval

SEMI C19-0514 5/16/2019 Specification for Acetone LChem (EU Chapter); Steve R. to review and recommend rev/reapproval

SEMI C18-0714 7/31/2019 Specification for Acetic Acid TBD


SEMI C23-0714 7/31/2019 Specifications for Buffered Oxide Etchants

TBD


11/25/2019 Guide for Determination of Method

Detection Limits

TBD

SEMI F48-0600 (Reapproved 1214)

12/5/2019 Test Method for Determining Trace

Metals in Polymer Materials

TBD


12/5/2019 SEMI Statistical Guidelines for Ship

To Control

TBD

7.2 SNARFs Approaching 3-Year Review

• No SNARFs need extension.

8) New Business 8.1 New TFOFs and SNARFs Authorization:

• No new TFOFs authorization

• New SNARFs were approved for the following documents:

o Revision to SEMI C64-0308 (Reapproved 1214), SEMI Statistical Guidelines for Ship to Control, with title change to: Statistical Guide for Ship to Control

o Line Item Revision to SEMI F61-0617, Guide to Design and Operation of a Semiconductor Ultrapure Water System

o Line Item Revision to SEMI F63-0918, Guide for Ultrapure Water Used in Semiconductor Processing

o Line Item Revision to SEMI F75-0617, Guide for Quality Monitoring of Ultrapure Water Used in Semiconductor Manufacturing

o Reapproval to SEMI C19-0514, Specification for Acetone

o Reapproval to SEMI C51-0114, Specification for Xylenes

o Reapproval to SEMI C84-0214, Guide for Cyclopentanone

o Reapproval to SEMI C85-0214, Guide for Methyl Isobutyl Carbinol (MIBC)

Motion: To approved SNARFs for Revision to SEMI C64; Line item Revision to SEMI F61, F63, F75 and Reapproval SNARF for C19, C51, C84, C85

By / 2nd: Bob McIntosh (GF Piping) / Chuck Dale (Suez)

Discussion: None.

Vote: 6-0. Motion passed

8.2 New Ballots Authorization:


Motion: To authorize ballots for Cycle 5-2019 submission for the following documents: Revision to SEMI C64; F104; Line item Revision to SEMI F61, F63, F75 and Reapproval SNARF for C19, C51, C84, C85

By / 2nd: Steve Rogers (KMG Chemicals) /Don Hudder (Intel)

Discussion: None.

Vote: 6-0. Motion passed

9) Action Items Review 9.1 Previous Meeting(s) Action Items

Inna Skvortsova (SEMI) reviewed open action items. These can be found in the Previous Meeting(s) Action Items table at the beginning of these minutes.

9.2 New Action Items

Inna Skvortsova (SEMI) reviewed the new action items. These can be found in the New Action Items table at the beginning of these minutes.

10) Next Meeting and Adjournment The next meeting is scheduled for July 9, 2019 at San Francisco CA in conjunction with SEMICON West Meetings. See http://www.semi.org/standards-events for the current list of events. Having no further business, a motion was made to adjourn. Adjournment was at 3:55 PM.

Respectfully submitted by:

Inna Skvortsova

Sr. Standards Coordinator

SEMI North America

Phone: 408-9436996

Email: [email protected]

Minutes tentatively approved by:

Don Hadder (Intel), Co-chair Laura Ledenbach (Peroxy Chem) Co-chair Steve Rogers (KMG Chemicals) Co-chair Koh Murai (MegaFluids Systems) Co-chair

Table 13 Index of Available Attachments#1

Title Title Attachment 01: SEMI Standards Required Elements.ppt Attachment 06 CAM Task Force Report (April 2019) Attachment 02: NA Liquid Chemicals TC Meeting Minutes (Nov 2018).pdf

Attachment 07: UPW Task Force Report (April 2019)

Attachment 03: SEMI Standards Staff Report (April 2019).ppt

Attachment 08: HPPM&C Task Force Report (April 2019)

Attachment 04: Japan Liquid Chem Liaison Report (April 2019).pdf

http://www.semi.org/standards-events

http://www.semi.org/standards-events


Table 13 Index of Available Attachments#1 Attachment 05: 6315_Procedural Review #1 Due to file size and delivery issues, attachments must be downloaded separately. A .zip file containing all attachments for these minutes is available at www.semi.org. For additional information or to obtain individual attachments, please contact [SEMI Staff Name] at the contact information above.

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