Linear Actuator Design
Transcript of Linear Actuator Design
The Anti-Gravity MicroMachine
Presented by: Vertically Challenged
Introduction
• Vertically Challenged is…Shabnam Abedi MoghaddamMichele La HayeRichard TuTerrence Yu
What are Micromirrors?• Change the angle of a reflected beam in
multiplexing and de-multiplexing of optical signals
• Very precise and flawless• Aim: raise the mirror to the desired
angle
Mirror Animation
Click in window to start animation
The Problem• Vertical lift cannot be obtained through
horizontal movement• Fabrication process leads the mirror to
sag down
Fixed Hinge
MirrorLever Applied
Force
Wafer
The Solution• Provide initial lift to the mirror
Fixed Hinge Mirror Lever Applied
Force
Wafer
Thermal Actuators• Make use of differing arm thickness to
provide movement• Problem: using the principles described,
it is difficult to obtain vertical movement
Vertical Thermal Actuators• Design 1: Built to provide a downward
motion but is overdriven; when current is removed the actuator snaps up
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More Vertical Thermal Actuators • Design 2: Provides upward motion
through the use of thin flexible connectors
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Even More Vertical Thermal Actuators• Design 3: U-shaped designed to
prevent thicker arm from conforming
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Thermal Actuator Animation
Click in window to start animation
Levers• Design 4: Downward Vertical Thermal
Actuator is used to create lift by pressing down on one end of a lever
Mirror Hinge Thermal Actuator
Lever
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More Levers• Design 5: Flexible connector used to
transfer downward force of Vertical Thermal Actuator to a lever
Mirror Hinge Thermal Actuator
Lever
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Lever Animation
Click in window to start animation
Linear Stepper Motor• Makes use of 2 banks of horizontal
thermal actuators to provide a drive mechanism
Staple HingeRotating Bar
Staple
Staple Hinge
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Staple Hinge Issues
Rotating bar
Rotating bar
Applied Force
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Torsion Hinge• Thin flexible rods attached to mirror on
either side
Mirror
Rotating Bar
Lever
Applied Force
Prevent Bar from Bowing Out
Torsion Hinge
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Final Picture
Possible Issues• Torsion hinge might break or not be
flexible enough• Actuating arms might bend• Vertical thermal actuators might not give
enough deflection
Conclusion• Testing has yet to be done• “We are confident of positive results…”
Terrence
Thanks To• Dr. Ash Parameswaran• Rob Johnstone• Shivalik Bakshi• Coffee
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