Leybold Vacuum MAG Turbo Upgrades for the Semiconductor Industry
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Oerlikon Leybold Vacuum USA Inc. 5700 Mellon Road Export, PA 15632-8900 T 1 800-764-5369 F 1 800-215-7782 www.oerlikon.com/leyboldvacuum VISIT US AT BOOTH #2440 [email protected] Oerlikon Leybold Vacuum Turbomolecular Pump Upgrades for Semiconductor Processing Increasing demands, new pumping challenges, changing processes require upgrades to Leybold Digital MAG Technology n Full 5X Axis Magnetically Levitated Rotor, Not a Hybrid and No Oil n Plug and Play Electronics n No Batteries n No Calibration n Improving Yields by Lower Particle Issues n MTBF >6 years n Kepla-Coated Rotor n 1X Part Number for the Complete Upgrade Package n More than 50X Chambers Upgraded n PSG, USG and STI Qualified n Full 5X Axis Magnetically Levitated Rotor n Plug and Play Electronics n No Batteries n No Calibration n Improving Yields by Lower Particle Issues n Variable Speed Controller n MTBF End-Users Report ~ 42 months n Kepla Coated Rotor - Emissivity 1:1 n 90C insures process does not condense in the lower stages of the pump. The MAG W 1500CT is the hottest pump available. Today and is a proven winner. Successful MAG Pump Upgrades Include: n AMAT Metal & Poly Etch n AMAT Ultima HDP-CVD n AMAT 5500 PVD n LAM 9400 & 9600 n Novellus/LAM Speed C2 n Varian Implanters E220, E250, E500, Viista n Axcelis 8250, GSD and HE n Eaton NV1080 LAM 9600 & AMAT 5200 Metal Upgrades LAM/Novellus C2 Turbo Upgrades Varian & Axcelis Implanter Turbo Upgrades n Full 5X Axis Magnetically Levitated Rotor, Not a Hybrid and No Oil n Plug and Play Electronics n No Batteries n No Calibration n Variable Speed Controller n ISO-F Flanges are used to insure a safe installation. n Installation Support AMAT 5500 Endura Pre-Clean and TxZ Turbo Upgrades New TurboVac 350i Hybrid Best performance in its class: n 100x Higher Compression n Up to 60% Higher Light Gas Pumping Speed n The Only Maintenance and Oil-Free Hybrid Bearing Pump in the Market n On-Board Controller n Plug and Play Kit Available n Installation Support and Onsite Service Possible (Bearing Replacement) n Fully Integrated Converter with 24 and 48 V DC Supply n Only Pump with USB as a Standard Interface n Replaces Existing Leybold TMP361C Trust OEM Upgrades and Repairs by the Industry Leader Contact: Tom Mooney Market Segment Manager T 512-656-5483 [email protected] Why Upgrade to Oerlikon Leybold Vacuum Turbo Pumps? n Experience: Leybold has been upgrading semiconductor tools for >13 years with over 100 successful upgrades n Confidence: We use only Leybold OEM Parts. All our upgrades insure that pumps are brought up to “As New Status” with a 1-Year Factory Warranty n Peace of Mind: Dealing with direct with an OEM pump manufacturer n Consignment: With a commitment to large upgrade projects, pumps are on site when ready. No searching the Internet for used pumps or parts n OEM repairs vs. others… Ask us the difference Save Money by Reducing Spares Inventory Oerlikon Leybold MAG Drive Digital Controllers will run the entire family of MAG Digital Turbos, to include Implant Thin-Film, Poly and Metal Etch
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Transcript of Leybold Vacuum MAG Turbo Upgrades for the Semiconductor Industry
Oerlikon Leybold Vacuum USA Inc.5700 Mellon RoadExport, PA 15632-8900T 1 800-764-5369F 1 800-215-7782
www.oerlikon.com/leyboldvacuum
VISIT US AT BOOTH #2440
Oerlikon Leybold Vacuum Turbomolecular Pump Upgrades for Semiconductor Processing Increasing demands, new pumping challenges, changing processes require upgrades to Leybold Digital MAG Technology
n Full 5X Axis Magnetically Levitated Rotor, Not a Hybrid and No Oil
n Plug and Play Electronics
n No Batteries
n No Calibration
n Improving Yields by Lower Particle Issues
n MTBF >6 years
n Kepla-Coated Rotor
n 1X Part Number for the Complete Upgrade Package
n More than 50X Chambers Upgraded
n PSG, USG and STI Qualified
n Full 5X Axis Magnetically Levitated Rotor
n Plug and Play Electronics
n No Batteries
n No Calibration
n Improving Yields by Lower Particle Issues
n Variable Speed Controller
n MTBF End-Users Report ~ 42 months
n Kepla Coated Rotor - Emissivity 1:1
n 90C insures process does not condense in the lower stages of the pump. The MAG W 1500CT is the hottest pump available. Today and is a proven winner.
Successful MAG Pump Upgrades Include:n AMAT Metal & Poly Etch
n AMAT Ultima HDP-CVD
n AMAT 5500 PVD
n LAM 9400 & 9600
n Novellus/LAM Speed C2
n Varian Implanters E220, E250, E500, Viista
n Axcelis 8250, GSD and HE
n Eaton NV1080
LAM 9600 & AMAT 5200 Metal Upgrades
LAM/Novellus C2 Turbo Upgrades
Varian & Axcelis Implanter Turbo Upgrades
n Full 5X Axis Magnetically Levitated Rotor, Not a Hybrid and No Oil
n Plug and Play Electronics
n No Batteries
n No Calibration
n Variable Speed Controller
n ISO-F Flanges are used to insure a safe installation.
n Installation Support
AMAT 5500 Endura Pre-Clean and TxZ Turbo Upgrades New TurboVac 350i Hybrid
Best performance in its class:
n 100x Higher Compression
n Up to 60% Higher Light Gas Pumping Speed
n The Only Maintenance and Oil-Free Hybrid Bearing Pump in the Market
n On-Board Controller
n Plug and Play Kit Available
n Installation Support and Onsite Service Possible (Bearing Replacement)
n Fully Integrated Converter with 24 and 48 V DC Supply
n Only Pump with USB as a Standard Interface
n Replaces Existing Leybold TMP361C
Trust OEM Upgrades and Repairs by the Industry Leader
Contact: Tom MooneyMarket Segment ManagerT [email protected]
Why Upgrade to Oerlikon Leybold Vacuum Turbo Pumps?n Experience: Leybold has been upgrading semiconductor tools for >13 years with over 100 successful upgrades
n Confidence: We use only Leybold OEM Parts. All our upgrades insure that pumps are brought up to “As New Status” with a 1-Year Factory Warranty
n Peace of Mind: Dealing with direct with an OEM pump manufacturer
n Consignment: With a commitment to large upgrade projects, pumps are on site when ready. No searching the Internet for used pumps or parts
n OEM repairs vs. others… Ask us the difference
Save Money by Reducing Spares InventoryOerlikon Leybold MAG Drive Digital Controllers will run the entire family of MAG Digital Turbos, to include Implant Thin-Film, Poly and Metal Etch
