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COMPANY CONFIDENTIAL
Lasing on a Sunny Afternoon:From Einstein to Bell Labs to
Next-Gen Solar Cells
Finlay ColvilleDirector of Marketing – Solar
Coherent, Inc.
SVPV SocietyPARC, Palo Alto
4th November, 2009
COMPANY CONFIDENTIAL
ContentsImages, Coherent, Inc. 2009.
• Introduction• Lasers-&-solar: 1700-2010
• Technical synergy through Newton, Maxwell, Einstein• Bell Labs in the 1950’s• Market pull: radar & the space-race• Laser & solar industries emerge• The UNSW/BP-Solar LGBC cell• Routine applications for lasers within solar cell
production• Next-generation cells & value-added from laser
processes
• Combine technology with market analysis
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II. Process Tools
I. Laser Sources
Coherent, Inc. within the solar industry
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The 18th Century: What was ‘light’?
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The 19th Century: Experiments & theory
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1900-1920: Scientific explanations
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1920-1940: First ‘market’ pull - radar
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1940-1960: World firsts & solar market pull
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1960-1980: Early industry growth
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1980-2000: Basic R&D & ‘Green’ initiatives
Lasers for
solar
Diode-pumped solid-state (DPSS) lasersat 1064 or 532 nm
Lamp-pumped solid-state
lasers
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LGBC – The original selective emitter
Process flow
Front scribe
Sub-surface & surface quality
Laser used
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LGBC-CPV cells produced today at Narec
http://www.narec.co.uk/
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LGBC legacy
Source: F. Colville, InterPV, June 2009
Source: F. Colville, InterPV, June 2009
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2000-2010: Market dynamics kick-in
DPSS lasers at 1064, 532, & 355 nm Short-pulse lasers & high-power UV quasi-CW lasers
Lasers for
solar
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Source: F. Colville, PVI-3, March 2009.
Thin-film patterning: laser standardized
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HE cells: Research-led with c-Si bias
Source: Various online links; publication links cited in magazines referenced herein.
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HE cells: first laser tooling equipment
http://www.m-solv.com/
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Source: F. Colville, PV World, March/April 2009
… by 2009, lasers matched to HE cells
http://www.laserfocusworld.com/display_article/283862/12/none/none/News/PHOTOVOLTAICS:-Laser-processing-yields-solar-cells-with-22-efficienc
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Edge isolation
Process flow - BEOL
Front scribe
Abs. & lifetimes Amortized cost/wafer
Laser used
Source: F. Colville, Global Solar Technology, March/April 2009.Data (centre) referenced therein (ISE/ISFH/LZH sourced).
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Wrap-through
Process flow - FEOL TSV drill
Post-etching standard Laser used
Source (all except lower-left): F. Colville, InterPV, April 2009.Lower-left: Courtesy J. Callaghan, Xsil, 2008.
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Dielectric ablation / passivation opening
Lines or holes SiNx or SiNO2
Lasers used
P-layer sensitivity
Source: All images published within F. Colville, Solar: A PV Management Magazine, II, June 2009.Top graphs; original data from (a) ISFH/LZH, (b) CiS, (c) Rana et al. (EUPVSEC 2008). See above for specific citations.
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Selective emitters & laser doping
Lasers used
Apps gallery
SE categories
Table concept (above): F. Colville, Coherent, Inc., June 2009.Gallery (top-right):(a) Courtesy C. Morilla, BP-Solar, 2008; (b), (d), (e) Coherent, Inc. 2008-2009; (c), (f) Nanogram, Inc., 2009.
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SE’s & laser doping: further reading
Source: F. Colville, PV International 5, September 2009
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Contact & acknowledgements
Special thanks for inputs used in this presentation:N. Mason, C. Morilla, R. Russell, A. Schoonderbeek,K. Neckermann, B. Xu, & all the Coherent applications guys ww
Further reading:John Perlin, “From space to earth: the story of solar electricity”, aatec publications, 1999.Mario Bertolotti, “The history of the laser”, IOP publishing, ltd. 2005.