Lambda Physik COMPex 301 EXCIMER LASER OPERATING MANUAL

Version: 2.0 April 2012

UNIVERSITY OF TEXAS AT ARLINGTON

Nanofabrication Research and Teaching

Facility

DOCUMENT: Lambda Physik COMPex 301 Excimer LASER OPERATING PROCEDURES Version 2.0

2

TABLE OF CONTENTS

1. Introduction....3

1.1 Scope of Work.......3

1.2 Description..3

1.3 Safety......3

2. Hardware....................................5

3. Requirements.......7

3.1 Training.......7

3.2 System Restrictions.........7

4 Operating Procedures...........9

4.1 System Pre-Checks............9

4.2 Lambda-Physik COMpex 301 LASER operation..10

5 Recipes........14

5.1 Recipe Guidelines....................................................14

6 Gas Flush and Fill Procedures ..16

DOCUMENT: Lambda Physik COMPex 301 Excimer LASER OPERATING PROCEDURES Version 2.0

3

1.0 INTRODUCTION

1.1 Scope

These procedures apply to the Lambda Physik COMPex 301 Excimer LASER system. All maintenance should follow the procedures set forth in the manufacturers maintenance and operations manuals. This document is for reference only.

Users must first coordinate with University of Texas at Arlingtons EH&S Laser Safety Officer (LSO) to ensure compliance with established federal and state procedures before operating this equipment (http://www.uta.edu/campus-ops/ehs/radiation/laser.php ).

Users must also receive training and be authorized by trained Nanofab staff before operating this equipment

1.2 Description

The Lambda Physik COMPex 301 Excimer LASER system is capable of producing a stable high energy pulsed rare gas-halide laser . The COMPex 301 excimer laser provides up to 10 watts of 10-50ns pulsed Krypton Fluoride ( KrF ) laser emission at wavelength of 248nm. The short pulse durations and the use of unstable resonator results emission bandwidths of a few and beam divergence of 2-4 mrad. This high energy pulsed beam is used with Neocera PLD vacuum chamber and focusing system to strike target materials that are to be deposited on sample pieces or up to 4 diameter wafers. The process can occur in ultra high vacuum with optional background O2 or N2 gas pressure and substrate heating up to 650C.

The pulsed laser deposition technique (PLD) can be used to fabricate high quality crystalline films, nitride, oxides, YBCO, ZnO and other approved thin films.

1.3 Safety

1.3.1 This tool emits a narrow beam of intense Ultraviolet Light. The radiation of the excimer laser lies outside the visible spectrum so the light will be unable to be detected by the human eye. Make sure that suitable protective eye ware - 248 nm UV goggles and UV face shields are available for putting the laser into operation. Ensure laser safety eye ware is worn by everyone operating on or near the laser and any unauthorized person without laser safety eye ware must LEAVE BAY3.

1.3.2 Ensure all laser operators remove reflective watches or jewelry from their bodies. Make sure your gloves cover all exposed skin.

http://www.uta.edu/campus-ops/ehs/radiation/laser.php

DOCUMENT: Lambda Physik COMPex 301 Excimer LASER OPERATING PROCEDURES Version 2.0

4

1.3.3 Keep all flammable materials such as clean room paper, notebooks, solvent bottles ( Methanol, Acetone, Isopropanol Alcohol ) away from the beam path.

1.3.4 Do not remove safety eye ware during laser beam alignment (use a piece of fused

silica or Laser Zap paper to determine the position of the beam). Align the optical components starting with the component nearest the laser shutter. Keeps hand clear of LASER light path to avoid LASER burns on arms and hands. The following are very dangerous radiation hazards :

Direct radiation light as it leaves the laser shutter. Reflected radiation light which hit a surface and reflects back. Diffused radiation light which hits a surface and scattered.

Laser shutter

1.3.5 This tool is connected to HIGH VOLTAGES. 42VAC, 60VAC and 32KV are generated in the

laser device. The safety panels and interlocks should not be remove or bypassed or there is a risk of electrocution! The capacitors in the laser device holds tens of joules of energy up to 32KV. Capacitors voltages need to be completely discharge before any maintenance work on the power supplies. If you encounter any electrical malfunctions contact staff immediately.

1.3.6 The gas supplied to this machine contains a mixture of 5% fluorine and 95 % helium.

The 5% fluorine is further diluted in the laser with other gases. Inhalation or skin contact with halogen gasses should be avoided. Halogens can cause severe chemical and thermal burns to the respiratory track. Fluorine is characterized by an extremely stinging smell in very low concentrations (0.1ppm). If you suspect any problems with the gas supplies contact Nanofab staff immediately. USERS are required to read the following 20% and 100 % fluorine MSDS. http://www.chemadvisor.com/Matheson/database/msds/00244235000800003.PDF http://www.chemadvisor.com/Matheson/database/msds/MAT09920000220003.PDF

http://www.chemadvisor.com/Matheson/database/msds/00244235000800003.PDFhttp://www.chemadvisor.com/Matheson/database/msds/MAT09920000220003.PDF

DOCUMENT: Lambda Physik COMPex 301 Excimer LASER OPERATING PROCEDURES Version 2.0

5

Only trained Nanofab staff are allowed to open F2/He bottle and fill the gas line to the laser. After USERs are finished only staff are allowed to evacuate the line and close the F2/He bottle.

1.3.7 USERS NOT allowed to FILL THE LASER TUBE or adjust the BUFFER gas Ne regulator , RARE gas Kr regulator, INERT gas He regulator or the HALOGEN F2/He gas regulators due to the risk of over pressurizing the laser tube and gas lines causing a leak.

BUFFER Ne (80psi) Rare Kr (80psi) INERT He (80psi)

1.3.8 Users cannot run the laser if EITHER facility ACID or SOLVENT exhaust are OFF.

If you suspect an exhaust problem notify staff. If youre already running the laser turn the laser OFF by pressing the RUN/STOP or BREAK button the keypad and notify staff immediately.

Acid exhaust OFF = 0 Solvent exhaust OFF = RED RUN/STOP button

1.3.9 Due to the fact a Nanofab staff member must power ON the COMPex 301 Excimer LASER, it can ONLY be used Monday-Fridays from 8am to 5pm ( excluding holidays and UTA snow days).

DOCUMENT: Lambda Physik COMPex 301 Excimer LASER OPERATING PROCEDURES Version 2.0

6

1.3.10 Read any posted NanoFAB Engineering Change Notices (ECN) for any hardware, process or safety changes before running the tool.

1.3.11 Note the location of emergency phone numbers and phone locations :

Emergency Exit Locations

1

Clean ZonesBuilding Clean Zone Legend.............Most Clean, Class 100.............Intermediate Clean, Class 10,000.............Lowest Clean, equipment, chase.............House Clean, building standard

Floorplan & Area Names

N

S

E W

Drawing Layers

3

Nanotechnology Research and Teaching Facility

8' wideopening Alley

12' wide

First Floor

Displayed Layers

UTA Cleanroom Floorplan.dsf

\usr2\UTA-Cleanroom\layouts

25 Apr 200024 ft : 1"

file:

path:

scale: last revised:

1st Level Floorplan

3' x 6.5'11.5' high

Raisedceiling forLN2 phaseseparator

(2 locations)

3' x 6.5'11.5' high

Floorplan Key:

....................= sliding glass door

KE

EP

CLE

AR

platform5' x 11'

ramp

5' x 8'

airshower

eva

p#2

eva

p#1

LN2tank

LN2 service

LN2

fill

HPN2gas

Men'sRoom

Women'sRoom

Building Cleanliness Zones

Location of emergency equipment.

First Aid

Fire Extinguisher

Phone Eye Wash

EXT

First Aid

WASH

EXT

EXT

EXTEXT

EXT

EXT

EXT

EXT

EXT

EXT

EXT EXT EXT

EXT

EXT

EXT

WASH

WASH

WASHWASH

First Aid

airshower

Entrance

Gowning

Teaching FabClass-10,000

Bay #1 Yellow Room, Class-100

Bay #2 Characterization, Class-100

Bay #3 Main Processing, Class-100

Bay #4 MBEClass-10,000

Chase #2

Chase #3

Chase #4

Chase #5

Entry ChaseEquipment Entrance

& Clean Storage

WorkroomLab #1

WorkroomLab #2

ToolShop

AssemblyArea

EastChase

Viewing Gallery

Alcove

AChaseFurnace

Park

Visitor Reception Lobby

TeachingYellow Room

4

Area Labels

Chase #1

ramp

5' x 8

'

North Side

Exit

East Side

Exit

Main

Lobby Exit

Main Lobby

Exit

1.3.12 Emergency Procedure :

DOCUMENT: Lambda Physik COMPex 301 Excimer LASER OPERATING PROCEDURES Version 2.0

7

2.0 HARDWARE

2.1 All Lambda Physik excimer lasers use the NovaTube technology. The NovaTube has been conceived to eliminate the effects of corrosion and contamination.

2.2 Optimized electrode materials combined with an improved preionization scheme minimizes electrode erosion.

2.3 LASER gas replenishment