Laboratory Safety and Laboratory Safety and Hazardous Waste Training Hazardous Waste Training

RefresherRefresher

Kostas Center and Kostas Center and Microfabrication LaboratoryMicrofabrication Laboratory

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Kostas Center and Microfabrication Kostas Center and Microfabrication Laboratory Training GoalsLaboratory Training Goals

Labeling WasteLabeling Waste Review chemical Review chemical

types used in clean types used in clean roomsrooms

Review proper Review proper storage and storage and disposal of clean disposal of clean room chemicalsroom chemicals

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LabelingLabelingFour Critical ItemsFour Critical Items Label must say “Hazardous Waste”Label must say “Hazardous Waste” Must identify a date when container is filledMust identify a date when container is filled Must identify the physical hazards of chemical Must identify the physical hazards of chemical Must list full name(s) of the chemicalMust list full name(s) of the chemical

Useful LinksUseful Links Hazardous Waste Listed and Characteristic WasteHazardous Waste Listed and Characteristic Waste Harvard University Labeling ToolHarvard University Labeling Tool

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Waste LabelWaste Label

HAZARDOUS WASTEFEDERAL LAW PROHIBITS IMPROPER DISPOSAL

Northeastern UniversityOffice of Environmental Health & Safety

229 Forsyth BuildingBoston, Massachusetts 02115

(617) 373-2769http://www.ehs.neu.edu

Investigator: _________________________________Phone: ________________________Dept: ________________________________Room # / Bldg: ________________________Date Container Filled: ____________________Container Size(s): ____________________Principal Constituents (Give % and Full Chemical Name): ____________________________________________________________________________________________________________________________________________________________________________Hazardous Waste Classification (Check at least one):

______ Ignitable (Includes Flammable liquids, solids and gasses)______ Corrosive (pH of 2 or less, or 12 or greater, and/or can corrode steel)______ Reactive (Is unstable, can detonate or reacts violently with water)______ Toxic (Contains heavy metals, certain organics or pesticides)______ Listed (Appears on the F, U, P or M List)______ Other (Specify): ___________________________________________

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Hazardous Waste ReferencesHazardous Waste References

What is MF 321 or SU-8?

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Chemical Types Used in the Chemical Types Used in the Microfabrication LaboratoriesMicrofabrication Laboratories

Physical HazardsPhysical Hazards Flammable and Combustible Flammable and Combustible

LiquidsLiquids Compressed GassesCompressed Gasses ExplosivesExplosives Organic PeroxidesOrganic Peroxides OxidizersOxidizers PyrophoricsPyrophorics Water ReactivesWater Reactives

Health HazardsHealth Hazards CarcinogensCarcinogens Reproductive ToxinsReproductive Toxins SensitizersSensitizers IrritantsIrritants CorrosivesCorrosives Neurotoxins (nerve)Neurotoxins (nerve) Hapatoxins (liver)Hapatoxins (liver) NephrotoxinsNephrotoxins Agents that act on the Agents that act on the

hematopoietic system (blood)hematopoietic system (blood) Agents that damage the lungs, Agents that damage the lungs,

skin, eyes or mucus membranesskin, eyes or mucus membranes

OSHA Defined Hazardous Chemicals

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Acids and EtchantsAcids and Etchants• Acetic Acid

• Buffered Oxide Etch (BOE - Ammonium Fluoride + HF Mixtures)

• BOE 20:1

• BOE 7:1

• Chrome Etch (Cerric ammonium nitrate + Perchloric Acid)

• Hydrochloric Acid (HCl)

• Hydrofluoric Acid (HF)

• Hydrofluoric Acid 1% (Premix HF and water)

• Hydrofluoric Acid 10% (Premix HF and water)

• Nitric Acid

• Phosphoric Acid

• Sulfuric Acid (H2SO4)

• Gold Etchant

• BOE 10:1

• Aluminum Etchant

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Corrosives, Developers and GasesCorrosives, Developers and Gases

CorrosivesCorrosives• Ammonium Hydroxide

• Potassium Hydroxide

• Sodium Hydroxide

• Tetramethylammonium Hydroxide

DevelopersDevelopers• AZ 300 MIF Developer

• AZ 400 K Developer

• MF 319 Developer

• SU-8 Developer

• MF 321

GasesGases

• Forming Gas (N2:H2; <5.7% H2 - Nonflammable)

• Helium (He)

• Hydrogen (H2)

• Nitrogen (N2)

• Oxygen (O2)

• Sulfur Hexafluoride (SF6)

• Siline and inert (N2, He or Ar) mixture

• Trifluromethane ("Halocarbon 23" CHF3)

• Argon

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Solvents, Photoresist and OxidizersSolvents, Photoresist and Oxidizers

PhotoresistPhotoresist

• AZ4620• AZ5214-E• NANO 495 PMMA• S 1813 • SU-8• S 1818• S 1827• S 1805• Adhesion Promoter 100• Adhesion Promoter 150 NAAPS• Nano 950 PMMA

OxidizersOxidizers• Hydrogen Peroxide

SolventsSolvents• Acetone ((CH3)2CO)

• Anisole (C6H5OCH3)

• Chlorobenzene (C6H5Cl)

• Ethanol

• Isopropanol ((CH3)2 CHOH)

• Methanol (CH3OH)

• Methyl Isobutyl Ketone

• Trichloroethylene (C2HCl3)

• Toluene (C6H5-CH3)

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EPA's Chemical Compatibility Chart

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Proper Storage of ChemicalsProper Storage of Chemicals

Flammable Flammable Storage CabinetsStorage Cabinets

Corrosive Corrosive Storage CabinetsStorage Cabinets

ShelvingShelving Spill PalletsSpill Pallets Rubbermaid Rubbermaid

TubsTubs

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Hazardous Waste Disposal OptionsHazardous Waste Disposal Options

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Hazardous Waste Satellite Hazardous Waste Satellite Accumulation and DisposalAccumulation and Disposal

Scheduling DisposalScheduling Disposal Appropriate Appropriate

ContainersContainers LabelingLabeling Designated Storage Designated Storage

AreaArea TrainingTraining Improper DisposalImproper Disposal Waste MinimizationWaste Minimization Emergency Spill Emergency Spill

ResponseResponse

Hazardous Waste Satellite Hazardous Waste Satellite Accumulation AreaAccumulation Area

Please review the following requirements to ensure that you compPlease review the following requirements to ensure that you comply with ly with environmental regulations and safe handling procedures for hazarenvironmental regulations and safe handling procedures for hazardous waste. Please dous waste. Please keep this posted at your designated “Satellite Accumulation Areakeep this posted at your designated “Satellite Accumulation Area”. A detailed fact ”. A detailed fact sheet on hazardous waste disposal is available as a supplement tsheet on hazardous waste disposal is available as a supplement to this o this posting.posting.http://www.ehs.neu.edu/hazardous_waste/labels_postings/documentshttp://www.ehs.neu.edu/hazardous_waste/labels_postings/documents/satpost/satpostin3.docin3.doc

SCHEDULI NG DI SPOSAL. SCHEDULI NG DI SPOSAL. For disposal of hazardous waste please call the Office of For disposal of hazardous waste please call the Office of Environmental Health and Safety (EHS) at x2769 or use our onEnvironmental Health and Safety (EHS) at x2769 or use our on-- line disposal request line disposal request form available on our website at (form available on our website at (http://http://www.ehs.neu.eduwww.ehs.neu.edu). Filled ). Filled ororhttp://www.ehs.neu.edu/hazardous_waste/labels_postings/documentshttp://www.ehs.neu.edu/hazardous_waste/labels_postings/documents/satpostin3.do/satpostin3.docc unwanted waste must be removed from the satellite area within tunwanted waste must be removed from the satellite area within three days so it is hree days so it is important that you contact us once your important that you contact us once your container(scontainer(s) are filled or ready for removal.) are filled or ready for removal.

APPROPRI ATE CONTAI NERS. APPROPRI ATE CONTAI NERS. Containers must be compatible with the hazardous Containers must be compatible with the hazardous waste being accumulated. Hazardous waste containers must be clowaste being accumulated. Hazardous waste containers must be closed at all times sed at all times during storage, except when waste is being added or removed. Reduring storage, except when waste is being added or removed. Regulations do not gulations do not permit funnels in waste containers unless it is being filled. Tpermit funnels in waste containers unless it is being filled. The maximum size allowed he maximum size allowed for containers is 55 gallons for hazardous waste and one quart ffor containers is 55 gallons for hazardous waste and one quart for acutely hazardous or acutely hazardous waste (go to waste (go to http://http://www.ehs.neu.edu/epareg.htmwww.ehs.neu.edu/epareg.htm for hazardous waste determination for hazardous waste determination info).info).

LABELI NG. LABELI NG. All hazardous waste containers must be labeled at the time the All hazardous waste containers must be labeled at the time the waste is waste is first placed into the container. Labels must include the followfirst placed into the container. Labels must include the following information: 1) the ing information: 1) the words, “Hazardous Waste”; 2) the full chemical name of the contewords, “Hazardous Waste”; 2) the full chemical name of the contents (e.g. “sulfuric nts (e.g. “sulfuric acid”); 3) the waste acid”); 3) the waste http://www.ehs.neu.edu/hazardous_waste/labels_postings/documentshttp://www.ehs.neu.edu/hazardous_waste/labels_postings/documents/satpostin3.doc/satpostin3.doc(e.g. “corrosive”, etc.); 4) the date when the container becomes(e.g. “corrosive”, etc.); 4) the date when the container becomes full or is no longer full or is no longer needed. Please call EHS if you need labels.needed. Please call EHS if you need labels.

DESI GNATED STORAGE AREA. DESI GNATED STORAGE AREA. For safety and environmental reasons, hazardous For safety and environmental reasons, hazardous waste must be stored in a designated “Satellite Accumulation Arewaste must be stored in a designated “Satellite Accumulation Area”, (e.g. flammable a”, (e.g. flammable storage cabinet, bench top). These must be located at or near tstorage cabinet, bench top). These must be located at or near the point of generation. he point of generation. Storage areas that could result in a leak into a sink or floor dStorage areas that could result in a leak into a sink or floor drain must have secondary rain must have secondary containment to guard against this. Designated “Satellite Accumucontainment to guard against this. Designated “Satellite Accumulations Areas” must lations Areas” must be inspected weekly for leakage and compliance with these requirbe inspected weekly for leakage and compliance with these requirements. ements.

TRAI NI NG. TRAI NI NG. Environmental regulations require training of people who generaEnvironmental regulations require training of people who generate, te, handle or manage hazardous waste. Training is offered on a reguhandle or manage hazardous waste. Training is offered on a regular schedule by EHS. lar schedule by EHS. Check the training section of our website for specific dates Check the training section of our website for specific dates ((http://http://www.ehs.neu.edu/training.htmwww.ehs.neu.edu/training.htm). ).

I MPROPER DI SPOSALI MPROPER DI SPOSAL. Sinks or rubbish cans should never be used for hazardous . Sinks or rubbish cans should never be used for hazardous waste disposal. Please contact EHS to confirm what chemicals cawaste disposal. Please contact EHS to confirm what chemicals can be managed as n be managed as nonnon--hazardous waste.hazardous waste.

WASTE MI NIMI ZATI ON. WASTE MI NIMI ZATI ON. Generators of hazardous waste are required to incorporate Generators of hazardous waste are required to incorporate waste minimization into the process generating their waste. Waswaste minimization into the process generating their waste. Waste minimization te minimization includes changing procedures, reducing scale and substituting maincludes changing procedures, reducing scale and substituting materials. EHS also terials. EHS also maintains a chemical recycling list on its website that you can maintains a chemical recycling list on its website that you can used to recycle excess used to recycle excess chemical stock (chemical stock (http://http://www.ehs.neu.edu/chemrecy.htmwww.ehs.neu.edu/chemrecy.htm).).

EMERGENCY SPI LL RESPONSE.EMERGENCY SPI LL RESPONSE. In the event of a spill or other emergency, the In the event of a spill or other emergency, the University Emergency Coordinators can be reached by calling x276University Emergency Coordinators can be reached by calling x2769 (day) or x3333 9 (day) or x3333 (24 hours). Fire extinguishers are located in each laboratory a(24 hours). Fire extinguishers are located in each laboratory and fire alarms are nd fire alarms are located in hallways and should be used as necessary. The Bostonlocated in hallways and should be used as necessary. The Boston Fire Department can Fire Department can be reached by calling the Northeastern University Public Safety be reached by calling the Northeastern University Public Safety Division emergency Division emergency number at x3333. number at x3333.

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Wastewater AlertWastewater Alert

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Questions?Questions?