WESTFÄLISCHERHEINISCH-

AACHEN

TECHNISCHEHOCHSCHULE

Kick-off meeting, Villingen 18.08.2004

A. Heinrici, P. Haring Bolívar, H. KurzInstitut für Halbleitertechnik, RWTH Aachen, Germany

ATHOS – media tester developmentATHOS – media tester development

Institute of Semiconductor Electronics, RWTH Aachen

ContentsContents

Role of RWTH in ATHOS Deliverables and milestones Time schedule Current work Open discussion points

Institute of Semiconductor Electronics, RWTH Aachen

Role of RWTH in ATHOSRole of RWTH in ATHOS

Substrate and disk development (WP4) Task 4.5 Characterization and optimization of the disc assembly

(with LETI&MPO)

Media testing (WP7) Task 7.2: Scattering analysis of media Task 7.3: Holographic media tester (with Optimal/BU) Task 7.4: Holographic testing of media

Institute of Semiconductor Electronics, RWTH Aachen

Deliverables & MilestonesDeliverables & Milestones

D22 (month 12) Dedicated tester for holographic media analysis at 408nm

M19 (month 24)Detailed performance inter-comparison of media manufactured at LETI and MPO,

using Aprilis and InPhase materials to concentrate further development.

M20 (month 24)Characterization of flat media (without tracking structure) manufactured with

different materials M21 (month 36)Final evaluation of fundamental

characteristics of structured media

Institute of Semiconductor Electronics, RWTH Aachen

Time scheduleTime schedule

Official planning:

First priority is holographic tester Planned schedule: working setup by Feb 2005

Month N° 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36Workpackage Title

WP 7 Media tester

7.1 Standard optical characterization

7.2 Scattering analysis

7.3 Holographic media tester

7.4 Testing of fundamental media characteristics

Institute of Semiconductor Electronics, RWTH Aachen

Holographic media testerHolographic media tester

Detailed planning is actually performed in close cooperation with Optimal Optik (Gábor Szarvas)

Start at 532nm (5W DPSS laser) and then 408nm

laser 1

mirror 1

shutter 1

semitransparent mirror

detector

λ/2 plate

microscope objective

pinhole

achromatic doublet

PBS prism

shutter 2

λ/2 plate

mirror 2

Cr mask

Writing Fourier objective

reference aperture

reference

lens

data carrier

Beam stop

relay lens

CCD/CMOS detector array

Adjustable components

(Computer controlled)

Reading Fourier objective

Intermediate image plane

Reference arm

Scheme of tester

(by Optimal Opt.)

Institute of Semiconductor Electronics, RWTH Aachen

RequirementsRequirements

Transmission and reflection Shift multiplexing and angle multiplexing + phase!! 532nm and 405nm

Writing Fourier objective NT30-941

Reading Fourier objective, NT30-941

Chromium mask

Beam stop

Substrate+ storage layer

Institute of Semiconductor Electronics, RWTH Aachen

Interference analysisInterference analysis

Tests with large area interference setup

X

I

1

2

P = / (2 s in ( ) )

Institute of Semiconductor Electronics, RWTH Aachen

Examples of interference patterns on photoresist (2)Examples of interference patterns on photoresist (2)

Institute of Semiconductor Electronics, RWTH Aachen

Open issuesOpen issues

General issues: Reflection geometry for media tester: When will first reflection

disks be available? Is angle multiplexing best option for quantifying shrinkage? Phase stability of DLP devices? Disadvantages of LC-array? Blue laser by Toptica? When? Characteristics Scattering sensitivity of disks? Storage requirements? Spectral

dependencies? Material specs (InPhase tapestry 3000?) intensity specs for

detection array?