IWORID 7: Industrial Applications · IWORID 7: Industrial Applications ... IEEE/Rome, Salon Paris...

1

PANalyticalK. Bethke, R. de Vries, V. Kogan, J. Vasterink,R. Verbruggen, J. Bethke

P. Kidd, P. Fewster / PAN Sussex Research

IWORID 7: Industrial ApplicationsApplications and new Developments in X-ray Materials Analysis

2IWORID 7 Grenoble

Outline

• Background• Medipix Tech-Transfer• First results on detector properties• Expectations for XRD applications• First results of Medipix in XRD• New EUREKA project “RELAXD”• Conclusions

3IWORID 7 Grenoble

Main Activities

XX--ray Diffraction and Fluorescence for ray Diffraction and Fluorescence for Scientific and Industrial ResearchScientific and Industrial Research

Winning by Sharing Winning by Sharing knowknow--how and experience how and experience in Xin X--ray diffraction and fluorescenceray diffraction and fluorescence

4IWORID 7 Grenoble

Main Activities

• XRF (Industry and Research)– Elemental Analysis (qualitative and quantitative)– Applications: Cement, Petrochemical, Plastics,

Steel, Aluminium, Environmental, Geology– Automation

• XRD (Research and Industry)– Phase Analysis (qualitative and quantitative)– Applications: Pharmaceuticals, Cement, Minerals– Other: Thin Films and Semiconductors, Nanotech, – Automation

5IWORID 7 Grenoble

History

PANalytical is located in Almelo for over 35 years

6IWORID 7 Grenoble

Product range (Elemental Analysis)

CubiXAxiosMiniMate

MiniPal 2

MagiX FASTVenus

7IWORID 7 Grenoble

Product range (Phase analysis)

CubiX PROX’Pert PRO

8IWORID 7 Grenoble

9IWORID 7 Grenoble

X’PertX’Pert PRO MRDPRO MRD

• Advanced X-ray analysis for new materials research and development

• For thin films, semiconductors and microstructures

10IWORID 7 Grenoble

X’PertX’Pert PRO MRD XLPRO MRD XL

• X-ray analysis for research and process development of advanced materials

• Analysis of wafers up to 300 mm diameter

• Automatic wafer loading

11IWORID 7 Grenoble

X’PertX’Pert PRO MRD XLPRO MRD XL

• X-ray analysis for research and process development of advanced materials

• Analysis of wafers up to 300 mm diameter

• Automatic wafer loading

12IWORID 7 Grenoble

X’CeleratorX’Celerator

• The standard in X-ray powder diffraction

• Speed and resolution• Rapid data collection

of complete powder diffractograms

13IWORID 7 Grenoble

X’PertX’Pert SoftwareSoftware

• A complete range of software packages for X-ray diffraction

• Based on the universal standard for data sharing and file transfer and XML

14IWORID 7 Grenoble

CSI MIAMICSI MIAMI

• FORENSIC SCIENCE

15IWORID 7 Grenoble

XRD X’PERT PRO MRD system overview

Acrobat Document

16IWORID 7 Grenoble

Outline


17IWORID 7 Grenoble

18

PANalyticalK. Bethke, R. de Vries, V. Kogan, J. Vasterink,R. Verbruggen, J. Bethke

P. Kidd, P. Fewster / PAN Sussex Research

AcknowledgementCERN team

Michael CampbellXavier Llopart

Erik Heijne

CERN ETTMarilena Streit-Bianchi

Beatrice BressanNIKHEF team

Jan Visschers

Medipix CollaborationPaolo Russo, Hans Erik Nielsson

Chip design

Tech-transfer Office+combined exhibitions IEEE/Rome, Salon ParisR/o electronics, partnership new projectOrigin Medipix activities

19IWORID 7 Grenoble

PARIS: Salon de la Recherche et l’Innovation

20IWORID 7 Grenoble

Medipix Collaboration

-- UnivUniv + INFN + INFN CagliariCagliari-- CEACEA--LIST LIST SaclaySaclay-- CERN CERN GenèveGenève-- UnivUniv d'Auvergned'Auvergne-- UnivUniv ErlangenErlangen-- ESRF ESRF GrenobleGrenoble-- UnivUniv FreiburgFreiburg-- UnivUniv GlasgowGlasgow-- IFAE BarcelonaIFAE Barcelona-- MitthoegskolanMitthoegskolan SundsvallSundsvall-- MRCMRC--LMB Cambridge LMB Cambridge -- UnivUniv + INFN + INFN NapoliNapoli-- NIKHEF AmsterdamNIKHEF Amsterdam-- UnivUniv + INFN Pisa+ INFN Pisa-- FZU CAS Prague FZU CAS Prague -- IEAP CTU Prague IEAP CTU Prague -- SSL Berkeley SSL Berkeley

Spokespersons: Spokespersons: Michael CAMPBELL CERNMichael CAMPBELL CERNJan VISSCHERS Jan VISSCHERS NIKHEFNIKHEF

21IWORID 7 Grenoble

Outline


22IWORID 7 Grenoble

Pixel response (before flatfield correction)

0

1000

2000

3000

4000

5000

6000

7000

8000

0 20 40 60 80 100 120 140

23IWORID 7 Grenoble

Pixel response (after flatfield correction)

0

1000

2000

3000

4000

5000

6000

7000

8000

0 20 40 60 80 100 120 140

24IWORID 7 Grenoble

Flatfield correction factors (all pixels)

0

2000

4000

6000

8000

10000

12000

14000

16000

0.5 0.6 0.7 0.8 0.9 1 1.1 1.2 1.3 1.4 1.5

25IWORID 7 Grenoble

Medipix at PARC: Images of the direct beam

mirror +1/32 slit

100

1000

10000

100000

1000000

0 50 100 150 200 250 300

Series1

200 micron double pinhole

10

100

1000

10000

100000

0 50 100 150 200 250 300

Series1

26IWORID 7 Grenoble

Medipix at PARC: Images of the direct beam

mirror +1/32 slit

100

200100

400100

600100

800100

1000100

1200100

0 50 100 150 200 250 300

Series1

200 micron double pinhole

105010

1001015010200102501030010350104001045010

0 50 100 150 200 250 300

Series1

line

point

Long fine focus

27IWORID 7 Grenoble

Medipix Installation at PARC

Early comparison with X’Celerator Static

1.2deg 2ThetaMedipix 100sKM0427C.dat.profile

spikes

X’celerator 100sKX0427B

Improve data by isolating useful pixels

M154 AlGaAs InGaAs GaAs

18-05-2005IWORID 7 Grenoble

High Resolution XRD rapid screening

• Rapid feedback on samples with compositional grade: 12 measurements in 12 minutes!

Plan View

10987654321

10987654321

Compositionally graded

perovskite thin film

x

5mm

1o range 2Theta/Omega rapid 2Theta/Omega scans


“Five fingers of quartz”, 300 vs 700 micron sensor

300 micron sensor 700 micron sensor


“Five fingers of quartz”, 300 vs 700 micron sensor

0

50000

100000

150000

200000

250000

300000

350000

0 50 100 150 200 250

Pixel number

Tota

l num

ber

of c

ount

s

300 micron sensor 700 micron sensor

31IWORID 7 Grenoble

XRD as tool for detector development (www. Dannalab.com)

32IWORID 7 Grenoble

First shot: direct beam


Direct beam

Linear scale Logarithmic scale

34IWORID 7 Grenoble

R&D: Medipix collaboration - PANalytical


Micro–high-resolution wafer mapping

“Static” measurement geometry for wafer screening of CdHgTe diode arrays for thermal imaging cameras

<00l>

<624>

Linear array SiStrip detector

Discrimination on every photon separates very weak scattering from random noise in measurement •Signal peak gets enhanced with counting time•Random residual noise statistically cancels with counting time•Results in an enhanced dynamic range

Signal peak <0.25 photons/s

Background noise after 100 s count time ~0.005 photons/s

Single 100 µm sampled region

X-rays

36IWORID 7 Grenoble

Still weaker signals; very small residual noise

Signal peak ~0.1 photons/s

Background after 100 s count time <0.002 photons/s


Signal peak ~0.06 photons/s

Background after 100 s count time <0.001 photons/s


37IWORID 7 Grenoble

Outline


38IWORID 7 Grenoble

High REsolution Large Area X-ray Detector

RELAXD

Innovation Collaboration EUREKA Project

39IWORID 7 Grenoble

RELAXD Partners

RELAXD Consortium

• CANBERRA Olen, Belgium• IMEC Leuven, Belgium

• NIKHEF Amsterdam, Netherlands• PANalytical as Penholder:

Almelo, Netherlands

40IWORID 7 Grenoble

Consequences of RELAXD for the partners

• Cost & Subsidy (plan! not yet officially approved!)– 2690 kE total project– 1138 kE PAN 60% funding => 455 KE own & 683 kE IS– 922 kE NIKHEF 553 kE IS– 633 kE CANBERRA 331 kE IWT– 0 IMEC funded by CAN mainly and also by PAN

– If you go larger (area) => the s/w r/o and acquisition algorithms have to be done anyway!

41IWORID 7 Grenoble

RELAXD ‘Ingredients’

• 5 elements– Fan-out structure – pitch adaption– Minimized dead spaces– Through Si via technology – 4 side buttability– High-speed Gbit/s read-out– Software for data acquisition,

homogenization of large area pixel responsecalibrations,control software=> X-ray detector (‘low’ energies)

42IWORID 7 Grenoble

Fully tiled X-ray imager

need pitch adapterGbit/s serial readoutInnovation Project Funded

43IWORID 7 Grenoble

The Future: Medipix2 tiling

through-via etchingwafer thinning3D stacking

44IWORID 7 Grenoble

Project Flow

RELAXD

Innovation Collaboration EUREKA Project

non-uniform 2x2-sensor

uniform 2x2-sensor

Uniform, fast6x6 chip detector

Minimized dead spaces

Sensor pitch fanout 1 Gbit/s

transceiver

2x4 carrierboard

current quad system

Uniform, fast 2x2 chip detector

MIBOinterface

4-side tilablesensor

ThroughCMOS via

4-side tilable

Medipix

MedipixCMOS

chip

MIBO-2interface

fast 2x2 carrier

9-channelMIBO-3interface

4-sidetilable

2x2 carrier

laminatedHDI carrier

45IWORID 7 Grenoble

Pictures of the MIBO

46IWORID 7 Grenoble

Role PAN

– Conclusion: RELAXD is really to our benefit!

47IWORID 7 Grenoble

Roadmap Partners & PANalytical

Tech & ApplicationCenter

PANalyticalProduct / Integration /

Software

Core PartnersCERN / NIKHEF / CANBERRA / IMECChip design / Electronics /

Software

SuppliersIBM

MCNC Electronics companies

Outsourcing

Potential Partners

Output => PLATFORMBasic detector modules

Tiling- RELAXDMainstream + spin-offs

48IWORID 7 Grenoble

Relevance: PAN Detector center

Medipix 2

CERN

Detector chip production

CMOS process (0.25 µm)

Medipix + , ++

Plus spin-offs

0.13 mu, 0.09 mu CMOS

….Super-chip, >RELIABLE<

PANalytical

NIKHEF

CANBERRA

IMEC

PANalytical(+CANBERRA)

(MCNC)

Large®

areaMeaning of RELAXD

Pixel intelligence

Various shapes&sizes

49IWORID 7 Grenoble

Product Roadmap Detectors

2005 2006 2007 2008 2009 2010

Medipixbased

PIXEL2D

Medi-pix

3 sidebuttable

chips

Only tiling tosmaller areas

(2 rows of chips

max)

50IWORID 7 Grenoble

Product Roadmap Detectors

RELAXDbased

RELAXDOrder of

magnitude6x6 chips

(9cm x 9 cm)RELAXDOrder o.m.

Quad(3 cm x 3 cm)

Medipixbased

PIXEL2D

Medi-pix

3 sidebuttable

chips

4 sidebuttable

chips

Only tiling tosmaller areas

(2 rows of chips

max)

Tiling tolarge areas

RELAXD = “New

Platform”

Big step

Very largeRELAXD

RELAXD = as large as

possible

2005 2006 2007 2008 2009 2010

51IWORID 7 Grenoble

Detectors

portunityConclusions

• Medipix– Mature, may come soon

• RELAXD– Starts soon

• RELA-XRD– Prepared in time

• Question– Who has fun in a collaboration / (different chips)?– Who has enthusiam for another subsidy project ?

52IWORID 7 Grenoble

Detector

MIC Tutorial Seminar 12 January 2005Erik HEIJNE CERN PH

EXPOSURE at EXPOSURE at PanalyticalPanalytical

Roelof de VriesRoelof de Vries

BACKGROUND in Medipix2 CHIPBACKGROUND in Medipix2 CHIP

TRACK over ~ 140 PIXELS

RADIUS of CURVATUREr = 6.9 mm PROBABLY MUONBENT by EARTH FIELD ?

B = 5 x 10-5 Tp = 0.3 B r --> momentump ~ 100 eV (not possible ??

10 MeV µ has range ~5 mm)(in reality field higher ?)

53IWORID 7 Grenoble

IWORID 7: Industrial Applications · IWORID 7: Industrial Applications ... IEEE/Rome, Salon Paris...

Documents

Transcript of IWORID 7: Industrial Applications · IWORID 7: Industrial Applications ... IEEE/Rome, Salon Paris...