C O N F I D E N T I A L

T h e Y i e l d M a n a g e m e n t C o m p a n y

iPartner™ Support Offerings . . . Partnering for reduced cost and higher uptime

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iPartneriPartner

KLA-Tencor, the premier company in yield

management, introduces a breakthrough in

semiconductor customer support

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iPartneriPartner

iPartner …

. . . A unique relationship between customers and KLA-Tencor onsite and online resources.

. . . A partnership that allows our customers to tailor their support level to match their specific manufacturing requirements.

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iPartneriPartner

iPartnerNew service offerings from KLA-Tencor for

your iSupport-compatible systems

With KLA-Tencor as your support partner, you’ll cut your costs and improve tool uptime.

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iPartner: AdvantagesiPartner: Advantages

What’s in it for you?

Reduced cost, higher uptime A choice of online/onsite support solutions Pick the one that matches your requirements Go online 7x24 for fast response and rapid resolution Get faster onsite resolution for more complex issues Realize immediate savings

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iPartner Support Offerings iPartner Support Offerings

Balances Cost and Performance

Reduces Cost and Increases UptimeiPerformanceiPerformance

Optimizes Tool Performance

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7 x 24 Online Support

i724i724

iValueiValue

iShareiShare

Saves More through Shared Responsibility

Highest Performance Lowest Cost

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iPartner: How it WorksiPartner: How it Works

7x24 round-the-clock online service

iPartner offerings are based on a unique partnership among KLA-Tencor Online Support Center (OSC) engineers, K-T’s customer support engineers and your engineers

Increased coverage, faster response

Common issues are quickly resolved (e.g. lockups, alignment errors, calibrations, etc.), reducing the need for onsite dispatch

Complex issues are assisted via online diagnostics and parts ordering, reducing onsite MTTR

Fast resolution, shared savings

Reduced downtime

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Comparison to Conventional SupportComparison to Conventional Support

Feature Full i724Onsite Support Coverage 5x8 5x8

Off-shift Support Coverage Uplift 7x24 Online

< 2 hrs Online

4 covered hrs Onsite

Online Parts Diagnosis & Ordering No 7x24

Cost Savings No Yes

Remote Operation, Data Transfer,

E-10 ReportingNo Yes

Price StandardStandard Minus Saver

Awards

4 covered hrs OnsiteResponse Time

i724 Reduces Costs, Provides More Coverage, and Resolves Problems Faster

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iPartner: Cost Saving BenefitsiPartner: Cost Saving Benefits

Using 24x7 online support reduces onsite costs

We share the savings with you

Savings depends upon the following

Number of compatible tools

OSC utilization

Whether or not you have an iDM server

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iPartner Saver AwardsiPartner Saver Awards

For example, your fab with $XM service entitlement: KLA-Tencor will pay for installing, licensing and maintaining the iDM We will pay for the license fees of connected tools We will provide 7x24 online support We share savings after paying for the license and maintaining

the server if you meet the online usage target Expected annual saving up to $XXXXX

iPartner OfferingOSC Usage

Targets

Savings Apply Toward iPartner Offerings

85 to 89% Neutral

90 to 94% $YYYYY

95% or More $ZZZZZ

iPerformance

i724

iValue

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iPartner: Longer-term BenefitsiPartner: Longer-term Benefits

iPartner support offerings are extremely flexible

Support is scaled to match your specific requirements How complex are your KLA-Tencor tools? How critical are your applications? Where are you in the production cycle? What is your level of maintenance expertise?

Over time, your requirements may change

Transition to lower-cost iPartner offering

No more “one-cost fits all” support solution

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iPartner: Longer-term BenefitsiPartner: Longer-term Benefits

Tool health monitoring

System optimization service

Intra-fab remote tool operation

Future features will further reduce downtime and improve productivity

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iPartner Support Offerings at a GlanceiPartner Support Offerings at a Glance

Support Element i724 iValue iShare

Online Support CenterOnline Coverage 7x24 7x24 7x24

Online Response 2 hr. 4 hr. 4 hr.

Parts Diagnosis & Ordering 7x24 7x24 7x24

Case Tracking

Onsite SupportCoverage Period 5x8* 5x8* 5x8*

Repair Labor8 visits (includes

1 annual PM visit)

Tool Down Response (avg.after working on-line) 4 covered hr 8 covered hr 8 covered hr

On-site Response -varies by Product 4 or 8 covered hr16 or 24 covered

hr

16 to 24 covered

hr

Preventive Maintenance By Customer

Extended Onsite Coverage Optional Optional Optional

PartsRepair Parts

Consumables

Stocking Locations Local Local Local

* 7x8 at select hubsAll programs and options may not be available for all locations. Please consult your local service manager.

Jul-02

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iPartner - AvailabilityiPartner - Availability

iPartner™ Service Offerings Availability

iDM Compatible tools iPer

form

ance

i724

iVal

ue

iShar

e

2350

AIT2,3

ASET F5X

Archer 10

SP1

5XXX XP

Available Q3’CY02 Available Q4’CY02

213X NT

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iPartner: Current CustomersiPartner: Current Customers

Beta tested at major semiconductor manufacturers in North America

iSupport technology widely accepted …

20+ customer sites with iDM servers in US, Europe, Taiwan, Japan and Korea

More than 200 tools connected to online support

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iPartneriPartner

Make KLA-Tencor your support partner

Cut your costs and improve tool uptime

“It’s simply a better way of doing business”

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Back up

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iPartner: Beta ResultsiPartner: Beta Results

SP1_TBI Systems

Maintainability Metrics

6.0

0

2

4

6

8

10

12

14

Jul-01 Sep-01 Nov-01 Jan-02 Mar-02 May-02

Ho

urs

MTTR

BetaEngagement

97% Availability – Customer data

Demonstrated MTTR Reduction From 10 to 6 hoursIncreased Uptime and Reduced Onsite Repair

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Price Comparison Example (US)Price Comparison Example (US)

Tool Type # of Tools Basic iValue

2139 10 $111 $111

AIT II with ADC 10 $105 $105

SP1-TBI 2 $36 $36

Archer 10 2 $42 $42

iPartner Saver Awards Discount*

NA None -$40

Total Discounted Price 24 $1,985 $1,945

iValue Reduces Costs, Provides More Coverage, and Resolves Problems Faster

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iPartner Comprehensive OfferingsiPartner Comprehensive Offerings

7 x 8 onsite support 4 covered hour onsite response 7 x 24 online support

Remote support Parts diagnosis & ordering 1 hour priority online response

All parts and labor for PM and repair Priority escalation Hardware and software revisions Optional onsite off-shift support

iPerformance (Q4CY02) Optimizes Tool Performance

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iPartner Comprehensive OfferingsiPartner Comprehensive Offerings

5 x 8 onsite support (7 x 8 at select hubs) Onsite response (after working online)

4 covered hours on average for tool-down cases 4 or 8 covered hours for non-tool down cases

7 x 24 online support Remote support Parts diagnosis & ordering 2 hour online response

All parts and labor for PM and repair Hardware and software revisions Optional onsite off-shift support available

i724 Reduces Cost and Increases Uptime

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iPartner Value OfferingsiPartner Value Offerings

5 x 8 onsite coverage (7 x 8 at select hubs)

Onsite response (after working online) 4 covered hours on average for tool-down cases 4 or 8 covered hours for non-tool down cases

7 x 24 online support Remote support Parts diagnosis & ordering 4 hour online response

All parts and labor for PM and repair

Hardware and software revisions Optional onsite off-shift support available

iValue Balances Cost and Performance

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iPartner Value OfferingsiPartner Value Offerings

Your engineers perform PMs, calibrations and first level diagnostics 8 K-T onsite visits annually (including one PM visit) 5 x 8 onsite coverage (7 x 8 at select hubs) Onsite response (after working online)

4 or 4 covered hours on average for tool downcases8 covered hours for non-tool down cases

7 x 24 online support Remote support Parts diagnosis & ordering 4 hour online response

All parts for PM and repair; you order authorized parts through OSC On-going skill and PM verification Service bulletins & special purchasable tooling Hardware and software revisions

iShare Saves More Through Shared Responsibility

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iPartner Saver Awards Example iPartner Saver Awards Example

For example, a fab with $2M service entitlement: KLA-Tencor will pay for installing, licensing and maintaining the iDM We will pay for the license fees of connected tools We will provide 7x24 online support We share savings after paying for the license and maintaining the server Expected annual saving up to $40,000

iPartner OfferingOSC Utilization

TargetsSavings Apply Toward

iPartner Offerings

85 to 89% Neutral

90 to 94% $15,000

95% or More $40,000

iPerformance

i724

iValue

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Utilization Metric - iPartnerUtilization Metric - iPartner

Clarify Data Case History Summary Report Onsite CSE Date / Time minus

Case Open Date / Time Percentage Cases Opened prior

to CSE onsite plus remote resolution, over all cases

Chart Product Family Performance.

Chart Overall Performance Chart 3 month rolling average

Targets 3 month rolling average over

either: 85%, 90% or 95%

3 Mnth Rolling OSC Perf.

82.3%

0%

10%

20%

30%

40%

50%

60%

70%

80%

90%

100%

Oct Nov Dec Jan Feb Mar Apr May Jun

Utiliz Target

Product Family OSC Perf.

0%

10%

20%

30%

40%

50%

60%

70%

80%

90%

100%

Oct Nov Dec Jan Feb Mar Apr May Jun

2XXX 8XXX AIT

Optical SP1 UV

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Price Comparison Example (US)Price Comparison Example (US)

2139 10 $121 $121

AIT II with ADC 10 $116 $116

SP1-TBI 2 $39 $39

Archer 10 2 $47 $47

iPartner Saver Awards Discount*

NA None -$40

Total Discounted Price 24 $2,177 $2,137

i724 Reduces Costs, Provides More Coverage, and Resolves Problems Faster

Tool Type # of Tools Full i724

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Price Comparison Example (US)Price Comparison Example (US)

Tool Type # of Tools Basic iValue

2139 10 $111 $111

AIT II with ADC 10 $105 $105

SP1-TBI 2 $36 $36

Archer 10 2 $42 $42

iPartner Saver Awards Discount*

NA None -$40

Total Discounted Price 24 $1,985 $1,945

iValue Reduces Costs, Provides More Coverage, and Resolves Problems Faster

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iPartner RoadmapiPartner Roadmap

V 2.0 (July ’02) V 2.7 (2H’02) V 3.0 (Q2CY03)

Supported Tools

iPartnerOfferings andFeatures

iDM Features

2350 (V8.0.66) AIT III(V5.0.15SP4) SP1-TBI (V3.5.2304) ADC (2.0.17NT)** 8X00 (4.0P2 NT) F5x (V2.6) Archer 10 (V1.1*4) 5xxxXP (V14.6)

i724, iValue and iShare 7x24 Online Support 7x24 Parts Diagnosis

& Ordering

Worldwide VPN Service Request

from iDM Browser Remote Operation,

data transfer E-10 Reporting

Previous Tools Plus Next Generation: 2370 SP1-DLS & Next Generation AIT XPRemote Support Only 2401/Viper eS20XP TeraStar ADC Manager

iPerformance Tool Health Monitoring

and Reporting System Optimization Service Multi-Language Translation

Support

Unix OS Support Intra-fab Remote Operation

(on selected products) Data Table Viewer and export

** = Remote

Support Only

Previous Tools Plus: CRS 3000 Quantox Others TBD

Expanded architecture to connect 75 tools

Configurable reporting engine Simplified User Administration Improved Metric reporting

with SPC VoIP