Ion Fluxes Impacting Surfaces Exposed to EUV-Induced Plasma · 2018-07-15 · Hollow cathode Xe...

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Ion Fluxes Impacting Surfaces Exposed to EUV-Induced Plasma Tijn van de Ven Ruud van der Horst Kees de Meijere Maarten van Kampen Vadim Banine Job Beckers

Transcript of Ion Fluxes Impacting Surfaces Exposed to EUV-Induced Plasma · 2018-07-15 · Hollow cathode Xe...

Page 1: Ion Fluxes Impacting Surfaces Exposed to EUV-Induced Plasma · 2018-07-15 · Hollow cathode Xe pinch discharge 500 Hz 150 μJ/pulse Characterize the ion fluxes towards surfaces exposed

Ion Fluxes Impacting Surfaces Exposed to EUV-Induced Plasma

Tijn van de Ven

Ruud van der Horst

Kees de Meijere

Maarten van Kampen

Vadim Banine

Job Beckers

Page 2: Ion Fluxes Impacting Surfaces Exposed to EUV-Induced Plasma · 2018-07-15 · Hollow cathode Xe pinch discharge 500 Hz 150 μJ/pulse Characterize the ion fluxes towards surfaces exposed

Tijn van de Ven | EUVL workshop 20182

Page 3: Ion Fluxes Impacting Surfaces Exposed to EUV-Induced Plasma · 2018-07-15 · Hollow cathode Xe pinch discharge 500 Hz 150 μJ/pulse Characterize the ion fluxes towards surfaces exposed

photon + H2 → H2+ + e-

Page 4: Ion Fluxes Impacting Surfaces Exposed to EUV-Induced Plasma · 2018-07-15 · Hollow cathode Xe pinch discharge 500 Hz 150 μJ/pulse Characterize the ion fluxes towards surfaces exposed

A S Kuznetsov, M A Gleeson and F Bijkerk, J PHYS-CONDENS MAT (24) 5, 2011

Tijn van de Ven | EUVL workshop 20184 NASA, ESA, and the Hubble Heritage Team (STScI/AURA)

Page 5: Ion Fluxes Impacting Surfaces Exposed to EUV-Induced Plasma · 2018-07-15 · Hollow cathode Xe pinch discharge 500 Hz 150 μJ/pulse Characterize the ion fluxes towards surfaces exposed

Hollow cathode Xe pinch discharge

500 Hz 150 μJ/pulse

Characterize the ion fluxes towards surfaces exposed to EUV-induced plasma

Tijn van de Ven | EUVL workshop 2018

Ion massspectrometer

or

RFEA

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Page 6: Ion Fluxes Impacting Surfaces Exposed to EUV-Induced Plasma · 2018-07-15 · Hollow cathode Xe pinch discharge 500 Hz 150 μJ/pulse Characterize the ion fluxes towards surfaces exposed

Evolution of the ion-flux density

Tijn van de Ven | EUVL workshop 20186

The temporal evolution of the ion-flux density can be described using

classic plasma physical concepts

Simulations Experiments

Page 7: Ion Fluxes Impacting Surfaces Exposed to EUV-Induced Plasma · 2018-07-15 · Hollow cathode Xe pinch discharge 500 Hz 150 μJ/pulse Characterize the ion fluxes towards surfaces exposed

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Ion-flux composition and energy distribution

H3+ is most abundant

Ion energies are low (<10 eV)

Energy distribution of H+ has a high-energy tail

H+

H3+

H2+

T.H.M. van de Ven, P. Reefman, C.A. de Meijere, R.M. van der Horst, M. van Kampen, V.Y. Banine and J. Beckers, Ion energy distributions in highly transientEUV induced plasma in hydrogen, Journal of Applied Physics, 123(7), 2018

Page 8: Ion Fluxes Impacting Surfaces Exposed to EUV-Induced Plasma · 2018-07-15 · Hollow cathode Xe pinch discharge 500 Hz 150 μJ/pulse Characterize the ion fluxes towards surfaces exposed

Plasma remains ‘hot’ for longerthan expected

Possible explanation:

Superelastic collisions electrons and vibrationally excited H2

Tijn van de Ven | EUVL workshop 20188

Evolution of the ion energy distribution

Page 9: Ion Fluxes Impacting Surfaces Exposed to EUV-Induced Plasma · 2018-07-15 · Hollow cathode Xe pinch discharge 500 Hz 150 μJ/pulse Characterize the ion fluxes towards surfaces exposed

Ion fluence can be modeled

Ion Fluxes Impacting Surfaces Exposed to EUV-Induced Plasma

H+ energetic tail

Plasma remains ‘hot’

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Page 10: Ion Fluxes Impacting Surfaces Exposed to EUV-Induced Plasma · 2018-07-15 · Hollow cathode Xe pinch discharge 500 Hz 150 μJ/pulse Characterize the ion fluxes towards surfaces exposed

Wim van der Zande

Maarten van Kampen

Kees de Meijere

Ruud van der Horst

Vadim Banine

Job Beckers

Elementary

Processes in

Gas discharges

[email protected] van de Ven | EUVL workshop 201810

Thesis online:https://pure.tue.nl/ws/files/98728540/20180704_van_de_Ven.pdf

Or via Linkedin:https://www.linkedin.com/in/tijnvandeven/

Page 11: Ion Fluxes Impacting Surfaces Exposed to EUV-Induced Plasma · 2018-07-15 · Hollow cathode Xe pinch discharge 500 Hz 150 μJ/pulse Characterize the ion fluxes towards surfaces exposed

Tijn van de Ven | EUVL workshop 2018

Page 12: Ion Fluxes Impacting Surfaces Exposed to EUV-Induced Plasma · 2018-07-15 · Hollow cathode Xe pinch discharge 500 Hz 150 μJ/pulse Characterize the ion fluxes towards surfaces exposed

Ion fluence can be modeled

Ion Fluxes Impacting Surfaces Exposed to EUV-Induced Plasma

H+ energetic tail

Plasma remains ‘hot’

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