INDUSTRIAL INSPECTION MICROSCOPE

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UNIVERSAL INFINITYSYSTEM

Introducing a microscope optimized for inspecting many different varieties of electronics components.

In our continuing quest for the ideal inspection microscope, Olympus creates a continuing line of innovative designs. The entire MX-series offers an outstanding degree of operational versatility for superb inspection efficiency. Now, Olympus introduces the new MX40, a reflected-light inspection microscope optimized for the inspection requirements of a variety of electronics components including magnetic heads and semiconductors. Compact, simple to operate, and cost- effective, the MX40 model retains the proprietary Frontal Control operational system of the MX-series, as well as world-renowned UIS optics. Its flexible design can accommodate various modifications depending on user needs. ., _....~... -

For operational efficiency, important controls and switches are located up front, near the optical axis.

i -

I MX40 SYSTEM DIAGRAM

U-KMAlOO Vertical illuminator unit for brightfield Especially designed to facilitate InspectIon of magnettc heads, electronics components, and metallurgical structures, this unit provides a built+- lamp housing to eliminate the need for centering and adjustment of the field trls diaphragm with the light source. In addltlon to brightfield and Nomarskl DIC observations, slm- ple polarized light observation IS accommodated, and changeover to Nomarskl DIC observation IS

quick and easy using a single DIC prism.

U-RLA Vertical illuminator unit for brightfield/darkfield (with U-LHlOOL) Thrs versatile illuminator can be used for brightfield and darkfield as well as Nomarskl DIC and simple polarrzed light obsetvatlons. A pinhole IS Incorporated to further assure the production of images with Increased focal depth and razor-sharp contrast, an especially convenient feature in observation at extra-high magniflcatlon

U-URA Universal vertical illuminator unit (with U-LHlOO) Designed for Improved ultraviolet transmission, this illuminator ensures outstanding brrghtness and contrast for fluorescent images. In addltlon to fluorescence microscopy, the unit can be easily used for all other observation methods. It accommodates up to four different cube units In the rotattng turret.

*’ When using U-DICRH, combine with U-POTP for optimum results. LUMPLFL, UMPLFL-BD, UMPLFL- BDP series of obiectives are suaaested for combination.

*2 Polarizers and analyzers are noinecessary in DIC microscopy using U-MDIC.

*3 Various cubes are also available.

,h,c system 1 WI ~Cmountvideocamera~

U-CMAD C mount adapter

U-PMNC C mount video port

U-VPT Video camera- Integrated photo tube

U-OSM Filar micrometer eyepiece

U-DICR DIC slider for reflected light (high contrast type)

U-DICRH*’ 423

DIC sltder for reflected light (high resolution type)

.;.. “‘- i----. . i i ,. . . ., I. U-DBBDREM

I” ,., ii I, . . ,;

Motorized quintuple

w + y&J ;...+ i..w m

revolving nosepiece for BF/DF/DIC

U-5RE Quintuple revolving “CSC3pEC~ for BF

U-6RE Sextuple

j U-BBDRE : U-DGRE : U-DSBDRE ‘sy.

U-DGREM : Quintuple

! revolving 1 Motorized sextu-

[ revolving

i Sextuple revolving

: Quintuple revolving

nosepiece j nosepiece i nosepiece ple revolving

: nosepiece for ; for BF : for BF/DF : for BFIDIC BF/DF/DIC

: nosepiece for BF,DlC

WH

BH-SICHG BH-SICHB BH-SICHI

.:

A BD-M-AD BD revolver changing adapter

U-REMPS POW% supply unlt

Q UIS oblectws for bnghtfleld UIS objectwes for

brlghtfleldldarkfleld

P

Q

BHZ-WHR65 BH2-WHR54 BH2-WHR43 0 6”.5” rotatable 0 5”.4” rotatable 4”-3” rotatable la

wafer holder Q wafer holder wafer holder U-HS Hand switch

. _

BH-SICH3 Wafer holders

s Q

MX-SICGA 6” right handle stage

Q 0 U-SIC4UR 4’# stage MX-STAD

/ S mount v,deo camera 1

U-FMT F/Tmount t] adapter

U-TMAD a T mount

adapter

U-SMAD

a SONY mount adapter

Q U-PMTV \/iAnn .A+tachme”t

3

u-TVo.5x U-NZ

CJ kkz-%llage Video port with 0.5x lens

Zoom video port

video port : with lx lens

U-PMNlx Video attachment with 1 x lens

B PE Photo eyeplea?

U-SPT Single port tube

U-DPT Double port tube

B u-TLU Single port ~. tube

SWH super wIdefield C?!+XXX?

U-ETR WIdefIeld erect Image trlnocular tube (under development)

Qps--l U-PO Polarizer for reflected light U-POTP” Polarizer for use with U-DICRH U-DND-2 ND filter slider for BF/DF swltchover

’ U-AN ’ Analyzer for ’ reflected light

Qn / U-LBD-2 Light balancing filter I U-IF550-2 I Interference I contrast filter U-ND&2

I

ND filter I I

U-ND25-2 ND filter U-FR-2 Frost ftlter

,

I olo , U-AN360 / Analyzer for , reflected Ilght, / 360” rot&on

U-MBF BF cube U-MDF BF/DF cube

e

al ‘.:

U-ULH Uwersal lamp houslng

U-UCLHG/XEA Collector lens for Hg/% type A U-ULSIOOHG

Lamp socket for 1 OOW Hg

0

U-MDIC? DICcube m

0 U-MU*3 Fluorescence cube U-URA

Universal reflected light lllumlnator

BH2-RFL-T3 Power unit

U-UCLHG/XEB Collector lens for HglXe type B

I..

U-UCLH Collector lens for 1OOW halogen

AHP-RX-T Power unit U-KMAlOO

Reflected light lllumlnator for BF/DIC

MX40-F MX40 ma,” body for reflected light

1 oow ,,, d I IU-LHIOOL

.‘ 1 halogen lamp 1 housing

U-ULSlOOH Lamp socket for 1oow halogen

--

Controls are positioned up front, close to the optical axis for convenient stage manipulation. The MX40 uses the original Frontal Control design concept of the MX-series, with focusing knobs, illumination intensity controls, and a stage control panel all arranged in front for easy access. Operator fatigue is significantly reduced by positioning the most frequently used knobs and switches in this manner. Since electronics components inspection generally involves frequent stage manipulation, controls are located near the optical axis for maximum operator convenience.

Space-saving compact design allows plenty of room to work. The new MX40 requires the smallest installation space of any microscope in its class. Thanks to its compact design, the MX40 allows a wider workspace area.

The MX40 can be modlfled by detaching the arm from the frame.

An integral clutch lever on the stage handle allows smooth, fatigue-free stage control. The MX40 provides an ultra-compact B-inch stage with a smaller travel range than any previous model. In addition to these convenient features, the MX40 stage handle incorporates a clutch lever. This allows easy manipulation of the clutch without releasing the stage handle, for rapid changeover between coarse and fine adjustments, The operator does not need to look away from the eyepieces during operation, expediting inspection tasks.

Compact dimensions are combined with a high-rigidity, vibration-resistant design. In addition to a compact, space-saving design, an industrial inspection microscope should provide clear, consistent image quality and superior durability. To achieve all

The flexible MX40 design simplifies inspection of thick, heavy samples.

these objectives, Olympus used a varjety of computer simulation techniques, such as the infinite-element meth- od. We also conducted vibration analysis to deter- mine the optimal absorption of external vibration and damping of internal vibra- tion. As a result, the MX40 frame is rigid and stable enough to prevent optical axis deviation, while the instrument supplies ctystal- clear, blur-free images. The focusing unit features signifi- cantly enhanced rigidity, and its perfectly balanced design offers an ultra-precise fine focus adjustment of less than 1~.

The frame and arm can be separated for easy inspection of mounted samples. In order to accommodate bulky samples and provide adequate working distance, the MX40 allows detachment of the arm and Insertron of a spacer unit between the arm and the frame.

Three illumination options accommodate virtually any reflected-light observation application. The MX40’s brightfield-dedicated illumination pillar incorporates a simple, easy-to-handle lamp housing wrth an extra-bright IOOW halogen bulb light source. This boosts operational efficiency and cost-effective performance in routine inspection of electronrcs components. Brightfield/darkfield and universal illuminators can also be used for many other industrial inspectron applica- tions ranging from magnetic heads and electronics components to semrconductors.

World-famous UIS optics offer outstand- ing image clarity and sharpness. The Olympus UIS optrcal system enables the MX40 to deliver superb image resolution and contrast. As light passes through the objec- tive, It travels through the body tube as paral- lel rays. The telan lens focuses these rays to form an aberration-free intermediate image. Attachments can be added between the objective and telan lens without compromis- ing exceptionally clear, ghost-free Images.

Ultra-long working distance objectives are convenient for many kind of electronics components. A full line of cost-efficient objectives can be selected, depending on the application. The SLMPL50x ultra-long W.D. objectrve extends the working drstance to 15mm, preventing the objective from touching the sample.

Surface of hard disk Magneto-optIcal card pit

MX40 Specifications Item Description

Microscope stand Frame 6’ arm-integrated frame dedtcate for reflected lrght Built-In transformer for reflected Irght.

Focus Coaxral coarse and fine focus controls, stage travel range 32mm (2mm up and 30mm down from the focal plane) Fine focus stroke par rotation 0 1 mm, mrnimum focus adjustment graduation lFm, sensitivrty lprn or less

Revolving nosepiece Brightfield Qutntuple/sextuple/DIC sextuple/motorrzed DIC sextuple

Brightfield/darkfield Quintuple/DIG qurntuple/motorrzed DIC qurntuple

Incident illumination Brightfield/DIC I&‘, 1 OOW halogen bulb light source Integrated lamp housrng Burlt-In aperture draphragm (with centerrng mechanrsm)

Brightfield/darkfield/DIC 1 ZV, 1 OOW halogen bulb light source (xenon and mercury lamp housrng mountable). Brightfield/darMreld swrtchable vra slrder Field diaphragm, aperture draphragm (wrth centerrng mechanrsm), and burlt-In prnhole slider

Fluorescence IOOW mercury and 75 xenon lrght source (halogen lamp housing mountable) Obsetvatron method changeover vra a turret holdrng four filter cubes. Freld draphragm, aperture draphragm (wcth centering mechanism) and built+- shutter mechanrsm

/ 6”x6” Stroke. 158xi58mm Reflected light roller gurde slide mechanism, belt drive system (no racks), stage handle with a built-It- clutch

4”x 4” Stroke 1OOxl05mm Reflected Irght: roller gurde slide mechanrsm, rack & prnron dnve system, burlt-In Y-drrectron lock mechanrsm

CbSeNatiOn tube Invert

Erect

1 WIdefield brnocular tube, wrdefreld tnnocular tube (F N 22) super widefield tnnocular tube (F.N 26.5)

) Widefield trinocular tube (F N 22), super widefield trrnocular tube, super wrdefield trltfng trinocular tube (F N 26.5)

Objectives 1 UIS obiectives

Eyepieces

Photo eyepieces

Power consumotion

UIS ayepreces (1 Ox, 12.5x,

UIS photo eyepieces (2x, 2.5

15OVA

Weight Approx. 25ka. (standard set)

Dimensions IMX40F + U-KMAl 00 + MX-SICGAI

Semiconductor Inspection Microscope

One of the Olympus MX-series, the MX50 Semiconductor Inspection Microscope can accommodate 8” wafers. Combined with the easy-to-use, high-performance AL1 00 wafer loader series, the MX.50 improves inspection efficiency and helps conserve cleanroom space.

Specrfrcatrons are subject to change wrthout any oblrgatron on the part of the manufacturer.

Olympus business areas

OLYMPUS OPTICALCQLTD. 2-43-Z.Hatagaya. Shlbuya-k”, Tokyo. Japan OLYMPUS OPTI~LCO. (EURORA) GMBH. Postfach 10 49 08, 20034. Hamburg. Germany OLYMPUS AMERICA INC. 2 corporate center Drive. MeMIle, NY 11747-3157. us A. OLYMPUS OPTICALCO.(U.Io LTD. 2-8 Hond”ras street. London EClY OTX, ““lW Kingdom.

Prrnted in Japan M490E-0996B