IEEE-NEMS 2021

IEEE-NEMS 2021The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems

The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems

IEEE-NEMS.org/2021April 25-29 , 2021, Xiamen, China

PROGRAM

April 25-29 , 2021 Xiamen, China

WELCOME

Welcome to the 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems (IEEE-NEMS 2021)! The IEEE NEMS Conference series originated in 2005, is a premier conference series sponsored by the IEEE Nanotechnology Council. This Conference brings together annually the international MEMS community consisting of top players in academia and industry by providing them with the latest results on every aspect of M/NEMS, nanotechnology, and molecular technology. Previous 15 conferences were held in Zhuhai (2006), Bangkok (2007), Hainan Island (2008), Shenzhen (2009), Xiamen (2010), Kaohsiung (2011), Kyoto (2012), Suzhou (2013) , Hawaii (2014), Xi’an (2015), Matsushima Bay and Sendai (2016), Los Angeles (2017), Singapore (2018), Bangkok(2019). Despite the unprecedented challenges due to the COVID-19 pandemic, NEMS2020 was held online virtually.At 2021, based on the improving situation of COVID19 at mainland China and fully support of Xiamen University, the committee decided to have NEMS2021 at Xiamen for attendees in mainland China, meanwhile provide the online broadcast to participants who NOT in mainland China. The conference has also enabled us to feature more attendees than other years. We hope that you will enjoy the presentations by our accomplished both on onsite and online. We would like to express our sincerest gratitude to all the authors who submitted papers. Their high quality work serves as the foundation for the success of this conference. A total of 515 accepted paper out of 730 submissions were carefully selected by 90 experts comprising the Technical Program Committee (TPC). The conference arranges presentation of accepted papers in parallel sessions with 10 plenary and 30 keynote and 128 invited talks 180 oral presentations, and 350 posters including late news. In addition, the TPC collectively nominated, based on quality, paper submissions as finalists for the Best Conference Paper Award, the Best Student Paper Award, the Best Conference Poster Award, and CM HO Best Paper Award in Micro/Nano Fluidics. These awards aim to recognize excellence amongst work and will be announced in a special ceremony at conference banquet.More important, this year is the 100 anniversary of Xiamen University, we will celebrate it with a special memorial session of Prof. Wen H Ko, the pioneer and founder of Micro-Nano transducers field, the excellent alumni of Xiamen University, the first WHK Scholarship will be awarded too.We gratefully acknowledge the all sponsors and benefactors for their contributions to this conference. The strong support from Xiamen University is highly appreciated. In closing, we hope you enjoy the technical presentations, online networking, exhibition, and all the interactive features of the onsite/online platforms of the IEEE NEMS 2021 Conference!

General Chair General Co-Chair TPC ChairHaixia(Alice) ZHANG Daoheng SUN Xu HOUPeking University Xiamen University Xiamen University


Organizing Committee 8Contests Information 11Benefactors 12General Information 13General Map 14Floor Map 15Program Schedule 21

Day 1 - Monday, 26 April 21Opening Ceremony 21Plenary Speaker Ia 21Plenary Speaker Ib 21Session Ia: Micro/Nano/Molecular Fabrication-I 21Chihming Ho Award 22Invited Session Ia: Advanced Micro/nano Fabrication, Materials and Applications 23Invited Session Ib: Thermal management in MicroNano Systems 24Invited Session Ic: Resonant Micro/Nanoelectromechanical Systems 24Session Ib: Energy Conversion and Storage-I 25Session Ic: Micro/Nano Pores and Channels 26Lunch Break 27Best Conference Paper 27Wen H Ko Memorial Session 28Plenary Speaker Ic: 28Invited Session Id: Self-powered Micro/Nano Systems 28Invited Session Ie: Bioelectronic Devices and Systems 29Invited Session If: Non-linear Micro/Nanoelectromechanical Systems 30Session Id: MEMS/NEMS-I 30Session Ie: Micro/Nano Fluidic-I 31Plenary Speaker Id (Nobel Laureate) 32Coffee Break & Poster Session I 32学术好莱坞讲座 -- 现代科研论文的构思与写作� 33

Adjourn for the Day 33VIP Dinner (By Invited) 33

CONTENTS


Day 2 - Tuesday, 27 April 43Plenary Speaker IIa 43Plenary Speaker IIb 43Coffee Break 43Session IIa: MEMS/NEMS-II 43Best Student Paper 44Invited Session IIa: Micro Nano and Molecular Systems for Diagnostics and Therapeutics 45Invited Session IIb: Micro-/Nanofluidic Devices and Systems 46Invited Session IIc: Multidisciplinary Frontier: Advanced Chemistry Materials for MEMS/NEMS 47Session IIb: Nanophotonics and Nanoscale Imaging 47Session IIc: Energy Conversion and Storage-II 48Lunch Break 49Session IId: Soft&Flexibe Devices and Applications-I 50Session IIe: Micro/Nano Fluidic-II 51Invited Session IId: Multidisciplinary Frontier: Micro/Nano Energy and Smart Electronics 52Invited Session IIe: Electronic and Optoelectronic Fibers and Textiles 52Invited Session IIf: RF Micro/Nano Components and Systems 53Session IIf: Nanoscale Robotics, Assembly, and Automation 54Session IIg: Micro/Nano Sensors and Actuators-I 55Plenary Speaker IIc (Nobel Laureate) 56Coffee Break & Poster Session I 56学术格莱美讲座 -- 如何与编辑沟通？� 56

Top Journal Session 56Adjourn for the Day 56

Day 3 - Wednesday, 28 April 68Plenary Speaker IIIa 68Plenary Speaker IIIb 68Coffee Break 68Session IIIa: MEMS/NEMS-III 68Session IIIb: Soft&Flexibe Devices and Applications-II 69Invited Session IIIa: Multidisciplinary Frontier: Soft Rubbery Electronics and Stretchable Integrated Systems 70Invited Session IIIb: Multidisciplinary Frontier: Nanoplasmonics and Biosensors 71Invited Session IIIc: Flexible and Wearable Microsystems for Sensing and Actuation 71Session IIIc: Micro/Nano Sensors and Actuators-II 72Session IIId: Micro/Nano/Molecular Fabrication-II 73Lunch Break 74Session IIIe: M/NEMS-IV 74Session IIIf: Soft&Flexibe Devices and Applications-III 75Invited Session IIId: Advanced Scanning Probe Technology and Applications 76


Invited Session IIIe: Advanced Microsystems for Biomedical Applications 77Invited Session IIIf: Multidisciplinary Frontier: Advanced Micro/Nano Electronics Plus (Bio-, Photo-, Energy-) 78Session IIIg: MEMS/NEMS-V 78Session IIIh: Nanomaterials-I 79Plenary Speaker IIIc (Nobel Laureate) 80Coffee Break & Poster Session I 81Industrial Panel 81学术奥斯卡讲座 -- 如何做好学术报告？� 81

Adjourn for the Day 81Banquet & Award Ceremony 81

Day 4 - Thursday, 29 April 94Session IVa: MEMS/NEMS-VI 94Session IVb: Bio-inspired multiscale Interfaces 95Invited Session IVa: Multidisciplinary Frontier: Micro/Nano-Engineered Materials for Sensing and Applications 96Session IVc: Nanomaterials-II 97Session IVd: Nature-inspired energy conversion and harvesting: from fundamentals to applicaitons 98Coffee Break 98Session IVe: MEMS/NEMS-VI 99Session IVf: Soft&Flexibe Devices and Applications-IV 99Invited Session IVb: Multidisciplinary Frontier: Functional Micro-nano Structures, Techniques and Applications 100Session IVg: Soft&Flexibe Devices and Applications-V 101Session IVh: Micro&Nanotechnologies for biomedicine 101Fairwell Lunch & Adjourn of Conference 102Lab Tour (Optional) 102

POSTER SESSION 112Day 1 - Monday, 26 April 112

Poster Session I 112

Day2 - Tuesday, 27 April 124Poster Session II 124

Day3 - Wednesday, 28 April 136Poster Session III 136


8

ORGANIZING COMMITTEE

International Advisory Committee Chih-Ming HO Univ. of CaliforniaMasayoshi ESASHI Tohoku Univ.Meyya MEYYAPPAN NASA AMESNicolas F. de ROOIJ Univ. of NeuchatelToshio FUKUDA Beijing Institute of Technology/Meijo Univ.

Steering Committee Ning XI Univ. of Hong KongHaixia (Alice) ZHANG Peking Univ.Daoheng SUN Xiamen Univ.Gwo-Bin LEE National Tsing Hua Univ.Osamu TABATA Kyoto Univ.Wen J. LI City Univ. of Hong KongWilliam C. TANG Univ. of California at Irvine Shuji TANAKA Tohoku Univ.Yu-Chong TAI California Institute of Technology

IEEE-NEMS 2021 CommitteeHonorary Chair: Zhongqun TIAN Xiamen University

General Chair: Haixia (Alice) ZHANG Peking University

General co-Chair: Daoheng SUN Xiamen University

Program Chair: Xu HOU Xiamen University

Program co-Chairs:Jungmok SEO Yonsei UniversityJianyu LI McGill UniversityPaolo MALGARETTI Helmholtz Institute Erlangen-Nürnberg for Renewable EnergyXian ZHANG Stevens Institute of Technology


9

Zhigang CHEN University of Southern Queensland

Invited Session Chair: Xiaosheng ZHANG Univ. of Electronic Science & Technology of China

Organizing Chair: Wei ZHOU Xiamen University

Award Committee Chair: Wenjung LI City University of HongKong

Sponsor Chair: Liang HOU Xiamen University

Industrial Chair: Shenglin MA Xiamen University

Promotion Chair: Lingyun WANG Xiamen University

Publication Chair: Zhidong WANG Chiba Institute of TechnologyXu HOU Xiamen University

Technical Program Committee

Alberto GIACOMELLO Sapienza Università di RomaArend van der ZANDE UIUCAzeemuddin SYED International Institute of Information Technology HyderabadBaiyi CHEN Xiamen UniversityBeomjoon KIM The University of TokyoBinghao WANG The University of TokyoBo MENG Shenzhen UniversityBoyang ZHANG McMaster UniversityCheng TU University of Electronic Science and Technology of ChinaDaewoo KIM Yonsei UniversityDingbang XIAO National University of Defense TechnologyFrank NIKLAUS KTH Royal Institure of TechnologyHo Cheung SHUM University of Hong KongHojeong JEON Korea Institute of Science and TechnologyHong Nam KIM Korea Institute of Science and TechnologyHuacheng ZHANG RMITHuicong LIU Soochow UniversityHyojin LEE Korea Institute of Science and TechnologyJaehong LEE DGISTJiajia CHEN Xiamen UniversityJianjun WANG Institute of Chemistry Chinese Academy of SciencesJie JU Henan UniversityJinhye BAE University of California San DiegoKaichen XU Zhejiang University


10

Mahmoud ALMASRI University of MissouriMassimo MASTRANGELI Delft University of TechnologyMatteo FASANO Politecnico di TorinoMauro CHINAPPI Università di Roma Tor VergataMengchuang ZHANG Northwestern Polytechnical UniversityMengdi HAN Peking UniversityMiao WANG Xiamen UniversityMin ZHANG Peking UniversityPhilippe BASSET Univ Gustave EiffelQihan LIU University of PittsburghQijun SUN Beijing Institute of Nanoenergy and Nanosystems, CASQing YANG Zhejiang University, ChinaQuan YUAN Institute of Semiconductors, CASRusen YANG Xidian UniversitySeongjun PARK KAISTShuai WANG Xiamen UniversityShuli WANG Xiamen UniversityShuo GAO Beihang UniversityStefano PALAGI Scuola Superiore Sant’AnnaTae-Eun PARK Ulsan National Institute of Science and TechnologyTianxun GONG University of Electronic Science and Technology of ChinaTuhin SANTRA Indian Institute of Technology MadrasWei ZHOU Xiamen UniversityWendong WANG Shanghai Jiao Tong UniversityWenhui WANG Tsinghua UniversityWibool PIYAWATTANAMETHA KMTILXinge YU City University of Hong KongXipeng LI Xiamen universityXu XIAO University of Electronic Science and Technology of ChinaYaqi HOU Xiamen UniversityYi LI SUSTechYinghui WANG Institute of Microelectronics of Chinese Academy of SciencesYoshikazu HIRAI Kyoto UniversityYu ZHOU Central South UniversityYuan GAO University of IllinoisYuanjing LIN Southern University of Science and TechnologyYuanzhi TAN Xiamen UniversityYuerui LU Australian National UniversityYunlong ZI The Chinese University of Hong KongZhizhi SHENG Suzhou Institute of Nano-Tech and Nano-Bionics, CASZhuoqing YANG Shanghai Jiao Tong UniversityZhuqing WANG Sichuan UniversityZongyou YIN The Australian National University


11

CONTESTS INFORMATIONThe IEEE-NEMS Conference Series annually selects winners to receive the Best Conference Paper Award and the Best Student Paper Award. Starting from NEMS 2011, the Steering Committee has decided to also grant a Best Conference Poster Award annually at the conference. In addition, we are very grateful to a group of private donors in contributing financially to the conference to set up a CM HO Best Paper Award in Micro/Nano Fluidics, in honor of Prof. C.-M. Ho, of the University of California, Los Angeles. For any of these awards, factors to be considered in determining the winners are the significance of the new findings/applications, technical merits, originality, potential impact on the field, and clarity of presentation.

Best Conference Award Committee

Co-Chairs: Yong QIN(onsite), Wen Jung LI(online)

Best Conference Paper Award Committee

Zheng CUI, Weizheng YUAN, Yuan LIN, Chaoyong YANG

CM HO Best Paper Award in Micro/Nano Fluidics Committee

Zheng CUI, Weizheng YUAN, Yuan LIN, Chaoyong YANG

Best Student Paper Award Committee

Zheng CUI, Weizheng YUAN, Yuan LIN, Jian CHEN

Best Conference Poster Award Committee

Zhengchun PENG, Xiongying YE, Wenbo DING, Mengdi HAN, Xueyong WEI, Tao WU, Zenghui WANG, Jian CHEN


12

BENEFACTORSWe gratefully acknowledge, at the time of printing, the financial contributions from the following:

CONFERENCE SPONSORS

BENEFACTORS

Microsystems & Nanoengineering Evatec China Ltd.

Guangdong Sygole Intelligent Technology Co.,Ltd BMF Precision Tech Inc.

TAN KAN KEE INNOVATION LABORATORY Nanomaterials (MDPI)

Ningbo ABAX Sensing Electronic Technology Co. Ltd. Xiamen High-End MEMS Technology Co., Ltd.

Suzhou Research Materials Microtech Co.,Ltd XI’AN LEADMEMS SCI&TECH CO.,LTD.

Jiangsu Hinovaic Technology Co. Ltd. ICEASY TECHNOLOGY CO.,LTD.

BEST PAPER AWARD BENEFACTOR

Microsystems & Nanoengineering/Springer Nature

嘉庚创新实验室TAN KAH KEE INNOVATION LABORATORY


13

GENERAL INFORMATIONLOCATION: Science & Art Center, Xiamen University ADDRESS: 422 Siming South Road,Siming District,Xiamen City,Fujian Province,China

Registration Desk:

Date Time VenueApril 25, Sun. 13:00-21:00 Pre-function Area, 2rd Floor

April 26, Mon. 08:30-18:30 Pre-function Area, 2rd Floor

April 27, Tue. 08:30-18:30 Pre-function Area, 2rd Floor

April 28, Wed. 08:30-18:30 Pre-function Area, 2rd Floor

April 29, Thur. 08:30-12:00 Pre-function Area, 2rd Floor

Conference Events:

Welcome Reception on April 25

18:30-20:30 at Pre-function Area, Science & Art Center, 2/F

Conference Lunches on April 26-29

(April 26-29) 12:15-13:30 at Qinye Canteen, 3/F

Banquet & Award Ceremony on April 28

19:00-21:00 at Qinye Canteen, 3/F

Fairwell Lunch & Adjourn of Conference on April 29

12:00-14:00 at Qinye Canteen, 3/F


14

GENERAL MAPXiamen University Siming Campus

Science & Art Center

Qinye CanteeenYifu Building

Linwutong Building

Yixuan Building

Please scan the QR code for the detailed map of Xiamen University


15

FLOOR MAPScience & Art Center, Xiamen University


16

Official Language

The official language of the conference is English. All presentation including discussion and submissions shall be made in English.

Presentation Specifications

In each oral presentation room, one LCD projector with the aspect ratio of 16:9 and one laptop will be available. The presenters should prepare Power Point Slides to facilitate their presentations. The presenters should test it before session start to avoid potential format problems caused by different software versions.

*Speakers should use the laptop provided at the conference hall.

Duration for each category of presentation are listed below:

• Plenary Lectures are scheduled for 45 minutes (including 10 minutes Q&A) each.• Keynote Lectures are scheduled for 30 minutes (including 5 minutes Q&A) each.• Invited sessions are scheduled for 20 minutes (including 5 minutes Q&A) each.• Oral presentations are schedule for 15 minutes (including 3 min Q&A) each.

Poster Specifications

Dimensions: Poster Size: 90 cm (wide) x 120 cm (high). Title: The title of your poster should appear at the top with lettering of at least 70 pt font size. Below the title, place the names of authors and their affiliations. Text: Text should be readable from five feet away. Use a minimum font size of 18 pt. Keep the text brief. Try to use text to introduce the study, explain visuals and direct viewers’ attention to significant data trends and relationships portrayed in the visuals, state and explain the interpretations that follow from the data. It is also a good idea to put future research plans or questions for discussion with viewers in your text. Figures: Each figure should have a brief title. Figures should be numbered consecutively according to the order in which they are first mentioned in the text. Try to use color figures rather than only black and white text to make your poster attractive and highlight the important technical content of your paper. Make sure that the text and the visuals are integrated.

Conference Attire

Appropriate attire is requested during the conference; e.g., casual attire at the Welcome and Farewell Party; a business suit or a white shirt at all technical sessions.


17

IEEE-NEMS 2021 ProgramLLooccaattiioonn：：SScciieennccee && AArr tt CCeenntteerr ,, XXiiaammeenn UUnniivveerrssiittyy （（厦厦门门大大学学思思明明校校区区，，科科学学与与艺艺术术中中心心））

SSuunnddaayy,, 2255 AApprr iillVenue: Pre-function Area, 2rd Floor

1133::0000--2211::0000 Registration 1188::3300--2200::3300 Reception

Venue: Exhibition Hall (1F)1133::0000--2211::0000 Exhibition Set Up

DDaayy11 -- MMoonnddaayy,, 2266 AApprr iillMain Venue: Concert Hall (2F)

0088::3300 -- 0088::4455 Opening Ceremony Chair: Haixia ZHANG0088::4455 -- 0099::3300 Plenary Speaker Ia：：Lei JIANG Chair: Zhongqun TIAN0099::3300 -- 1100::1155 Plenary Speaker Ib：：Paul WEISS Chair: Xu HOU1100::1155 -- 1100::4455 Coffee Break & Group Photo

1100::4455 -- 1122::4455

Session Ia: Micro/Nano/Molecular Fabrication-IKeynote Speaker: Wenjing HONGChair: Sheng HU445,455,515,578,655

1100::4455 -- 1122::4455

Venue: Multi-function Hall (1F) Venue: Conference Room No.01 (1F)Chihming Ho AwardChair: Yong QIN60,99,263,511,544

Invited Session IaAdvanced Micro/nano Fabrication, Materials and ApplicationsChair: Zhuoqing YANG

Venue: Conference Room No.04 (2F) Venue: Conference Room No.05 (2F)Invited Session IbThermal management in MicroNano SystemsChair: Xian (Annie) ZHANG

Invited Session IcResonant Micro/Nanoelectromechanical SystemsChair: Zenghui WANG

Venue: Conference Room No.07 (3F) Venue: Sunshine Hall (3F)Session IbEnergy Conversion and Storage-IKeynote Speaker: Xiaodong CHENChair: Huan LIU241,261,358,364,484

Session Ic: Micro/Nano Pores and ChannelsKeynote Speaker: Zhongyi JIANGChair: Xinghua XIA 93,127,161,340,411

1122::4455 -- 1133::3300Location: Qinye Canteen 3rd FloorLunch Break

1133::3300 -- 1155::3300

Main Venue: Concert Hall (2F)

Best Conference PaperChair: Yong QIN111,112,150,182,298,380,587

Venue: Multi-function Hall (1F) Venue: Conference Room No.01 (1F)

Wen H Ko Memorial SessionPlenary Speaker Ic：：Minghui HONG

Invited Session IdSelf-powered Micro/Nano SystemsChair: Wei TANG

Venue: Conference Room No.04 (2F) Venue: Conference Room No.05 (2F)Invited Session IeBioelectronic Devices and SystemsChair: Zhou LI & Mengdi HAN

Invited Session IfNon-linear Micro/Nanoelectromechanical SystemsChair: Dong F. WANG & Xueyong WEI

Venue: Conference Room No.07 (3F) Venue: Sunshine Hall (3F)Session IdMEMS/NEMS-IKeynote Speaker: Sang-Woo KIMChair: Ting ZHANG 652,674,684,698,471,386

Session IeMicro/Nano Fluidic-IKeynote Speaker: Xinghua XIAChair: Zhongyi JIANG 64,361,114,552,591,456

Main Venue: Concert Hall (2F)1155::3300 -- 1166::3300 Plenary Speaker Id (Nobel Laureate) : Jean-Marie LEHN Chair: Yunbao JIANG

Venue: Exhibition Hall (1F)0088::3300 -- 1166::3300 Exhibition1166::3300 -- 1188::3300 Coffee Break & Poster Session I Accept Posters from No.4 to No.320 except 256 & 3141177::0000 -- 1188::0000 中中文文讲讲座座：：学学术术好好莱莱坞坞--现现代代科科研研论论文文的的构构思思与与写写作作，主讲人：李风煜教授（暨南大学）

1188::3300 Adjourn for the DayLocation: Yifu Building

1199::0000-- 2211::0000 VVIIPP DDiinnnneerr ((BByy IInnvviitteedd))


18

DDaayy22 -- TTuueessddaayy,, 2277 AApprr iillMain Venue: Concert Hall (2F)

0088::3300 -- 0099::1155 Plenary Speaker IIa：：Chennupati JAGADISH Chair: Haixia ZHANG0099::1155 -- 1100::0000 Plenary Speaker IIb：：Shigang SUN Chair: Yan LI1100::0000 -- 1100::1155 Coffee Break

1100::1155 -- 1122::1155

Session IIa: MEMS/NEMS-IIKeynote Speaker: Jing LIUChair: Dezhi WU 372,539,440,266,482,144

1100::4455 -- 1122::1155


Best Student PaperChair: Yong QIN2,149,335,407,448,460,469,664

Invited Session IIaMicro Nano and Molecular Systems for Diagnostics and TherapeuticsChair: Yi ZHANG

Venue: Conference Room No.04 (2F) Venue: Conference Room No.05 (2F)

Invited Session IIbMicro-/Nanofluidic Devices and SystemsChair: Yan XU & Wenhui WANG

Invited Session IIcMultidisciplinary Frontier: Advanced Chemistry Materials for MEMS/NEMSChair: Xi YAO

Venue: Conference Room No.07 (3F) Venue: Sunshine Hall (3F)Session IIbNanophotonics and Nanoscale ImagingKeynote Speaker: Mona JARRAHI Chair: Xu XIAO508,660,669,695,599,438,177

Session IIcEnergy Conversion and Storage-IIKeynote Speaker: Jianhua ZHANGChair: Honglong CHANG473,625,267,310,384,98,621


1133::3300 -- 1155::3300


Session IIdSoft&Flexibe Devices and Applications-IKeynote Speaker: Zheng CUI Chair: Wenli ZHOU253,269,322,382,397,651,102

Venue: Multi-function Hall (1F) Venue: Conference Room No.01 (1F)Session IIeMicro/Nano Fluidic-IIKeynote Speaker: Xingyu JIANGChair: Yan LI 613,371,336,697,132

Invited Session IIdMultidisciplinary Frontier: Micro/Nano Energy and Smart ElectronicsChair: Yong ZHAO & Xiuhan LI

Venue: Conference Room No.04 (2F) Venue: Conference Room No.05 (2F)Invited Session IIeElectronic and Optoelectronic Fibers and TextilesChair: Fabien Sorin & Lei WEI

Invited Session IIfRF Micro/Nano Components and SystemsChair: Joshua E.-Y. LEE & Cheng TU

Venue: Conference Room No.07 (3F) Venue: Sunshine Hall (3F)Session IIfNanoscale Robotics, Assembly, and AutomationKeynote Speaker: Metin SITTI Chair: Xi XIE159,200,417,293,251,368

Session IIgMicro/Nano Sensors and Actuators-IKeynote Speaker: Xinxin LIChair: Xueyong WEI 631,403,461,488,529,622

Main Venue: Concert Hall (2F)1155::3300 -- 1166::3300 Plenary Speaker IIc (Nobel Laureate) : Jean Pierre SAUVAGE Chair: Xiaoyu CAO

Venue: Exhibition Hall (1F)0088::3300 -- 1166::3300 Exhibition1166::3300 -- 1188::3300 Coffee Break & Poster Session II Accept Posters from No.323 to No.526 include 256 & 3141166::3300 -- 1177::0000 中中文文讲讲座座：：学学术术格格莱莱美美讲讲座座----如如何何与与编编辑辑沟沟通通？？主讲人：李彦教授（北京大学，ACS Nano副主编）

1177::0000 -- 1188::3300 中中文文讲讲座座：：顶顶刊刊交交流流会会 TToopp JJoouurrnnaall SSeessssiioonn

1188::3300 Adjourn for the Day


19

DDaayy33 -- WWeeddnneessddaayy,, 2288 AApprr iillMain Venue: Concert Hall (2F)

0088::3300 -- 0099::1155 Plenary Speaker IIIa: Joost VLASSAK Chair: Xu HOU0099::1155 -- 1100::0000 Plenary Speaker IIIb: Alex JEN Chair: Xiaosheng ZHANG1100::0000 -- 1100::1155 Coffee Break

1100::1155 -- 1122::1155

Session IIIaMEMS/NEMS-III Keynote Speaker: Yuan LIN Chair: Xiaosheng ZHANG30,583,257,321,229,270

1100::4455 -- 1122::1155

Venue: Multi-function Hall (1F) Venue: Conference Room No.01 (1F)Session IIIbSoft&Flexibe Devices and Applications-IIKeynote Speaker: Yongan HUANG Chair: Libo GAO129,134,211,146,218,219

Invited Session IIIaMultidisciplinary Frontier: Soft Rubbery Electronics and Stretchable Integrated SystemsChair: Cunjiang YU & Wei LAN

Venue: Conference Room No.04 (2F) Venue: Conference Room No.05 (2F)Invited Session IIIbMultidisciplinary Frontier: Nanoplasmonics and BiosensorsChair: Xiangwei ZHAO

Invited Session IIIcFlexible and Wearable Microsystems for Sensing and ActuationChair: Zhengchun PENG & Xinge YU

Venue: Conference Room No.07 (3F) Venue: Sunshine Hall (3F)Session IIIcMicro/Nano Sensors and Actuators-IIKeynote Speaker: Jian ZHUChair: Tie LI 278,306,362,493,509,555,436

Session IIIdMicro/Nano/Molecular Fabrication-IIKeynote Speaker: Litao SUNChair: Zenghui WANG 435,57,275,395,426,348


1133::3300 -- 1155::3300

Main Venue: Concert Hall (2F)Session IIIeM/NEMS-IV Keynote Speaker: Lining SUNChair: Hongzhong LIU 226,106,48,53,232,239,562Venue: Multi-function Hall (1F) Venue: Conference Room No.01 (1F)Session IIIfSoft&Flexibe Devices and Applications-IIIKeynote Speaker: Guozhen SHENChair: Rui ZHOU 430,576,533,561,563,565

Invited Session IIIdAdvanced Scanning Probe Technology and ApplicationsChair: Huan HU & Yu Kyoung RYU


Invited Session IIIeAdvanced Microsystems for Biomedical ApplicationsChair: Soo Hyeon KIM

Invited Session IIIfMultidisciplinary Frontier: Advanced Micro/Nano Electronics Plus (Bio-, Photo-, Energy-)Chair: Yu ZHOU & Yue SHAO

Venue: Conference Room No.07 (3F) Venue: Sunshine Hall (3F)Session IIIgMEMS/NEMS-VKeynote Speaker: Liviu NICU Chair: Zewen LIU203,105,116,173,538,418

Session IIIhNanomaterials-IKeynote Speaker: Yan LI Chair: Jingxia WANG13,11,34,284,186,676

Main Venue: Concert Hall (2F)1155::3300 -- 1166::3300 Plenary Speaker IIIc (Nobel Laureate) : Kostya NOVOSELOV Chair: Nanfeng ZHENG

Venue: Exhibition Hall (1F)0088::3300 -- 1166::3300 Exhibition1166::3300 -- 1188::3300 Coffee Break & Poster Session III Accept Posters from No.527 to No.7201166::3300 -- 1177::3300 IInndduussttrriiaall PPaanneell

1177::3300 -- 1188::3300 中中文文讲讲座座：：学学术术奥奥斯斯卡卡讲讲座座----如如何何做做好好学学术术报报告告？？主讲人：张海霞教授（北京大学）

1188::3300 Adjourn for the DayLocation: Qinye Canteen 3rd Floor

1199::0000-- 2211::0000 BBaannqquueett && AAwwaarrdd CCeerreemmoonnyy


20

DDaayy44 -- TThhuurrssddaayy,, 2299 AApprr iill

88::3300-- 1100::3300


Session IVaMEMS/NEMS-VIKeynote Speaker: Yulong ZHAOChair: Zewen LIU 242,311,334,637,338,223,163

Session IVbBio-inspired multiscale InterfacesKeynote Speaker: Shutao WANGKeynote Speaker: Dechen JIANGChair: Peiyi WU 199,209,391,560,23


Invited Session IVaMultidisciplinary Frontier: Micro/Nano-Engineered Materials for Sensing and ApplicationsChair: Xu XIAO & Tianxun GONG

Session IVcNanomaterials-IIKeynote Speaker: Jian JINChair: Jie JU295,458,510,550,466

Venue: Conference Room No.07 (3F)Session IVdNature-inspired energy conversion and harvesting: from fundamentals to applicaitonsKeynote Speaker: Zuankai WANGChair: Haisheng SAN 101,443,532,376,92,600

1100::4455-- 1111::0000 Coffee Break

1111::0000 -- 1122::0000

Venue: Multi-function Hall (1F) Venue: Conference Room No.01 (1F)Session IVeMEMS/NEMS-VIIKeynote Speaker: Yikuen LEEChair: Songyue CHEN396,646,365

Session IVfSoft&Flexibe Devices and Applications-IVKeynote Speaker: Peiyi WU Chair: Shutao WANG 51,90,28


Invited Session IVbMultidisciplinary Frontier: Functional Micro-nano Structures, Techniques and Applications Chair: Yang CAO

Session IVgSoft&Flexibe Devices and Applications-VKeynote Speaker: Hu TAOChair: Guozhen LIU 491,598,115

Venue: Conference Room No.07 (3F)Session IVhMicro&Nanotechnologies for biomedicineKeynote Speaker: Beomjoon KIMChair: Guoan TAI 513,497Location: Qinye Canteen 3rd Floor

1122::0000 -- 1144::0000 FFaaiirrwweellll LLuunncchh && AAddjjoouurrnn ooff CCoonnffeerreennccee

1144::0000 LLaabb TToouurr ((OOppttiioonnaall))


21

PROGRAM SCHEDULE

Day 1 - Monday, 26 April

08:30 - 08:45 Opening Ceremony


Chair: Haixia ZHANG

08:45 - 09:30 Plenary Speaker Ia


Chair: Zhongqun TIAN

“BIOINSPIRED SUPER-WETTABILITY SYSTEM AND BEYOND——QUANTUM-CONFINED SUPERFLUID: ENERGY CONVERSION, CHEMICAL REACTION AND BIOLOGICAL INFORMATION TRANSFER”Lei JIANG Techinical Institute of Chemistry, Chinese Academy of Sciences

09:30 - 10:15 Plenary Speaker Ib


Chair: Xu HOU

ATOMICALLY PRECISE CHEMICAL, PHYSICAL, ELECTRONIC, AND SPIN CONTACTSPaul S. WEISS University of California, Los Angeles

10:15 - 10:45 Coffee Break & Group Photo

10:45 - 12:30 Session Ia: Micro/Nano/Molecular Fabrication-IVenue: Concert Hall (2F)

Chair: Sheng HU 10:45-11:15 KEYNOTE SPEAKER : OPPORTUNITIES FOR SINGLE-MOLECULE ELECTRONICS: A TEN-YEAR PERSPECTIVEWenjing HONG Xiamen University


22

11:15-11:30 #445, SYNCHRONIZED SURFACE MODIFICATION OF TIO2 COMPOSITE NANOFIBER THROUGH CORE-SHELL ELECTROSPINNINGHao Peng, Guoyi Kang, Jiaxin Jiang, Zungui Shao, Juan Liu, Yifang Liu and gaofeng zhengXiamen University

11:30-11:45#455, PRECURSOR-BASED ZNO NANO INKS FOR PRINTED ELECTRONICSWenxin Liu, Hao Dong, Di Wang and Xing ChenZhejiang University

11:45-12:00#515, EFFICIENT MANUFACTURING OF MICRODOME ARRAY FOR ADVANCED ELECTRONIC AND OPTICAL DEVICESZehua Xiang, Haobin Wang, Hang Guo, Ji Wan, Chen Xu, Liming Miao, Mengdi Han and Haixia ZhangPeking Universiry

12:00-12:15#578, SOLVENT-FREE NANOFABRICATION BASED ON ICE-ASSISTED ELECTRON-BEAM LITHOGRAPHYYu Hong, Ding Zhao and Min QiuWestlake University

12:15-12:30#655, ICE-ASSISTED ELECTRON-BEAM LITHOGRAPHY FOR 3D NANOFABRICATIONDing Zhao, Yu Hong and Min QiuWestlake University

10:45 - 12:00 Chihming Ho Award

Venue: Multi-function Hall (1F)

Chair: Yong QIN 10:45-11:00#60, INTEGRATED ELECTRICAL TEST VEHICLE CO-DESIGNED WITH MICROFLUIDICS FOR EVALUATING THE PERFORMANCE OF EMBEDDED COOLINGYuxin Ye, Nan Zhang, Lihang Yu, Bo Cong, Ruiwen Liu, Yanmei Kong and Binbin JiaoInstitute of Microelectronics of the Chinese Academy of Science

11:00-11:15#99, FREQUENCY CHARACTERISTICS OF MICROFLUIDIC SINGLE GATE OSCILLATORZhou Zhou, Manman Xu, Hai Wang, Kunpeng Zhang and Daoheng SunAnhui Polytechnic University

11:15-11:30#263, MINIMAL-INVASIVE LEVODOPA SENSING BASED ON DIFFERENTIAL AMPEROMETRY MICRONEEDLE ELECTRODES


23

DECORATED WITH SPIKE-LIKE AU NANOPARTICLESHangxu Ren, Xiyu Mao, Shanshan Zhang, Yu Cai, Lu Fang, Xuesong Ye and Bo LiangZhejiang University

11:30-11:45#511, SILICON NANOWIRE ARRAY SENSOR FOR HIGHLY SENSITIVE AND SELECTIVE DETECTION OF NERVE AGENT SIMULANT VAPOR VIA SURFACE HYDROXYL GROUPSXingqi Liu, Hongpeng Zhang, Zhiping Huang, Xuanlin Yang, Shixing Chen, Yuelin Wang, Tie Li and Zhenxing ChengShanghai Institute of Micro-system and Information Technology, Chinese Academy of Sciences

11:45-12:00#544, MAGNETIC FORCE ENABLED PLANT SEED LEVITATION TO SIMULATE MICROGRAVITY ENVIRONMENT ON A MICROFLUIDIC CHIPJing Du, Lin Zeng, Zitong Yu, Sihui Chen, Xi Chen, Yi Zhang and Hui YangShenzhen Institute of Advanced Technology, Chinese Academy of Sciences

10:45 - 12:45Invited Session Ia: Advanced Micro/nano Fabrication, Materials and Applications

Venue: Conference Room No.01 (1F)

Chair: Zhuoqing YANG10:45-11:05SURFACE AND BULK MICRO/NANOMACHINING OF POLYMERSJunshan LIU Dalian University of Technology

11:05-11:25FLEXIBLE HEALTHCARE SENSORSXuewen WANG Northwestern Polytechnical University

11:25-11:45HEXAGONAL BORON NITRIDE PHONONIC CRYSTAL WAVEGUIDES FOR CLASSICAL AND QUANTUM SIGNAL TRANSDUCTIONYanan WANG University of Florida

11:45-12:05MICRO-FLUIDIC HEAT DISSIPATION TECHNOLOGY BASED ON MULTI-ELEMENTS COMPATIBLE MEMS PROCESSYunna SUN Shanghai Jiao Tong University

12:05-12:25ACCURATE THREE-DIMENSIONAL PHYSICAL SIMULATIONS OF MICRO/NANO FABRICATION PROCESSES Zaifa ZHOU Southeast University

12:25-12:45MICRO-SYSTEM BASED MULTIMODALITY IMAGING SYSTEM FOR


24

QUANTITATIVE MOLECULAR IMAGING AND PRECISION HEALTHZhen QIU Michigan State University

10:45 - 12:45 Invited Session Ib: Thermal management in MicroNano Systems


Chair: Xian (Annie) ZHANG 10:45-11:05 THERMAL TRANSPORT OF MECHANICALLY DEFORMED 2D MATERIALSBaoxing XU University of Virginia

11:05-11:25THERMAL TRANSPORT PROPERTIES OF METALS AND METALLIC NANOSTRUCTURESHua BAO Shanghai Jiao Tong University

11:25-11:45RATIONAL DESIGN OF CONDUCTIVE POLYMERS FOR FLEXIBLE THERMOELECTRIC DEVICEHui LI Institute of Ceramics, Chinese Academy of Sciences

11:45-12:05LAYERED TWO-DIMENSIONAL MATERIALS SHOWING TWO EXTREMES OF HEAT TRANSPORTHyejin JANG Seoul National University

12:05-12:25LAYER DEPENDENT THERMAL TRANSPORT PROPERTIES OF 2D WSE2Xian (Annie) ZHANG Stevens Institute of Technology

12:25-12:45TEMPERATURE-MICROSTRUCTURE-PROPERTIES RELATIONSHIPS DURING AL-SN-AL THERMO-COMPRESSION WAFER BONDINGZhiyuan ZHU Southwest University, China

10:45 - 12:45 Invited Session Ic: Resonant Micro/Nanoelectromechanical Systems


Chair: Zenghui WANG10:45-11:05HIGH RESOLUTION MICRO-SENSORS BASED ON COUPLED RESONATORS/MODESChun Zhao HUST


25

11:05-11:25MULTIMODE RESONANT MICROMECHANICAL SYSTEMS IN LIQUID FOR BIOPHYSICAL STUDIES OF CANCER CELLSHao Jia SIMIT

11:25-11:45 SENSING WITH SERIAL OR PARALELL MICROMECHANICAL RESONATORSHonglong Chang NWPU

11:45-12:05ATOMICALLY-THIN MOS2 NANOELECTROMECHANICAL RESONATORSRui Yang SJTU

12:05-12:25NONLINEAR MEMS: FUNDAMENTALS AND APPLICATIONSXueyong Wei XJTU

12:25-12:45ULTRA-WIDE BANDGAP Β-GA2O3 RESONANT NANOELECTROMECHANICAL SYSTEMS (NEMS)Xuqian Zheng University of Florida

10:45 - 12:30 Session Ib: Energy Conversion and Storage-IVenue: Conference Room No.07 (3F)

Chair: Huan LIU 10:45-11:15KEYNOTE SPEAKER : CONFORMAL BIOELECTRONIC INTERFACESXiaodong CHEN Nanyang Technological University

11:15-11:30#241, BROADBAND PIEZOELECTRIC HARVESTER UTILIZING THREE-WAFER BONDING FOR SELF-POWERED WIRELESS SENSOR SYSTEMXin Chen, Daqiao Tong, Jian Zhang, Lingxiao Gao, Fayang Wang, Hongzhi Pan, Liang Cao and Xiaojing MuChongqing University

11:30-11:45#261, DESIGN AND FABRICATION OF A METAL-SILICON ACTUATOR WITH LARGE DISPLACEMENT AND LOW VOLTAGEYing Bu, Jin Xie, Kaiquan Li, Zhuang Xiong, Bing Tang, Qi Tao and Jun DaiBeijing Institute of Technology

11:45-12:00#358, FLEXIBLE SINGLE ELECTRODE TRIBOELECTRIC NANOGENERATORYuchi Liu, Rami Ghannam and Xiaosheng ZhangUniversity of Electronic Science and Technology of China


26

12:00-12:15#364, DEVELOPMENT OF CLOSED-LOOP SOFT ACTUATORS WITH SELF-SENSING CAPABILITY FOR ADVANCED WEARABLE ASSISTIVE ROBOTICSHwajoong Kim and Jaehong LeeSoft Biomedical devices Lab, Department of Robotics Engineering, Daegu Gyeongbuk Institute of Science and Technology(DGIST)

12:15-12:30#484, WEARABLE TRIBOELECTRIC NANOGENERATOR BASED ON THE CONDUCTIVE TEXTILE WITH POLYANILINE GRAFTEDYun Tian, Chuanhong Zhou, Zejue Yu, Zhangwei Liu, Chenyang Xing, Bo Meng and Zhengchun PengShenzhen University

10:45 - 12:30 Session Ic: Micro/Nano Pores and ChannelsVenue: Sunshine Hall (3F)

Chair: Xinghua XIA 10:45-11:15KEYNOTE SPEAKER: ORGANIC MOLECULAR SIEVE MEMBRANESZhongyi JIANG Tianjin University

11:15-11:30#93, REGULATORY MECHANISM OF IONIC/MOLECULAR TRANSPORT BEHAVIORS IN NANOSCALE CHANNELSYaqi Hou and Xu HouXiamen University

11:30-11:45#127, FABRICATION OF NANOSLITS WITH <111> ETCHING TSWE METHODHao Hong, Li Ye, Ke Li, Pasqualina M Sarro, Guoqi Zhang and Zewen LiuDepartment of Microelectronics, Delft University of Technology

11:45-12:00#161, CONFINED COLLOIDS GATING SYSTEM FOR TUNABLE FLUID TRANSPORTZhizhi Sheng, Mengchuang Zhang, Jing Liu and Xu HouSuzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences

12:00-12:15#340, CHARACTERIZATION OF ITO-SINX NANOPORES FOR SINGLE-BIOMOLECULAR SENSINGXin Zhu, Chaoming Gu, Xiaojie Li, Zhi Ye, Zhen Cao and Yang LiuZhejiang University

12:15-12:30#411, MECHANICAL ENERGY HARVESTER FOR SMART SHARED BICYCLE APPLICATIONJunlong Huang, Chen Bao, Anxin Luo and Fei WangSouthern University of Science and Technology


27

12:15 - 13:30 Lunch Break

Location: Qinye Canteen 3rd Floor

13:30 - 15:15 Best Conference Paper

Venue: Concert Hall (2F)

Chair: Yong QIN13:30-13:45#111, CHIP-LEVEL-MICROASSEMBLY COMB-DRIVE XYZ-MICROSTAGE WITH LARGE DISPLACEMENTS AND LOW CROSSTALKGaopeng Xue, Masaya Toda, Xinghui Li and Takahito OnoTsinghua University

13:45-14:00#112, EFFECT OF THE DIFFERENT SUBSTRATES AND THE FILM THICKNESS ON THE SURFACE ROUGHNESS OF STEP STRUCTUREChenying Wang, Jiangtao Pu, Lei Li, Weixuan Jing, Yijun Zhang, Yaxin Zhang, Feng Han, Ming Liu, Wei Ren and Zhuangde JiangXi’an Jiaotong University

14:00-14:15#150, EFFICIENT INFRARED–THERMAL-ELECTRIC CONVERSION WITH TEXTURED DIELECTRIC FILMYunqian He, Yuelin Wang and Tie LiShanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences

14:15-14:30#182, INERTIAL FOCUSING CHIP BASED ON SUPERPOSED SECONDARY FLOWSJianguo Feng, Qi Wang, Yuanming Ma, Honglong Chang and Gaobin XuHefei University of Technology

14:30-14:45#298, A SENSORISED FORCEP BASED ON PIEZORESISTIVE FORCE SENSOR FOR ROBOTIC-ASSISTED MINIMALLY INVASIVE SURGERYCheng Hou, Jiangjun Geng, Yuyang Sun, Tao Chen, Fengxia Wang, Hongliang Ren, Xiuli Zuo, Yanqing Li, Huicong Liu and Lining SunSoochow University

14:45-15:00#380, IN SITU LASER-ASSISTED MICROMACHINING OF ENVIRONMENTALLY-RESPONSIVE HYDROGEL FILMSHongjie Jiang, Manuel Ochoa and Rahim RahimiSouth China University of Technology

15:00-15:15


28

#587, THREE-DIMENSIONAL GRAPHENE FETS FOR PH DETECTIONTao Deng, Yuning Li, Zhaohao Zhang, Yang Zhang and Zewen LiuBeijing Jiaotong University

14:30 - 17:00 Wen H Ko Memorial SessionPlenary Speaker Ic:


Chair: Kangping WANG14:30-15:40Wen H Ko Memorial Events

Chair: Haixia ZHANG

15:40-16:20 Plenary Speaker Ic:PUSHING LASER PRECISION ENGINEERING FROM MICRO-SCALE TO NANO-SCALE: PROGRESS, CHALLENGES AND OPPORTUNITIESMinghui HONG National University of Singapore

16:20-16:30MEMS/SEMI ECOSYSTEM IN CHINA --2021Lucy HUANG Hanking Electronics (Liaoning) Co., Ltd.

16:30-16:40FOREVER SCALING—PUSHING THE LIMIT OF MINISCULE SENSORS AND ACTUATORSZenghui WANG University of Electronic Science and Technology of China

16:40-16:50FOREVER PIONEER- IN MEMORY OF PROF. WEN KOTie LI Shanghai Institute of Microsystem and Information Technology

16:50-17:00MICRO NANO RESEARCH AT XIAMEN UNIVETSITYDaoheng SUNXiamen University

13:30 - 15:30 Invited Session Id: Self-powered Micro/Nano Systems


Chair: Wei TANG13:30-13:50 TRIBOTRONICS FOR ACTIVE MECHANOSENSATION AND SELF-POWERED MICROSYSTEMSChi ZHANG Beijing Institute of Nanoenergy and Nanosystems, Beijing


29

13:50-14:10PULSED TRIBOELECTRIC NANOGENERATOR AND SELF-POWERED SENSING SYSTEMGang CHENG Henan University

14:10-14:30HIGH EFFICIENT VIBRATION ENERGY HARVESTING FOR SELF-POWERED MACHINE MONITORING APPLICATIONJian HE North University of China

14:30-14:50NANOGENERATORS FOR SELF-POWERED WEARABLE PHYSICAL MONITORING SYSTEMSWei TANG Beijing Institute of Nanoenergy and Nanosystems, Beijing

14:50-15:10TRIBOELECTRIC POLYMERS AND ELECTROSTATIC POWER SOURCEXiangyu CHEN Beijing Institute of Nanoenergy and Nanosystems, Beijing

15:10-15:30SELF-POWERED TRIBOELECTRIC PRESSURE SENSORSZhen WEN Soochow University

13:30 - 15:30 Invited Session Ie: Bioelectronic Devices and Systems


Chair: Zhou LI & Mengdi HAN13:30-13:50DEVELOPMENT OF SELF-POWERED SENSORS TOWARDS MACHINE-LEARNING ENABLED SMART SYSTEMSChengkuo LEE National University of Singapore

13:50-14:10INTERACTIVE NEUROMORPHIC SYNAPTIC DEVICES AND SYSTEMSQijun SUN Beijing Institute of Nanoenergy and Nanosystems, CAS

14:10-14:30MINIMALLY INVASIVE BIOSENSORSXi XIE Sun Yat-sen University

14:30-14:50FLEXIBLE BIOELECTRONIC DEVICES FOR MONITORING AND REGULATING PHYSIOLOGICAL ACTIVITIESXian HUANG Tianjin University

14:50-15:10SHAPE-ADAPTABLE BIOMEDICAL DEVICESXuemin DU Shenzhen Institutes of Advanced Technology Chinese Academy of Sciences


30

15:10-15:30SELF-POWERED MEDICAL ELECTRONICSZhou Li Beijing Institute of Nanoenergy and Nanosystems, CAS

13:30 - 15:30 Invited Session If: Non-linear Micro/Nanoelectromechanical Systems


Chair: Dong F. WANG & Xueyong WEI13:30-13:50 NONLINEAR INTERACTION IN COUPLED CANTILEVERS AND ITS SENSING APPLICATIONS: MODE-LOCALIZATION, SYNCHRONIZATION AND INTERNAL RESONANCECao XIA Jilin University

13:50-14:10INSIGHT OF SENSING MECHANISMS FOR CONJUGATED POLYMER BASED GAS SENSORSJian SONG Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences

14:10-14:30ULTRASENSITIVE MASS SENSING UTILIZING NONLINEAR MODE LOCALIZATION OF MEMS CURVED BEAMS WITH DISTRIBUTED ELECTRODESJian ZHAO Dalian University of Technology

14:30-14:50NONLINEAR BROADBAND ENERGY HARVESTING AND APPLICATIONSJunyi CAO Xi’an Jiaotong University

14:50-15:10DYNAMIC-BASED MICRO AND NANO DEVICES AND PHENOMENAMohammad I. Younis King Abdullah University of Science and Technology

15:10-15:30NONLINEAR DYNAMICS OF COUPLED MEMS RESONATORS AND ITS APPLICATIONRonghua HUAN Zhejiang University

13:30 - 15:30 Session Id: MEMS/NEMS-IVenue: Conference Room No.07 (3F)

Chair: Ting Zhang13:30-14:00 KEYNOTE SPEAKER: TRIBOELECTRIC NANOGENERATOR FOR POWERING BODY-IMPLANTABLE ELECTRONICS


31

Sang-Woo KIM Sungkyunkwan University (SKKU)

14:00-14:15#386, LUBRICATED NON-IMMUNOGENIC NEURAL PROBES FOR LIFELONG USE BRAIN-MACHINE INTERFACESYeontaek Lee, Hyogeun Shin, Il-Joo Cho and Jungmok SeoSchool of Electrical and Electronic Engineering, Yonsei University

14:15-14:30#471, DEVELOPMENT OF THIN GLASS-BASED BICONVEX MICROLENS VIA THERMAL EXPANSIONYusufu AishanOsaka University

14:30-14:45#652, ANALYSIS OF VIBRATION MODES IN TPOS DISK RESONATORSFeilong Li, Cheng Tu, Jiannan Chen and XIAOSHENG ZHANGUniversity of Electronic Science and Technology of China

14:45-15:00#674, A RESONANT DIFFERENTIAL PRESSURE SENSOR BASED ON BULK SILICON TECHNOLOGYChao Cheng, Yadong Li, Yulan Lu, Chao Xiang, Junbo Wang, Deyong Chen and Jian ChenState Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences

15:00-15:15#684, AN ULTRALOW-RIPPLE POLARIZATION VOLTAGE GENERATOR BASED ON HIGH- VOLTAGE BANDGAP REFERENCE FOR MEMS GYROSCOPESHua Chen, Zhen Meng, Xingcheng Zhang and Ke LiuInstitute of Microelectronics CAS

15:15-15:30#698, ELECTROCHEMICAL MICROMACHINING OF COPPER WORKPIECE WITH ULTRASHORT VOLTAGE PULSESZhen Ma, Lianhuan Han, Hantao Xu, Bingqian Du, Yang Wang and Dongping ZhanXiamen University

13:30 - 15:30 Session Ie: Micro/Nano Fluidic-IVenue: Sunshine Hall (3F)

Chair: Zhongyi JIANG13:30-14:00KEYNOTE SPEAKER: NANOFLUIDIC DEVICES FOR BIOSENSING AND ENERGY CONVERSIONXinghua XIA Nanjing University

14:00-14:15#64, INNER SURFACE DESIGN OF MICROFLUIDIC CHANNELS FOR


32

MICROSCALE FLOW CONTROLShuli Wang and Xu HouXiamen University

14:15-14:30#114, FREQUENCY RESEARCH OF MICROFLUIDIC WEAR DEBRIS DETECTION CHIP BASED ON INDUCTIVE WHEATSTONE BRIDGEYucai Xie, Hongpeng Zhang, Haotian Shi and Yuwei Zhang

14:30-14:45#361, CARBON NANOTUBE-BASED IONIC DIODES: DESIGN AND MECHANISMRan Peng, Yueyue Pan, Biwu Liu, Zhi Li, Peng Pan, Shuailong Zhang, Zhen Qin, Aaron R. Wheeler, Shirley Tang and Xinyu LiuDalian Maritime University

14:45-15:00#456, FLOW-THROUGH ELECTROPORATION USING SILVER-PDMS BASED 3D SIDEWALL MICROELECTRODESYao Cai, Yunyi Huang, Guangyu Qin, Duli Yu and Xiaoxing XingBeijing University of Chemical Technology 15:00-15:15#552, MOLECULAR DYNAMICS SIMULATION ON DIRECTIONAL WETTING BEHAVIOR OF A NANO DROPLET ON TITANIUM OXIDES SURFACEChenhua Liu, Xiangmeng Li and Xijing ZhuNorth University of China

15:15-15:30#591, A HUMAN CORNEA-ON-A-CHIP FOR THE STUDY OF EPITHELIAL WOUND HEALING BY EXTRACELLULAR VESICLESZitong Yu, Rui Hao, Jing Du, Xi Chen, Yi Zhang, Wei Li, Zhongze Gu and Hui YangShenzhen Institute of Advanced Technology, Chinese Academy of Sciences

15:30 - 16:30 Plenary Speaker Id (Nobel Laureate)


Chair: Yunbao JIANG

FROM SUPRAMOLECULAR TO ADAPTIVE CHEMISTRY – CONTRIBUTIONS TO NANOSCIENCE AND TECHNOLOGYJean-Marie LEHN University of Strasbourg


33

16:30 - 18:30 Coffee Break & Poster Session I

Venue: Exhibition Hall (1F)

Accept Posters from No.4 to No.320 except 256 & 314

17:00 - 18:00 学术好莱坞讲座 -- 现代科研论文的构思与写作


主讲人 : 李风煜教授 ( 暨南大学 )

18:30 Adjourn for the Day

19:00 - 21:00 VIP Dinner (By Invited)

Location: Yifu Building


34

Bioinspired Super-wettability System and Beyond——Quantum-confined Superfluid: Energy Conversion, Chemical

Reaction and Biological Information Transfer

Lei Jiang

Techinical Institute of Chemistry, Chinese Academy of Sciences, Beijing 100190, P.R. China

E-mail : [email protected]

ABSTRACTA new concept of "quantum-confined superfluid (QSF)" has been proposed for ultrafast ions andmolecules transmission in biological ion channels, which are in a quantum way of single molecular orionic chain with a certain number of molecules or ions. The biomimetic systems also exhibit QSFphenomena, such as ultrafast ions transport in artificial ion channels, and ultrahigh water flux inartificial water channels. The introduction of QSF concept in the fields of energy, chemistry andbiology may create significant impact. As a challenge to the traditional theory, the concept of QSF willopen up a new field of quantum ionics, promote the development and application of energy conversionmaterial system, subvert the understanding of neural signal transmission in neuroscience and brainscience, and promote the development of interfacial catalytic chemistry theory, and open up a new wayfor the future development of chemistry, chemical engineering and synthetic biology.

BIOGRAPHY

Lei Jiang is a Professor at the Technical Institute of Physics and Chemistry, Chinese Academy ofSciences. He is an academician of the Chinese Academy of Sciences, Academy of Sciences for theDeveloping World, and National Academy of Engineering, USA. His scientific contribution is learningfrom nature, discovering and establishing super-wettability system: from fundamental understanding toinnovative applications. He has made a series of achievements, continuously leading the developmentof bioinspired super-wettability field in the world, and won many important international awards.Recent research interest includes introduction of quantum-confined superfluid into super-wettabilitysystem, and its applications in energy conversion, chemical reaction and biological informationtransfer.

Plenary Speaker


35

Atomically Precise Chemical, Physical, Electronic, and Spin ContactsPaul S. Weiss

California NanoSystems Institute and Departments of Chemistry & Biochemistry,Bioengineering, andMaterials Science & Engineering, University of California, Los Angeles (UCLA), LosAngeles, California 90095, USA

E-mail: [email protected]: www.nano.ucla.edu

ABSTRACTTwo seemingly conflicting trends in nanoscience and nanotechnology are our increasing ability toreach the limits of atomically precise structures and our growing understanding of the importance ofheterogeneity in the structure and function of molecules and nanoscale assemblies. By havingdeveloped the “eyes” to see, to record spectra, and to measure function at the nanoscale, we have beenable to fabricate structures with precision as well as to understand the important and intrinsicheterogeneity of function found in these assemblies.

The physical, electronic, mechanical, and chemical connections that materials make to one another andto the outside world are critical and are intertwined in terms of their function. Just as the properties andapplications of conventional semiconductor devices depend on these contacts, so do nanomaterials,many nanoscale measurements, and devices of the future. We discuss the important roles that thesecontacts can play in preserving key transport and other properties.

Initial nanoscale connections and measurements guide the path to future opportunities and challengesahead. Band alignment and minimally disruptive connections are both targets and can be characterizedin both experiment and theory. Chiral assemblies can control the spin properties and thus transport atinterfaces. I discuss our initial forays into these areas in a number of materials systems.

BIOGRAPHYPaul S. Weiss holds a UC Presidential Chair and is a distinguished professor of chemistry &biochemistry, bioengineering, and materials science & engineering at UCLA. His interdisciplinaryresearch group includes chemists, physicists, biologists, materials scientists, mathematicians,bioengineers, electrical and mechanical engineers, computer scientists, clinicians, and physicianscientists. They focus on the ultimate limits of miniaturization, exploring the atomic-scale chemical,physical, optical, mechanical, and electronic properties of surfaces, interfaces, supramolecular, andbiomolecular assemblies. They develop new techniques to expand the applicability and chemicalspecificity of scanning probe microscopies. They apply these and other tools to study self- and directedassembly, and molecular and nanoscale devices. They advance nanofabrication down to ever smallerscales and greater chemical specificity to operate and to test functional molecular assemblies, and toconnect to the chemical and biological worlds in neuroscience, gene editing, cancer immunotherapy,tissue engineering, and the microbiome. He has written over 400 publications, holds over 30 patents,and has given over 800 invited, plenary, keynote, and named lectures.Prof. Weiss has been awarded a National Science Foundation (NSF) Presidential Young InvestigatorAward, a Sloan Fellowship, the American Chemical Society (ACS) Nobel Laureate Signature Awardfor Graduate Education in Chemistry, a Guggenheim Fellowship, a NSF Creativity Award, the ACSAward in Colloid and Surface Chemistry, the ACS Southern California Section Tolman Medal, theACS Patterson-Crane Award in Chemical Information, and the IEEE Nanotechnology Pioneer Award,among others. He is a fellow of the: American Association for the Advancement of Science, AmericanPhysical Society, American Vacuum Society, ACS, American Academy of Arts and Sciences,American Institute for Medical & Biological Engineering, Canadian Academy of Engineering, IEEE,Materials Research Society, and an honorary fellow of the Chinese Chemical Society and ChemicalResearch Society of India. He has been a visiting professor at the University of Washington and KyotoUniversity, and a distinguished visiting professor at the Kavli Nanoscience Institute and the JointCenter for Artificial Photosynthesis at Caltech. He is a visiting scholar at the Wyss Institute forBiologically Inspired Engineering at Harvard University. He held the Institut National de la RechercheScientifique (INRS) Chaire d'excellence Jacques-Beaulieu and was a Fulbright Specialist for the CzechRepublic. He is the founding editor-in-chief of ACS Nano.


36

I

Pushing Laser Precision Engineering from Micro-scale to Nano-scale:

Progress, Challenges and Opportunities

Hong MinghuiDepartment of Electrical and Computer Engineering, National University of Singapore, Singapore117508E-mail : [email protected]

Website: https://online.ece.nus.edu.sg/staff/web.asp?id=eleHMH

ABSTRACTLaser precision engineering in micro/nano-scales has unique advantages as a non-contact process with flexible setupand high speed processing in ambient air. It is an important advanced manufacturing means for high qualitymicro/nano-structures’ fabrication and related surface processing, especially to create new functional MEM/NEMdevices and structures. In the past decades, we have witnessed its extensive applications from academic researches toproduction lines. Combined with other advanced processing tools, laser precision engineering’s resolution has beenpushed down to ~ 25 nm in laboratories, much smaller than the optical diffraction limit, which will soon play a muchmore important role in next-generation nano-manufacturing. In this talk, the research progress on dynamic laser-matter interactions will be reviewed. How to achieve small heat affected zone is the first key challenge in high qualitylaser precision engineering to push its resolution from micro-scale to nano-scale. To apply ultrafast femtosecond laserinduced photo-thermal and photo-chemical effects is a must to solve this issue. The second key challenge is how toensure high enough processing speed to meet various industrial needs as one beam laser processing at high resolutioncould not achieve this mission. Parallel laser beam processing becomes a versatile solution to fit the bothrequirements on high resolution and high speed at the same time. The third challenge is how to carry out the lasernano-structuring in far field as the near field effect requires our tiny optics working very close to sample surfaces,which confines the near field laser nanofabrication to be only suitable for a few super-smooth surface samples. Ourrecent research shows that hybrid fs laser processing in far field and in ambient air is a novel method to make ~15 nmfeatures directly on Si surfaces (Fig. 1). Though we still need to understand clearly the complicated physics behindthis unique experimental result, further fine tuning of our experimental setup and laser processing parameters ishighly possible to bring our laser nano-fabrication resolution down to ~10 nm.

BIOGRAPHYzProf. Hong Minghui specializes in laser microprocessing & nanofabrication, optical engineering and laserapplications. He has co-authored 15 book chapters, 42 patents granted, and 450+ scientific papers in Nature,Chemical Reviews, Nature Nanotechnology, Advanced Materials, Advances in Optics and Photonics, Nano Letters,Light: Science and Applications, ACS Nano, Science Advances, Nature Communications, and Laser & PhotonicsReviews etc. and 80+ plenary/keynote/invited talks in international conferences. He is a member of organizingcommittees for Laser Precision Micromachining International Conference (2001~2021), International Symposium ofFunctional Materials (2005, 2007 and 2014), Chair of International Workshop of Plasmonics and Applications inNanotechnologies (2006), Chair of Conference on Laser Ablation (2009) and Chair of Asia-Pacific Near-field OpticsConference (2013 and 2019). Prof. Hong is invited to serve as an Editor of Light: Science and Applications,Engineering, Science China G, Laser Micro/nanoengineering, and Executive Editor-in-chief of Opto-ElectronicAdvances. Prof. Hong is Fellow of Academy of Engineering, Singapore (FSEng), Fellow of Optical Society ofAmerica (OSA), Fellow of International Society for Optics and Photonics (SPIE), and Fellow and Vice President ofInternational Academy of Photonics and Laser Engineering (IAPLE) and Fellow and Vice President of Institution ofEngineers, Singapore (IES). Prof. Hong is currently a Full Professor and the Director of Advanced Research andTechnology Innovation Centre (ARTIC), Director of Optical Science and Engineering Centre (OSEC), Department ofElectrical and Computer Engineering, National University of Singapore. He is also a founder of Phaos TechnologyPte. Ltd.


37

From Supramolecular to Adaptive Chemistry – Contributions toNanoscience and Technology

Jean-Marie Lehn

ISIS, University of Strasbourg; Strasbourg, FranceE-mail : [email protected]

Supramolecular chemistry is actively exploring systems undergoing self-organization, i.e. systems capable ofspontaneously generating well-defined functional supramolecular architectures by self-assembly from theircomponents, on the basis of the molecular information stored in the covalent framework of the components and readout at the supramolecular level through specific interactional algorithms, thus behaving as programmed chemicalsystems.

The implementation of molecular information controlled, “programmed” and functional systems allows thespontaneous but controlled generation of well-defined, functional molecular and supramolecular architectures ofnanometric size through self-organization by design . It represents a means of performing programmed engineeringand processing of functional nanostructures and offers attractive perspectives to nanoscience and nanotechnology.

Supramolecular entities as well as molecules containing reversible bonds are able to undergo a continuous change inconstitution by reorganization and exchange of building blocks. This capability allows for self-organisation withselection and defines a Constitutional Dynamic Chemistry (CDC) on both the molecular and supramolecular levels.CDC introduces a paradigm shift with respect to constitutionally static chemistry. It takes advantage of dynamicconstitutional diversity to enable variation and selection and thus allow for adaptation leading to the emergence of anadaptive chemistry towards a chemistry of complex systems.

Lehn, J.-M., Supramolecular Chemistry: Concepts and Perspectives, VCH Weinheim, 1995.

Lehn, J.-M., Dynamic combinatorial chemistry and virtual combinatorial libraries, Chem. Eur. J., 1999, 5,2455.

Lehn, J.-M., Programmed chemical systems : Multiple subprograms and multiple processing/expression ofmolecular information, Chem. Eur. J., 2000, 6, 2097.

Lehn, J.-M., Toward complex matter: Supramolecular chemistry and self-organization, Proc. Natl. Acad. Sci.USA, 2002, 99, 4763.

Lehn, J.-M., Toward self-organization and complex matter, Science, 2002, 295, 2400.

Lehn, J.-M., From supramolecular chemistry towards constitutional dynamic chemistry and adaptivechemistry, Chem. Soc. Rev., 2007, 36, 151.

Lehn, J.-M., in Constitutional Dynamic Chemistry, ed. M. Barboiu, Topics Curr. Chem, 2012, 322, 1-32.

Lehn, J.-M., Perspectives in Chemistry – Steps towards Complex Matter, Angew. Chem. Int. Ed., 2013, 52,2836-2850.

Lehn, J.-M., Perspectives in Chemistry – Aspects of Adaptive Chemistry and Materials, Angew. Chem. Int.Ed., 2015, 54, 3276-3289.

BBIIOOGGRRAAPPHHYY

Jean-Marie LEHN was born in Rosheim, France in 1939. In 1970 he became Professor of Chemistry at theUniversité Louis Pasteur in Strasbourg and from 1979 to 2010 he was Professor at the Collège de France inParis. He is presently Professor at the University of Strasbourg Institute for Advanced Study (USIAS). Heshared the Nobel Prize in Chemistry in 1987 for his studies on the chemical basis of “molecular recognition”(i.e. the way in which a receptor molecule recognizes and selectively binds a substrate), which also plays afundamental role in biological processes. Over the years his work led him to the definition of a new field ofchemistry, which he has proposed calling “supramolecular chemistry” as it deals with the complex entitiesformed by the association of two or more chemical species held together by non-covalent intermolecular forces,whereas molecular chemistry concerns the entities constructed from atoms linked by covalent bonds.Subsequently, the area developed into the chemistry of "self-organization" processes and more recentlytowards "adaptive chemistry", dynamic networks and complex systems. Author of over 1000 scientificpublications, Lehn is a member of many academies and institutions. He has received numerous internationalhonours and awards.


38

Keynote Speaker

Opportunities for Single-Molecule Electronics: A Ten-Year Perspective

Wenjing Hong

College of Chemistry and Chemical Engineering, State Key Laboratory of Physical Chemistryof Solid SurfacesXiamen University, 361005 Xiamen, China

E-mail : [email protected] : pilab.xmu.edu.cn

ABSTRACTWith the development and scaling downward of electronic devices, the dimension of electronic devicehas shrunk down to nanometer scale. Molecular electronics is an important subject of nanoelectronics,which will utilize rich varieties of organic and inorganic molecular materials as the functioningelectronic component to realize the electronic behaviors as conventional electronic devices.

“More Moore”: The original goal of molecular electronics is to build functional molecules fromatomic level, and then to build electronic devices and circuits from the individual molecules. Towardsthis goal, quantum interference effect in the charge transport through single-molecule junction enablespotential higher switching ratio and even lower subthreshold swing than traditional transistors whenleads to the single-molecule transistors. However, the stability and the integration of multiple deviceson chip remained as a major challenge for the fabrication of “molecular circuits”.

“Beyond Moore”: In recent years, we extended the application of single-molecule techniques to thequantitative analysis of the molecular physical-chemical process by counting the number of molecules.n this talk, I will share our recent effort towards quantitative analysis of the reaction rate, adsorptionfree energy, isomerization, the movement manipulation of molecules, and even the assembly ofmolecules at the scale of single or several molecules.

As perspective, recent advances of molecular electronics will lead to their device application on thefield of sensors and thermoelectric devices in the next ten years.

BIOGRAPHY

Wenjing Hong is currently “Minjiang” Chair Professor of Chemical Engineering and Vice Dean inCollege of Chemistry and Chemical Engineering, Xiamen University. He is also the Assistant toDirector (Prof. Zhong-qun Tian) in Tan Kah Kee Innovation Laboratory. Prof. Hong received hisbachelor degree from Xiamen University, master degree from Tsinghua University, and Ph.D. degreefrom University of Bern, Switzerland. After his postdoctoral research at the University of Bern,Switzerland, he joined Xiamen University as a full professor in 2015. Prof. Hong’s research mainlyfocused on single-molecule electronics, and the application of artificial intelligence for chemicalengineering. 80+ peer-reviewed papers are published in top journals of chemistry and nanotechnology,including Nature Materials, 13 papers in Science Advances/Chem/Matter/Nature Communications, 17


39

papers in J. Am. Chem. Soc./Angew. Chem. Int. Ed., and 5 invited reviews in Chem. Soc. Rev., Acc.Chem. Res., Adv. Mater., etc. Besides the publications, the scientific instrument for single-moleculeelectronic characterization developped by his group has been used in 10+ research labs all over theworld.Prof. Hong was supported by the National Science Foundation for Excellent Young Scholars Programin 2017, he has undertaken serveral research projects such as the National Key Research andDevelopment Program of China and the National Natural Science Foundation of China. In 2019, hewas awarded the Chinese Chemical Society Award for Outstanding Young Chemist. In 2020, he wonthe second prize of Fok Ying Tung Education Foundation Young Faculty Award and the FujianProvince Youth Science and Technology Award.

Conformal Bioelectronic InterfacesXiaodong Chen

Innovative Centre for Flexible Devices (iFLEX), School of Materials Science and Engineering,Nanyang Technological University, SingaporeE-mail : [email protected]: https://personal.ntu.edu.sg/chenxd

ABSTRACTSmart sensors not only enrich daily lives by providing enhanced smart functions, but also providehealth information by monitoring body conditions. For example, patchable sensors have the potentialto better interface with human skin, thus improving the sensitivity of detection of health indicators.However, the crucial aspects toward the advancement of such sensors rely on the development of novelmechanically durable materials, which allow maintaining the function under the deformed states. Inthis talk, I will present our latest progress on building conformal bioelectronic interfaces,manufacturing conformal sensors and their integration of individual devices into systems.

BIOGRAPHYDr. Xiaodong Chen is the President’s Chair Professor in Materials Science and Engineering, Professorof Chemistry and Medicine (by courtesy) at Nanyang Technological University, Singapore (NTU). Heis the Director of Innovative Centre for Flexible Devices (iFLEX) at NTU and the Director of MaxPlanck – NTU Joint Lab for Artificial Senses.He received his B.S. degree (Honors) in chemistry from Fuzhou University (China) in 1999, M.S.degree (Honors) in physical chemistry from the Chinese Academy of Sciences in 2002, and Ph.D.degree (Summa Cum Laude) in biochemistry from University of Muenster (Germany) in 2006. Afterhis postdoctoral fellow working at Northwestern University (USA), he started his independent researchcareer as Nanyang Assistant Professor at Nanyang Technological University since 2009. He waspromoted to Associate Professor with tenure in Sept 2013, then Full Professor in Sept 2016. He wasappointed as the President’s Chair Professor in Materials Science and Engineering in April 2019. Hisresearch interests include mechano-materials and devices, integrated nano-bio interface, and cyber-human interfaces.He has been elected as a Fellow of the Academy of Engineering Singapore and a Fellow of RoyalSociety of Chemistry in UK. In addition, he was recognized by multiple prestigious awards and honorsincluding Singapore NRF Investigatorship, Small Young Innovator Award, Singapore NRF Fellowship,Nanyang Research Award, Lubrizol Young Materials Science Investigator Award, Mitsui Chemicals-SNIC Industry Award in Materials and Nano-chemistry, and Friedrich Wilhelm Bessel ResearchAward from Alexander von Humboldt Foundation.


40

Organic Molecular Sieve MembranesZhongyi Jiang

School of Chemical Engineering and Technology, Tianjin University, Tianjin, 300072, P.R.China

E-mail : [email protected] : http://www.jiang-lab.com/

ABSTRACTMolecular separations that enable selective transport of target molecules from gas and liquid molecularmixtures, represent the most energy sensitive and significant demands. A number of emergingmicroporous organic materials have displayed the great potential as building blocks of molecularseparation membranes, which not only integrate the rigid, engineered pore structures and desirablestability of inorganic molecular sieve membranes, but also exhibit high degree of freedom to createchemically-rich combinations/sequences. In this talk, we propose the concept of organic molecularsieve membranes (OMSMs) with the focus on the precise construction of membrane structures andefficient intensification of membrane processes. The platform chemistries, designing principles,assembly methods for the precise construction of OMSMs are elaborated. Conventional mass transportmechanisms are analyzed based on the interactions between OMSMs and penetrate(s). Particularly,‘STEM’ guidelines of OMSMs are highlighted to guide the precise construction of OMSM structuresand efficient intensification of OMSM processes. Emerging mass transport mechanisms are elucidatedinspired by the phenomena and principles of the mass transport processes in biological realm. Therepresentative applications of OMSMs in gas and liquid molecular mixture separations are highlighted.

BIOGRAPHY

Zhongyi Jiang is a Professor at School of Chemical Engineering and Technology of Tianjin University.He obtained a PhD degree from Tianjin University in 1994. He was a visiting scholar of University ofMinnesota with Prof. Edward Cussler in 1997 and California Institute of Technology with Prof. DavidTirrell in 2009. He is the winner of the National Science Fund for Distinguished Young Scholars inChina, and a fellow of the Royal Society of Chemistry. He is an editorial board membrane of Journalof Membrane Science, Separation and Purification Technology, Green Chemical Engineering, etc. Hisresearch interests include biomimetic and bioinspired membranes and membrane processes,biocatalysis, and photocatalysis. Until now, he has co-authored over 560 peer-reviewed scientificpapers, and the total citation times is over 22,000 with a h-index of 79.


41

Triboelectric Nanogenerator for Powering Body-implantable Electronics

Sang-Woo Kim

School of Advanced Materials Science and Engineering, SKKU Advanced Institute ofNanotechnology (SAINT), Samsung Advanced Institute for Health Sciences & Technology(SAIHST), Sungkyunkwan University (SKKU), Suwon 16419, Republic of Korea

E-mail : [email protected] : http://nesel.skku.edu/

AABBSSTTRRAACCTT

In this presentation, I firstly introduce the fundamentals and possible device applications of TENGs,including their basic operation modes. Then the different improvement parameters will be discussed.As the first main topic, I will report transcutaneous ultrasound energy harvesting using triboelectrictechnology. Implantable medical devices (IMDs) are designed to perform or augment the functions ofexisting organs by using monitoring, measuring, processing units, and the actuation control.Conventional IMDs are powered with primary batteries that require frequent surgeries for maintenanceand replacement. Therefore, IMDs require a new reliable and safe powering system to avoid the needfor frequent surgeries. Recently my group demonstrated that ultrasound was used to deliver mechanicalenergy through skin and liquids and demonstrated that a thin inplantable vibrating triboelectricnanogenerator (TENG) is able to effectively harvest it. Ultrasound TENG (US-TENG) was triggeredwith an applied 20-kHz ultrasound at 3 W/cm2 reaching 9.71 V(root mean square [RMS]) and 427 ARMS. Themeasured output current was enhanced two orders of magnitude compared with conventional TENGs,with a similar level of surface charge density, triggered in low-frequency mechanical environments.Interestingly, to experimentally simulate clinical conditions closer to human in the laboratory, weinserted US-TENG under porcine tissue, showing that it fully charged a rechargeable Li-ion batteryhaving a capacity of 0.7 mAh. As the second topic, I will deal with our very recent demonstration of acommercial coin battery-sized high-performance inertia-driven TENG (I-TENG) based on bodymotion and gravity. In a preclinical test, we demonstrate that the encapsulated device successfullyharvested energy using real-time output voltage data monitored via a Bluetooth low-energyinformation-transmitting system. Details will be presented in the conference site.

BBIIOOGGRRAAPPHHYYDr. Sang-Woo Kim is currently an SKKU Distinguished Professor (SKKU Fellow) at SungkyunkwanUniversity (SKKU) and Director of the BK21 FOUR SKKU MSE Program. He received a Ph.D. inElectronic Science and Engineering from Kyoto University in 2004 and completed his postdoctoralresearch at University of Cambridge. From 2015 to 2016, he was a visiting professor at GeorgiaInstitute of Technology as a sabbatical stay. His recent research interest is belonging totriboelectric/piezoelectric nanogenerators for powering wearable and body-implatable electronics, self-powered sensors and neurostimulation, and 2D materials including graphene, h-BN, and TMDs.. Prof.Kim has published over 270 research papers including Science, Nature Journals, etc (h-index of 69)and presented more than 100 Plenary, Keynote, Invited talks in international/domestic conferences.

Prof. Kim served as Chairman of the 4th NGPT (Nanogenerators and Piezotronics) conference atSKKU in 2018 and Director of SAMSUNG-SKKU Graphene/2D Research Center. He is currentlyserving as Head of the MSE graduate program at SKKU, an Associate Editor of Nano Energy, and anExecutive Board Member of Advanced Electronic Materials. He received the Award of the Ministry ofScience and Technology (Science Technology Researcher Award for this month, 2020), the Award forExcellent Basic Research (2019), the Research Award of the National Academy of Engineering ofKorea (2018), The Republic of Korea President’s Award for Scientific Excellence (2015), etc.


42

Nanofluidic devices for Biosensing and Energy ConversionXing-Hua Xia

State Key Lab of Analytical Chemistry for Life Science, School of Chemistry and ChemicalEngineering, Nanjing University, Nanjing 210023, China

E-mail : [email protected] : https://xxh.nju.edu.cn/

ABSTRACTThe ionic transport properties of nanochannels with size comparable to the electric double layerthickness are dominantly determined by the surface properties and can be regulated by surfacerecognition reaction and external fields such as light and heat. Thus, understanding of influence ofsurface properties on the mass transport behavior in nanochannel will help us to exploit the interestingapplication of the nanofluidic device in biosensing and energy conversion.

This talk will introduce how the surface properties regulate the mass transport behavior through thenanochannels for biosensing and energy conversion. Our results show that the surface charges play adetermining role when the channel size is approximately close to the electric double layer thickness.As the nanochannel surface is negatively charged, anions will be accumulated in front of the channel,while cations can easily pass through. Based on these unique phenomena, biomolecules carryingdifferent charges can be easily separated and label-free DNA assays are developed. In addition, rapidprotein concentration, efficient florescence labeling and purification can be achieved on amicro/nanofluidic devices. At the end, we will show the integrate of plasmonics to nanochannels forthe possibility of light-electricity conversion on a nanofluidics devices. Our results demonstrate themicro/nano-fluidic devices are promising platform for bioanalysis and energy conversion.

BIOGRAPHYXing-Hua Xiais currently a Professor at the School of Chemistry and Chemical Engineering, NanjingUniversity, China. He received the M.Sc. degree in chemistry from Xiamen University, China, in 1989and the Ph.D. degree of chemistry in 1996 from the University of Bonn, Germany. During thefollowing five years, he worked at the Universität der Bundeswehr München, at the Fritz-Haber-Institute of the Max-Planck-Society in Berlin, Germany and the Debye Institute of the University ofUtrecht, The Netherlands, performing postdoctoral studies.Since 2001, he took the Professor position at the School of Chemistry and Chemical Engineering,Nanjing University, China. He was awarded as the National Science Fund for Outstanding YoungScholars (2001) and Changjiang Chair Professor from the MOE of China (2009). His researchactivities were awarded the first class prize of natural science researches from the Ministry ofEducation of China (2011). He is now an editor of Journal of Electroanalytical Chemistry and memberin editorial boards of Scientific Reports, Analytical Chemistry, Talanta and a few Chinese ChemicalJournals. The current research activities of his group are focused on interfacial behaviors ofbiomolecules and biosensors, plasmon enhanced spectroscopies and electrochemistry, bioinspiredcatalytic materials chemistry, biorecognition and reaction kinetics of bioevents within confinednanospace, e.g., mass transport properties in nanofluidics. He has published more than 370 peer reviewpapers.


43

Day 2 - Tuesday, 27 April

08:30 - 09:15 Plenary Speaker IIa


Chair:Haixia ZHANG

SEMICONDUCTOR NANOWIRES FOR OPTOELECTRONICS APPLICATIONSChennupati JAGADISH Australian National University

09:15 - 10:00 Plenary Speaker IIb


Chair: Yan LI

NANOMATERIALS OF HIGH-SURFACE ENERGY FOR EFFICIENT ELECTROCHEMICAL ENERGY CONVERSION AND STORAGEShigang SUN Xiamen University

10:00 - 10:15 Coffee Break

10:15 - 12:15 Session IIa: MEMS/NEMS-II


Chair: Dezhi WU 10:15-10:45 KEYNOTE SPEAKER: LIQUID METAL NANO ELECTRONICSJing LIU Tsinghua University

10:45-11:00#144, RESEARCH ON A MEMS DETONATED DEVICE WITH BUILT-IN SAFETY AND ARMING DEVICEKexin Wang, Tengjiang Hu, Yulong Zhao and Wei RenXi’an Jiaotong University


44

11:00-11:15#266, RESEARCH ON MOTION CHARACTERISTICS FOR LATCHING MECHANISM OF MEMS SAFETY AND ARMING DEVICE UNDER DUAL ENVIRONMENTAL FORCESShenghong Lei, Yun Cao, Weirong Nie, Zhanwen Xi, Na Xu and Weixiang QiuNanjing University of Science and Technology

11:15-11:30#372, DESIGN AND MANUFACTURE OF A HIGH PRECISION MEMS FLEXIBLE FORCE SENSORHuimin Zhang, Yanlu Feng and Wei ZhangPeking University

11:30-11:45#440, POWER HANDLING CAPABILITY ENHANCED RF MEMS SWITCH USING MODIFIED-WIDTH CANTILEVERS STRUCTUREYulong Zhang, Zhuhao Gong, Huiliang Liu and Zewen LiuTsinghua University

11:45-12:00#482, MODELING AND OPTIMIZATION OF SCALN-BASED MEMS MIRROR WITH LARGE STATIC TWO-AXIS TILTING ANGLEChanghe Sun, Bolun Li, Wenqu Su, Yufei Liu and Yaming WuYangtze Univerisity

12:00-12:15#539, LINEAR STIFFNESS TUNING OF MEMS TRIANGULAR CAPACITORSYiming Jin, Zhipeng Ma, Yixuan Guo, Tengfei Zhang, Xudong Zheng and Zhonghe JinZhejiang University

10:15 - 12:15 Best Student Paper


Chair: Yong QIN10:15-10:30#2, MICROSTRUCTURAL-PVDF DIELECTRIC LAYER BASED HIGH-RESOLUTION FLEXIBLE CAPACITIVE PRESSURE SENSORZebang Luo, Jing Chen, Zhengfang Zhu, Lin Li, Yi Su, Lei Wang and Hui LiShenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen

10:30-10:45#149, ELECTROHYDRODYNAMICALLY PRINTED MULTICOLOR PEROVSKITE IMAGE SENSOR ARRAYQilu Wang, Guannan Zhang, Hanyuan Zhang, Yongqing Duan and YongAn HuangHuazhong University of Science and Technology

10:45-11:00#335, A NOVEL PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER WITH ADJUSTABLE BROAD AND FLAT FREQUENCY BANDLei Wang, Wei Zhu, Zhipeng Wu, Wenjuan Liu and Chengliang Sun


45

Institute of Technological Sciences, Wuhan University, China

11:00-11:15#407, STACKABLE TRIBOELECTRIC NANOGENERATORS FOR SELF-POWERED MARINE MONITORING BUOYJiale Dong, Hao Wang, Xiu Xiao, Taili Du, Yunpeng Zhao, Zhongqi Fan and minyi xuCollege of Marine Engineering, Dalian Maritime University

11:15-11:30#448, MODULATING THE ELECTRICAL TRANSPORT CHARACTERISTICS OF A METAL-SEMICONDUCTOR-METAL STRUCTURE BY LOCAL STRAIN GRADIENTYouchao Huang, Shenhui Ma, Jiaona Zhang, Chao Xie and Min ZhangPeking University Shenzhen Graduate School

11:30-11:45#460, A HIGH-FREQUENCY NARROW-BAND FILTERING MECHANISM BASED ON AUTO-PARAMETRIC INTERNAL RESONANCERong Wang, Cao Xia, Dong F. Wang and Takahito OnoMicro Engineering and Micro Systems Laboratory (JML), Jilin University

11:45-12:00#469, CALIBRATE SILICON NANOWIRES FIELD EFFECT TRANSISTOR SENSOR WITH ITS PHOTORESPONSEYi Yang, Yuelin Wang, Shixing Chen and Tie LiShanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences; University of Chinese Academy of Sciences

12:00-12:15#664, FLEXIBLE AND TRANSPARENT ULTRAVIOLET PHOTODETECTOR ENABLED BY METAL DOPING ZNO NANORODS BASED ON MICA SUBSTRATEYao huang, Hainan Zhang, Guanhua Dun, Yuhua Li, Renrong Liang, Yi Yang, Dan Xie, He Tian and Tian-ling RenTsinghua University

10:15 - 12:15Invited Session IIa: Micro Nano and Molecular Systems for Diagnostics and Therapeutics


Chair: Yi ZHANG10:15-10:35FUSION APPLICATION OF MEDICAL SENSORS AND INTERNET OF MEDICAL THINGSJinhong GUO University of Electronic Science and Technology of China

10:35-10:55SEMICONDUCTING MOLECULAR PROBES FOR ULTRASENSITIVE AFTERGLOW IMAGING AND EARLY DIAGNOSISKanyi PU Nanyang Technological Univeristy, Singapore


46

10:55-11:15CELL-BASED BIOSENSING TECHNOLOGY AND SYSTEMNing HU Sun Yat-sen University

11:15-11:35EVANESCENT WAVE FLUORESCENT BIOSENSOR FOR THE DETECTION OF MICRORNAXiaohong ZHOU Tsinghua University, China

11:35-11:553D PRINTING MAGNETIC SOFT MILIROBOTS BY RECIRCULATING VAT POLYMERIZATION FOR POINT-OF-CARE DIAGNOSTICS Yi ZHANG Nanyang Technological Univeristy, Singapore

11:55-12:15ACTIVE SENSING AND HYBRIDIZED SENSORS TOWARDS TACTILE INTELLIGENCEBo MENG Shenzhen University

10:15 - 12:15 Invited Session IIb: Micro-/Nanofluidic Devices and Systems


Chair: Yan XU & Wenhui WANG10:15-10:35 PATIENT-DERIVED ORGANOIDS ANALYZED ON A SUPERHYDROPHOBIC MICROWELL ARRAY FOR PREDICTING DRUG RESPONSE OF LUNG CANCER PATIENTS WITHIN A WEEKPeng LIU Tsinghua University

10:35-10:55FLEXIBLE FILTER BASED LIQUID BIOPSYWei WANG Peking University

10:55-11:15A FULLY INTEGRATED AND AUTOMATED MICROFLUIDIC SYSTEM FOR RAPID TESTING OF RESPIRATORY VIRUSESLiangbin PAN CapitalBio

11:15-11:35BIOINSPIRED SURFACE MICROFLUIDICS FOR DIGITAL PCR AND DIGITAL ELISATianzhun WU SIAT, CAS

11:35-11:55MULTI-DIMENSIONAL MANIPULATION OF SOLID/LIQUID INTERACTIONXu DENG University of Electronic Science and Technology of China

11:55-12:15NANOWIRE-INTEGRATED MICROFLUIDIC DEVICES TO IDENTIFY


47

URINARY MICRORNA GROUPS FOR CANCER DETECTIONTakao YASUI Nagoya University

10:15 - 12:15Invited Session IIc: Multidisciplinary Frontier: Advanced Chemistry Materials for MEMS/NEMS


Chair: Xi YAO10:15-10:35FABRICATING FLUORESCENT GLASS DERIVED FROM MESOPOROUS POWDERSLianjun WANG Donghua University

10:35-10:55CONTROLLABLE LIQUID TRANSFER FOR MAKING HIGH-PERFORMANCE THIN-FILM DEVICESHuan LIU Beihang University

10:55-11:15PHOTO-CROSSLINKABLE, INSULATING SILK FIBROIN FOR BIOELECTRONICS WITH ENHANCED CELL AFFINITYJie JU Henan University

11:15-11:35UNCONVENTIONAL NANOTEMPLATE-BASED TECHNIQUE AND ITS EMERGING APPLICATIONSLiaoyong WEN Westlake University

11:35-11:55PAINTABLE HYDROGELS BASED ON SILANE CHEMISTRYXi YAO Henan University

11:55-12:15ELECTRODEPOSTION FILLING METHOD OF TSV FOR 3D INTEGRATIONYan WANG University of Electronic Science and Technology of China

10:15 - 12:30 Session IIb: Nanophotonics and Nanoscale Imaging


Chair: Xu XIAO10:15-10:45KEYNOTE SPEAKER: WAVELENGTH CONVERSION THROUGH PLASMON-COUPLED SURFACE STATESMona JARRAHI University of California, Los Angeles

10:45-11:00


48

#177, FULL-SPECTRUM OPTOELECTRONICS BASED ON BANDGAP-GRADED MATERIALSZongyin YangZhejiang University

11:00-11:15#438, COMPARE OF SNOM, PTIR, PIFM AND PFIRHai-Long Wang, En-Ming You, Song-Yuan Ding and Zhong-Qun TianXiamen University

11:15-11:30#508, PHOTONIC NANOJET PRODUCED BY A MICROFLUIDIC CHANNEL FOR BIOFLUID MONITORINGGuoqiang Gu, Pengcheng Zhang and Hui YangShenzhen Institute of Advanced Technology, Chinese Academy of Sciences

11:30-11:45#599, SELF-POWERED TEXTILE-BASED TACTILE SENSORS INSPIRED BY HUMAN-SKIN FOR MULTIFUNCTIONAL SENSING OF WEARABLES AND ROBOTSChangyong CaoMichigan State University

11:45-12:00#660, FLUORESCENCE ENHANCEMENT UTILIZING DIELECTRIC MICROBEADS WITH SEMI-OPEN MICROWELLSPengcheng Zhang, Bing Yan, Guoqiang Gu, Zitong Yu, Xi Chen, Zengbo Wang and Hui YangShenzhen Institute of Advanced Technology, Chinese Academy of Sciences

12:00-12:15#669, SPECTROMETER-FREE REFRACTOMETRIC SENSING USING IMAGE RECOGNITION ON CENTIMETER-SCALE GRADIENT NANOSTRUCTURESSiyi Min, Shijie Li, Zhouyang Zhu, Yu Liu, Chuwei Liang, Jingxuan Cai, Fei Han, Yuyan Li, Xing Cheng and Wen-Di LiThe University of Hong Kong

12:15-12:30#695, STRONGLY ANISOTROPIC MONOLAYER INSE POLARIZED LIGHT DETECTORXusheng Wang and xi zhang

10:15 - 12:30 Session IIc: Energy Conversion and Storage-II

Venue: Sunshine Hall (3F)

Chair: Honglong CHANG10:15-10:45 KEYNOTE SPEAKER: FLEXIBLE BIONIC INTELLIGENT PERCEPTION SYSTEMJianhua ZHANG Shanghai University


49

10:45-11:00#98, WIND-DRIVEN SELF-POWERED WIRELESS ENVIRONMENTAL SENSORS FOR INTERNET OF THINGS AT LONG DISTANCEDi Liu, Baodong Chen, Jie An, Chengyu Li, Jiajia Shao, Wei Tang, Chi Zhang and Zhonglin WangBeijing Institute of Nanoenergy and Nanosystems Chinese Academy of Sciences

11:00-11:15#267, CARD-BASED HYBRID PIEZO-TRIBOELECTRIC NANOGENERATOR FOR SIMULTANEOUSLY HARVESTING SLIDING MECHANICAL ENERGYDanliang Wen, Peng Huang, Yanyuan Ba and Xiaosheng ZhangUniversity of Electronic Science and Technology of China

11:15-11:30#310, SELF-POWERED ELECTROCHEMICAL INTERFACES FOR MATERIAL AND ENERGY CONVERSIONShuyan Gao and Zhong Lin WangHenan Normal University

11:30-11:45#384, A MICRO DEVICE ARRAY FOR REAL-TIME MONITORING CARDIAC CONTRACTIONLi Wang, Jun Chen, Weiguang Su, Anqing Li, Pengbo Liu and Chonghai XuQilu University of Technology

11:45-12:00#473, FABRICATION OF LASER SCRIBED GRAPHENE STRETCHABLE SUPERCAPACITOR BY LASER-ASSISTED TRANSFER PRINTING STRATEGYGuangyuan Xu, Yanan Chen, Fangshuai Chen, Yanfang Meng, Yinji Ma and Xue FengTsinghua University

12:00-12:15#621, DESIGN OF SELF-POWERED ENVIRONMENT MONITORING SENSOR BASED ON TEG AND TENGJianhao Liu, Changxin Liu, Cong Zhao, Huaan Li, Guanghao Qu, Zhuofan Mao and Zhenghui ZhouDalian Maritime University

12:15-12:30#625, SMART POWER MANAGEMENT MICROSYSTEM FOR DISTRIBUTED RENEWABLE ENERGY HARVESTINGLinhao Feng, Kai Huang, Mingxin Liu, Hongsheng Zhong and Xiaosheng ZhangPOWERCHINA SICHUAN ELECTRIC POWER ENGINEERING CO.,LTD.




50

13:30 - 15:45 Session IId: Soft&Flexibe Devices and Applications-I


Chair: Wenli ZHOU13:30-14:00 KEYNOTE SPEAKER: PRINTED FLEXIBLE/STRETCHABLE ELECTRONICS AND APPLICATIONSCui ZHENG Suzhou Institute of Nano-Tech and Nano-Bionics,CAS

14:00-14:15#102, A SELF-POWERED RETRACTABLE DEVICE BASED ON TRIBOELECTRIC NANOGENERATOR FOR SENSING OF JOINT AND SPINAL BENDING/STRETCHINGChengyu Li, Di Liu, Chaoqun Xu, Ziming Wang, Sheng Shu, Zhuoran Sun, Wei Tang and Zhonglin WangBeijing Institute of Nanoenergy and Nanosystems Chinese Academy of Sciences Huairou, Beijing

14:15-14:30#253, OPTICAL MICRO/NANOFIBER ENABLED COMPACT TACTILE SENSOR FOR HARDNESS DISCRIMINATIONYao Tang, Haitao Liu, Jing Pan, Zhang Zhang, Yue Xu, Lei Zhang and Limin TongZhejiang University

14:30-14:45#269, A FLEXIBLE TRIBOELECTRIC-ELECTROMAGNETIC HYBRIDIZED NANOGENERATORHaitao Deng, Zhiyong Wang, Yanyuan Ba, Xinran Zhang, Danliang Wen and Xiaosheng ZhangUniversity of electronic science and technology of china

14:45-15:00#322, A MULTIFUNCTIONAL ULTRASENSITIVE HYBRID OPTICAL SKINJing Pan, Lei Zhang and Limin TongZhe Jiang University

15:00-15:15#382, AN INTEGRATED STRETCHABLE SENSING PATCH FOR SIMULTANEOUSLY MONITORING OF PHYSIOLOGICAL AND BIOCHEMICAL PARAMETERSWenhao Pan, Shiyi Xu, Xiyu Mao, Tianyu Li, Qingpeng Cao, Xuesong Ye and Bo LiangZhejiang University

15:15-15:30#397, A TEXTILE TACTILE SENSOR FOR DUAL-MODE PROXIMITY/PRESSURE PERCEPTION IN SMART ROBOTICSQinhua Guo, Weiguan Zhang and Zhengchun PengShenzhen University

15:30-15:45


51

#651, MODELING AND SIMULATION OF FLEXIBLE VECTOR SHEAR FLOW SENSOR BASED ON COMSOL MULTIPHYSICSGuochang Liu, Wenping Cao, Haoyu Tan, Renxin Wang and Wendong ZhangNorth University of China

13:30 - 15:15 Session IIe: Micro/Nano Fluidic-II


Chair: Yan LI13:30-14:00KEYNOTE SPEAKER: MICROFLUIDIC LIQUID METAL FOR STRETCHABLE BIOMED-ELECTRONICSXingyu JIANG Southern University of Science and Technology

14:00-14:15#132, BUBBLE FORMATION IN NANOPORESAlberto Giacomello and Roland RothSapienza Università di Roma

14:15-14:30#336, LIQUID METAL-BASED MICROFLUIDIC FOR SPERM THERMOTAXIS.Yimo Yan, Ran Liu and Boxuan ZhangTsinghua University

14:30-14:45#371, MACRO-POROUS FERRO-GEL FOR REGULATION OF FLOW AND DRUG RELEASE IN BIO-MICROFLUIDICS USING STATIC MAGNETIC FIELDHongjie Jiang, Manuel Ochoa, Babak Ziaie and Yi MaSouth China University of Technology

14:45-15:00#613, BIOINSPIRED UNIVERSAL FLEXIBLE ELASTOMER-BASED MICROCHANNELSBaiyi Chen, Rongrong Zhang, Hexuan Fu and Xu HouXiamen University

15:00-15:15#697, DIGITAL MICROFLUIDICS FOR EFFICIENT AND ACCURATE MOLECULAR PROFILING OF SINGLE CIRCULATING TUMOR CELLSQingyu Ruan, Jian Yang, Fenxiang Zou, Lingling Wu, Zhi Zhu and Chaoyong YangXiamen University


52

13: 30 - 15: 30Invited Session IId: Multidisciplinary Frontier: Micro/Nano Energy and Smart Electronics


Chair: Yong ZHAO & Xiuhan LI13:30-13:502D MEMS METAMATERIAL MODULATORS FOR THZ COMMUNICATIONXiuhan LI Beijing jiaotong university

13:50-14:10FIBER STRUCTURED FLEXIBLE PRESSURE SENSOR AND ELECTRONIC SKINZhaoling LI Donghua University

14:10-14:30SELF-POWERED SENSING TECHNIQUES TOWARDS INTELLIGENT HUMAN-MACHINE INTERACTIONHuicong LIU Soochow University

14:30-14:50SURFACE PLASMON POLARITONS ENHANCED 2D-MATERIAL PHOTODETECTOR FOR INFRARED APPLICATIONWen HUANG University of Electronic Science and Technology of China

14:50-15:10REGULATION OF STRONG AND WEAK BONDS IN LITHIUM METAL BATTERIES TO ENHANCE THEIR PERFORMANCEYong ZHAO Henan University

15:10-15:30ACHIEVING ULTRAHIGH OUTPUT ENERGY DENSITY OF TRIBOELECTRIC NANOGENERATOR IN HIGH-PRESSURE GAS ENVIRONMENTYunlong ZI Chinese University of Hong Kong

13: 30 - 15: 30 Invited Session IIe: Electronic and Optoelectronic Fibers and Textiles


Chair: Fabien Sorin & Lei WEI13:30-13:50TUNING THE VISCOSITY FOR A MULTI-MATERIAL MULTI-FUNCTIONAL FIBERChong Hou Huazhong University of Science and Technology, China

13:50-14:10 NANOPARTICLES ENABLED DRAWING OF ULTRA-LONG METAL NANOWIRESXiaochun Li University of California, Los Angeles, USA


53

14:10-14:30ELECTRONIC MULTI-MATERIAL FIBER SENSORS AND ENERGY HARVESTERSFabien Sorin École Polytechnique Fédérale de Lausanne, Switzerland

14:30-14:50ADVANCED FUNCTIONAL SEMICONDUCTOR FIBERS AND TEXTILESLei Wei Nanyang Technological University, Singapore

14:50-15:10COMPUTATIONAL DESIGN OF NOVEL TWO-DIMENTIONAL SEMICONDUCTING SILICON CARBIDES FOR OPTOELECTRIC APPLICATIONSLiujiang Zhou University of Electronic Science and Technology of China,CHINA

15:10-15:30NANO-/MICRO-ENABLED MULTIMATERIAL FIBERS FOR WEARABLE AND BIOSENSING APPLICATIONSXiaoting Jia Virginia Tech., USA

13:30 - 15:30 Invited Session IIf: RF Micro/Nano Components and Systems


Chair: Joshua E.-Y. LEE & Cheng TU13:30-13:50MEMS RESONATORS WITH HIGH Q AND GOOD TEMPERATURE STABILITYGuoqiang WU Wuhan University

13:50-14:10NOVEL RF MEMS DEVICES USING ALGANGAN HETEROSTRUCTUREHaoshen ZHU South China University of Technology

14:10-14:30MECHANICALLY-FLEXIBLE RF MEMS RESONATORS ENABLED BY FLEXMEMS TECHNOLOGYMenglun ZHANG Tianjin University

14:30-14:50CHIP-SCALE ALN THIN FILM TRANSDUCERS AND RF WAKE-UP RECEIVERSTao WU ShanghaiTech University

14:50-15:10SOI-MEMS BASED RF MICROMACHINED SWITCHES FOR WIRELESS APPLICATIONSYong Zhu Griffith University, Australia

15:10-15:30INVESTIGATION ON ENERGY DAMPING MECHANISMS AND Q-ENHANCEMENT STRATEGIES IN PIEZOELECTRIC-ON-SILICON MEMS RESONATORSCheng TU University of Electronic Science and Technology of China


54

13:30 - 15:30 Session IIf: Nanoscale Robotics, Assembly, and Automation


Chair: Xi XIE13:30-14:00 KEYNOTE SPEAKER: SMALL-SCALE WIRELESS ROBOTS FOR MEDICAL APPLICATIONSMetin SITTI Max Planck Institute, MPI

14:00-14:15#159, ORDER AND INFORMATION IN THE PHASES OF SPINNING MICRO-DISKSWendong Wang, Gaurav Gardi, Paolo Malgaretti, Vimal Kishore and Metin SittiShanghai Jiao Tong University

14:15-14:30#200, SINGLE CELL MANIPULATION WITH ACOUSTICALLY POWERED MICROROBOTIC PLATFORMSXiaolong LuNanjing University of Aeronautics and Astronautics

14:30-14:45#251, ANISOTROPIC SPREADING OF DROPLETS ON STRIPED ELECTRODESWei Wang, Yanbo Xie and Antoine RiaudMOE Key Laboratory of Material Physics and Chemistry under Extraordinary Conditions, School of Physical Science and Technology, Northwestern Polytechnical University

14:45-15:00#293, 3D PRINTING OF MAGNETICALLY ACTUATED MINIATURE SOFT ROBOTSZhongbao Wang, Yigen Wu, Dezhi Wu and Zhenyin HaiDepartment of Mechanical and Electrical Engineering, Xiamen University

15:00-15:15#368, LOW-COST MICRO SEARCH-COIL MAGNETIC SENSOR WITH SELF CALIBRATION FOR THE INTERNET OF THINGSHadi Tavakkoli, Izhar, XU ZHAO and Yi-Kuen Leethe Department of Mechanical and Aerospace Engineering, The Hong Kong University of Science and Technology

15:15-15:30#417, SIMULATION OF THE SHAPE-DIRECTED AC DRIVEN DEFECTIVE MICROMOTORSRencheng Zhuang, Dekai Zhou, Xiaocong Chang and Longqiu LiHarbin Institute of Technology


55

13:30 - 15:30 Session IIg: Micro/Nano Sensors and Actuators-I


Chair: Xueyong WEI 13:30-14:00KEYNOTE SPEAKER: NANO SIZE-EFFECT ENHANCED SENSITIVITY OF GAS DETECTIONXixin LI Shanghai Institute of Microsystem and Information Technology

14:00-14:15#403, THERMALVOLTAGE MEASUREMENT AND MANIPULATION IN SINGLE-MOLECULE DEVICEJunyang Liu, Hang Chen, Ping Zhou, Wenqiang Cao and Wenjing HongXiamen University

14:15-14:30#461, A TUNGSTEN-RHENIUM THIN FILM THERMOCOUPLES SENSOR BASED ON ALN TRANSITION LAYERBian Tian, Bingfei Zhang, Zhongkai Zhang, Zhaojun LIiu, Jiangjiang Liu, Gong Cheng, Qijing Lin, Chen Wu, Peng Shi and Zhuangde JiangXi’an Jiaotong University

14:30-14:45#488, THIN FILM ANTIOXIDATIVE COATING FOR HIGH-TEMPERATURE THIN FILM SENSORS MADE OF POLYMER-DERIVED CERAMICS FOR HARSH ENVIRONMENTXiaochuan Pan, Zaifu Cui, Zhenyin Hai, Guochun Chen and Daoheng SunXiamen University

14:45-15:00#529, A NEW METHOD FOR CHARACTERIZATION OF SINGLE CELL USING SYSTEM IDENTIFICATIONShuang Ma, Wenxue Wang, Lianqing Liu, Yuechao Wang and Tianlu WangShenyang Institute of Automation, Chinese Academy of Sciences

15:00-15:15#622, REVERSIBLE IMMUNOAFFINITY INTERFACE ENABLES DYNAMIC MANIPULATION OF TRAPPING FORCE FOR ACCUMULATED CAPTURE AND EFFICIENT RELEASE OF CIRCULATING RARE CELLSXiaofeng Chen, Lingling Wu and Chaoyong YangXiamen University

15:15-15:30#631, SCALABLE SYNTHESIS OF SNO2 NANOSHEET ARRAYS ON CHIPS FOR ULTRALOW CONCENTRATION NO2 DETECTIONGaoqiang Niu, Changhui Zhao and Fei WangSouthern University of Science and Technology


56

15:30 - 16:30 Plenary Speaker IIc (Nobel Laureate)


Chair: Xiaoyu CAO

MOLECULES IN MOTION: FROM BIOLOGY TO CHEMISTRYJean Pierre SAUVAGE University of Strasbourg



Accept Posters from No.323 to No.526 include 256 & 314

16:30 - 17:00 学术格莱美讲座 -- 如何与编辑沟通？


主讲人 : 李彦教授（北京大学，ACS Nano 副主编）

17:00 - 18:20 Top Journal Session


17:00-17:10 ACS Nano Speaker: Yan LI17:10-17:20 Advanced Materials Speaker: Lu SHI17:20-17:30 Joule &Matter Speaker: Duan YAN&Jiqing SUN17:30-17:40 Light: Science and Applications Speaker: Yuhong BAI17:40-17:50 Microsystems & Nanoengineering/Springer Nature Speaker: Na LI17:50-18:00 National Science Review Speaker: Yanzhang ZENG18:00-18:10 Research Speaker: Yongchao SHI18:10-18:20 Sensors and Actuators A Speaker: Bin WU



57

Plenary Speaker

Semiconductor Nanowires for Optoelectronics ApplicationsChennupati Jagadish

ARC Centre of Excellence on Meta-Optical Systems, Research School of Physics, AustralianNational University, Canberra, ACT 2601, Australia

E-mail : [email protected] : https://physics.anu.edu.au/contact/people/profile.php?ID=106

AABBSSTTRRAACCTTSemiconductors have played an important role in the development of information and communicationstechnology, solar cells, solid state lighting. Nanowires are considered as building blocks for the nextgeneration electronics and optoelectronics. In this talk, I will introduce the importance of nanowiresand their potential applications and discuss about how these nanowires can be synthesized and how theshape, size and composition of the nanowires influence their structural and optical properties. I willpresent results on axial and radial heterostructures and how one can engineer the optical properties toobtain high performance lasers, THz detectors, solar cells and to engineer neuronal networks. Futureprospects of the semiconductor nanowires will be discussed.

BBIIOOGGRRAAPPHHYYProfessor Jagadish is a Distinguished Professor and Head of Semiconductor Optoelectronics and

Nanotechnology Group in the Research School of Physics, Australian National University. He hasserved as Vice-President and Secretary Physical Sciences of the Australian Academy of Science during2012-2016. He is currently serving as Past President of IEEE Photonics Society, Past President ofAustralian Materials Research Society. Prof. Jagadish is the Editor-in-Chief of Applied PhysicsReviews, Editor of 3 book series and serves on editorial boards of 19 other journals. He has publishedmore than 950 research papers (680 journal papers), holds 5 US patents, co-authored a book, co-edited15 books and edited 12 conference proceedings and 18 special issues of Journals. He has won the 2000IEEE Millennium Medal and received Distinguished Lecturer awards from IEEE NTC, IEEE LEOSand IEEE EDS. He is a Foreign Member of US National Academy of Engineering, Fellow of theAustralian Academy of Science, Australian Academy of Technological Sciences and Engineering, TheWorld Academy of Sciences, US National Academy of Inventors, Indian National Science Academy,Indian National Academy of Engineering, Indian Academy of Sciences, National Academy of Sciencesof India, IEEE, APS, MRS, OSA, AVS, ECS, SPIE, AAAS, FEMA, APAM, IoP (UK), IET (UK), IoN(UK) and the AIP. He received many awards including IEEE Pioneer Award in Nanotechnology, IEEEPhotonics Society Engineering Achievement Award, OSA Nick Holonyak Jr Award, Welker Award,IUMRS Somiya Award, UNESCO medal for his contributions to the development of nanoscience andnanotechnologies and Lyle medal from Australian Academy of Science for his contributions to Physics,Beattie Steel Medal from Australian Optical Society and IEEE Education Award from ElectronDevices Society. He has received Australia’s highest civilian honor, AC, Companion of the Order ofAustralia, from the Australian Government.


58

Nanomaterials of High-Surface Energy for Efficient ElectrochemicalEnergy Conversion and Storage

Shi-Gang Sun

State Key Laboratory of Physical Chemistry of Solid Surfaces, College of Chemistry andChemical Engineering, Xiamen University, Xiamen 361005, China

E-mail: [email protected] : https://pcoss.xmu.edu.cn/en/info/1084/1082.htm;http://www.sungroup.ac/index.asp

ABSTRACT

Electrochemical energy conversion and storage paly a major role in mobile electronic devices, electricvehicles, renewable energy development and utilization, and are also widely applied in informationtechnology and NEMS. The fast development of above application scenarios is raising increasingdemands on electrochemical energy conversion and storage, including higher energy density, higherpower density, higher safety, longer lifespan, lower cost and wider window of operation temperature.To fulfill this requirement and to promote the reduction of carbon emission, the key issue is todevelop/exploit high-efficient electrocatalysts for fuel cells and high-performant electrode materials forbatteries. The nanomaterials of high-surface energy possesses an open surface structure, and areappropriate high-efficient electrocatalysts with high-density of catalytic active sites and high-performantelectrode materials with high-density of transportation channels. We have focused, in recent years, onstructural design and controlled synthesis of nanomaterials of high-surface energy for both fuel cellcatalysts and lithium batterie electrodes, the main progresses will be reported at the presentation.

References:

1. N. Tian et al. Science, 2007, 316, 732.2. N. F. Yu, et al. Angew. Chem. Int. Ed. 2014, 53, 5097.3. J. Xiao et al. J. Am. Chem. Soc. 2013, 135, 18754.4. Z.Y. Zhou et al. Chem. Soc. Rev. 2011, 40, 4167. 5.G. Z. Wei et al. Adv. Mater. 2010, 22, 4364.6. F. Fu et al. J. Mater. Chem. A, 2013, 1, 3860.7. T. Sheng et al. Acc. Chem. Res. 2016, 49, 2569.8. Y.C. Wang et al. ChemElectroChem. 2018, 5, 1914.9. S.J, Zhang, et al. Small, 2018, 14, 1801054.10. X.C. Liu, et al. Nano Energy, 2018, 50, 685.11. N.F. Yu, et al. ACS Catal. 2019, 9, 3144.12. C. Xiao, et al. Joule, 2020, 4, 2562.


59

BIOGRAPHY

Shi-Gang Sun obtained his Bachelor of Science from Xiamen University, China, in 1982, Doctoratd’Etat (Docteur ès Sciences Physiques) from Université Pierre et Marie Curie (Paris VI), France, in1986. After one-year post-doctoral research in the Laboratoire d’Electrochimie Interfaciale du CNRS,France, he returned to China by the end of 1987, and served as associate professor and later full professorin 1991 at the Department of Chemistry of Xiamen University till now. His main research interests ofProf. Sun include Electrocatalysis, Electrochemical SurfaceScience, Spectroelectrochemistry,Nanomaterials and Chemical power sources.

Prof. Sun is Academician of Chinese Academy of Sciences, fellow of International Society ofElectrochemistry (ISE) and fellow of Royal Society of Chemistry (RSC). He has been awarded the“Brian Conway Prize” from International Society of Electrochemistry (ISE), “Distinguished ContributionAward” from the Chinese Society of Electrochemistry, “Le prix Franco-Chinois 2014-2015” jointly fromSociété Chimique de France (SCF) and Chinese Chemical Society (CCS), and the State Natural ScienceAward (2nd Degree) of China, “Achievement award” from Internatioanl Automotive Lithium BatteryAssocietion, and “Achievement award in spectroscopy” from Chinese Chemical Society and ChinesOptics Society. He is now editorial board member of Journal of Electroanalytical Chemistry, FunctionalMaterials Letters, ACS Energy Letters, Electrochemical Energy Review, National Science Review,Applied Chemistry and Journal of Solid State Electrochemistry, and is serving as associate editor toElectrochimica Acta, Spectral Analysis and Spectroscopy, Chinese Journal of Chemical Education, ActaChimica Sinica, and editor-in-chief of the Journal of Electrochemistry.


60

Molecules in Motion: From Biology to Chemistry

Jean-Pierre Sauvage

Institut de Science et d'Ingénierie Supramoléculaires (ISIS), University

of Strasbourg, F-67000 Strasbourg, France


ABSTRACTAn important family of molecules is that of interlocking or threaded rings named catenanes and

rotaxanes respectively. The simplest catenane, a [2] catenane, consists of two interlocking rings.Rotaxanes consist of rings threaded by acyclic fragments (axes). These compounds played animportant role in the emergence of the field named "molecular machines". This field has experienceda spectacular development, in relation to molecular devices at the nanometric level or as mimics ofbiological motors. In biology, motor proteins are omnipresent and crucial in a large variety ofprocesses essential to life (ATPase, a rotary motor, being particularly impressive). Numerous examplesof artificial molecular machines are based on simple or complex rotaxanes or catenanes. Non-interlocking ring compounds have also been used. In particular, light-driven rotary motors have beencreated by the team of Feringa. Finally, potential applications and future developments of this activeresearch area will be mentioned.

BIOGRAPHYSince the beginning of the 80s, Sauvage and his group have been interested in various fields including :(i) coordination photochemistry and solar energy conversion, (ii) CO2 electrocatalytic reduction, (iii)chemical topology: catenanes, knots and rotaxanes, (iv) multifunctional ruthenium and iridiumcomplexes for light-induced charge separation, (v) multifunctional porphyrins as models of thephotosynthetic reaction centre as well as (vi) molecular switches and molecular machine prototypessuch as a "swinging catenane", "muscles" or "compressors".Sauvage received many awards.

The most recent ones are listed below :2014 "Grand Prix de la Fondation de la Maison de la Chimie"2016 Nobel Prize in Chemistry with J. Fraser Stoddart and Ben Feringa

Honorary Fellow of the Royal Society of Chemistry (U-K)Foreign Member of the Russian Academy of Sciences

2017 Grand Officier de l'Ordre National du MériteHonorary Doctorate, University of Athens (Greece)

2018 Honorary Doctorate, Uppsala University (Sweden)2019 Honorary Doctorate, Universitat Politècnica de València (Spain)

Foreign Associate of the U.S. National Academy of Sciences2020 The Order of the Rising Sun, Gold and Silver Star, Japan


61

Keynote Speaker

Liquid Metal Nano ElectronicsJing Liu

Department of Biomedical Engineering, School of Medicine, Tsinghua University, Beijing100084, China& Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing100190, China

E-mail : [email protected] : www.liquidmetallab.com

ABSTRACTConventional micro/nano electronics are generally complex, time, material and energy consuming tomake. From an alternative, the recently initiated direct printing of electronics and then making offunctional devices via the liquid metal ink and its allied material and machines. Such basic way alsoopens big potential towards straightforward fabrication of ever smaller circuits, say the nanoelectronics and the MEMS and NEMS thus involved. This talk is dedicated to present an overview andperspective on the fundamentals and technological endeavors of the new horizontal liquid metalprinted nano electronics. The challenges thus raised and the opportunities offered from the nanosciencewill be clarified. Particularly, a group of key strategies through nanotechnologies to innovate andenhance various liquid metal electronic inks, printing machines as well as new generationtransformable nano electronics will be illustrated. The fundamental mechanisms lying behind will beinterpreted. Further, several representative desktop printing methods developed in the lab will be takenas examples to illustrate their pervasive adaptability in quickly making nano electronics and futureending user NEMS devices. Typical utilization of high performance liquid metal printed nanoelectronics in diverse situations such as tiny soft device, biomedical health care system with highsensitivity, smart home appliances, and advanced printed MEMS/NEMS etc. will be discussed.Prospects within the area spanning from revolutionizing material, machine to new conceptual practicesetc. will be given.

BIOGRAPHYJing Liu is a jointly appointed Professor of Tsinghua University (THU) and Technical Institute ofPhysics and Chemistry, Chinese Academy of Sciences. He received his double bachelor’s degrees (B.E.in Engineering & B.S. in Physics) in 1992, and Ph.D. (in Engineering and Biomedicine) in 1996, allfrom THU. Dr. Liu had ever been a Post-Doctorial Research Associate at Purdue University andSenior Visiting Scholar at Massachusetts Institute of Technology. He works intensively at theinterdisciplinary areas among liquid metal, biomedical engineering and thermal science and haspublished 16 popular books on the cutting edge frontiers, 21 invited book chapters and more than 500peer reviewed journal articles (over 30 selected as cover or back cover story), 200 issued inventionpatents. Dr. Liu pioneered a group of very fundamental discoveries and technological breakthrough onliquid metals which were frequently featured over the world. Many of his inventions have been widelyused in industry and by the society. He is a recipient of numerous awards like: The William BegellMedal, 2015 R&D 100 Award Finalist etc.


62

Wavelength conversion through plasmon-coupled surface statesMona Jarrahi

Electrical and Computer Engineering Department, University of California Los Angeles, 90095,CA, USA

E-mail : [email protected] : https://www.seas.ucla.edu/~mjarrahi/mjarrahi.html

ABSTRACTSurface states generally degrade semiconductor device performance by raising the charge injectionbarrier height, introducing localized trap states, inducing surface leakage current, and altering theelectric potential. Therefore, there has been an endless effort to use various surface passivationtreatments to suppress the undesirable impacts of the surface states. We show that the giant built-inelectric field created by the surface states can be harnessed to enable passive wavelength conversionwithout utilizing any nonlinear optical phenomena. Photo-excited surface plasmons are coupled to thesurface states to generate an electron gas, which is routed to a nanoantenna array through the giantelectric field created by the surface states. The induced current on the nanoantennas, which containsmixing product of different optical frequency components, generates radiation at the beat frequenciesof the incident photons. We utilize the unprecedented functionalities of plasmon-coupled surface statesto demonstrate passive wavelength conversion of nanojoule optical pulses at a 1550 nm centerwavelength to terahertz regime with record-high efficiencies that exceed nonlinear optical methods by4-orders of magnitude. The presented scheme can be used for optical wavelength conversion todifferent parts of the electromagnetic spectrum ranging from microwave to infrared regimes by usingappropriate optical beat frequencies.

BIOGRAPHYMona Jarrahi received her B.S. degree in Electrical Engineering from Sharif University of Technologyin 2000 and her M.S. and Ph.D. degrees in Electrical Engineering from Stanford University in 2003and 2007. She served as a Postdoctoral Scholar at the University of California Berkeley from 2007 to2008. After serving as an Assistant Professor at the University of Michigan Ann Arbor, she joined theUniversity of California Los Angeles in 2013 where she is currently a Professor of ElectricalEngineering and the Director of the Terahertz Electronics Laboratory. Prof. Jarrahi has madesignificant contributions to the development of ultrafast electronic and optoelectronic devices andintegrated systems for terahertz, infrared, and millimeter-wave sensing, imaging, computing, andcommunication systems by utilizing novel materials, nanostructures, and quantum well structures aswell as innovative plasmonic and optical concepts. The outcomes of her research have appeared in 200publications and 160 keynote/plenary/invited talks and have received a significant amount of attentionfrom scientific news outlets including Huffington Post, Popular Mechanics, EE Times, IEEE Spectrum,Optics & Photonics News Magazine, Laser Focus world, and Photonics Spectra Magazine. Herscientific achievements have been recognized by several international and national prestigious awardsincluding the Presidential Early Career Award for Scientists and Engineers (PECASE); FriedrichWilhelm Bessel Research Award from Alexander von Humboldt Foundation; Moore Inventor

Fellowship from the Gordon and Betty Moore Foundation; Kavli Fellowship by the USA NationalAcademy of Sciences (NAS), Grainger Foundation Frontiers of Engineering Award from the USANational Academy of Engineering (NAE); Breakthrough Award from Popular Mechanics Magazine;Research Award from Okawa Foundation; Early Career Award in Nanotechnology from the IEEENanotechnology Council; Outstanding Young Engineer Award from the IEEE Microwave Theory andTechniques Society; Booker Fellowship from the USA National Committee of the International Unionof Radio Science; Lot Shafai Mid-Career Distinguished Achievement Award from the IEEE Antennasand Propagation Society; Early Career Award from the USA National Science Foundation (NSF);Young Investigator Awards from the USA Office of Naval Research (ONR), the Army ResearchOffice (ARO), and the Defense Advanced Research Projects Agency (DARPA); the Elizabeth C.Crosby Research Award from the University of Michigan; and the Distinguished Alumni Award fromSharif University of Technology. Prof. Jarrahi is a Fellow of IEEE, OSA, SPIE, and IOP societies andhas served as a distinguished lecturer of IEEE, traveling lecturer of OSA, and visiting lecturer of SPIEsocieties.


63

Flexible Bionic Intelligent Perception SystemJian-Hua Zhang

Key Laboratory of Advanced Display and System Application, Ministry of Education, ShanghaiUniversity,Shanghai 200072, China


ABSTRACTTo construct an intelligent perception system with the same function as the organism is promising inthe application of personal health surveillance, man-machine interaction, and artificial electronic skin.The perception function of the organism includes both the acquisition of the external informationthrough sensing organs and the cognitive competence by means of learning, judgment, and reasoningof the nervous system. Thus, an intelligent perception system mainly depends on two basic units:flexible sensor and artificial synapse. However, the device structure and fabrication process of flexiblesensor hampers not only the further improvement of its sensing properties, including the sensitivity andlinearity range, but also the massive large-area manufacture in the form of high-density arrays. Interms of artificial synapse, the search for new material systems and device structures to simulatesynaptic properties remains challenges.

This talk will introduce flexible piezoresistive pressure sensors with highly sensitivity and ultrabroadlinear response range based on biomimetically textured porous materials and pollen-shapedhierarchical structure. On the other hand, taking advantage of high-density manufacturing and signalamplification of thin film transistor (TFT), we developed the active electrode array based on TFT torealize the high resolution perception of human EMG signals. Meanwhile, kinds of synaptic transistorsbased on TFT with high migration rate were designed and prepared to simulate the memory property ofthe human brain. These works provide the innovative application of TFT in the field of intelligentperception, which are promising for the application of medical physiological signal, man-machineinteraction, etc.

BIOGRAPHYJian-Hua Zhang is currently a Professor in the Key Laboratory of Advanced Display and SystemApplication, Ministry of Education, Shanghai University, China. She received the Ph.D. degree ofengineering in 1999 the Shanghai University, China. During the following two years, she worked at theCity University of Hong Kong in Hongkong and Heriot-Watt University, UK, performing postdoctoralstudies.

Since 2005, she took the Professor position in Key Laboratory of Advanced Display and SystemApplication, Ministry of Education, Shanghai University, China. She was awarded as the NationalScience Fund for Outstanding Young Scholars (2018). Her research activities were awarded the firstprize of technical invention in Shanghai (2014), the first prize of science and technology progress inShanghai twice (2016, 2020). She is now an editor of Journal of Bionic Engineering and Advance InManufacturing, and chairman in China OLED technical committee in Society for Information Display(SID). Her group endeavors on the development of semiconductor manufacturing and packagingprocess and its applications in flexible intelligent display. Prof. Zhang is active in the field ofheterogeneous integration of integrated circuit (IC), display technology and sensor.


64

Printed flexible/stretchable electronics and applications

Zheng Cui

Suzhou Institute of Nanotech and Nanobionics, Chinese Academy of Sciences, P.R. China

E-mail : [email protected] : www.perc-sinano.com

ABSTRACTLithography-based patterning and subtractive pattern transfer have been the dominant fabricationtechnologies for the fabrication of either integrated circuit chips or electronic circuit boards. In the pastdecade, printing fabrication has risen to prominence because of its additive nature. Printing enablespatterning in large area and at low cost, can be of high throughput and less pollutant to environment,and most interestingly, independent of substrate properties. For the fabrication of a flexible orstretchable electronic system, conventional lithographic patterning has to rely on a rigid carriersubstrate to perform the fabrication processes, printing can directly construct circuit patterns on aflexible or stretchable substrate. The rapid development in solution forms of various functionalelectronic materials has made printing as a preferred technology for the fabrication of flexible orstretchable electronics.

The author’s group has been engaged in the development of printed flexible and stretchable electronicstechnologies since 2009 when the Printable Electronics Research Center (PERC) was setup. In the past10 years, printable conductors, semiconductors and light emitting inks have been developed. Thin-filmtransistors, light emitting devices, sensors and solar cells have been made by inkjet printing, screenprinting or an innovative hybrid printing technique. The printed flexible/stretchable electronics havefound applications in touch panels, RFID tags, wearable sensors and smart textiles as shown in Figure1.

BIOGRAPHYProfessor Zheng Cui had his PhD in 1988 and worked in the UK for 20 years, first at CambridgeUniversity and then at Rutherford Appleton Laboratory in the field of micro and nanofabricationtechnologies. In 2009, he returned to China and setup the Printable Electronics Research Center(PERC). The Center has established research themes from electronic ink formulation to printingprocess development with applications including printed solar cells, printed thin-film transistors,printed organic light emission, and printed flexible/stretchable/wearable electronics. He has authoredand coauthored over 280 technical papers, 7 books on the subject of micro and nanofaricationtechnologies and 4 books on the subject of printed electronics. Some of the developed technologies atPERC have been transferred to industry.


65

Microfluidic Liquid Metal for Stretchable Biomed-electronics

Xingyu JIANG

Southern University of Science and Technology, Shenzhen, China

E-mail : [email protected] : http://www.jiangxingyu.com

ABSTRACTOur interest in making stretchable bioelectronics stems from our work in microfluidic chips that allowmany biomedical functions, such as diagnosis, screening/synthesis of therapeutics, as well as tissueengineering. Integrating liquid metal and elastic polymer-based microfluidic chips into stretchableelectronic circuits, we find that these stretchable circuits can dramatically expand the capability ofmicro-/nano-scale structures in a variety of biomedical applications, such as biomedical sensing, tissueengineering, drug discovery and biological computing. For example, a fully stretchable blood oxygensensor and a fully stretchable sweat detection device can be prepared by using liquid metal elasticpolymer microfluidic devices. These new materials can also be used to prepare healable electronicblood vessels and vascular stents that allow gene therapy on targeted live tissues.

BIOGRAPHYXingyu Jiang is a Chair Professor at the Southern University of Science and Technology, Shenzhen,

China. He obtained his BS at the University of Chicago (1999) and PhD at Harvard University(Chemistry, 2004). In 2005, he joined the National Center for NanoScience and Technology. Hemoved to the Southern University of Science and Technology in 2018. His research interests includemicrofluidics and nanomedicine. He was awarded the National Science Foundation of China’sDistinguished Young Scholars Award, the Human Frontier Science Program Young InvestigatorAward, and Tencent ExplorePrize. He is a Fellow of the Royal Society of Chemistry (UK) andAmerican Institute of Medical and Biological Engineering. He has published over 300 peer-reviewedpapers.


66

Small-scale Wireless Robots for Medical ApplicationsMetin Sitti

Director, Max Planck Institute for Intelligent Systems, Stuttgart, GermanyProfessor, Department of Information Technology and Electrical Engineering, ETHZurich, SwitzerlandProfessor, Koc University, School of Medicine & College of Engineering, Istanbul, Turkey

E-mail: [email protected]: http://pi.is.mpg.de

ABSTRACT

Wireless small-scale medical robots have the potential to revolutionize healthcare, since they have the uniquecapability of non-invasive access and operation inside hard-to-reach and unprecedented small spaces inside thehuman body. However, due to miniaturization limitations on on-board actuation, powering, sensing, computing andcommunication, new methods need to be introduced in creating such tiny robots. First, cell-driven biohybridmicrorobots are proposed, where a synthetic microrobot body is driven by attached biological microorganisms(bacteria and microalgae) or cells (macrophages). Such biohybrid microswimmers loaded with drugs are shown invitro to deliver drugs actively and locally to cancerous tissues. Next, external magnetic fields are used to actuate andsteer rolling microrobots, spinning helical microswimmers and soft-bodied magnetic millirobots. Inspired by soft-bodied small animals, soft millirobots are demonstrated to be able to have seven locomotion modalities to be able tonavigate in complex environments, such as inside the human body. Also, a baby jellyfish-inspired soft swimmer isshown to realize many diverse functions by controlling the local fluidic flow around them towards medical use.

BIOGRAPHY

Professor Sitti has pioneered many research areas, including small-scale wireless medical robots, gecko-inspiredmicrofiber adhesives, bioinspired miniature robot locomotion and physical intelligence. He was a professor inDepartment of Mechanical Engineering and Robotics Institute at Carnegie Mellon University in Pittsburgh, USAduring 2002-2014 and a research scientist at University of California at Berkeley during 1999-2002. He is currentlydirector at Max Planck Institute for Intelligent Systems in Stuttgart, Germany since 2014. As side academicappointments, he is a professor in Department of Information Technology and Electrical Engineering at ETH Zurich,Switzerland and professor in School of Medicine & College of Engineering at Koç University, Turkey. He receivedthe BSc (1992) and MSc (1994) degrees in electrical and electronics engineering from Boğaziçi University, Turkey,and the PhD degree (1999) in electrical engineering from the University of Tokyo, Japan. He is an IEEE Fellow. Hefounded nanoGriptech Inc. in 2012 to commercialize his lab’s gecko-inspired microfiber adhesive technology,branded as Setex®. He is an IEEE Fellow. He has published over 460 peer-reviewed articles, 2 books and over 15patents.

Prof. Sitti received the Breakthrough of the Year Award in the Falling Walls World Science Summit (2020), ERCAdvanced Grant (2019), Rahmi Koç Science Prize (2018), SPIE Nanoengineering Pioneer Award (2011) and NSFCAREER Award (2005). He has won over fifteen awards at major conferences, such as Best Paper Award inRobotics Science and Systems Conference (2019), IEEE/ASME Best Mechatronics Paper Award (2014) and BestPaper Award in the IEEE/RSJ Intelligent Robots and Systems Conference (2009, 1998). He is the editor-in-chief ofProgress in Biomedical Engineering and Journal of Micro-Bio Robotics and associate editor in Science Advances andExtreme Mechanics Letters journals.


67

Nano Size-effect Enhanced Sensitivity of Gas Detection

Xinxin Li

State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and InformationTechnology,Chinese Academy of Sciences, Shanghai 200050, China


AABBSSTTRRAACCTT

Nano size-effect is the soul of nanoscience and technology, where the feature nano-scale dimensiondominates the properties of the nanomaterial. Recently more and more functionalized nanomaterialsare proposed and developed for biochemical sensing applications. Beyond the increase in specificsurface area, nanostructure can exhibit more significant property change when the solid geometry isshrunk down to nano-scale. Along with the size decrease, the atom/molecule number at surface iscomparable to that in the body and the former may be dominant in surface activity. The author’s grouphave worked on the topic for many years and quite a lot of nano size-effects on sensitivity ofbiochemical nanosensors have been found experimentally and analytically revealed by usingquantitative characterization of thermodynamic/kinetic parameters, which reflect the essential ofphenomenal behavior of the sensing nanomaterial. The presentation will introduce a series ofnanosensors developed in the group by using ZnO nanowires.

BBIIOOGGRRAAPPHHYYProf. Xinxin Li received his BS degree from Tsinghua University, PhD degree from Fudan University.

He ever worked in HKUST, Nanyang Technological University of Singapore, Tohoku University ofJapan. In MEMS and transducer technology field, Prof. Xinxin Li is a senior scientist. He is nowserving as a professor and Director of the State Key Lab of Transducers Technology, ShanghaiInstitute of Microsystem and Information Technology, Chinese Academy of Sciences. He receivedNational Science Fund for Distinguished Youth Scholars in 2007.He has authored/co-authored more than 300 SCI journal papers. He became the first IEEE MEMS TPCmember from mainland China and totally served the committee for four years. From 2011 to 2019, healso served as the only International Steering Committee member from mainland China for theTransducers conference and he has authored/co-authored 72 papers there (including an invitedpresentation in 2009 at Denver, USA). He has invented more than 100 patents on MEMS and sensortechnology, including more than 30 licensed to industrial field for volume production. He is nowserving as associate editor or editorial member for the SCI journals of J Micromech Microeng,Scientific Reports, Microsyst & Nanoeng, and, Micromachines.


68

Day 3 - Wednesday, 28 April

08:30 - 09:15 Plenary Speaker IIIa


Chair: Xu HOU

NANO-CALORIMETRY: A NEW TOOL FOR MATERIALS DEVELOPMENTJoost VLASSAK Harvard University

09:15 - 10:00 Plenary Speaker IIIb


Chair: Xiaosheng ZHANG

TRANSFORMATIVE IMPACT OF PRINTABLE SOLAR CELLS FOR MEETING, NEXT-GENERATION ENERGY DEMANDSAlex JEN City University of Hong Kong


10:15 - 12:15 Session IIIa: MEMS/NEMS-III


Chair: Xiaosheng ZHANG 10:15-10:45KEYNOTE SPEAKER: APPLICATIONS OF FLEXIBLE INORGANIC THIN-FILM DEVICES IN BIOELECTRONICSYuan LIN University of Electronic Science and Technology of China

10:45-11:00#30, AN ON-CHIP INDUCTIVE-CAPACITIVE SENSOR FOR THE DETECTION OF WEAR DEBRIS AND AIR BUBBLES IN HYDRAULIC OILHaotian Shi, Hongpeng Zhang, Wei Li, Zhiwei Xu, Laihao Ma, Yucai Xie and Dian HuoDalian Maritime University

11:00-11:15#229, A MODE-LOCALIZED MASS SENSOR WITH DIFFERENT ORDER MODES COUPLING INDUCED BY ASYMMETRIC STRUCTURESJiahao Song, Jian Zhao, Ming Lyu, Pengbo Liu, Heng Zhong, Xianze Zheng and Yinghai Tang


69

Dalian University of Technology

11:15-11:30#257, MODELING OF MAGNETIC SENSOR BASED ON BAW MAGNETOELECTRIC COUPLING MICRO-HETEROSTRUCTURESi Chen, Wanchun Ren, Junru Li, Chunrui Peng and Yang GaoSouthwest University of Science and Technology

11:30-11:45#270, A BREATHING MODE DUAL-RING RESONATOR WITH HIGH QUALITY FACTOR OPERATING AT ATMOSPHERE PRESSUREWen Chen, Wenhan Jia and Guoqiang WuWuhan University

11:45-12:00#321, THE 3D CAPACITANCE MODELING OF NON-PARALLEL PLATES BASED ON CONFORMAL MAPPINGYue Feng, Zilong Zhou, Wenlong Wang, Zehong Rao and Yanhui HanBeijing Insititute of Technology

12:00-12:15#583, ALN CONTOUR MODE RESONATORS WITH HALF CIRCLE SHAPED REFLECTORSZhifang Luo, shuai shao and Tao WuShanghaiTech University

10:15 - 12:15 Session IIIb: Soft&Flexibe Devices and Applications-II


Chair: Libo GAO 10:15-10:45KEYNOTE SPEAKER: VERSATILE E-PRINTING FOR FLEXIBLE ELECTRONICSYongan HUANG Huazhong University of Science and Technology

10:45-11:00#129, A HIGH-RESOLUTION SELF-POWERED FLEXIBLE PRESSURE SENSOR MATRIX BASED ON ZNO NANOWIRESQifeng Lu, Fuqin Sun, Lili Li, Yuanyuan Bai, Zihao Wang and Ting ZhangSuzhou Institute of Nano-Tech and Nano-Bionics,CAS

11:00-11:15#134, DESIGN AND PREPARATION OF A MICROFLUIDIC SYSTEM FOR STRETCHING OF CELLS IN TOPOGRAPHIC MICROSTRUCTURESYingning He, Yuqian Yang, Yexin Gu, Tianjiao Mao, Yue Yu and Jiandong DingFudan University

11:15-11:30#146, DYNAMIC SIMULATION OF NANOGENERATOR BASED ON FINITE ELEMENT


70

MODEL COUPLED WITH LUMPED PARAMETER ELEMENTSYao Chu, Ruixing Han, Huiliang Liu, Xiongying Ye and Fei TangTsinghua University

11:30-11:45#211, STOCHASTIC ANALYSIS OF THE ELCTROTHERMAL MICROACTUATOR WITH FABRICATION ERRORHaotian Liu, Hao Chen, Yun Cao, Weirong Nie, Zhanwen Xi and Shenghong LeiNanjing University of Science and Technology

11:45-12:00#218, DIRECT INK WRITING OF SOFT MICROSCALE STRUCTURES USING PURE POLYDIMETHYLSILOXANEHuyue Chen, Qifan Ding, Wen-Ming Zhang and Lei ShaoUniversity of Michigan – Shanghai Jiao Tong University Joint Institute

12:00-12:15#219, ALL-PRINTED FLEXIBLE TACTILE SENSORS WITH HIGH SENSITIVITY AND LARGE DETECTION RANGEQifan Ding, Huyue Chen, Wenming Zhang and Lei ShaoShanghai Jiaotong University

10:15 - 12:15Invited Session IIIa: Multidisciplinary Frontier: Soft Rubbery Electronics and Stretchable Integrated Systems


Chair: Cunjiang YU & Wei LAN10:15-10:35E-SKINS WITH SUPERHIGH PRESSURE RESOLUTION AND TOUGH INTERFACESChuanfei GUO Southern University of Science and Technology

10:35-10:55SOFT RUBBERY ELECTRONICSCunjiang YU University of Houston

10:55-11:15THREE-DIMENSIONAL SOFT ELECTRONIC SYSTEMS FOR BIOMEDICINEMengdi HAN Peking University

11:15-11:35DESIGN OF ARTIFICIAL SYNAPSES AND SENSORIMOTOR NEURONSWentao XU Nankai University

11:35-11:55RATIONAL DESIGN OF DIELECTRIC MATERIALS FOR FLEXIBLE CAPACITIVE PRESSURE SENSING COATINGSZhuo LI Fudan University


71

11:55-12:15MECHANICS-DRIVEN DESIGNS OF SOFT NETWORK MATERIALS AND THEIR APPLICATIONS IN STRETCHABLE INTEGRATED DEVICESYihui ZHANG Tsinghua University

10:15 - 12:15Invited Session IIIb: Multidisciplinary Frontier: Nanoplasmonics and Biosensors


Chair: Xiangwei ZHAO10:15-10:35 SURFACE PLASMOINC ENHANCED EXCITON-POLARITON EFFECT IN SEMICONDUCTOR NANOWIRESQing ZHANG Peking University

10:35-10:55OPTICAL SUPEROSCILLATION FOR LABEL-FREE SUBDIFFRACTION BIOIMAGINGGuanghui Yuan Nanyang Technological Univeristy, Singapore

10:55-11:15IMPLANTABLE BIOCHIP FOR MANAGEMENT OF INFLAMMATION IN LUNG CANCER MODELGuozhen Liu The University of New South Wales

11:15-11:35IN-VITRO DIAGNOSTIC ASSAYS ENABLED BY PLASMON-ENHANCED PHOTOACOUSTIC DETECTIONMeng Lu Iowa State University

11:35-11:552D NANOMATERIALS ENHANCED SURFACE PLASMON RESONANCE FOR SENSING APPLICATIONSShuwen Zeng CNRS/University of Limoges

11:55-12:15HYBRID METAL/DIELECTRIC NANOSYSTEMS AND APPLICATIONSYali Sun ITMO University

10:15 - 12:15Invited Session IIIc: Flexible and Wearable Microsystems for Sensing and Actuation


Chair: Zhengchun PENG & Xinge YU10:15-10:35 TRIGGER-DETACHABLE HYDROGEL ADHESIVES FOR BIOELECTRONIC INTERFACES


72

Ji LIU Southern University of Science and Technology

10:35-10:55MATERIALS AND DEVICES DESIGNS FOR BIOELECTRONIC MEDICINESJie ZHAO Fudan University

10:55-11:15BIODEGRADABLE MATERIALS FOR ELECTRONIC MEDICINE AND BIOSENSORSLan YIN Tsinghua University

11:15-11:35MICROSCALE OPTOELECTRONIC DEVICES FOR BIOLOGICAL MODULATION AND SENSINGXing SHENG Tsinghua University

11:35-11:55HYBRIDIZED AND COUPLED NANOGENERATORSYa YANG Beijing Institute of Nanoenergy and Nanosystems, CAS

11:55-12:15DEFORMABLE STRUCTURES FOR FLEXIBLE SMART MATERIALSZunfeng LIU Nankai University

10:15 - 12:30 Session IIIc: Micro/Nano Sensors and Actuators-IIVenue: Conference Room No.07 (3F)

Chair: Tie LI 10:15-10:45KEYNOTE SPEAKER: HETEROGENEOUS INTEGRATION FOR RF APPLICATIONJian ZHU Nanjing Electronic Devices Institute

10:45-11:00#278, CHITOSAN/GRAPHENE OXIDE/MOS2/AUNPS MODIFIED ELECTROCHEMICAL SENSOR FOR TRACE MERCURY DETECTIONRi Wang, Chenyu Xiong, Yong Xie, Mingjie Han, Yuhao Xu, Chao Bian and Shanhong XiaState Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences

11:00-11:15#306, VISUAL CHEMICAL DETECTION MECHANISM BY A LIQUID GATING SYSTEM WITH DIPOLE-INDUCED INTERFACIAL MOLECULAR RECONFIGURATIONYi Fan and Xu HouXiamen University

11:15-11:30#362, QUANTITATIVE GLUCOSE MEASUREMENT ON A SYNTHETIC PAPER TEST STRIPWeijin Guo, Jonas Hansson and Wouter van der WijngaartKTH Royal Institute of Technology, Sweden


73

11:30-11:45#436, IMPROVED DESIGN OF POLYMER MICROMACHINED TRANSMISSION FOR FLAPPING WING NANO AIR VEHICLERASHMI KANT, Daisuke Ishihara, Ryotaro Suetsugu, Sunao Murakami and Prakasha RamegowdaKyushu Institute of Technology

11:45-12:00#493, ORGANIC FIELD-EFFECT TRANSISTORS BASED GAS SENSORS FOR VOLATILE TOLUENE DETECTIONTengfei Guo, Yuelin Wang, Jian Song and Tie LiShanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences

12:00-12:15#509, P-DOPANT ENHANCED ORGANIC THIN FILM TRANSISTORS BASED GAS SENSORS FOR VOLATILE BENZENES DETECTIONMeng Liu, Yuelin Wang, Jian Song and Tie LiShanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences

12:15-12:30#555, COUPLING MECHANISM OF THE MICRO MASS-SPRING SYSTEM AND ELECTROTHERMAL ACTUATOR AND ITS APPLICATION IN OPTICAL SWITCHESChanglei Feng, Jin Xie, Kaiquan Li, Zhuang Xiong, Bin Tang and Jun DaiBeijing Institute of Technology

10:15 - 12:15 Session IIId: Micro/Nano/Molecular Fabrication-IIVenue: Sunshine Hall (3F)

Chair: Zenghui WANG10:15-10:45KEYNOTE SPEAKER: ATOMIC-SCALE MANUFACTURING BASED ON TEMLitao SUN Southeast University

10:45-11:00#57, OBJECT MANIPULATION WITH FREESTANDING MAGNETIC MICROFIBERS FABRICATED BY FDM 3D PRINTINGQing Lu, Ki-Young Song and Yue FengBeijing Institute of Technology

11:00-11:15#275, ELECTROCHEMICAL NANOIMPRINT LITHOGRAPHYHantao Xu, Lianhuan Han, Bingqian Du, Qinghui Meng, Yang Wang, Zhen Ma, Zhong-Qun Tian, Zhao-Wu Tian and Dongping ZhanXiamen university

11:15-11:30#348, STUDY ON THE MINIMUM SIZE OF MOLECULE BY EMPLOYING THE SINGLE-MOLECULE PLASMONIC OPTICAL TRAPPING METHOD


74

Yang Yang, Biao-Feng Zeng, Chun-An Huo, Jia Shi, Wenjing Hong and Zhong-Qun TianXiamen University

11:30-11:45#395, ADAPTIVE WAVEFRONT SHAPING FOR DIRECT LASER ABLATION APPLICATIONChong Kuong Ng, Fan Zhang, Peng Tan and Yuanliu ChenZhejiang University

11:45-12:00#426, SIMULATION AND EXPERIMENTAL STUDY ON SINGLE PULSE ABLATION BY A FEMTOSECOND LASERFan Zhang, Peng Tan, Chong Kuong Ng and Yuanliu ChenZhejiang University

12:00-12:15#435, RESEARCH ON MELT ELECTROWRITING TPU HYDROPHOBIC MICROFIBER MESH FOR DIRECTIONAL WATER TRANSPORTZungui Shao, Jiaxin Jiang, Junyu Chen, Huatan Chen, Guoyi Kang and Gaofeng ZhengXiamen University



13:30 - 15:45 Session IIIe: M/NEMS-IVVenue: Concert Hall (2F)

Chair: Hongzhong LIU13:30-14:00KEYNOTE SPEAKER: SOFT MICRO-ROBOTS AND MICRO-ACTUATORS: MATERIALS, DESIGN, CONTROL AND APPLICATIONSLining SUN Soochow University

14:00-14:15#48, OPTICAL MEASUREMENT OF THE DYNAMIC RESPONSE OF AN ELECTROTHERMAL MICROACTUATORChen Hao, Wang Xingjie, Xi Zhanwen, Wang Jiong and Nie WeirongNanjiing University of Science and Technology

14:15-14:30#53, A WEARABLE STRAIN SENSOR BASED ON FIBER-STRUCTURED PU/MXENE/CNT COMPOSITE WITH ULTRA-HIGH SENSITIVITY AND BROAD SENSING RANGEGuoxi Luo, Qiankun Zhang, Yunyun Luo, Ke Chen, Wenke Zhou, Libo Zhao and Zhuangde JiangXi’an Jiaotong University


75

14:30-14:45#106, INFLUENCE OF MASS LOADING EFFECT ON RADIATION QUALITY FACTOR OF BAW MAGNETOELECTRIC ANTENNAJunru Li, Chunrui Peng, Yang Gao, Wanchun Ren and Xuefeng HeChongqing University

14:45-15:00#226, ULTRASENSITIVE MASS SENSING UTILIZING HIGH-ORDER MODE LOCALIZATION OF CLAMPED-CLAMPED MICROBEAMS WITH DISTRIBUTED ELECTRODESMing Lyu, Jian Zhao, Pengbo Liu, Jiahao Song, Heng Zhong, Xianze Zheng and Yinghai TangDalian University of Technology

15:00-15:15#232, NONLINEAR THRESHOLD MASS SENSOR USING THE SNAP-THROUGH PHENOMENON OF A CLAMPED–CLAMPED MICROMACHINED ARCH BEAMHeng Zhong, Jian Zhao, Ming Lyu, Jiahao Song, Pengbo Liu, Xianze Zheng and Yu HuangDalian University of Technology

15:15-15:30#239, FEASIBILITY STUDY OF WEARABLE MUSCLE DISORDER DIAGNOSING BASED ON PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERMengjiao Qu, Hong Ding, Xuying Chen, Dengfei Yang, Dongsheng Li, Ke Zhu and Jin XieZhejiang University

15:30-15:45#562, MULTIFUNCTIONAL CARDIOMYOCYTE-BASED BIOSENSOR FOR ELECTROPHYSIOLOGY-MECHANICAL BEATING-GROWTH VIABILITY MONITORINGDongxin Xu, Jiaru Fang and Ning HuSun Yat-Sen University

13:30 - 15:30 Session IIIf: Soft&Flexibe Devices and Applications-III


Chair: Rui ZHOU13:30-14:00KEYNOTE SPEAKER: DEVELOPING BIOCOMPATIBLE AND IMPLANTABLE FLEXIBLE PRESSURE SENSORS FOR HEALTH MONITORING APPLICATIONSGuozhen SHEN Institute of Semiconductors,Chinese Academy of Sciences

14:00-14:15#430, AN ELECTRICAL DOUBLE LAYER-BASED IONTRONIC TACTILE SENSOR FOR DETECTION OF BIOLOGICAL IONIC LIQUIDYulu Liu, Shuyi Huang, Menglu Li, Xiangyu Zeng, Wei Li and Xiaozhi WangCollege of Information Science and Electronic Engineering, Zhejiang University


76

14:15-14:30#533, HIGHLY SENSITIVE AND FLEXIBLE TACTILE SENSOR BASED ON THE FABRICATION OF POROUS GRAPHENE/SILICONE RUBBER COMPOSITESZhijian Chen, Yancheng Wang, Deqing Mei and Jie JinZhejiang University

14:30-14:45#561, UNIFORMLY DISTRIBUTED SELF-FILLING MICRO-STRIPS FOR HIGH-PERFORMANCE PRESSURE-SENSITIVE SENSORZhiping Chai, Xingxing Ke, Han Chen, Jiaqi Zhu, Chuanfei Guo and Zhigang WuHuazhong University of Science and Technology

14:45-15:00#563, A SENSITIVE FLEXIBLE STRAIN SENSOR VIA ANISOTROPY MICROSTRUCTURED SENSITIZED SURFACE RESISTIVE CHANGE FOR HUMAN MOTION MONITORINGWenjie Fei, Shuo Zhang and Zhigang WuHuahzong University of Science and Technology

15:00-15:15#565, A SURFACE AND INTERIOR MATERIAL IDENTIFICATION TECHNOLOGY BASED ON DUAL-MODE SENSORZhuhui Yin, Ning Li, Weifeng Chen, Yue Jiang, Kaiyang Lan, Jiabin Peng and Zhengchun PengShenzhen University

15:15-15:30#576, STRAIN-ENGINEERED BISTABLE CLAMPED THIN FILMS: FROM MACROSCALE TO NANOSCALE FABRICATIONGuangchao Wan, Ziao Tian, Borui Xu, Yongfeng Mei and Zi ChenDartmouth College

13:30 - 15:30 Invited Session IIId: Advanced Scanning Probe Technology and Applications


Chair: Huan HU & Yu Kyoung RYU13:30-13:50MARKERLESS FABRICATION OF FINFET DEVICES BY THERMAL SCANNING PROBE LITHOGRAPHYArmin W. Knoll IBM Zurich Laboratory

13:50-14:10ADVANCED SCANNING PROBES FOR NANOFABRICATION AND NANOMEASUREMENTHuan Hu Zhejiang University

14:10-14:30SCANNING PROBE-ASSISTED NANOWIRE CIRCUITRYPablo Ares Universidad Autónoma de Madrid


77

14:30-14:50ADVANCED LITHOGRAPHY FOR OPTO-ELECTRONIC NANOCHIPSXiaorui Zheng Westlake University

14:50-15:102D MATERIALS PATTERNING BY OXIDATION SCANNING PROBE LITHOGRAPHYYu Kyoung Ryu Instituto de Sistemas Optoelectrónicos de Madrid (Universidad Politécnica de Madrid)

15:10-15:30SPATIALLY CONFINED SURFACE REACTIONS AND NANOPATTERNING BY CANTILEVER-FREE POLYMER TIP ARRAYSZhuang Xie Sun Yat-sen University

13:30 - 15:50 Invited Session IIIe: Advanced Microsystems for Biomedical Applications


Chair: Soo Hyeon KIM13:30-13:50ENGINEERING AND MEASURING SYSTEMIC MULTI-ORGAN INTERACTIONSYi-Chin TOH Queensland university of technology

13:50-14:10INTELLIGENT DRUG DELIVERY SYSTEM BASED ON MICRONEEDLE TECHNOLOGYJongho PARK University of Tokyo

14:10-14:30MECHANOSENSING OF BIOLOGICAL SAMPLES WITH SILICON-BASED MICROSYSTEMSMehmet Cagatay TARHAN Yncrea HdF, Lille, France

14:30-14:50SINGLE-MOLECULE ANALYSIS OF BIO-MOLECULES AND ITS APPLICATIONRikiya WATANABE RIKEN

14:50-15:10ADVANCED BIOMEDICAL MICROSYSTEMS FOR SINGLE-CELL ANALYSISSoo Hyeon Kim University of Tokyo

15:10-15:30SURFACE ENHANCED RAMAN SCATTERING SENSORS FOR DISEASES DETECTIONTianxun GONG University of Electronic Science and Technology of China

15:30-15:50ADVANCED MICROFLUIDICS AND PCR TECHNOLOGY COMBINED FOR POINT-OF-CARE DIAGNOSTICS


78

Sisi LI Fraunhofer Institute for Microengineering and Microsystems IMM

13:30 - 15:30Invited Session IIIf: Multidisciplinary Frontier: Advanced Micro/Nano Electronics Plus (Bio-, Photo-, Energy-)


Chair: Yu ZHOU & Yue SHAO13:30-13:50ANGSTROM-POROUS MOF MATERIALS FOR EFFICIENT ION ADSORPTION AND SIEVINGHuacheng ZHANG RMIT University

13:50-14:10SURFACE FREE ENERGY CHARACTERIZATION OF SOFT MATERIALS THROUGH COMPUTATIONAL EXPERIMENTSMatteo FASANO Politecnico di Torino

14:10-14:30SOLITON MICROCOMBS: INTEGRATED PHOTONICS POWERING METROLOGYQifan YANG Peking University

14:30-14:50SYNTHETIC EMBRYOLOGY: MERGING STEM CELLS AND MECHANICAL MICROSYSTEMS TO FORGE AN EMBRYO-FREE FUTURE FOR HUMAN EMBRYOLOGYYue SHAO Tsinghua University

14:50-15:10CONTROLLED SYNTHESIS AND DEVICES APPLICATIONS OF 2D CRYSTAL ARRAYSYu ZHOU Central South University

15:10-15:30ACTIVE IONIC ARTIFICIAL SKIN: ION TRANSPORT MECHANISMS AND PROTOTYPE DESIGNZicai ZHU Xi’an Jiaotong University

13:30 - 15:30 Session IIIg: MEMS/NEMS-V


Chair: Zewen LIU13:30-14:00KEYNOTE SPEAKER: MEMS-BASED PLATFORMS FOR CHARACTERIZATION OF ADVANCED FUNCTIONAL MATERIALS


79

Liviu NICU LAAS-CNRS

14:00-14:15#105, MULTI-MODAL RESONANCE MEASUREMENT CAPABLE OF DISCERNING AND VISUALIZING EFFECTS DUE TO EXCITATION SCHEMES IN MEMS RESONATORBo Xu, Jiankai Zhu, Tongqiao Miao, Jing Li, Qingyang Deng, Song Wu, Ting Wen, Fei Wang, Xiaoping Hu, Xuezhong Wu, Dingbang Xiao and Zenghui WangUESTC

14:15-14:30#116, NANOSTRUCTURE VANADIUM-DOPED ZINC OXIDE FILM SENSOR ENDOWED WITH ENHANCED PIEZOELECTRIC RESPONSEWei Gao, Yu Zhang, Binghe Ma, Jian Luo, Jinjun Deng and Weizheng YuanNorthwestern Polytechnical University

14:30-14:45#173, HUMIDITY SENSOR WITH HIGH RESOLUTION AND FAST RESPONSE BASED ON ALN CANTILEVER WITH TWO GROUPS OF SEGMENTED ELECTRODESDongsheng Li, Hanyong Dong, Zihao Xie, Mengjiao Qu, Qian Zhang and Jin XieZhejiang University

14:45-15:00#203, DESIGN AND FABRICATION OF A LATCHING SILICON-BASED MEMS SWITCHTongtong Cao, Tengjiang Hu and Yulong ZhaoXi’an Jiaotong University

15:00-15:15#418, 3D PRINTED SUGAR SCAFFOLD FOR HIGH PRECISION AND HIGHLY SENSITIVE ACTIVE AND PASSIVE WEARABLE SENSORSDong Hae Ho, Panuk Hong, Joong Tark Han, Sang Youn Kim, S. Joon Kwon and Jeong Ho ChoYonsei university

15:15-15:30#538, DESIGN AND FABRICATION OF INTEGRATED PIEZOELECTRIC MICROPUMP WITH VORTEX ENHANCEMENT OPTIMIZATIONBoshen Liang, Louis Paquet, Yongbin Jeong, Paul Heremans and David CheynsImec

13:30 - 15:30 Session IIIh: Nanomaterials-I


Chair: Jingxia WANG 13:30-14:00KEYNOTE SPEAKER: STRUCTURE-CONTROLLED SYNTHESIS OF SINGLE-WALLED CARBON NANOTUBESYan LI Peking University

14:00-14:15


80

#11, SYNTHESIS OF POROUS CO3O4-ZNO AND ITS PERFORMANCE FOR SENSITIVE ETHANOL DETECTIONXiao Zhang, Yaohua Xu, Feng Wei and Anjie MingGRINM

14:15-14:30#13, A NOVEL LOW-TEMPERATURE POST-CURING TRANSFER METHOD OF GRAPHENE WRINKLING SURFACE FOR STRAIN ENGINEERINGKai-Ming HuState Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University

14:30-14:45#34, SIMULTANEOUS SENSING OF REFRACTIVE INDEX AND TEMPERATURE USING A SYMMETRY-BREAKING SILICON METASURFACE WITH MULTIPLE FANO PEAKSLuo Zhao, Guoguo Kang, Junyi Wang, Haiyang Li and Cheng ZhangBeijing Institution of Technology

14:45-15:00#186, SWITCHABLE PDT BY A SELFASSEMBLED FRET QUENCHING NANOPARTICLEZiying Li and Yu GaoCancer Metastasis Alert and Prevention Center

15:00-15:15#284, DYNAMIC CURVATURE NANOCHANNEL-BASED MEMBRANE WITH ANOMALOUS IONIC TRANSPORT BEHAVIORSMiao Wang and Xu HouXiamen University

15:15-15:30#676, ENHANCED ION SENSING STABILITY WITH NANOTEXTURED BIOSENSORSYanfang Wang and Yuanjing LinSouthern University of Science and Technology

15:30 - 16:30 Plenary Speaker IIIc (Nobel Laureate)


Chair: Nanfeng ZHENG

Kostya NOVOSELOVThe University of Manchester



Accept Posters from No.527 to No.720


81

16:30 - 17:30 Industrial Panel


17:30 - 18:30 学术奥斯卡讲座 -- 如何做好学术报告？


主讲人：张海霞教授（北京大学）


19:00 - 21:00 Banquet & Award Ceremony



82

Plenary Speaker

Nano-calorimetry: A New Tool for Materials DevelopmentJoost J. Vlassak

Harvard School of Engineering and Applied Sciences, Harvard University, Cambridge, MA02138, USA

E-mail : [email protected] : https://vlassakgroup.seas.harvard.edu/

ABSTRACTCalorimetry has long been used to study chemical reactions and phase transitions in materials. Thetechnique finds its origin in the mid-18th century when Scottish physician Joseph Black discovered thenotion of latent heat and Lavoisier developed an ice calorimeter to measure the amount of heat givenoff during combustion of carbon or respiration of living organisms. Since then calorimetry hasdeveloped into a sophisticated technique indispensable in chemistry and materials science.

In this talk, I will show how the same technique can be used in the context of the Materials GenomeInitiative. We use micromachining to fabricate arrays of calorimetric sensors that can performmeasurements on samples as thin as a few nanometers at rates varying from isothermal to 105 K/s. Thesensor arrays are ideally suited to explore complex materials systems using a combinatorial approachbased on sputter-deposited thin-film composition spreads, especially when guided by computationalmaterials science modeling. The methodology is illustrated for high-temperature shape memory alloys.Because of its large dynamic range, nanocalorimetry is also ideal for evaluating the kinetics of solid-state and solid-gas reactions. As an example, we use nano-calorimetry to evaluate the kinetics of solid-state reactions in Zr/B and Zr/B4C multilayers and demonstrate that ultra-high temperature ceramicssuch as ZrB2 and ZrB2/ZrC alloys can be synthesized at moderate temperatures. Calorimetry tracesshow that the formation reactions typically proceed in two distinct steps: inter-diffusion andamorphization, followed by crystallization. First-principles calculations provide insight in theamorphization processes in the reactive multilayers and confirm the relatively low activation energiesassociated with these processes. Finally, I will present results on the non-Arrhenius crystallizationkinetics of Cu50Zr50 metallic glass. Time permitting, a new isothermal device with applications inbiophysics will be briefly discussed.

BIOGRAPHYJoost J. Vlassak is currently the Abbott and James Lawrence Professor of Materials Engineering atHarvard University. Dr. Vlassak received his PhD degree in Materials Science from StanfordUniversity. After working for several companies in Silicon Valley, Dr. Vlassak joined the School ofEngineering and Applied Sciences at Harvard University in 2000. Dr. Vlassak is active in the field ofthe thermo-mechanical behavior of materials. He has developed experimental methods to characterizephase transitions and solid-state reactions in thin films, plastic deformation of coatings, elasticanisotropy in indentation, and fracture of thin films. Current experimental research projects focus onfracture of hydrogels, the use of hydrogels as ionic conductors in 3D printed devices, combinatorialcalorimetry and calorimetry sensors for metabolic rate measurements in biological systems. Dr.Vlassak is co-author of more than 150 peer-reviewed scientific publications and several book chapters,and holds 7 US patents.


83

Transformative Impact of Printable Solar Cells for MeetingNext-Generation Energy Demands

Alex JenDepartment of Materials Science & Engineering and 2Department of Chemistry, City University ofHong Kong, Kowloon, HK SARE-mail: [email protected]

ABSTRACTTo complement silicon PV and make PV ubiquitous through a sustainable subsidy-free market model,it is crucial to develop low cost and high efficiency printable solar cells. Among different printablesolar cell technologies, organic solar cells (OSCs) and perovskite solar cells (PVKSCs) are twocandidates that have immense potential. They have inherently easier manufacturability, where low-temperature solution processing via high-throughput printing techniques like spray coating, inkjetprinting, screen printing, blade coating, and slot die roll-to-roll (R2R) coating) can be used formanufacturing at scale. As a result, the capex requirements are significantly lower which will favor alow levelized-cost of electricity.

OSCs and PVKSCs also offer versatility in form factor for realizing flexible, semi-transparent, andcolor-tunable solar cells. These variants are pivotal for the success of building integrated photovoltaics(BIPVs) and niche market products (portable and wearable devices useful in fields like electronics,aviation, military, and medicine). Advancements in terms of non-fullerene acceptors (for OSCs) andmulti-junction device architectures (for PVKSCs) have recently escalated the progression in powerconversion efficiency (PCE). Record PCEs in lab scale devices have reached 19% and 25.5% for OSCsand PVKSCs, respectively, and efforts for scaling up and demonstrating large scale modules havebegun through close cooperation between academia and industry. In this talk, I will provide anoverview of progress and challenges for printable solar cells (OSCs and PVKSCs) towardcommercialization and highlight our integral contributions over the last decade in this field.

BIOGRAPHY

Professor Alex Jen is the Lee Shau Kee Chair Professor of Materials Science and Chair Professor ofChemistry and Materials Science of the City University of Hong Kong. He also served as the Provostfor CityU during 2016-2020. He is a distinguished researcher with more than 900 publications, 65,000citations, and an H-index of 129. He is also a co-inventor for 63 patents and invention disclosures. Hisinterdisciplinary research covers organic/hybrid functional materials and devices for photonics, energy,sensors, and nanomedicine.

For his pioneering contributions in organic photonics and electronics, Professor Jen was elected as anAcademician by both the European Academy of Sciences and the Washington State Academy ofSciences. He is also a Fellow of several professional societies including AAAS, MRS, ACS, PMSE,OSA, SPIE. He was named by the Times Higher Education (THE) as one of the “Top 10 university

researchers in Perovskite Solar Cell Research” from 2014 to 2017. In addition, he was recognized byThomson Reuters as one of the "World’s Most Influential Scientific Minds of 2015 and as a "HighlyCited researcher" in materials science from 2014-2019. He has also demonstrated strong capability intechnology transfer, and was the founder of the Institute of Advanced Materials for Energy (i-AME) ofthe University of Washington.

He has also been appointed as the Changjiang Endowed Chair by the Ministry of Education, 1000Talent Professor (Zhejiang Univ.), and as the World Class University Professor by the Korea Univ.,and as the Distinguished Chair Professor by the National Taiwan University.


84

Van der Waals Heterostructures

Kostya S. Novoselov

Department of Materials Science and Engineering, National University of Singapore, Singapore,117575, Singapore

ABSTRACTOne of the most important “property” of graphene is that it has opened a floodgate of experiments onmany other 2D atomic crystals: BN, NbSe2, TaS2, MoS2, etc. The resulting pool of 2D crystals is huge,and they cover a massive range of properties: from the most insulating to the most conductive, fromthe strongest to the softest.

If 2D materials provide a large range of different properties, sandwich structures made up of 2, 3, 4 …different layers of such materials can offer even greater scope. Since these 2D-based heterostructurescan be tailored with atomic precision and individual layers of very different character can be combinedtogether, - the properties of these structures can be tuned to study novel physical phenomena or to fitan enormous range of possible applications, with the functionality of heterostructure stacks is“embedded” in their design.

Already now such materials bring to life a number of exciting applications. In my lecture I will reviewsome of them.

BIOGRAPHYProf Sir Konstantin ‘Kostya’ Novoselov FRS was born in Russia in August 1974. He has both Britishand Russian citizenship. He is best known for isolating graphene at The University of Manchester in2004, and is an expert in condensed matter physics, mesoscopic physics and nanotechnology. Everyyear since 2014 Kostya Novoselov is included in the list of the most highly cited researchers in theworld. He was awarded the Nobel Prize for Physics in 2010 for his achievements with graphene.Kostya holds positions of a Tan Chin Tuan Centennial Professor at the National University ofSingapore. He is also part time Langworthy Professor of Physics and the Royal Society ResearchProfessor at The University of Manchester.

He graduated from the Moscow Institute of Physics and Technology, and undertook his PhD studies atthe University of Nijmegen in the Netherlands before moving to The University of Manchester in 2001.Later Professor Novoselov joint the National University of Singapore in 2019. Professor Novoselovhas published more than 400 peer-reviewed research papers. He was awarded with numerous prizes,including Nicholas Kurti Prize (2007), International Union of Pure and Applied Science Prize (2008),MIT Technology Review young innovator (2008), Europhysics Prize (2008), Bragg Lecture Prize fromthe Union of Crystallography (2011), the Kohn Award Lecture (2012), Leverhulme Medal from theRoyal Society (2013), Onsager medal (2014), Carbon medal (2016), Dalton medal (2016), OttoWarburg Prize (2019) among many others. He was knighted in the 2012 New Year Honours. 2020.


85

Keynote Speaker

Applications of Flexible Inorganic Thin-film Devices in Bioelectronics

Yuan Lin

School of Materials and Energy, University of Electronic Science and Technology of China,Chengdu 610054, Sichuan, P.R. China


ABSTRACTFlexible bioelectronics have greatly improved the way of human-machine interaction due to the factthat they can provide seamless interactions with humans. Due to the advantages of matureprocessibility and rich physicochemical properties, flexible and stretchable inorganic thin-filmelectronics play an increasingly important role in the emerging and exciting flexible electronic field.Serving as sensor elements or biomimetic actuators, flexible inorganic thin film bioelectronics coulddynamically sense physiological signals and provide timely stimulations or treatments. Thus, thesetypes of electronics may change the future of healthcare. This talk summarizes our recent work in thedevelopment of flexible inorganic thin film devices focusing on their biomedical applications,including biosensing and non-pharmacological stimulation treatments. A future perspective into thechallenges and opportunities for the next-generation flexible bioelectronics will also be discussed.

BIOGRAPHYYuan Lin is currently a Professor at School of Materials and Energy, University of Electronic Scienceand Technology of China. Dr. Lin received her Ph.D. degree in Condensed Matter Physics fromUniversity of Science and Technology of China in 1999. After that, she had worked in the Universityof Houston and Los Alamos National Lab as a postdoc, and in Intel Corp as a senior engineer. In 2008,she joined the faculty of University of Electronic Science and Technology of China as a Yangtze RiverScholars Distinguished Professor. Dr. Lin is active in the field of electronic thin films and devices. Hermain research interests are focused in the development of various thin films (such as ferroelectricoxide, vanadium oxide and other oxides) for applications in electronic devices, especially instretchable and flexible electronic devices. She has co-authored more than 150 papers in peer-reviewedjournals and her publications have been cited for more than 2000 times. She also has more than 20Chinese patents and 4 US patents awarded.


86

Versatile E-Printing for Flexible Electronics

YongAn Huang

State Key Laboratory of Digital Manufacture Equipment and Technology,Huazhong University of Science and Technology, Wuhan 430074, China.

E-mail : [email protected] : http://faculty.hust.edu.cn/huang

AABBSSTTRRAACCTT

Electrohydrodynamic (EHD) printing (E-Printing), which adopts electric field force to pull fluid flowsfrom microcapillary nozzles, is becoming a promising technology for flexible electronics manufacturedue to its unique advantages of high-resolution (<1μm) and compatibility with wide range of inks (1-10000 cps). Three types of printing mode that are E-jet printing, EHD direct-writing, and electrospray,can be switched through process adjustment to deposit dots, fibers/lines and thin films directly.Specially, the E-Printing technology enables large-scale deposition of highly aligned nanofibers in anadditive, noncontact, real-time adjustment, and individual control manner on rigid or flexiblesubstrates, making it rather attractive in the fabrication of flexible electronics.

This talk will briefly introduce our recent researches on E-Printing techniques, including the basicprinciples, alignment strategies and their applications. Several attractive applications in flexibleelectronics are also presented herein: (1) a hyper-stretchable (>300%) self-powered sensor that can beused to measure different physical quantities simultaneously; (2) organic thin-film transistor (OTFT)arrays that are fabricated in a large-area, high-efficiency and photolithography-free manner; (3) Aumetal-network electrodes that are fabricated to obtain a flexible and transparent touch panel withtransmittance of 94.3% and sheet resistance of 36.7 Ω□−1; (4) full color perovskite display andphotodetector, including full-color pixel and high-resolution dot matrix of 1 μm are fabricated. Thistechnology overcomes the limitations on the resolution of fabrication and viscosity of ink ofconventional inkjet printing, and represents major advances in manufacturing of flexible electronics.

BBIIOOGGRRAAPPHHYYYYoonnggAAnn HHuuaanngg,, professor of Huazhong University of Science and Technology (HUST), vice directorof State Key Laboratory of Digital Manufacturing Equipment and Technology. Dr. Zhang received herBachelor, Master and Ph.D. degrees from the Northwestern Polytechnical University. After finishinghis postdoctoral research at HUST, he joined the faculty of HUST in 2009. In 2012, he was a visitingprofessor at the Northwestern University. He is a winner of The National Science Fund forDistinguished Young Scholars. He focuses on the research of design and manufacturing for flexibleelectronics, including 1) EHD printing and laser lift-off, and 2) flexible printed display, smart skin ofaircrafts, electronic skin of robots and epidermal electronics of human. He has published more than100 papers in journals including Science Advances, Advanced Materials, Advanced FunctionalMaterials, Materials Horizon, Nano Energy, Small, Nature Communication, etc, and also published 3monographs. He has won first prize of Natural Science in Hubei Province, Gold/Special Gold Awardon International Exhibition of Inventions in Geneva, Switzerland.


87

Heterogeneous Integration for RF application

Jian Zhu

Nanjing Electronic Devices Institute, Nanjing, 210096, P.R. ChinaE-mail : [email protected]

AABBSSTTRRAACCTT

Complementary metal oxide semiconductor (CMOS) offers ultimate advantages in terms of maturity,complexity and integration density among semiconductor technologies, especially in digital functionapplications. III-V compound semiconductor (CS) technology is dominating radio frequency (RF)applications due to their superior transport properties. CS devices offer better RF performance inpower, efficiency, bandwidth, dynamic range and frequency, comparing to their Si based competitors.Therefore, integration of high performance CS circuits with CMOS is essential for a RF module withboth optimum performance and compact size. Conventional printed circuit board (PCB) or lowtemperature co-fired ceramic (LTCC) based assemblies are cost-effective and reliable solutions for CSand CMOS integration. However, drawbacks in pattern resolution, stacking accuracy, and interconnectsize restrict these techniques in higher frequency and more compact applications. HeterogeneousIntegration technology is emerging as an attractive approach.

This talk will introduce our latest research activities on heterogeneous integration technology for RFapplication. A 38 GHz T/R module will be used as an example to illustrate the idea. A silicon basedIPD structure combined with Cu TSV interposer is suitable for RF applications. Compound materialbased MMICs are integration through heterogeneous integration scheme. The processing techniquesare compatible with the standard CMOS technology.

BBIIOOGGRRAAPPHHYYJian Zhu is currently a Chief scientist at CETC. Dr. Zhu is a joint professor at Nanjing University. Dr.Zhu received her Ph.D. degree from Southeast University. Dr. Zhu is active in the field of RF MEMSand microsystem. She is fellow of Chinese Society of Micro-Nano Technology （CSMNT） , vicepresident of Chinese semiconductor Society MEMS board, board member of DTIP OFMEMS/MOEMS Technical Program Committee, and expert in national science foundation committee.She publishes over 130 papers and holds over 40 patents.


88

Atomic-scale Manufacturing based on TEM

Litao Sun

SEU-FEI Nano-Pico Center, Key Lab of MEMS of Ministry of Education,School of Electronic Science and Engineering, Southeast University, Nanjing, 210096, P.R. China

E-mail : [email protected] : http://www.seu-npc.com

ABSTRACTWith the rapid development of semiconductor technology, the 5 nm feature size of fabrication isalready achieved. It is thus quite essential to explore more precise manufacturing and characterizationmethod to evaluate the shape/structure stability and possible new properties of sub-5nm materialcomponents, especially under external stimuli such as strain, electric, or thermal fields. Along with thereduction of dimensions, the surface-to-volume ratio of the materials increases. Surface atoms arepreferably reconstructed for adapting their geometrical and electronic structure to the environment.Thus, the surface structure begins to dominate material properties ranging from electronic andstructural aspects when the characteristic dimension is reduced to sub-5 nm. Here we review our recentprogress in atomic resolution manufacturing and dynamic characterization of individual nanostructuresand nanodevices based on the idea of "setting up a nanolab inside a transmission electron microscope".The electron beam can be used as a tool to induce manufacturing on the atomic scale. Additionalprobes from a special-designed holder provide the possibility to further manipulate and measure theelectric/mechanical properties of the nanostructures in the small specimen chamber of a TEM.Recently, the optical signal also was introduced into the electron microscope to enrich the coverage ofinvestigation inside the “multifunctional nanolab”. All phenomena from the in-situ experiments can berecorded in real time with atomic resolution.

References:[1] L. Sun, F. Banhart, et. al., Science 312, 1199 (2006)[2] J. R-Manzo, M. Terrones, et.al., Nature Nanotechnology 2, 307 (2007)[3] X. Liu, T. Xu, et al., Nature Communications 4, 1776 (2013)[4] X. Guo, G. Fang, et al., Science 344, 616 (2014)[5] J. Sun, L. He, et al., Nature Materials 13, 1007 (2014)[6] Q. Zhang, K. Yin, et al., Nature Communications 8, 14889 (2017)[7] C. Zhu, S. Liang, et al., Nature Communications 9, 421 (2018)[8] H. Dong, F. Xu, et al., Nature Nanotechnology 14, 950 (2019)

BIOGRAPHYProf. Litao Sun received his PhD from the Shanghai Institute of Applied Physics, Chinese Academy ofSciences in 2005. He worked as a research fellow at University of Mainz, Germany from 2005 to 2008,and a visiting professor at University of Strasbourg, France from 2009 to 2010. Since 2008, he joinedSEU and honored as a Distinguished Professor. He currently serves as the head of School of Electronic

Science and Engineering, Southeast University (SEU), the director of SEU-FEI Nano-Pico center, thedirector of Key Lab of MEMS of Ministry of Education, and the director of Center for AdvancedMaterials and Manufacture, Joint Research Institute of Southeast University and Monash University.He is the founding chairman of IEEE Nanotechnology Council Nanjing Chapter. He is the author andco-author of around 200 papers on international journals including 2 in Science, 15 in Nature andNature series journals, etc. He was selected the Global Highly Cited Researchers list from the Web ofScience Group. He holds around 80 patents and has given more than 160 invited presentations. He isthe Review Panel member of Graphene Flagship, European Union and Member of European ScienceFoundation College of Expert Reviewers. He has obtained National Science Fund for DistinguishedYoung Scholars of China, New Century Excellent Talents in University, Young Leading Talent inScience and Technology Innovation, Cheung Kong Scholar Chair Professor from Ministry ofEducation etc.


89

Soft Micro-robots and Micro-actuators: Materials, Design, Control andApplications

Lining Sun

Soochow University, Suzhou 215000 P.R. China

E-mail : [email protected] : group or personal website if applicable

ABSTRACTMicrorobots have drawn extensive attentions due to their great potential for biomedical and MEMSapplications. In this talk, I would like to share my experiences of creating soft micro-robots and micro-actuators with stimulus-responsive materials. Then, I will report our field based teleoperation actuationsystems to accurately control these micro-robots. Finally, I will show our attempts of applying thesemicro-robots and micro-actuators to execute targeted drug delivery and therapy trial and cooperativelymicro-manipulation.

BIOGRAPHYProf. Lining Sun is currently the director of Robotics and Microsystems Center of Soochow University,and is the dean of the College of Mechatronic Engineering of Soochow University. He is also the vice-director of the State Key Laboratory for Robotics and System in Harbin Institute of Technology. He isthe Chang-Jiang Professor and the obtainer of The National Natural Science Fund for DistinguishedYoung Scholars. Prof. Sun has directed more than 30 projects from “863” Program, “973” Programand NSFC, and obtained many academic honors and awards, including National Science andTechnology Progress Awards and Provincial Science and Technology Prizes, the Ho Leung Ho LeeFoundation Science and Technology Innovation Award, to name a few.


90

Developing biocompatible and implantable flexible pressure sensors forhealth monitoring applications

Guozhen Shen

State Key Laboratory for Superlattices and Microstructures, Institute ofSemiconductors, Chinese Academy of Sciences, Beijing 100083, P.R. ChinaE-mail : [email protected] : https://www.x-mol.com/groups/flextronics

ABSTRACTAdvances in digital health care have driven innovations in high-performance wearable and smartsensors. One requirement in this field is establishing healthy, secure and reliable medical devices forprecisely monitoring vital signs of the human body or the surrounding environment through flexiblesensors with not only high sensing performance, but also excellent biofunctionality. Smart wearablesensors with excellent biofunctionality furnish medical devices with various smart functions such asbiocompatibility, biodegradability, and self-healing, which have attracted widespread interest fromdevice engineers and materials scientists. Here, we focus on the various types of materials used inbiomedical and implantable devices and their bio-multifunctional (biocompatible, biodegradable, andself-healing) designs. The subsequent content highlights the most advanced medical applications ofbio-multifunctional wearable sensors, classified into three main subfields (Figure 1): 1) biophysicalmonitoring (heart rate/pulse, human motion, and temperature), 2) biochemical tracking (biomolecule,blood glucose, and Na+/K+), and 3) real-time environmental information detection (gas molecules andhumidity). Finally, this work concludes with an overview of key challenges and a summary ofopportunities, ultimately determining that advances in smart wearable sensors are critical to theircontinuing progress.

BIOGRAPHYGuozhen Shen is currently a Professor and Group Leader at Institute of Semiconductors, ChineseAcademy of Sciences. Dr. Shen received his Ph.D degree in Chemistry from University of Scienceand Technology of China. From 2004 to 2013, he did his research in Hanyang University (Korea),National Institute for Materials Science (Japan), University of Southern California (US) and HuazhongUniversity of Science and Technology (China). Dr. Shen’s research focuses on design of low-dimensional nanostructures for flexible electronic applications, including flexible sensors, flexibleenergy storage devices and flexible multifunctional integrated electronic systems. He is the Editor/Editorial board member of Nanoscale Research Letters, Advanced Materials Technologies, Journal ofSemiconductors, etc. Dr. Shen has published more than 300 peer-reviewed articles and edited 2 bookswith an H-factor of 76.Dr. Shen won several important awards, including the National Science Fund for Distinguished YoungScholars, the 2nd prize of Science and Technology Award of Beijing, and 1st prize of Science andTechnology of C-MRS.


91

MMEEMMSS--bbaasseedd ppllaattffoorrmmss ffoorr cchhaarraacctteerr iizzaattiioonn ooff aaddvvaanncceeddffuunnccttiioonnaall mmaatteerr iiaallss

LLiivviiuu NNiiccuu11, Susan Trolier-McKinstry2, Gabor Molnar3, Azzedine Bousseksou3, MariaDolores Manrique Juarez1, Fabrice Mathieu1, Daisuke Saya1, Karsten Haupt4, Denis Dezest5,Thierry Leïchlé1,6

1LAAS-CNRS, Université de Toulouse, France2Department of Materials Science and Engineering and Materials Research Institute, ThePennsylvania State University, PA, USA3LCC-CNRS, Université de Toulouse, France4Université de Technologie de Compiègne, CNRS Laboratory of Enzyme and CellEngineering, Compiègne, France5CEA-Leti, Grenoble, France6Georgia Tech-CNRS Joint International Laboratory, GA, USAEE--mmaaiill: [email protected]: www.laas.fr

LLiivviiuu NNIICCUU is currently senior scientist at the French National Scientific Research Center and is General Director ofthe CNRS Systems Analysis and Architecture Laboratory in Toulouse, France. After obtaining his PhD degree inElectrical Engineering from Paul Sabatier University in Toulouse, he joined Thales Avionics Valence (France) wherehe took charge of the company's inertial silicon microsensor projects from 2001 to 2003. He joined the SystemsAnalysis and Architecture Laboratory since 2003 where he conducted research in the fields of bioMEMS and MEMSfor the physical and chemical characterization of advanced functional materials. Liviu NICU is co-author of over 100peer-reviewed articles, 2 books / book chapters and has co-invented 3 patents. The laboratory he is heading sinceJanuary 2016 brings together more than 700 people working in the fields of automation, robotics, computing andmicro-nanotechnologies.

AAbbssttrraacctt

The integration of new advanced functional materials in the production chain of microelectromechanical systems(MEMS) requires a fundamental in-depth knowledge of their physical and chemical properties. In recent years, therehas been a significant increase in publications reporting on performant transduction properties of classes of materialspartially or completely unknown by the production chain mentioned above [1], [2]. These materials are generallysynthesized and characterized in a form (powders, single crystals, etc.) that is not suitable for MEMS manufacturingprocesses, rather requiring homogeneous thin films. Thus, despite the announced performances, which are veryconvincing and promising, there is no guarantee that they can be easily integrated into MEMS devices, nor can therebe any guarantee that their performances will be preserved once the integration phase is successful.

Our work over the past few years was to assess the performance of materials, which either by their nature or by theway they are structured, still remain exotic for conventional micro / nanofabrication pathways. This assessment goesthrough the same stages, which are: the deposition and patterning of these materials at the micro-scale (byconventional or alternative techniques), their integration into basic micrometric structures (passive or active levers)and their characterization.

In this talk we will present our contribution to the characterization of three classes of materials: molecularly imprintedpolymers (MIP), spin crossover materials (SCO) and piezoelectric materials (sol-gel lead zirconate titanate or PZT).In each of the cases presented, the same process flow and characterization methodology are followed, namely:

- in case of SCO materials (Figure 1.a): evaporation onto microfabricated cantilevers with actuation and sensingcapabilities, assessment of the post-process spin cross-over capabilities;

- in case of MIPs (Figure 1.b): deposition and patterning of the MIP (by spin-coating and photolithography) fullyintegrated within the process flow of the microcantilevers’ fabrication, assessment of the post-process mechanicalintegrity of the MEMS and chemical functionality preservation;


92

- in case of sol-gel PZT (Figure 1.c): integration of the active material into the process flow of microcantilevers’fabrication by means of micro-contact printing in order to assess the actuation and sensing capabilities.

As a general conclusion, we will demonstrate that by appropriately integrating thin films of these advanced materialsand using the MEMS transduction capability, MEMS platforms are powerful tools for the physical and chemicalcharacterization of these materials. As exemplified by the works presented here, these materials can be organic orinorganic, deposited by evaporation, micro-contact printing, spray coating or other types of techniques adaptable toMEMS manufacturing chain. The anticipation of the compatibility with MEMS process flow should allow, when anew material with high transduction potential is identified, its integration into the whole device architecture startingwith the design phase.

RReeffeerreenncceess

[1] M. D. Manrique-Juárez et al., « Switchable molecule-based materials for micro- and nanoscale actuatingapplications: Achievements and prospects », Coord. Chem. Rev., vol. 308, p. 395‑408, févr. 2016, doi:10.1016/j.ccr.2015.04.005.

[2] E. Ahmed, D. P. Karothu, et P. Naumov, « Crystal Adaptronics: Mechanically Reconfigurable Elastic andSuperelastic Molecular Crystals », Angew. Chem. Int. Ed., vol. 57, no 29, p. 8837‑8846, juill. 2018, doi:10.1002/anie.201800137.

BBiiooggrraapphhyy

LLiivviiuu NNIICCUU is currently senior scientist at the French National Scientific Research Center and is General Director ofthe CNRS Systems Analysis and Architecture Laboratory in Toulouse, France. After obtaining his PhD degree inElectrical Engineering from Paul Sabatier University in Toulouse, he joined Thales Avionics Valence (France) wherehe took charge of the company's inertial silicon microsensor projects from 2001 to 2003. He joined the SystemsAnalysis and Architecture Laboratory since 2003 where he conducted research in the fields of bioMEMS and MEMSfor the physical and chemical characterization of advanced functional materials. Liviu NICU is co-author of over 100peer-reviewed articles, 2 books / book chapters and has co-invented 3 patents. The laboratory he is heading sinceJanuary 2016 brings together more than 700 people working in the fields of automation, robotics, computing andmicro-nanotechnologies.


93

Structure-Controlled Synthesis of Single-Walled CarbonNanotubes

Yan Li

College of Chemistry and Molecular Engineering and Academy for AdvancedInterdisciplinary Studies, Peking University, Beijing National Laboratory for MolecularSciences, Beijing, China


ABSTRACTSingle-walled carbon nanotubes (SWCNTs) can be either semiconducting and metallic. SemiconductingSWCNTs (s-SWCNTs) present direct bandgap and balanced high mobility toward electrons and holes, which isdesired in electronic applications. However, the bandgap is determined by their structure which is described bytheir chiral index (n,m). Therefore, the structure-controlled preparation of SWCNTs is a crucial issue forcarbon-based nanoelectronics and has been a great challenge since 1990s.We developed a strategy to synthesize SWCNTs with a specific chirality by using intermetallic compoundCo7W6 nanocrystals. The catalyst nanocrystals act as the structural templates for the formation of SWNTs withdesigned chiralities. SWCNTs of high chirality purity are obtained under optimized kinetic growth conditions.This strategy has shown success in the synthesis of SWCNTs of several different chiralities. Further in situstudies on the catalysts under reactive environment reveals the mechanism at atomic scale.

BIOGRAPHYYan Li joined the faculty of Chemistry, Peking University in 1995 and has been the full professor of chemistryat Peking University since 2002. She was a visiting associate professor in Department of Chemistry, DukeUniversity from 1999 to 2001. From 2016 to 2019, she was appointed as Distinguished Visiting Professor atSchool of Engineering, University of Tokyo and was awarded as Fellow of the School in 2020. Her research isfocused on carbon nanomaterials, especially the preparation, modification, characterization and application ofcarbon nanotubes. She has published over 150 papers in premier journals such as Nature, Science, J. Am. Chem.Soc., Adv. Mater., Acc. Chem. Res, Chem. Rev. etc. Currently, she is serving as the associated editor of ACSNano. She is also on the editorial or advisory board of several journals including Chemical Society Reviews,Materials Horizons, Nano Research, and Carbon.Dr. Li has received many awards and honors, such as National Science Fund for Distinguished Young Scholarsby NSFC (2011), Chang Jiang Scholar by Chinese Ministry of Education (2013), Fellow of Royal Society ofChemistry (2014), First Class Science and Technology Award by China Association for Instrumental Analysis(2015), Outstanding Researcher by China Association for Science and Technology (2016), First Prize in NaturalScience by Ministry of Education (2017), Chemical Innovation Award Distinguished Scientist by ChineseChemical Society (2018). She was also awarded as Top Ten Best Teacher (for undergraduate education) inPeking University (2008), Famous Teacher of Beijing City (2013), and Top Ten Best Supervisor (for graduateeducation) in Peking University (2015).


94

Day 4 - Thursday, 29 April

08:30 - 10:45 Session IVa: MEMS/NEMS-VI


Chair: Zewen LIU08:30-09:00 KEYNOTE SPEAKER: HIGH ACCURACY RESONANT ACCELEROMETERS BASED ON QMEMSYulong ZHAO Xi’an Jiaotong University

09:00-09:15 #163, LARGE-SWING LOW-DISTORTION HIGH VOLTAGE AMPLIFIER DESIGN FOR MEMS GYROSCOPESHua Chen, Ke Liu and Zhen MengInstitute of Microelectronics CAS

09:15-09:30#223, PREPARATION AND DETECTION OF MICRO-NANO ELECTRODE ARRAY BASED ON CHIPMUNK HYPOTHALAMUS IN SPECIFIC BRAIN REGIONSYiding Wang, Shengwei Xu, Chao Yang, Penghui Fan, Botao Lu, Gucheng Yang, Yinghui Li and Xinxia CaiState Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.

09:30-09:45#242, INFRARED THERMAL IMAGING SENSOR USING TRANSFERRED RUPHEN-BASED TEMPERATURE SENSITIVE FILMJialiang LI, Jun Hu, Yufei Zhai, Song Li, Yiming Yuan and Min WangSouthern University of Science and Technology

09:45-10:00#311, HYBRID FREQUENCY-TIME DOMAIN ANALYSIS OF BULK ACOUSTIC WAVE CIRCULATORJing Yuan , Bingbin Zhang, Chengfeng Wu and Yang Gao School of Information Engineering, Southwest University of Science and Technology

10:00-10:15#334, A PIEZOELECTRIC MICROMACHINED ULTRASONIC ARRAY WITH FREQUENCY-SELECTABLE TUBESWei Zhu, Lei Wang, Zhipeng Wu, Wenjuan Liu and Chengliang SunInstitute of Technological Sciences, Wuhan University, China


95

10:15-10:30#338, RESEARCH ON THE STABILITY THRESHOLD AND SUBHARMONIC OSCILLATION IN A PARAMETRIC EXCITATION MEMS RESONATORKuo Lu, Kai Wu, Qingsong Li, Xin Zhou, Yongmeng Zhang, Ming Zhuo, Xuezhong Wu and Dingbang XiaoNational University of Defense Technology

10:30-10:45#637, A MICROMACHINED ELECTROCHEMICAL ANGULAR ACCELEROMETER BASED ON INTERDIGITAL ELECTRODESTian Liang, Junbo Wang, Deyong Chen, Jian Chen, Bowen Liu, Chao Xu, Wenjie Qi, Xu She, Mingwei Chen, Anxiang Zhong and Yumo DuanState Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences

08:30 - 10:45 Session IVb: Bio-inspired multiscale Interfaces


Chair: Peiyi WU 08:30-09:00 KEYNOTE SPEAKER: BIO-INSPIRED MULTISCALE ADHESIVE INTERFACIAL MATERIALSShutao WANG Technical Institute of Physics and Chemistry CAS

09:00-09:30 KEYNOTE SPEAKER: NANOKITS FOR SINGLE CELL ANALYSIS Dechen JIANG Nanjing university

09:30-09:45#23, FABRICATION OF POLYMER/METAL COMPOSITE MICRO/NANO ARRAY STRUCTURES AND THEIR APPLICATIONS IN BIOLOGICAL INTERFACES AND ACTUATORSHongxu ChenJiaxing University

09:45-10:00#209, MWCNT/PEDOT:PSS NANOCOMPOSITES-MODIFIED MICROELECTRODE ARRAY FOR RECORDING NEURAL ACTIVITY OF HIPSCS-DERIVED MATURE NEURONS TO DIFFERENT CONCENTRATIONS OF K+ AND GLUEnhui He, You Zhou, Shihong Xu, Kui Zhang, Shengwei Xu, Yilin Song, Jinping Luo, Wanwan Zhu, Qi Xu and Xinxia CaiState Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences; University of Chinese Academy of Sciences

10:00-10:15#199, SWCNTS/PEDOT:PSS MODIFIED MICROELECTRODE ARRAY FOR DETECTION OF THE NEURONAL ELECTROPHYSIOLOGICAL ACTIVITY OF CORTICAL


96

NEURONS UNDER GLUTAMATE STIMULATIONShihong Xu, Yu Deng, Enhui He, Shenwei Xu, Longzhe Sha, Kui Zhang, Yiling Song, Jinping Luo, Qi Xu and Xinxia CaiState Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences

10:15-10:30#391, BIOINSPIRED LIQUID GATING MEMBRANE-BASED CATHETER WITH ANTICOAGULATION AND POSITIONALLY DRUG RELEASE PROPERTIESChunyan Wang and Xu HouCollege of Chemistry and Chemical Engineering, Innovation Center of Chemistry for Energy Materials, Xiamen University.

10:30-10:45#560, ULTRA-THIN FLEXIBLE NEURO PROBE UTILIZING BIODEGRADABLE COLLAGEN MICRONEEDLEDong Huang, Junshu Li, Zhongyan Wang, Zhitong Zhang, Qining Wang and Zhihong LiNational Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronics, Peking University

08:30 - 10:30Invited Session IVa: Multidisciplinary Frontier: Micro/Nano-Engineered Materials for Sensing and Applications


Chair: Xu XIAO & Tianxun GONG08:30-08:50FLEXIBLE HUMAN-MACHINE INTERACTING SENSORSYanchao MAO Zhengzhou University

08:50-09:10SOFT ROBOTIC MANIPULATION SYSTEM CAPABLE OF STIFFNESS VARIATION AND DEXTEROUS OPERATION FOR SAFE HUMAN-MACHINE INTERACTIONSChangyong CAO Michigan State University, USA

09:10-09:30BOROPHENE-BASED TWO-DIMENSIONAL MATERIALS AND DEVICESGuoan TAI Nanjing University of Aeronautics and Astronautics

09:30-09:50FUNCTIONAL PHOTONIC CRYSTAL WITH SUPERWETTABILITYJingxia WANG Technical Institute of Physics and Chemistry, CAS

09:50-10:10TWO-DIMENSIONAL TRANSITION METAL CARBIDES AND NITRIDES FOR TERAHERTZ ABSORPTION TECHNOLOGYXu XIAO University of Electronic Science and Technology of China

10:10-10:30


97

ROOM TEMPERATURE GAS SENSORS BASED ON TRANSITION METAL DICHALCOGENIDES HETEROSTRUCTURESZhi YANG Shanghai Jiao Tong University

08:30 - 10:15 Session IVc: Nanomaterials-II


Chair: Jie JU08:30-09:00 KEYNOTE SPEAKER: DESIGN OF SUB-NANOMETRE PORES FOR PRECISE SEPARATIONJian JIN Soochow University

09:00-09:15#295, SELF-POWERED FLEXIBLE SUPERCAPACITOR FOR HUMAN MOTION MONITORINGZheng Fan, Hongmei Chen, Yanyun Fan, Danfeng Cui, Shubin Yan and Chenyang XueNorth University of China

09:15-09:30#458, OPTOELECTRONIC SYNAPSE USING MOS2 VAN DER WAALS HOMOJUNCTION WITH INTERFACIAL PASSIVATION FOR FAST POTENTIATIONYizhen Ke, Lin Lin, Tianxun Gong, XIAOSHENG ZHANG and Wen HuangUniversity of Electronic Science and Technology of China

09:30-09:45#466, FUNCTIONALIZATION AND APPLICATION OF INORGANIC POROUS NANOFIBERSYunqian DaiSoutheast University

09:45-10:00#510, BIONIC TACTILE SENSOR BASED ON TRIBOELECTRIC NANOGENERATOR FOR MOTION PERCEPTIONSiyuan Wang, Peng Xu, Xinyu Wang, Hao Wang, Changxin Liu, Liguo Song, Guangming Xie and minyi xuDalian Maritime University

10:00-10:15#550, TRIBOELECTRIC NANOGENERATOR BASED ON SILVER NANOWIRESFengru FanXiamen University


98

08:30 - 10:30Session IVd: Nature-inspired energy conversion and harvesting: from fundamentals to applicaitonsVenue: Conference Room No.07 (3F)

Chair: Haisheng SAN08:30-09:00 KEYNOTE SPEAKER: NEMS-ENABLED INNOVATIONS AT INTERFACES FOR WATER-ENERGY NEXUSZuankai WANG City University of Hong Kong

09:00-09:15#92, A SELF POWERED ANGLE SENSOR AT NANORADIAN RESOLUTION FOR ROBOTIC ARMS AND PERSONALIZED MEDICAREZiming Wang, Jie An, Jinhui Nie, Jianjun Luo, Jiajia Shao, Tao Jiang, Baodong Chen, Wei Tang and Zhong Lin WangBeijing Institute of Nanoenergy and Nanosystems, CAS

09:15-09:30#101, APPLICATION AND PROSPECT OF MEMS TECHNOLOGY TO GEOPHYSICSHeting Hong, Lvchao Ni and Hongchun SunNortheastern University

09:30-09:45#376, ULTRASOUND-MEDIATED TOUGH TISSUE ADHESIVES USING NANOPARTICLESShuaibing Jiang, Zhenwei Ma, Tony Jin, Edmond Lam, Audrey Moores and Jianyu LiMcGill University

09:45-10:00#443, DESIGN AND ANALYSIS OF MEMS BIAXIAL COUPLED RESONANCE ACCELEROMETERHuimin Zhang, Yating Zhang and Wei ZhangPeking University

10:00-10:15#532, DEVELOPMENT OF ANNULAR-SHAPED BERNOULLI GRIPPER FOR CONTACTLESS GRIPPING OF LARGE-SIZE SILICON WAFERShihang Wang, Yancheng Wang, Deqing Mei and Songqiao DaiZhejiang University

10:15-10:30#600, DIELECTROPHORETIC MICRODEVICE WITH PLANAR ELECTRODES FOR CONCENTRATING MICROPARTICLESSalini Krishnan, Alia Mohammmed Shaker Alblooshi, Fadi Alnaimat and Bobby MathewUnited Arab Emirates University



99

11:00 - 12:15 Session IVe: MEMS/NEMS-VI


Chair: Songyue CHEN 11:00-11:30 KEYNOTE SPEAKER: SEMICONDUCTOR BIOSENSORS FOR GLOBAL HEALTH IN THE ERA OF AIOTYikuen LEE Hong Kong University of Science and Technology

11:30-11:45 #365, PREPARATION AND CHARACTERIZATION OF NI-AAO COMPOSITE SCAFFOLD GETTER WITH INDUCTION HEATINGLujiang Liu, Lingyun Wang, Zhenxiang Bu, Kuixi Wu, Wenlong Lv and Dandan GuDepartment of Mechanical and Electrical Engineering, Xiamen University

11:45-12:00#396,FREQUENCY OUTPUT, A MULTI-MODES VACUUM GAUGE WITH HIGHLY OUTPUT LINEARITY BASED ON ELECTROSTATIC NONLINEARITYChengxiang Wang, Yunbing Kuang, Yulie Wu, Zhanqiang Hou, Yongmeng Zhang, Xuezhong Wu and Dingbang XiaoNational University of Defense Technology

12:00-12:15#646,HIGH-RESOLUTION NONCONTACT ELECTROSTATIC VOLTAGE METER BASED ON MICROSENSOR CHIPXiaolong Wen, Pengfei Yang, Bo Zhang and Chunrong PengUniversity of Science and Technology Beijing

11:00 - 12:15 Session IVf: Soft&Flexibe Devices and Applications-IV


Chair: Shutao WANG 11:00-11:30KEYNOTE SPEAKER: BIO-INSPIRED IONIC SKIN FOR THERANOSTICSPeiyi WU Donghua University

11:30-11:45 #28, SPONTANEOUS BREATH ANALYSIS AND HEALTHCARE ASSESSMENT ENABLED BY TRIBOELECTRIC NANOGENERATORVYuanjie Su, Mingliang Yao, Guangzhong Xie, Huiling Tai and Yadong JiangUniversity of Electronic Science and Technology of China

11:45-12:00#51, ULTRA-FLEXIBLE AND HIGHLY TRANSPARENT HYDROGEL-BASED TRIBOELECTRIC NANOGENERATOR FOR PHYSIOLOGICAL SIGNAL MONITORING


100

Jiahao Yu, Zhensheng Chen, Haozhe Zeng, Bowen Ji, Zixuan Wu, Jin Wu, Yunjia Li, Jianbing Xie, Honglong Chang and Kai TaoNorthwestern Polytechnical University

12:00-12:15#90, A FLEXIBLE TACTILE SENSOR FOR THREE-DIMENSIONAL FORCE DETECTION BASED ON PIEZOELECTRIC SENSINGYunyun Luo, Libo Zhao, Guoxi Luo, Zhikang Li, Ping Yang, Qiankun Zhang, Qijing Lin, Zhuangde Jiang, Hongyan Wang and Yongshun WuXi’an Jiaotong University

11:00 - 13:00Invited Session IVb: Multidisciplinary Frontier: Functional Micro-nano Structures, Techniques and Applications Venue: Conference Room No.04 (2F)

Chair: Yang CAO11:00-11:20NANOFORESTS AND NANOFOREST-BASED MICRO SENSORSHaiyang MAO Institute of Microelectronics of Chinese Academy of Sciences

11:20-11:40BIOINSPIRED CATALYTIC MATERIALS BASED ON METAL-SULFUR CLUSTERSJian LIU Qingdao University of Science and Technology

11:40-12:00MASS TRANSPORT IN ATOMIC SCALE CONFINEMENTSSheng HU Xiamen University

12:00-12:20QUALITY HETEROSTRUCTURE FROM TWO-DIMENSIONAL MATERIALSYang CAO Xiamen University

12:20-12:40FIBER INTEGRATED MULTIFUNCTIONAL SENSING AND SUPER-RESOLUTION IMAGINGQing YANG Zhejiang University

12:40-13:00THE APPLICATIONS OF VANADIUM DIOXIDE THIN FILMS ON MULTI-FUNCTIONAL SENSORMing GAO University of Electronic Science and Technology of China


101

11:00 - 12:15 Session IVg: Soft&Flexibe Devices and Applications-V


Chair: Guozhen LIU11:00-11:30KEYNOTE SPEAKER: THE REINVENTION OF SILKHu TAO Shanghai Institute of Microsystem and Information Technology

11:30-11:45#115, A THREE-ELECTRODE MULTI-MODULE SENSOR FOR ACCURATE BODILY-KINESTHETIC MONITORINGHaobin Wang, Yu Song, Hang Guo, Ji Wan, Liming Miao, Chen Xu, Zhongyang Ren, Xuexian Chen and Haixia ZhangPeking University

11:45-12:00#491, A MULTIFUNCTIONAL SOFT ROBOTIC FINGER BASED ON NANO TEMPERATURE-PRESSURE SENSOR FOR MATERIAL RECOGNITIONXiaoshuang Zhang, Wentuo Yang, Cheng Zhou, Xueyou Sun, Mengying Xie and Xuexin DuanTianjin University

12:00-12:15#598, READOUT OF NEURAL ACTIVITY IN MAMMALIAN PERIPHERAL OLFACTORY SYSTEM VIA MICROELECTRODE ARRAYSLiujing Zhuang, Yan Duan, Suhao Wang, Qunchen Yuan, Jizhou Song and Ping WangZhejiang University

11:00 - 12:00 Session IVh: Micro&Nanotechnologies for biomedicine

Conference Room No.07 (3F)

Chair: Guoan TAI11:00-11:30KEYNOTE SPEAKER: BIOMOLECULAR NEEDLING SYSTEM FOR MEDICALSBeomjoon KIM University of Tokyo

11:30-11:45#497, TENG ENHANCED AND SELF-POWERED SENSORS FOR BIOMEDICAL SIGNAL DETECTIONJieyu Dai and Zhou LiCenter on Nanoenergy Research, College of Chemistry and Chemical Engineering, Guangxi University 11:45-12:00#513, PHYSICAL FORCES INFLUENCE THE SELF-ORGANIZATION OF THE FORMATION OF LEADER CELLS DURING COLLECTIVE CELL MIGRATION


102

Mengyun Pan, Yongliang Yang and Lianqing LiuShenyang Institute of Automation, CAS

12:00 - 14:00 Fairwell Lunch & Adjourn of Conference


14:00 Lab Tour (Optional)


103

Keynote Speaker

High Accuracy Resonant Accelerometers Based onQMEMS

Yulong Zhao

State Key Laboratory for Manufacturing System Engineering, Xi’an JiaotongUniversity, Xi’an 710049, China;

E-mail :[email protected]

ABSTRACTIt is well known that there are many kinds of micro accelerometers, such as capacitive sensors,piezoresistive sensors, resonant sensors and so on. Compared with capacitive or piezoresistive sensors,resonant accelerometers based on QMEMS have the ability to achieve better performances such ashigh accuracy, high resolution and low power consumption. Benefiting from digital output signals,resonant accelerometers can be easily interfaced with digital electronics, highly compatible with digitalinstrumentation and data-processing units on account of the frequency output.

This talk will introduce some new research activities on high accuracy resonant accelerometers basedon QMEMS such as working principle, some novel optimization of structural design and fabrication.We also focus on integrated packaging and temperature compensation technology, which makessignificant impact on the performance of resonant accelerometers.

By improvements of structures and packaging processes, tests show that the QMEMS accelerometersobtain the characteristic of higher stability and reliability. The resolution of the designed sensor is lessthan 1µg and bias stability is improved to 5µg. this sensor can be used in the fields of high accuracymicro inertial measurement unit (MIMU) system.

BIOGRAPHYYulong Zhao is currently a professor of Xi’an Jiaotong University, Xi’an, China. Dr. Zhao received hisPh.D. degree on high temperature MEMS pressure sensor in Xi’an Jiaotong University. His mainresearch fields include MEMS sensors, biosensors, precise instrument and micro/nano manufacturingtechnology. and he has published about 300 scientific articles including 160 SCI indexed papers. Healso owns more than 100 China invention patents. Those papers and patents are mainly about MEMSsensors and biosensors on piezoresistive and resonance theory, or based on new materials. It alsoincludes MEMS actuators, PCR technology and femtosecond micro machining.

Dr. Zhao is a Doctoral Advisor & the Vice Director of State Key Laboratory for ManufacturingSystems Engineering. The rewards that Prof. Zhao received include: National Nature ScienceFoundation for Distinguished Young Scholars, National Talents Project, National High-level Personnelof Special Support Program (Scientific and Technological Innovation Leader), Tengfei ScholarsProgram of Xi’an Jiaotong University, Program for New Century Excellent Talents in University.


104

Bio-inspired multiscale adhesive interfacial materials

Shutao Wang

CAS Key Laboratory of Bio-inspired Materials and Interfacial Science, Technical Instituteof Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, P. R. ChinaE-mail: [email protected]

ABSTRACTBio-interfacial adhesion has become a frontier hot in interfacial chemistry. It is not only helpful for usto understand the mystery of living systems, but also important for the development of new functionalinterfacial materials and related technologies. Leaning from nature, our group has recently investigatedseveral special adhesion phenomena on biointerfaces and developed a series of bio-inspired adhesiveinterfacial materials. 1) We discovered the superdurability of bird feathers against tears originated fromtheir cascaded slide-lock system, not from the “hook–groove system” proposed centuries ago; Inspiredby the arrester system of dragonfly, we developed a new mechanical interlocker with a nylon pestleinstead of the traditional hook, which breaks the limitation of traditional Velcro with undesirabledeformation, breaking and noise. 2) Inspired by immune system, we proposed the concept ofsynergistic effect of biointerface adhesion based on structural matching and molecular recognition fordetecting circulating tumor cell (CTC). We have developed a series of CTC detecting biochips bychemical etching, vapor deposition, electrochemical deposition, template replication, electrospinningand others; We also developed an emulsion interfacial polymerization strategy to fabricate bio-inspiredimmunomagnetic bead (spanning from Janus to porous) with controllable topology and surfacechemistry. 3) We disclosed the microstructure of wound blood scab and developed a series of wounddressing, greatly promoting wound healing.

BIOGRAPHYShutao WANG, doctoral supervisor, project leader, was selected into the National Outstanding Youth, youth toptalents. He mainly engaged in the research of bionic multi-scale adhesion controllable interface materials, such asanti-adhesive interface materials, efficient bio-identification adhesion interfaces and devices, and early diagnosis ofdiseases. He firstly proposed the biomarker adhesion effect of "structural matching and molecular recognition" whichis used for cancer detection. It is 1000 times more sensitive than the traditional cell separation method, so it wasnominated for the 2010 World Science and Technology Award. He has won major scientific advances in China in2006, outstanding doctoral thesis of the Chinese Academy of Sciences in 2008 (50 papers), National OutstandingDoctoral Dissertation Nomination Award in 2009, and China Chemical Society Youth Chemistry Award in 2013. Hehas published over 140 SCI papers with H-index of 39, including Angew. Chem.(9), Adv. Mater.(20), JACS (2), Nat.Protocol.(1), which have been cited over 4200times. He has 8 patents authorized by China and 2 by USA. He haspublished Invitation reviews and 3 English articles on well-known international journals such as Chemical Review,Chemical Society Review, Annual Review Nano Research, Account of Chemical Research, Journal ofPhotochemistry and Photobiology C: Chemistry Review, MRS Bulletin. His researching results have been reported inhighlight in Nature, Nature medicine, Science Daily, Chem&Eng News, Materials Views China, Material Today, LabChipfor many times. He has accepted interview of “The Sceptical Chemist” of Nature Chemistry, “People Watch” ofAsia-Pacific Biothech News and China Science Daily.


105

Nanokits for Single Cell Analysis

Dechen Jiang

State Key Laboratory of Analytical Chemistry for Life Science, School ofChemistry and Chemical Engineering, Nanjing University, Nanjing, 210092,China

E-mail : [email protected] : group or personal website if applicable

ABSTRACT

Single cell analysis can obtain more accurate and comprehensive information reflecting thephysiological state and process of cells, which is of great significance for life science research andearly diagnosis of major diseases. At present, the main analysis strategy is to design specificrecognition molecules (probes) to realize the detection of intracellular biomolecules. However, due tothe differences in the uptake of probes by different cells, it is difficult to accurately regulate the contentand distribution of these recognition probes in cells. Consequently, this approach could only providerelatively quantitative results

In the past six years, our laboratory has developed a single-cell nanokit strategy that addresses thechallenging as mentioned above. This talk will focus on the introduction of nanokit, and theapplication to determine the activity of biomolecules in a single cell, and even in a single lysosome.Compared with the current methods, the nanokit has adapted features of the well-established biologicalkits, and thus, could provide a specific device to characterize the individual cell activity.

BIOGRAPHYDr. Dechen Jiang is currently a professor in State Key Laboratory of Analytical Chemistry for Life,School of Chemistry and Chemical Engineering at Nanjing University. He obtained his B.S. M.S andPh.D. degrees from Nanjing University (2000), Fudan University (2003) and Case Western ReserveUniversity (2008). After three years postdoctoral training at UNC-Chapel Hill, Dr. Jiang joinedNanjing University to start his independent research. Dr. Jiang has published over 50 researchpublications as the corresponding author, such as PNAS, JACS, Angew Chem and Anal. Chem. Hisresearch focuses on the development of cutting-edge technology and instrumental for thecharacterization of cellular activity at single cells. He has received multiple awards, such as the NSFCAward for Distinguished Young Scientist, Changjiang Young Professor of the Ministry of Education,Young Innovation Award for Analytical Instrument (China Instrument and Control Society).


106

Design of Sub-nanometre Pores for Precise Separation

Jian Jin

Chemical Engineering and Materials Science, Soochow University, Suzhou,215123, P. R. China

E-mail : [email protected]: http://www.film-sinano.com/

ABSTRACT

With the rapid development of modern industry, the development of materials and technologies for energy-efficient precise separation, and the realization of precise separation of ions and molecules will have arevolutionary impact on energy, water, chemical, pharmaceutical and other fields, which is our urgent need andgoal. Membrane separation has the advantages of low energy consumption, mild separation conditions and easyoperation. It has been widely used in various fields of industrial production and daily life. However, thepreparation of nanoporous membranes with highly uniform pore size and accurate separation of ions or smallmolecules are still facing great challenges.

Nanofiltration membrane prepared by interfacial polymerization is the main form of commercial nanoporousmembrane, which has great potential in the application of water treatment, food, medicine, metallurgy and so on.This talk will introduce our recent progress on developing nanofiltration membranes with high flux and highrejection for precise separation of ions and small molecules. Our strategies include: (1) design of new poroussupport membrane based on one dimensional nanowires network; (2) increasing the effective filtration area ofthe selective layer by using nanoparticles and salt crystals as sacrificing template; (3) regulation of the reactionprocess of interfacial polymerization via a dynamic, self-assembled network of surfactants monolyer. As a result,we achieved polyamide nanofiltration membranes with highly uniform sub-nanometre pores for sub-1 Åprecision separation.

BIOGRAPHYJian Jin is currently a Professor at Chemical Engineering and Materials Science, Soochow University. Dr. Jinreceived her Ph.D. degree in Institute of Chemistry from Jilin University. She was a postdoctoral fellow inTokyo University from 2001 to 2003. From 2004 to 2009, she worked as a senior researcher in National Institutefor Materials Science, Japan. In 2009, she joined Suzhou Institute of Nano-Tech and Nano-Bionics, ChineseAcademy of Sciences as a group leader. She moved to Soochow University as a distinguished professor in 2017.Her research interests are designing porous materials and membranes for ion/molecule separation, wastewaterpurification, gas separation, and the applications in other fields. She has published more than 130 peer-reviewedscientific publications with over 9600 citations and h-index 52. She applied 40 invention patents and received 22licensed patents (include 2 US patents).Dr. Jin was awarded “Distinguished Yong Scholar Award” from National Natural Science Foundation of Chinaand “Hundred Talents Program” of Chinese Academy of Sciences. She was honored as the Leading InnovativeTalent Scholars of Young and Middle Age in the Ministry of Science and Technology of People´s Republic ofChina and elected as a member in the Ten Thousand-Talent Program in China. She won the “Zhu Li Yue Hua”Excellent Supervisor Award. As an outstanding woman scholar, she was awarded as “National WomanPacesetter”. In 2018, she won the first prize of Jiangsu Science and Technology Award.


107

NEMS-enabled Innovations at Interfaces for Water-Energy Nexus

Zuankai Wang

Department of Mechanical Engineering, City University of Hong Kong, HongKong, 999077, P.R. China

E-mail :[email protected] : https://wangzuankai.wixsite.com/wanglab

ABSTRACT

Water is the origin of life and energy. In spite of its ubiquity and seemingly simplicity, the water is probably theleast understood matter in the world. The phase transition, transport, and manipulation of water, normallyspanning different time and length scales, constitute the basic paradigm of numerous biological systems andindustrial processes such as thermal management, energy, agriculture, and healthcare. Over the past decade, theadvances in NEMS manufacturing and visualization provide new dimensions in our fundamental and controllingof interfacial and transport phenomena of water, especially on textured surfaces and under complicated workingenvironments involving varying temperatures.

In this talk, I will discuss recent innovations enabled by NEMS at the interfaces to address one of the mostimportant challenges facing us today, i.e., water-energy nexus. In particular, I will highlight how the rationaldesign and control of topological structures enables us to fundamentally change the triple-phase interaction andachieve the preferred functionalities. Examples include how to efficiently collect water from air, how to use onedroplet to cool down hot surfaces by several hundreds of degrees, and how to use one droplet to light up 100LEDs.

BIOGRAPHYDr. Zuankai Wang is a full professor in the Department of Mechanical Engineering and Associate Dean in theCollege of Engineering at the City University of Hong Kong. He earned his B.S. degree in MechanicalEngineering from Jilin University in 2000 and Master degree in Microelectronics from Shanghai Institute ofMicrosystem and Information Technology, Chinese Academy of Sciences, in 2003, and Ph. D. degree inMechanical Engineering at Rensselaer Polytechnic Institute in 2008. After one-year postdoc training inBiomedical Engineering at Columbia University, he joined in the City University of Hong Kong in September2009 as an assistant professor.

Dr. Wang is the founding member of Young Academy of Science of Hong Kong, fellow of the InternationalSociety of Bionic Engineering and Changjiang Chair Professor awarded by Ministry of Education of China. Hehas won many awards including the 2020 Xplorer Prize, World Cultural Council Special Recognition Award,Outstanding Youth Award from International Society of Bionic Engineering, Outstanding Research Award andPresident’s Lectureship at the City University of Hong Kong. The Ph.D. students he supervised have won anumber of prestigious awards including MRS Graduate Student Gold Award, MRS Graduate Student SilverAward, Hiwin Doctoral Dissertation Silver Award, Hong Kong Young Scientist Award (2015, 2019).


108

Semiconductor Biosensors for Global Health in the Era ofAIoT

Prof. Yi-Kuen LeeDepartment of Mechanical and Aerospace EngineeringDepartment of Chemical and Biomolecular EngineeringNanosystem Fabrication FacilityHong Kong Center for Construction RoboticsNanosystem Fabrication FacilityHong Kong University of Science and TechnologyClear Water Bay, Kowloon, Hong Kong SARhttp://meyklee.people.ust.hk/

ABSTRACT

Semiconductor technologies, especially silicon-based micro/nano CMOS processes, have been making a tremendousimpact on human society in the past 60 years. In recent years, Field Effect Transistors (FET) biosensors, e.g., Ion SensitiveFET (ISFET), have been developed for the detection of various ions and biomolecules for biomedical applications. One ofthe most prominent applications is CMOS ISFET-based DNA sequencing, such as the Ion Torrent Ion Proton II chip with660 million ISFET sensors. With the synergy of a fundamental principle of electrochemistry, generalized dimensionalanalysis from mechanics, analog IC design technique, and fabricated devices’ experimental data, we propose a generalizedgm/Id theory for the design of FET-based biosensors for detection of ions, DNA, and cells using commercialCMOS/CMOS MEMS foundry processes (TSMC 0.18m CMOS process and InvenSense 0.18 m CMOS MEMS process).The nonlinear coupling behavior of electrochemical-FET biosensors can be described as the sensitivity as a function ofcritical normalized parameters such as gm/Id, the normalized drain current (Inversion Coefficient), the electrochemicalreference voltage, and various noises. A series of CMOS biosensors for detection of ions, DNA, and bacteria with excellentperformance. In addition, we are working on developing a new CMOS Bio-MEMS platform for integration with microPCR/RT-PCR, the on-chip microelectronic circuit, microfluidics and edge-AI using heterogeneous integration ofcommercial semiconductor foundry processes, in-house-designed fabrication processes at HKUST NFF. This will bepromising in the era of AIoT for detecting various diseases, such as infectious diseases (COVID-19 and emerginginfectious diseases), cancer diagnosis, etc.

BIOGRAPHYYi-Kuen Lee receive his BS degree with honor at National Taiwan University (NTU) in 1992. He received his MS degree

under the supervision of late Prof Yih-Hsing Pao (member of US NAE and Academia Sinica) in the Institute of AppliedMechanics, NTU in 1995. He went to US and obtained Ph.D. degree in Mechanical Engineering with Major in MEMSunder the guidance of Prof Chih-Ming Ho (member of US NAE and Academia Sinica) at UCLA in 2001. He was anAssistant Professor from 2001 to 2007 at HKUST. He received substantiation and was promoted to Associate Professor in2007. He was a Visiting Associate at Caltech in 2011. He has published two book chapters, more than 120 refereed journaland international conference papers. His current research topics include microfluidics for enumeration of Circulation TumorCells (CTCs) for cancer diagnostics, microchips for DNA transfection, micro/nano heat transfer, micro/nanoelectrophoresis for large DNA molecules, MEMS sensors for environmental monitoring and energy-efficiency building. Heis the Associate Editor, HKIE Transaction. He is the President of Hong Kong Society of Theoretical and AppliedMechanics since 2014. He is the co-founder of the annual Nano/Micro Engineered and Molecular Systems (IEEE NEMS)conferences since 2006; the co-founder of International Contest of Application in Nano-micro Technology (ICAN)Association; Technical Program Committee (TPC) member of IEEE MEMS 2007, Kobe, Japan; TPC member of IEEENano 2007; TPC member of APCOT 2008, 2010, 2012, 2014; TPC member of IEEE NEMS 2009, 2010, 2011 & 2012,IEEE Transducers 2009 & 2011, 2013, 2015. He is also the Chair for the 5th International Workshop on Innovation andCommercialization of Micro & Nano Technologies (ICMAN 2011), Shenzhen, 5-8 Nov 2011. He is the Associate Editor ofMicrofluidics and Nanofluidics, Nature Springer. He chaired APCOT 2018 (Asia-Pacific Conference of Transducers andMicro-Nano Technology), Hong Kong in 2018. He also serves the Editorial Board of Micro/Nanotechnology Journal inChina, and the Bio-Design and Manufacturing (BDM), Springer.


109

Bio‐‐Inspired Ionic Skin for TheranosticsPeiyi Wu

State Key Laboratory for Modification of Chemical Fibers and Polymer Materials，College of Chemistry, Chemical Engineering and Biotechnology, Donghua University

E-mail : wupeiyi@ dhu.edu.cnWebsite : www.peiyiwu.cn

AABBSSTTRRAACCTT

The first‐generation ionic skins demonstrate great advantages in the tunable mechanical properties,high transparency, ionic conductivities, and multiple sensory capacities. However, little attention ispaid to the interfacial interactions among the ambient environment, natural organisms, and the artificialskins. In particularly, current ionic skins based on traditional synthetic hydrogels suffer fromdehydration in vitro and lack of substance communication channels with biological tissues. Herein, thiswork develops a bio‐inspired hydrogel to address these key challenges. The hydrogel is designedwith natural moisturizing factors to lock water, biomineral ions to transmit signals, and biomimeticgradient channels to transport substances from non‐living to living interfaces. It is stable in ambientcondition, adhesive and hydrated on mammal skins, and capable of non‐invasive point‐to‐pointtheranostics. This theranostic ionic skin realizes sensitive detection, enhanced treatment efficacy, andreduced side effects toward major diseases in vitro. It will shed light on the hydrogel bioelectronicswith excellent biocompatibility, bio‐protection, and bio‐integration for human–machine interfacesand intelligent theranostics.

BBIIOOGGRRAAPPHHYYDr. Peiyi Wu is currently a Professor and Dean at College of Chemistry, Chemical Engineering andBiotechnology, Donghua University. Dr. Wu received his Ph.D. degree in Chemistry from UniversityEssen, Germany. He was a Professor(2000-2017) and dean(2005-2012) of the Department ofMacromolecular Science, Fudan University. Prof. Wu is active in the fields of two dimensionalcorrelation spectroscopy and smart materials. He is corresponding-author of 300 peer-reviewedscientific publications including Science Advances, Nature Communications and Advanced Materials,etc..PPrrooffeessssoorr WWuu is a distinguished young scholar of the national natural science foundation ofChina(2004) and fellow of the royal society of chemistry


110

The Reinvention of silk

Hu TAO

Shanghai Institute of Microsystem and Information Technology, ChineseAcademy of Sciences, P.R. China


ABSTRACT

A paradigm shift for implantable medical devices lies at the confluence between regenerative medicine,where materials remodel and integrate in the biological milieu, and technology, through the use ofrecently developed material platforms based on biomaterials and bioresorbable technologies such asoptics and electronics. The union of materials and technology in this context enables a class ofbiomedical devices that can be optically or electronically functional and yet harmlessly degrade oncetheir use is complete. The talk will discuss the use of silk protein as a sustainable material in transientoptics and photonics, electronics and optoelectronic applications. The favorable properties of thematerial certainly make a favorable case for the use of silk, yet serve as a broad inspiration to furtherdevelop biological foundries for both the synthesis and processing of Nature’s materials for hightechnological applications.

BIOGRAPHYHu TAO received his Ph.D. in Mechanical Engineering with the Best Dissertation Award from BostonUniversity, in 2010. His research interests have mainly focused on terahertz metamaterials usingMEMS technology. He is currently a Professor at Shanghai Institute of Microsystem and InformationTechnology, CAS and his research interests focus on green nanotechnology, micro/nano- technologyenhanced novel electronic and photonic devices for biomedical applications. Dr. Tao has publishedover 70 papers in peer-reviewed scientific journals including Science, Nature, Nature Photonics,Nature Nanotechnology, Nature Communications, PNAS, Advanced Materials and Physical ReviewLetters.


111

Biomolecular Needling System for Medicals

Beomjoon Kim

Institute of Industrial Science, The University of Tokyo, Japan

E-mail : [email protected] : http://www.kimlab.iis.u-tokyo.ac.jp/

ABSTRACT

Based on nano/micro components systems for the fabrication of novel nano devices, we have very successfullyinvestigated to develop various micro sensors for biological applications, health care as well as environmentalmonitoring. Here, new transdermal drug delivery system by using dissoluble micro needle patch will beintroduced. Recently, in the transdermal drug delivery methods, the microneedle-mediated drug delivery system(DDS) has been developed to replace the hypodermic injection-mediated DDS, to provide painless self-administration of biological drug with patient friendly manner. Especially, dissolving microneedles, whichdeliver the target drugs as the drug-loaded microneedle dissolves into the skin, have been spotlighted recently.

We investigate a novel fabrication method to achieve the user-friendliest, low-cost, and safest way for dissolublemicroneedle patches with vaccine delivery, several medical treatments, and even glucose sensing. We havedeveloped a porous microneedle patch for monitoring glucose levels using a paper sensor. The device painlesslymonitors fluid in the skin within seconds. Anyone can use the disposable patch without training, making ithighly practical. Additionally, fabrication is easy, low cost, and the glucose sensor can be swapped for otherpaper-based sensors that monitor other important biomarkers.

Furthermore, to monitor the biological information through the skin continuously, a novel microneedles’structure is proposed and investigated by combining flexible "sponge-like" porous PDMS matrix and the coatingby dissoluble hyaluronic acid (HA).

BIOGRAPHYBeomjoon Kim is currently a full professor of Institute of Industrial Science, the University of Tokyo, Japan

(Dept. of Precision Engineering, The Univ. of Tokyo) and a director of LIMMS/CNRS-IIS UMI 2820. Hereceived the B.S. degree from Seoul National University, Dept. of Mechanical Design and ProductionEngineering, Seoul, Korea, in 1993, and received M.Eng., and Ph.D. in Department of Precision Engineering,the University of Tokyo, Tokyo, Japan, in 1995 and 1998, respectively. Recently he is also in charge as a chairof corporate sponsored research division of “Virological Medicine”, at I.I.S., the University of Tokyo, andactive as executive advisor of BNS Medicals, Co., Ltd., Japan.

He was a CNRS Associate Researcher for Microsensors, Nano-instruments for Nanotechnology in CentreNational de la Recherché Scientifique at Besancon, France at 1998. He worked also in research orientationNanoLink, MESA+ Research Institute, University of Twente in the Netherlands, to September 2000. SinceSeptember 2000, he has been an Associate Professor of Institute of Industrial Science, the University of Tokyountil April 2014. He visited Institute of Micro-engineering, EPFL (group of Prof. Juergen Brugger), Swiss, Dept.Chemical Eng. (group of Prof. D. Schwartz), The University of Washington, USA in 2005, Dept. Chemistry,(group of Prof. Y. Chen) École Normale Supérieure (ENS) Paris, in 2010, and Dept. of Medicine, HarvardMedical School, Harvard-MIT HST, Cambridge, USA in 2013 as well for collaboration about micro/nano bio-engineering.

He investigates several aspects of bio-sensors components to accomplish portable Point-of-Care diagnosticdevices, which are disposal, user-friendly, low-cost, and highly sensitive. Moreover, he is interested to developself-powered, energy harvesting micro sensors as well as smart monitoring system with network like “internet ofthings”. Recently, main research topic is focused to study on new transdermal drug delivery system by usingdissoluble micro needle patch. He has published 103 peer reviewed Journal papers, 200 international conferencepapers, 189 domestic conference papers as well as several patents, books publications so far.


112

POSTER SESSION

Day 1 - Monday, 26 April

16:30 - 18:30Poster Session I(Accept Posters from No.4 to No.320 except 256 & 314)

#151—SELF-DRIVEN PHOTOELECTROCHEMICAL UV-VISIBLE PHOTODETECTORS USING ZRO2@TIO2 CORE-SHELL NANOROD ARRAYS MODIFIED WITH SINGLE-WALLED CARBON NANOTUBESZhen Wang, Renrong Zheng, Na Wang and Haisheng SanXiamen University

#155—ELECTRONIC SKIN BASED ON ELECTROSPUN PVDF NANOFIBERS FOR SLIPPING DETECTIONLingke Yu, Wenchang Tu, Shanshan You, Lingling Liu and Daoheng SunXiamen University

#158—A FLEXIBLE HYBRIDIZED ELECTROMAGNETIC-TRIBOELECTRIC NANOGENERATOR AND ITS APPLICATION FOR 3D TRAJECTORY SENSINGJi Wan, Haobin Wang, Liming Miao, Hang Guo, Chen Xu and Hai Xia (Alice) ZhangPeking University

#188—A SIMPLE BANDWIDTH BROADENING METHOD OF TERAHERTZ METAMATERIAL ABSORBER BY PARTIALLY REMOVING THE DIELECTRIC LAYERJia Xu, Jiahao Miao, Yi Liu, Yuan Tian and Xiaomei YuPeking University,

#204—TOUGH SELF-HEALING POLYMER ENCAPSULATED STRETCHABLE CONDUCTIVE FIBERS FOR SYSTEMATICAL INTEGRATION OF WEARABLE ELECTRONICSChaebeen Kwon and Taeyoon LeeYonsei University

#216—MINIATURIZED PIEZORESISTIVE SENSORS WITH WIDE WORKING RANGE FOR WEARABLE HUMAN MACHINE INTERFACESHong Xu, Ling Duan and Libo GaoXidian University

#227—WATER DROP DETECTION CONTAINED IN LUBRICANT OIL FOR


113

SUBMERSIBLE PUMP FAULT DIAGNOSISFumikazu Mizutani, Michio Shimimura, Akinori Mori, Yoshikazu Yoshida, Yoshihiro Hosokawa, Tadao Matsunaga and Sang-Seok LeeTottori University, Sakuragawa Pump MFG Co., Ltd

#4—LATERAL CHARACTERISTIC CALIBRATION OF AN ATOMIC FORCE MICROSCOPE USING A CR ATOMIC DEPOSITION GRATINGJunjie Wu, Xiaoyu Cai, Yuan Li, Yunxia Fu and Jiasi WeiShanghai Institute of Measurement and Testing Technology

#14—A MINIATURIZED PM2.5 CONCENTRATION MONITORING SYSTEM BASED ON QCM SENSOR AND OPTIMIZED STRUCTURE VIRTUAL IMPACTORYong Wang, Dongyang Chen, Qian Zhang, Yinshen Wang and Jin XieZhejiang University

#20—PREPARATION OF POROUS SNO2 AND ITS ETHANOL DETECTION PERFORMANCE IN MEMS STRUCTURE GAS SENSORXiao ZhangGRINM

#37—HIGH ELECTROCHEMICAL ACTIVITY OF OXYGEN-DOPED GRAPHENE SHEETS EMBEDDED CARBON FILMYuanyuan Cao, Kaikai Sun, Haohua Zhong and Dongfeng DiaoShenzhen University

#38—FAST-SCAN MOEMS MIRROR FOR HD LASER PROJECTION APPLICATIONSHuijun Yu, Wenjiang Shen and Peng ZhouSchool of Nano-Tech and Nano-Bionics, University of Science and Technology of China

#43—MODELING AND OPTIMIZATION OF VLF PIEZOELECTRIC ANTENNA TOWARDS LOWER FREQUENCYHuiliang Liu, Yao Chu, Weiguo Hou, Yinqiao Li, Yuan Yao and Yaxing CaiChina Academy of Space Technology

#55—ELECTRICALLY INDUCED WIRE-FORMING 3D PRINTING TECHNOLOGY OF FLEXIBLE GALINSTANShane WangBeihang University

#61—AMORPHOUS CARBON FILM BASED WEAK PRESSURE SENSOR WITH ULTRATHIN SENSITIVE STRUCTUREQi Zhang and Yulong ZhaoSchool of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China

#62—BACTERIAL OUTER MEMBRANE VESICLES PRESENTING PROGRAMMED DEATH 1 FOR IMPROVED CANCER IMMUNOTHERAPY VIA IMMUNE ACTIVATION AND CHECKPOINT INHIBITIONYao LiXiamen University

#63—MICRO-FABRICATED ALKALI VAPOR CELLS FOR ATOMIC SPIN GYROSCOPE


114

STUDYYao Chen, mingzhi Yu, Yintao Ma, Guoxi Luo, Zhuangde Jiang, Yu Bai and Libo ZhaoXi’an Jiaotong University

#66—DOPAMINE MODIFIED NANOPORE FOR ULTRA-TRACE LEVEL DETECTIONWeijun Li and Xu HouXiamen University

#67—NANO/MICRO WEARABLE PHOTO-SENSOR SYSTEM BASED ON NOVEL CARBON FILMXi zhang and Dongfeng DiaoShenzhen University

#68—ELECTRON-INDUCED PERPENDICULAR GRAPHENE SHEETS EMBEDDED POROUS CARBON FILM FOR FLEXIBLE TOUCH SENSORSSicheng Chen and Lei YangXi’an Jiaotong University

#69—GRAPHENE OXIDE NANOSHEET ASSISTED POROUS CHITOSAN SPONGE FOR HEMOSTATIC APPLICATIONSYuanyuan YANG and Yajing ShenCity University of Hong Kong

#88—HIGH-PERFORMANCE FLEXIBLE SUPERCAPACITORS BASED ON NITROGEN-DOPED GRAPHENE FIBER ELECTRODESFeng Han, Weixuan Jing, Bian Tian, Qijing Lin, Chenying Wang, Libo Zhao, Ping Yang and Zhuangde JiangXi’an Jiaotong University

#89—DESIGN AND SIMULATION OF A WIDE-BANDWIDTH CMUTS ARRAY WITH DUAL-MIXED RADII AND MULTI OPERATING MODESZichen Liu, Libo Zhao, Yihe Zhao, Jie Li, Zhikang Li, Yu Bai, Ping Yang, Qijing Lin, Zixuan Li, Jiawei Yuan and Zhuangde JiangXi’an Jiaotong University

#97—TRANSPARENT, ANTI-FREEZING HYDROGELS FOR ULTRASENSITIVE TEMPERATURE AND STRAIN SENSOR BASED ON A THIN-FILM STRUCTUREZixuan Wu, Haojun Ding, Yaoming Wei, Kai Tao and Jin WuSun Yat-Sen University

#100—UNIFORMLY ARRAYED CARBON NANOFIBERS DOWN TO SEVERAL NANOMETERSJufeng Deng, Chong Liu and Madou MarcDalian University of Technology

#113—SELF-POWERED TRANSPARENT STRETCHABLE 3D MOTION SENSORHang Guo, Haobin Wang, Zehua Xiang, Chen Xu, Wan Ji, Liming Miao, Jiayin Li, Mengdi Han and Haixia Zhang


115

Peking University

#118—ENHANCING SENSITIVITY USING ELECTROSTATIC SPRING IN COUPLING MODE-LOCALIZED MEMS ACCELEROMETERZheng Wang, XingYin Xiong, KunFeng Wang, WuHao Yang, ZhiTian Li and XuDong ZouThe State Key Laboratory of Transducer Technology, Aerospace Information Research Institute Chinese Academy of Sciences

#119—SELF-POWERED DELTA-PARALLEL-BASED INTERFACE FOR DIVERSIFIED CONTROL APPLICATIONS FOR 2/3D CONTROL IN VIRTUAL/REAL SPACECheng Hou, Jiangjun Geng, Tao Chen, Huicong Liu and Lining SunSoochow University

#120—MICROCHIP BASED GIGAHERTZ ACOUSTIC STREAMING INDUCED CELLULAR INTERNALIZATION OF GOLD NANORODSShan He, Xiaoyu Wu, Wenjun Li, Wei Pang, Xuexin Duan and Yanyan WangTinajin University

#121—DIRECT-WRITE 3D PRINTED SELF-SUPPORTING FLEXIBLE MICROSTRUCTURE DEVICESCuiwen Hu, Haifeng Chen, Deyun Mo, Haishan Lian, Yinhuan Yang and Xiaojun ChenLingnan Normal University

#122—BIOMIMETIC CURVATURES CONTROLLED FLUID OVERFLOW SYSTEMZhichao DongTechnical Institute of Physics and Chemistry, Chinese Academy of Sciences

#125—A FLEXIBLE PAIN SENSOR BASED ON PDMS-AGNWSChen Xu, Liming Miao, Haobin Wang, Hang Guo, Zehua Xiang and Haixia ZhangPeking University

#128—LIQUID GATING MEMBRANES FOR MULTIPHASE SEPARATIONShijie YuXiamen University

#130—A BIONIC FISH WITH 4 IPMC PECTORAL FINSzhao chun, Wang Yanjie, Tang Gangqiang, wang jiale, zhu denglin and Luo Minzhou

#137—OHMIC CONTACT CHARACTERISTICS OF SILICON CARBIDE-BASED MEMS DEVICESWu ChenXi’an JiaoTong University

#145—FACILE FABRICATION OF NIO WRINKLE MICRO/NANOSTRUCTURES AND THE APPLICATION OF ENZYME-FREE GLUCOSE SENSORSShulan Jiang and Yong TanChina University of Gecosciences

#148—HARD PROTECTIVE TRANSPARENT COATINGS FOR FLEXIBLE ELECTRONICSOleksiy Penkov and Mahdi Khadem


116

Zhejiang University

#152—HIGH-EFFICIENT ELECTROCHEMICAL BETAVOLTAIC CELL USING ZRO2 MODIFIED TIO2 NANOROD ARRAYSRenrong Zheng, Zhen Wang, Na Wang, Zan Ding and Haisheng SanXiamen University

#154—DESIGN AND FABRICATION OF PDMS THIN FILM ELECTROMAGNETIC ACTUATORHongguang Lu, Xiaodan Miao, He Chen and Shihai LiuShanghai University Of Engineering Science

#156—ELASTOMERS WITH ULTRAFAST LOW TEMPERATURE SELF-HEALING RATE AND LOW ADHESION TO ICEYizhi ZhuoNorwegian University of Science and Techonology

#162—SPOOF PLASMON SURFACES FOR TERAHERTZ SENSINGYi Huang, Shuncong Zhong, Tingling Lin and Yujie ZhongFuzhou University

#166—A FLEXIBLE PRESSURE/FLOW SENSOR BASED ON GRAPHENE PIEZORESISTIVITYZihao Dong, Yonggang Jiang and Deyuan ZhangBeihang University

#174—HYPOXIA/PH DUAL-RESPONSIVE NITROIMIDAZOLE-MODIFIED CHITOSAN/ROSE BENGAL DERIVATIVE NANOPARTICLES FOR ENHANCED PHOTODYNAMIC ANTICANCER THERAPYXudong Li and Yu GaoFuzhou University

#175—RESEARCH ON KEY TECHNOLOGY OF NOVEL RF MEMS SWITCH DESIGNING AND FABRICATINGYun Qi, Yuanyuan Yang and Wenjiang ShenNano Science and Technology Institute, University of Science and Technology of China

#176—DESIGN AND ANALYSIS OF DUAL SUBSTRATE RF MEMS CAPACITIVE SWITCH WITH LOW ACTUATION VOLTAGEYuanyuan Yang, Yun Qi and Wenjiang ShenUniversity of Science and Technology of China

#179—A PULSE DIAGNOSIS INSTRUMENT BASED ON DIGITAL MICROFLUIDICS SYSTEM TO IMITATE TCMShouju Yao, Hang Jin, Bin Qiu, Wenchang Tu, yike zhou, Shanshan You, Tianhao Wu, lingling liu, gonghan he and Daoheng SunXiamen University

#180—EXPLORING THE THERAPEUTIC EFFECT OF SONODYNAMIC THERAPY IN CANCER CELLS UNDER DIFFERENT ULTRASONIC PARAMETERS AND TREATMENT CONDITIONS


117

Yilin Zheng, Jun Wang and Yu GaoFuzhou University

#185—STRETCHABLE AND FLEXIBLE FIBER ELECTRODE FOR MEASURING NEURAL SIGNAL WITH AU NANOPARTICLE CONDUCTIVE NETWORKSChihyeong Won and Taeyoon LeeYonsei University

#187—BROADBAND LINEAR-TO-CIRCULAR POLARIZATION CONVERTER BASED ON ULTRATHIN METAL NANO-GRATINGYuanyi Fan, Ran Zhang, Ze Liu, Chuanlong Guan and Jinkui ChuDalian University of Technology

#189—SKIN INSPIRED HUMIDITY AND PRESSURE SENSOR WITH WRINKLE-ON-SPONGE STRUCTURELiming Miao, Ji Wan, Chen Xu, Hang Guo, Haobin Wang, Zehua Xiang, Jiayin Li, Mengdi Han and Haixia ZhangPeking University

#190—PROBING ZETA POTENTIAL OF GLASS IN ELECTROLYTE SOLUTIONS BY COLLOIDAL PROBE TECHNIQUEZhijian Liu, Jiaming Gao, Tianze Wu, Sen Wu, Zixiao Fan, Ziyi Yuan, Yongxin Song and Xinxiang PanDalian Maritime University

#191—HIGH-RESOLUTION MEASUREMENT METHOD BASED ON ARRAY FOV AND CODED APERTURESLi Zhang and Fei XingTsinghua University

#193—DIFFERENT EFFECTS OF MASS AND DAMPING ON PERFORMANCE OF VIBRATION AND WIND ENERGY HARVESTERSXiaokang Yang, Xuefeng He, Zhengguo Shang, Hui Huang, Chunlong Li and Yufei LiuChongqing University, Henan University of Science and Technology

#194—NANOCOMPOSITES MODIFIED PLATINUM WIRE ELECTRODE FOR DETECTION OF 17Β-ESTRADIOL UTILIZING THE CONFORMATIONAL CHANGES OF APTAMERSFanli Kong, Jinping Luo, Tao Ming, Shuai Sun, Yu Xing, Yan Cheng, Shihong Xu, Hongyan Jin and Xinxia CaiState Key Lab. of Transducer Technology Aerospace Information Research Institute, Chinese Academy of Sciences

#196—IN-SITU DEPOSITED ION-IMPRINTED POLYMERS FOR ELECTROCHEMICAL DETECTION OF TRACE CADMIUM IN WATERShuyu Xiao, Jingfang Hu, Jiyang Wang, Yu Song, Yansheng Li, Guowei Gao and Lei QinBeijing Information Science & Technology University

#197—FABRICATION OF THREE-DIMENSIONAL SI BASED ELECTRODES FOR INTEGRATED LI ION MICROBATTERIESChuang YueNingbo University


118

#201—ELECTROCHEMICAL BETAVOLTAIC CELL USING BLACK TIO2 NANOTUBE ARRAYS MODIFIED WITH SINGLE-WALLED CARBON NANOTUBESNa Wang, Renrong Zheng, Zhen Wang, Jiang Chen and Haisheng SanXiamen University

#202—AN ACOUSTIC MICROROBOT CONTROL SYSTEM WITH VISION FEEDBACKXiaolong LuNanjing University of Aeronautics and Astronautics

#206—ELECTROCHEMICAL PAPER APTASENSOR BASED ON BIOTIN-STREPTAVIDIN SYSTEM FOR LABEL FREE DETECTION OF 17Β-ESTRADIOLTao Ming, Jinping Luo, Juntao Liu, Shuai Sun, Yu Xing, Fanli Kong, Yan Cheng, Hongyan Jin and Xinxia CaiAerospace Information Research Institute, Chinese Academy of Sciences

#207—TEMPERATURE COMPENSATION FOR MOEMS MICROMIRROR WITH PIEZORESISTIVE ANGLE SENSORLei Qian, Huijun Yu, Jie Hu and Wenjiang ShenUniversity of Science and Technology of China

#208—NANOCRYSTALLINE COMPOSED SNO2 INVERSE OPAL FOR HIGHLY SENSITIVE ACETONE GAS SENSOR AT PPB-LEVELFeng Jiang, Wen Zhang and Yu WeiXi’an Jiaotong University

#210—STUDY OF THE LIGHT EMISSION FROM EU3+ DOPED NANOPOROUS ORGANOSILICATE FILMSJinMing Zhang, Jing Zhang, Yanrong Wang, Md. Rasadujjaman, Shuhua Wei and Jiang YanNorth China University of Technology

#213—A HIGHLY SENSITIVE ORIGAMI-PAPER-BASED APTASENSOR FOR DETECTION OF PROGRAMMED CELL DEATH PROTEIN 1 (PD-1)Shuai Sun, Tao Ming, Jinping Luo, Juntao Liu, Yu Xing, Fanli Kong and Xinxia CaiState Key Lab. of Transducer Technology Aerospace Information Research Institute, Chinese Academy of Sciences

#214—INVESTIGATION ON ELECTROSTATICALLY ACTUATED MICROMACHINED GYROSCOPEJunduo Wang and Wenjiang ShenUniversity Of Science And Technology Of China

#217—HIGHLY SENSITIVITY RESONANT BI-DIRECTIONAL MAGNETIC FIELD MICRO-SENSORNouha ALCHEIKH, Sofiane Mbarek and Mohammad YounisKAUST

#220—MICROELECTRODE ARRAY FOR ELECTROPHYSIOLOGY DETECTION OF AMYGDALA IN FREE-MOVING MICEPenghui Fan, Yilin Song, Yuchuan Dai, Yiding Wang, Botao Lu, Enhui He and Xinxia CaiInformation Research Institute, Chinese Academy of Sciences


119

#221—PHOTOLUMINESCENT TOUGH GEL SHEATHED SUTURE FOR NEAR INFRARED BIOIMAGINGZhenwei Ma, Fan Yang, Dongling Ma and Jianyu LiMcGill University

#222—A FLEXIBLE MECHANICAL COMPOSITE MICRO-GRATING TAILORED BY ONE-DIMENSIONAL ORDERED WRINKLE PATTERNSYi-hang Xin, Kai-Ming Hu, Xiu-Yuan Li, Er-Qi Tu and Wen-Ming ZhangState Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University

#224—VIBRATION CHARACTERISTICS OF PIEZOELECTRIC TIMOSHENKO NANOBEAMS IN VISCOELASTIC MEDIUMDong Wu, Dapeng Zhang, Mingwei Liu and Yongjun Leithe College of Aerospace Science and Engineering, National University of Defense Technology

#225—AC & DC MAGNETIC FIELD SENSOR BASED ON FLEXIBLE PIEZOELECTRIC POLYMERWeilong Han, Jian Wen, Yifei Wu, Bo Niu, Yi Wu and Mingzhe RongXi’an JiaoTong University

#228—LARGE AREA TRANSIENT FILMS AND DEVICES BY PHOTONIC SINTERING OF TWO DIMENSIONAL MATERIALSWenxing Huo, Zi’an Zhang, Zilun Wang, Ziyue Wu, Jiameng Li and Xian HuangTianjin University

#230—FAST RECONSTRUCTION OF RAMAN IMAGE BASED ON THE MULTI-CHANNEL IMAGING SYSTEM AND KERNEL FUNCTIONXian-Guang Fan, Long Liu, Ting Nie, Yi-Xin Lin, Ying-Jie Xu, Jian He and Xin WangXiamen University

#231—MAGNETICALLY INDUCED MICROPILLAR ARRAYS FOR ULTRA-SENSITIVE FLEXIBLE SENSOR WITH WIRELESS RECHARGING SYSTEMLibo GaoXidian University

#235—A CAPACITIVELY TRANSDUCED BULK ACOUSTIC WAVE MEMS RESONATOR WITH LOW BIAS VOLTAGESZeji Chen, Qianqian Jia, Wenli Liu, Yinfang Zhu, Quan Yuan, Jinling Yang and Fuhua YangInstitute of Semiconductors, Chinese Academy of Sciences

#236—DETECTION OF SINGLE PROTEIN MOLECULES USING MOS2 NANOPORES OF VARIOUS SIZESChaoming Gu, Zhoubin Yu, Xiaojie Li, Xin Zhu, Zhen Cao, Zhi Ye, Chuanghong Jin and Yang LiuZhejiang University

#238—HUMIDITY SENSOR BASED ON THIN-FILM PIEZOELECTRIC-ON-SUBSTRATE RESONATOR AND MOS2 FOR MULTIFUNCTIONAL APPLICATIONSHanyong Dong, Jintao Pang, Dongsheng Li, Qian Zhang and Jin XieZhejiang University


120

#243—IRREVERSIBLE ELECTROWETTING ON PETAL-MIMETIC NANOTEXTURED DIELECTRIC FOR FORMATION OF SHAPE CONTROLLABLE POLYMERIC LENSESHuifen Wei and Xiangmeng LiNorth University of China

#245—IN-SITU SYNTHESIZED LIQUID METAL MICROGELSDawei Wang, Chennan Lu, Xiaohong Wang and Wei RaoTechnical Institute of Physics and Chemistry, Chinese Academy of Sciences, University of Chinese Academy of Sciences

#246—DESIGN AND DEVELOPMENT OF HIGH PRECISION MAGNETIC ENCODER BASED ON TMR MEMS DEVICEZhang Bo, Jiang Yong, Li Yang, Chen Xiaoli and Wen XiaolongUniversity of Science and Technology Beijing

#247—FLEXIBLE ELECTRICAL STIMULATION DEVICE WITH CHITOSAN-VASELINE® DRESSING THAT ACCELERATES WOUND HEALING IN DIABETES AND CORRESPONDING STIMULATION OPTIMIZATION BASED ON A PRECISION LAYERED SKIN MODELMenglu Li, Xiaofeng Wang, Jikui Luo, Wei-qiang Tan and Xiaozhi WangZhejiang University

#249—ACHIEVING ULTRAHIGH ENERGY DENSITY FOR TRIBOELECTRIC NANOGENERATORJingjing Fu and Yunlong ZiThe Chinese University of Hong Kong

# 2 5 2 — O P T I C A L M I C R O / N A N O F I B R E E M B E D D E D S O F T F I L M E N A B L E S MULTIFUNCTIONAL FLOW SENSING IN MICROFLUIDIC CHIPSZhang Zhang, Jing Pan, Yao Tang, Yue Xu, Lei Zhang, Yuan Gong and Limin TongZhejiang University

#255—DYNAMICAL REVERSIBLE ELECTROWETTING WITH LOW VOLTAGE ON THE DIMETHICONE INFUSED CARBON NANOTUBE ARRAY IN AIRLei Zhou, Miao Wang and Xu HouXiamen University

#259—TRACE MERCURY DETECTION BY RUTHENIUM-BASED MOFS MODIFIED MICROELECTRODEChenyu Xiong, Yuhao Xu, Chao Bian, Ri Wang, Yong Xie, Mingjie Han and Shanhong XiaState Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences

#262—FREQUENCY MATCHING SYSTEM OF MEMS GYROSCOPE BASED ON FUZZY CONTROL STRATEGYYifang Liu, Ruimin Liu, Gang Fu, Xin Yan, JunYu Chen and Gaofeng ZhengXiamen University

#264—HIGH-YIELD AND LARGE-SIZE SUSPENDED GRAPHENE DEVICE FABRICATION TECHNIQUE AND EDGE BURR EFFECT ANALYSISYing Liu, Qin Wang, Yong Zhang, Jing Qiu and Guan-jun Liu


121

National University of Defense Technology

#265—ATOMIC STUDY ON THE DEFORM MECHANISM OF CUTA/CU AND CUTA/TA NANOLAMINATESXiao Wang, Mengjie Wang, Min Liu, Yue Liu and Weidong WangXidian university

# 2 6 8 — W I R E L E S S I M P L A N TA B L E P H O TO T H E R A P Y D E V I C E F O R O R A L INFLAMMATION REPAIRShuang Huang, Cheng Yang, Ziqi Liu, Xinshuo Huang and Hui-Jiuan ChenSun Yat-Sen University

#271—DEVELOPMENT OF MULTI-FUNCTIONAL BIOCOMPATIBLE PHOTOPOLYMERSeokyoung Bang, Dongha Tahk, Noo Li Jeon and Hong Nam KimKIST

#272—MULTIPARAMETRIC FLEXIBLE SENSORARRAYS SYSTEM FOR IN SITU IMMEDIATE DIAGNOSIS OF GLOSSITISZiqi Liu, Keer Li, Shuang Huang, Xinshuo Huang, Lingfei Zhou, Tiancheng Sun and Hui-Jiuan ChenSun Yat-Sen University

#273—CONTRIBUTION DISCRIMINATION OF AUXETIC CANTILEVER FOR INCREASED PIEZOELECTRIC OUTPUT IN VIBRATION ENERGY HARVESTINGLu WangXi’an Jiaotong University

#276—RESEARCH ON EMBEDDED 3D PRINTING FOR MAGNETIC SOFT ROBOTSWei Zhang, Jiachen Li, Huicong Liu and Guoqing JinSoochow University

#279—RESEARCH ON COUPLING MECHANISM OF WIRELESS POWER SUPPLY EQUIPMENT FOR FILM PRESSURE WIRELESS SENSING NODE OF WATER-LUBRICATED BEARINGYifan Zhao, Nan Wang and Fan Jiang

#280—INVESTIGATION OF ELECTROSTATIC-PIEZOELECTRIC HYBRID VIBRATIONAL POWER GENERATORS WITH DIFFERENT FREQUENCY BROADENING SCHEMESYongqi Cao, Dezhi Nie, Jian Zhang, Yiwei Wang, Ronggang He, Zhe Zhao, Bowen Ji, Jianbing Xie and Kai TaoNorthwestern Polytechnical University

#281—BIO-INSPIRED FLEXIBLE, DUAL-MODULATION SYNAPTIC TRANSISTORS TOWARDS ARTIFICIAL VISUAL MEMORY SYSTEMSFuqin Sun, Qifeng Lu and Ting Zhangi-Lab, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO) Chinese Academy of Sciences (CAS)

#282—KINETIC INVESTIGATION INTO FAST SUPRAMOLECULAR PROCESSES AND CHEMICAL REACTIONS THROUGH MICROFLUIDIC NMRXinchang Wang, Liulin Yang, Xiaoyu Cao and Zhongqun TianXiamen University


122

#285—LIQUID METAL NANOPARTICLES DECORATED WITH GRAPHENE OXIDE FOR ENHANCED PEROXIDASE-LIKE ACTIVITYXiaohong Wang, Dawei Wang, Chennan Lu and Wei RaoTechnical Institute of Physics and Chemistry, Chinese Academy of Sciences; University of Chinese Academy of Sciences

#286—SIZE-DEPENDENT PARTICLE SEPARATING IN CURVED MICROFLUIDIC CHIPYun Tian, Yongkang Wang and Yunfei ChenSoutheast University

# 2 8 7 — TA I L O R I N G S U R FA C E M O R P H O L O G Y A N D C RY S TA L Q U A L I T Y CHARACTERISTICS IN INGAAS/GAAS QUANTUM WELL STRUCTURE BY INSERTING HIGH-TEMPERATURE LAYERQuhui Wang, Haizhu Wang and Xiaohui MaChangchun University of Science and Technology

#288—3D ALL-METAL NANO-CAVITY COUPLED METAMATERIAL FOR REFRACTIVE INDEX SENSINGKenan Zhang, Peimin Lu, Wengang Wu, Jia Zhu, Guanzhou Lin and Yun HuangCollege of Physics and Information Engineering, Fuzhou University, Fujian

#289—HUMIDITY INSENSITIVE NANOGENERATOR BASED ON NATURAL NANOFIBRILSYanyuan Ba, Xiaowen Li and Xiaosheng ZhangUniversity of Electronic Science and Technology of China

#291—DESIGN AND SIMULATION OF A DOUBLE-ENDED ARRANGEMENT INFRARED THERMOPILEYihao Guan and Cheng Lei

#292—NODDING DUCK STRUCTURED HYBRID TRIBOELECTRIC-ELECTROMAGNETIC NANOGENERATOR TOWARDS OCEAN WAVE ENERGY HARVESTING AND SELF-POWERED MONITORINGLiqiang Liu, Xiya Yang and Qunwei TangJinan University

#294—A FACILE AND GREEN MICROWAVE HYDROTHERMAL METHOD FOR FABRICATING G-C3N4 NANOSHEETS WITH IMPROVED HYDROGEN EVOLUTION PERFORMANCEHongmei Chen, Yanyun Fan, Zheng Fan, Danfeng Cui, Chenyang Xue and Wendong ZhangNorth University of China

#300—ONE-STEP VAPOR DEPOSITION OF FLUORINATED POLYCATIONIC COATING TO FABRICATE ANTIFOULING AND ANTI-INFECTIVE TEXTILE AGAINST DRUG-RESISTANTRuixiang Zhao

#301—ATOMIC LAYER DEPOSITION OF AL2O3 ON 2D MOS2 FOR ENHANCING THE RECOVERY RATE OF GAS SENSORSungjoo Wi, Inkyu Sohn, Youngjun Kim, Seungmin Jung and Hyungjun Kim


123

School of Electrical and Electronic Engineering, Yonsei University, Republic of Korea

#303—NONLINEAR DYNAMIC OF COUPLING MECHANICAL MODES DEMONSTRATED BY PHONONIC FREQUENCY COMSJiangkun SunNational university of defense technology

#304—DEEP SPATIAL FREQUENCY SHIFT ENABLED CHIP-BASED SUB-WAVELENGTH- RESOLUTION IMAGINGMingwei Tang, Xiaowei Liu, Qing Yang and Xu LiuZhejiang University

#305—A LOW-COST DIGITAL LITHOGRAPHY SYSTEM SUPPORTING VISUAL FOCUSING AND ITS APPLICATION ON OPTICAL FIBERLuming Wang, Zhimin Zhang, Ningning Luo, Haifeng Xiao, Long Ma and Qingwang MengKey Laboratory of Opto-Electronic Information Science and Technology of Jiangxi Province, and Key Laboratory of Nondestructive Test (Ministry of Education), Nanchang Hangkong University, Nanchang, China

#313—AU-ENABLED NANOSTRUCTURED SAPPHIRE OPTICAL FIBER SENSOR FOR IN-SITU GAS SENSING IN HARSH ENVIRONMENTSKai Liu, Paul Ohodnicki, Jeffrey Wuenschell, Subhabrata Bera, Renhong Tang, Lin Li, Yi Liu, Tinghan Liu, Han Wu, Zhihua Huang and Henry DuNational Innovation Center of Advanced Rail Transit Equipment

#315—RESEARCH ON THE RESOLUTION OF SUBMICRON LITHOGRAPHIC PROJECTION SYSTEM BASED ON DMD FOR OPTICAL FIBER END FACEQingwang Meng, Zhimin Zhang, Ningning Luo, Luming Wang and Menghan XiongKey Laboratory of Opto-Electronic Information Science and Technology of Jiangxi Province, and Key Laboratory of Nondestructive Test (Ministry of Education), Nanchang Hangkong University, Nanchang, China

#318—GOLD NANOPARTICLES MODIFIED SENSITIVITY-ENHANCED UNCOOLED NEAR-INFRARED DETECTORXiaoyu Wu, Quanquan Guo, Wencheng Li, Chenyang Yu and Yanyan WangTianjin University

#320—RESEARCH ON NONLINEAR SHRINKAGE CHARACTERISTICS OF SMALL MODULUS PLASTIC GEAR BASED ON MOLDFLOWXiansong He, Wangqing Wu and Yihua LeiCentral South University


124

Day2 - Tuesday, 27 April

16:30 - 18:30Poster Session II(Accept Posters from No.323 to No.526 include 256 & 314)

#256—DESIGN AND OPTIMIZATION OF GLASS FRIT PACKAGE STRUCTURE FOR MICRO PRESSURE SWITCHLingyun Wang, Daner Chen, Heng Xiong and yifang LiuXiamen University

#314—DAMAGE PROFILE MODEL OF NANOSTRUCTURE FABRICATED BY FOCUSED HELIUM ION BEAMChenglong Liu, Qi Li, Qianhuang Chen and Yan XingSoutheast University

#353—INVESTIGATION OF BROADING MODULUS RANGE OF SOFT PROBES BY SINGLE BEAM ACOUSTIC TWEEZERHuiyao Shi, Jialin Shi, Peng Yu and Lianqing LiuShenyang Institute of Automation

#404—VERTICAL ORGANIC SYNAPSE EXPANDABLE TO 3D CROSSBAR ARRAYYongsuk Choi, Seyong Oh, Chuan Qian, Jin-Hong Park and Jeong Ho ChoYonsei University

#415—ACTIVE-POWERING WEARABLE IONTRONIC TACTILE SENSING FOR HUMAN PHYSIOLOGICAL MONITORINGHongyan Sun, Yu Chang and Tingrui PanShenzhen Institutes of Advanced Technology, Chinese Academy of Science

#424—NEGATIVE DIFFERENTIAL RESISTANCE EFFECT IN GRAPHENE NANORIBBONS HETEROJUNCTIONLi Cheng, Yu Zhu, Qingfeng Gong and Wenli ZhouHuazhong University of Science and Technology

#504—3D PRITED KENICS STATIC MICROMIXERKunpeng Zhang, Gonghan He and Daoheng SunXiamen University

#323—VISCOELASTIC DEFORMATION AND PROCESS OPTIMIZATION OF POLYMER MICROFLUIDIC CHIP FOR RAPID IN-MOLD BONDINGYihua Lei,Wangqing Wu and Xiansong HeCentral South University

#324—FACTORS INFLUENCING RESOLUTION OF OPTICAL FIBER END FACE


125

PROCESSING IN DIGITAL LITHOGRAPHYMenghan Xiong, Ningning Luo, Zhimin Zhang and Qingwang MengNanchang Hangkong University

#326—STUDY ON FRICTION HEAT GENERATION MECHANISM BY MOLECULAR DYNAMICSChangsheng He and Wangqing WuCentral South University

#328—THROUGH GLASS VIAS BY WET-ETCHING PROCESS IN 49% HF SOLUTION USING AN AZ4620 ENHANCED CR/AU MASKGuanghui Ding, Binghe Ma, Yuchao Yan, Weizheng Yuan, Jinjun Deng and Jian LuoNorthwestern Polytechnical University

#329—DNA-DIRECTED NANOFABRICATION OF ULTRA-SCALED HIGH-PERFORMANCE ELECTRONICSYahong Chen, Mengyu Zhao, Zhi Zhu and Wei SunXiamen University

#330—THE DESIGN OF LOVE WAVE IMMUNOSENSOR FOR REAL-TIME DETECTION OF CANCER BIOMARKER FROM HUMAN SALIVAJunyu Zhang, Tao Zhang, Yuantao Chen, Xiaojing Zhang, Hao Wan and Ping WangZhejiang University

#331—MEASUREMENT OF CARDIOMYOCYTES MOTION BASED ON SURFACE PATTERNED POLYDIMETHYLSILOXANE MEMBRANESi Tang, Jialin Shi, Huiyao Shi, Peng Yu and Lianqing LiuShenyang Institute of Automation

#333—AN ADAPTIVE OCTREE LEVEL SET SIMULATION METHOD OF THE WET ETCHING PROCESS FOR THE FABRICATION OF MICRO STRUCTURE ON SAPPHIRE CRYSTALYe Chen, Jin Qian, Xinyan Guo and Yan XingSoutheast University at Nanjing

#337—SURFACE ACOUSTIC WAVE (SAW) DEVICES BASED ON SCALN/ALN/SI LAYERED STRUCTURES WITH LARGE FIGURE OF MERITYan Liu, Binghui Lin, Yang Zou, Yao Cai, Wenjuan Liu and Chengliang SunThe Institute of Technological Sciences, Wuhan University

#339—A FLEXIBLE AGNPS-PDMS SUBSTRATE TO PRODUCE ULTRASENSITIVE SERS DETECTIONGuanzhou Lin, Kenan Zhang, Yun Huang, Shengxiao Jin, Tian Kang, Yusa Chen, Liye Li, Peimin Lu and Wengang WuPeking University

#342—FABRICATION AND PROPERTIES OF TWO-DIMENSIONAL INSE TOP-GATE TRANSISTORS AND THEIR APPLICATIONS IN LOGIC CIRCUITSWei Li and Xiaozhi WangZhejiang University


126

#343—VOXELATED MENISCUS-CONFINED ELECTRODEPOSITION OF 3D METALLIC MICROSTRUCTURESYutao Wang and Yuanliu ChenZhejiang University

#345—A CLOGGING RATE PREDICTION MODEL BASED ON POROUS MICROARRAY MEMBRANES FOR LIQUID BIOPSIESYinghao He, Yaoping Liu, Wei Wang and Yufeng JinPeking University ShenZhen Graduate School

#346—BIOMIMETIC ELECTRODE–ELECTROLYTE DESIGN FOR EFFICIENT ELECTROCATALYTIC NITROGEN FIXATION UNDER AMBIENT CONDITIONSYang Liu, Xinyi Zhang, Panagiotis Tsiakaras and Pei Kang ShenHenan Normal University

#349—MICRO-DROPLET OF PARTICULATE SUSPENSION GENERATED BY A PNEUMATIC EJECTION SYSTEMWeijie Bao, Shengnan Sun, Zhihai Wang and Yaohong WangFaculty of Information, Beijing University of Technology

#354—TWEEZERS FOR MICRO-DROPLET TRANSFER BASED ON HYDROPHOBIC NON-PARALLEL PLATE STRUCTUREJiaqiang Wang, Liguo Chen, Xiongheng Bian and Zaichen Wang

#359—DESIGN AND PREPARATION OF A HIGH RESOLUTION ACCELEROMETER BASED ON GRAPHENEXiaodong Zhao, Yanlu Feng, Wei Zhang and Jianhui LiaoPeking University

#363—NANOROBOTIC MANIPULATION INSIDE SCANNING ELECTRON MICROSCOPE FOR THE ELECTRICAL AND MECHANICAL CHARACTERIZATION OF ZNO NANOWIRESMei Liu, Aristide Djoulde, Quan Yang, Weilin Su, Lingli Kong, Jinjun Rao, Jinbo Chen and Zhiming WangShanghai University

#366—NANO MECHANICS MARKERS FOR ACCESSING THE EFFECTS OF ULTRAVIOLET(UVC) DISINFECTIONYuxuan Xue, Ning Xi, Kaicheng Huang and Ye MaThe University of HongKong

#367—MULTI-PULSE TRIBOELECTRIC NANOGENERATOR BASED ON MICRO-GAP CORONA DISCHARGE FOR ENHANCEMENT OF OUTPUT PERFORMANCERu Wang, Juan Cui and Yong-Qiu ZhengNorth University of China

#369—CONTROL OVER ELECTRICAL PROPERTY OF A-INGAZNO THIN FILM TRANSISTORS USING COUPLED SELF-ASSEMBLED MOLECULAR LAYER AS COPPER DIFFUSION BARRIER.Seungmin Lee, Minkyu Lee and Taeyoon LeeYonsei University


127

#370—LATERALLY-EXCITED BULK-WAVE RESONATORS (XBARS) WITH EMBEDDED ELECTRODES IN 149.5° Z-CUT LINBO_3Xiyu Gu, Jieyu Liu, Yao Cai, Yan Liu, Chao Gao, Zhiwei Wen, Shishang Guo and Chengliang SunThe School of Physics and Technology, Wuhan University

#373—RESEARCH ON INTEGRATED RELIABLE MICRO-HIGH EXPLOSIVE TRAIN MODELBo He, Wenzhong Lou, Hengzhen Feng, Yuecen Zhao and Yi SunSchool of Mechatronical Engineering, Beijing Institute of Technology

#377—SPATIAL AND TEMPERATURE CONTROL OF EXCITON EMISSION BY FERROELECTRIC IN MONOLAYER TMDSBo Wen, Xi Zhang and Dongfeng DiaoShenzhen University

#378—THZ HYBRID GRAPHENE &METAL PATCHES METASURFACE FOR RCS REDUCTION AND DIGITAL CODINGBaolong Wang, Jiayi Yang, Shuangshuang Liu, Wei Xu, Guobin Chen, Di Feng, Lingjie Jia, Yan Meng and Xiuhan LiBeijing Jiaotong University

#379—A FLEXIBLE CIRCUIT FABRICATED BY TUNING THE WETTABILITY OF LIQUID METALChengjun Zhang, Qing Yang, Jingzhou Zhang, Jiale Yong, Xun Hou and Feng ChenXi’an Jiaotong University

#381—A METHOD FOR AUTOMATIC COUNTING AND LABELING OF CELLS STAINED WITH MICROPOROUS MEMBRANEJiangcheng Cao, Tingting Hun, Wenbo Zhou, Zheng Liu, Wei Wang and Yufeng JinPeking University ShenZhen Graduate School

#385—DESIGN OF A CONTROLLABLE PUSH-TRIGGERED MICROFLUIDIC CHIP FOR VITRIFICATION REAGENT LOADING/UNLOADINGGuangyi Cai, Boshi Jiang, Jiaxin Zhu, Fenglin Liu and Tianzhun WuShenzhen Institute of Advanced Technolog, Chinese academy of science

#387—BMP-2 IMMOBILIZED LUBRICANT-INFUSED SURFACE COATING FOR ORTHOPEDIC IMPLANTS WITH ANTI-BACTERIAL, ANTI-INFLAMMATORY, AND OSTEOGENIC FUNCTIONALITIESJaegyu Park, Yeontaek Lee, Kijun Park and Jungmok SeoYonsei University

#389—DIRECT AND ALL-DRY MICROFABRICATION OF ULTRAMICROELECTRODE BASED ON COLD ATMOSPHERIC MICROPLASMA JETYe Xi, Longchun Wang, Zhejun Guo, Bin Yang and Jingquan LiuShanghai Jiao Tong University

#390—NANOPORE SURFACE CHARGE SENSING WITH ION-STEP METHODJing Yang and Chen SongyueXiamen University


128

# 3 9 2 — R E S E A R C H O N C O M P L E X S U R FA C E PAT T E R N E D C O N F O R M A L MANUFACTURING SYSTEM BASED ON POINT CLOUD THEORYJoe Yao, Junchuan Gao and Gonghan HeXiamen University

# 3 9 3 — A C O P L A N A R E L E C T R O D E D I R E C T C U R R E N T T R I B O E L E C T R I C NANOGENERATOR WITH FACILE FABRICATION AND STABLE OUTPUTGuoqiang Xu and Yunlong Zi The Chinese University of Hong Kong

#399—THE MECHANISM AND REALIZATION OF USING ULTRASONIC ATOMIC FORCE MICROSCOPY TO MEASURE SUBSURFACE DEFECTS OF ULTRA-PRECISION COMPONENTSYuyang Wang, Chengjian Wu, Jinyan Tang and Yuanliu ChenZhejiang University

#400—BREATHABLE GRAPHENE-BASED HYDROGEL STRAIN SENSORSXingchi Liu, Hengchang Bi and Xing WuEast China Normal University

#401—ENGINEERING APPLICATION OF MICRO SURFACE ACOUSTIC WAVE SENSING SYSTEM IN TEMPERATURE DETECTION OF COPPER BUSBARS IN TRANSFORMER CABINET OF ELECTRIC LOCOMOTIVETinghan Liu

#402—IMMUNE-CAMOUFLAGE COATING FOR IMPLANTABLE MEDICAL DEVICES, BIOPRINTING, AND MICROFLUIDICSKijun Park, Yejin Jo, Inwoo Kim, Soyeon Kim and Jungmok SeoYonsei University

#406—SLIPPERY COATED IMPLANTABLE FLEXIBLE MICROELECTRODE ARRAY (FMEA) FOR HIGH-PERFORMANCE NEURAL INTERFACEMd Eshrat E Alahi, Tian Zhou, Sara Khademi, Hao Wang and Tianzhun WuShenzhen Institutes of Advanced Technology Chinese Academy of Sciences

#408—LIGHT EXTRACTION EFFICIENCY INVESTIGATION OF ALGAN-BASED DEEP ULTRAVIOLET LIGHT-EMITTING DIODES ON NANO-PATTERNED SAPPHIRE SUBSTRATEWan Hui, Lei Yu, Lan Shuyu, Gong Liyan, Gui Chengqun and Zhou ShengjunWuhan University

#409—EQUIVALENT ELECTRICAL MODEL AND EXPERIMENTAL ANALYSIS OF A NOVEL NEEDLE-RING ATMOSPHERIC PRESSURE PLASMA MICROJETS ARRAYLingju Xia, Junfeng Yang and Li WenUniversity of Science and Technology of China

#410—A WEARABLE HEALTH MONITORING SYSTEM SELF-POWERED BY HUMAN-MOTION ENERGY HARVESTERChen Bao, Anxin Luo, Yi Zhuang, Junlong Huang and Fei Wangthe School of Microelectronics, Southern University of Science and Technology (SUSTech)


129

#412—IMPROVED RESERVOIR COMPUTING BY CARBON NANOTUBE NETWORK WITH POLYOXOMETALATE DECORATIONShuo Wu, Wenli Zhou, Kaiqiang Wen, Chengzhu Li and Qingfeng GongHuazhong University of Science and Technology

#413—2D MICROSCOPY OF MAGNETIC FIELD USING ATOMIC VAPOR CELLLiu Chen

#414—ATOMISTIC RESOLVED SIGNALS OF AMINO ACIDS FOR PEPTIDE SEQUENCING BY TUNNELING CURRENT ANALYSISTommaso Civitarese and Giuseppe ZolloSapienza University of Rome

#416—SINGLE-MOLECULE ELECTRONICS: RECENT ADVANCES AND PERSPECTIVESJunyang Liu and Wenjing HongXiamen University

#422—TUNABILITY OF OPTOELECTRONIC OSCILLATOR BASED ON SIO2 OPTICAL WAVEGUIDE RING RESONATORZerong Jia, Yongqiu Zheng, Jiamin Chen, Liyun Wu, Chen Chen and Chenyang XueNorth University of China

#423—LITHOGRAPHIC PROPERTIES OF AMORPHOUS SOLID WATERShan Wu, Ding Zhao and Min QiuWestlake University

#425—CHEMICAL BONDING OF FUNCTIONAL GROUPS IN SELF-ASSEMBLED MONOLAYER (SAM) FOR CU DIFFUSION BARRIERMinkyu Lee and Taeyoon LeeYonsei University

#427—FUNCTIONALIZED NANOCHANNELS FOR CONSTRUCTING ULTRASENSITIVE ELECTROCHEMICAL SENSORWenrui Ma, Shunbo Li and Yi XuCollege of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China.

#428—THE OPPOSITE ANISOTROPIC PIEZORESISTIVE EFFECT RES2Chunhua An and Jing LiuTianjin University

#429—STRUCTURAL DESIGN AND SIMULATION OF IONIC TRANSPORT AND MASS SELECTION PROCESS IN MEMS TIME-OF-FLIGHT MASS SPECTROMETRY CHIPZongjia Cai, Ming Hao, Tianyuan Qi, Cong Wang, Kun Liu, Renchao Dou, Donghui Meng, Lichen Sun and Rongxin YanSchool of Mechanical Engineer and Automation, Northeastern University, Shenyang, China

#431—MECHANISMS OF BRANCH TIP FUSION IN MESHWORK PATTERNSShan Guo, Mingzhu Sun and Xin ZhaoNankai university


130

#434—LEAF-LIKE SELF-ASSEMBLED MXENE/ZNOEP HYBRID NETWORK FOR HIGH-SENSITIVE TEMPERATURE SENSING IN ELECTRONIC SKINShijie Wan, Weiguan Zhang, Chenyang Xing and Zhengchun PengShenzhen University

#437—ENERGY LOCALIZATION OF LAMB WAVE RESONATOR USING DISPERSION ENGINEERINGYusi Zhu, Lidong Du, Zhan Zhao and Zhen FangAerospace Information Research Institute, Chinese Academy of Sciences; University of Chinese Academy of Sciences

#439—ROOM TEMPERATURE LINEAR MAGNETORESISTANCE IN VERTICALLY ALIGNED GRAPHENE NANOCRYSTALLINE NETWORK FILMDong Ding, Xingze Dai, Chao Sang and Dongfeng DiaoShenzhen University

#441—PREPARATION OF FLAME-RETARDANT LITHIUM-ION BATTERY SEPARATOR BY COAXIAL ELECTROSPINNINGFangqin Shao, Guoyi Kang, Huatan Chen, Zungui Shao, Xiang Wang, Wengwang Li and Gaofeng ZhengDepartment of Instrumental and Electrical Engineering

#442—A NUMERICAL STUDY ON THE EFFECTS OF MECHANICAL PROPERTIES OF RED BLOOD CELLS ON RHEOLOGY IN NARROW MICROCHANNELSDe-Yun Liu, Peng Jing, Xiaolong Wang, Qiaodong Wei, Shenghong Zhang and Xiaobo GongShanghai Jiao Tong University

#446—FLEXIBLE TRANSPARENT CONDUCTIVE NETWORK BASED ON LIQUID FILM RUPTURE SELF-ASSEMBLY METHODXinran Zhang, Haitao Deng, Danliang Wen, Yanyuan Ba, Haixia Zhang and Xiaosheng ZhangUniversity of Electronic Science and Technology of China

#447—AN IN2O3 NANOTUBES BASED GAS SENSOR ARRAY COMBINED WITH MACHINE LEARNING ALGORITHMS FOR TRIMETHYLAMINE DETECTIONWenjie Ren, Changhui Zhao, Yingming Liu and Fei WangSouthern University of Science and Technology

#449—STUDY OF TOUCH MODE MEMS CAPACITANCE VACUUM GAUGE WITH CIRCULAR DIAPHRAGMXiaodong Han, Gang Li, Yongjian Feng and Detian LiXiamen University

#450—PMUT-BASED AIR-COUPLED IMAGING AND SURFACE STAIN DETECTIONSheng Sun, Jianyuan Wang, Yuan Ning and Menglun ZhangTianjin University

#451—3D PRINTED WATER-SOLUBLE UV PHOTOPOLYMER FOR FLEXIBLE SENSOR WITH SACRIFICIAL SCAFFOLDS AND INDIRECTED MOLDING PROCESSChunjiang Wang, Wanhao Niu, Qihang Song, Xiangyu Mi, Jianxu Shi and Xiaoming ChenXi’an Jiaotong University


131

#453—ULTRASENSITIVE SILICON NANOWIRE FIELD-EFFECT BIOSENSORS ENABLED BY FUNCTIONALIZED WITH GOLD NANOPARTICLES AND APTAMERSQianhui Wei, Jianglan Yang, Han Xiao, Kuo Men, Qingzhu Zhang, Jing Zhang and Feng WeiGRIMAT Engineering Institute Co. Ltd.

#454—SELF-ASSEMBLY OF ELECTROSPUN POLYMER NANOFIBERS: A GENERAL PHENOMENON GENERATING CYLINDER-PATTERNED NANOFIBROUS STRUCTURESTianhao Wu and Daoheng SunXianmen University

#457—THE FABRICATION OF THREE-LAYER SILICON STACKED ANTENNAYang Lei Cao, Jian Zhu, Fang Hou, Min Huang and Zong Lei JiaoNanjing Institute of Electronic Devices

#459—ENHANCED TRAPPING STIFFNESS BASED ON SERS EMBEDDED MICROCAVITYYanhong Wang, Zhihui Li, Jingzhi Wu and Hengze YangNorth University of China

#463—SELF-POWERED ELECTRO-TACTILE SYSTEM FOR VIRTUAL TACTILE EXPERIENCESYuxiang ShiChinese Academy of Science

#464—INFLUENCE OF THE PARTICLE SIZE OF GLASS POWDER ON SINTERING CHARACTERISTICS IN TGV PACKAGINGyifang Liu, Hongbo Sang, Zhenxiang Bu, Yulong Zhang, Guangen Gao and Lingyun WangXiamen University

#465—A SELF-POWERED SYSTEM DRIVEN BY RANDOM HUMAN WALKING ENERGY FOR WEARABLE HEALTHCARE APPLICATIONSFan Wang and Xiangyu Chen

#468—AN ELECTROMAGNETIC-PIEZOELECTRIC-TRIBOELECTRIC HYBRIDIZED ENERGY HARVESTER TOWARDS BLUE ENERGYYunfei Li, Tianyi Tang, Manjuan Huang, Xin Ma, Zhaohui Chen, Peijuan Cui, Huicong Liu and Lining SunHarbin Institute of Technology

#470—INTERNAL RESONANT OSCILLATION IN COUPLED RESONATORS FOR HIGH-RESOLUTION MASS SENSING WITH A WIDER COUPLING RANGENanxing Li, Cao Xia, Guowen Zheng, Xu Du and Dong F. WangMicro Engineering and Micro Systems Laboratory (JML), Jilin University

#472—AN IMMERSED BOUNDARY METHOD FOR MASS TRANSFER THROUGH POROUS BIOMEMBRANES UNDER LARGE DEFORMATIONSXiaolong Wang, Peng Jing, Qiaodong Wei, Shenghong Zhang and Xiaobo GongShanghai Jiao Tong University

#474—ELASTIC STRAINING OF FREE-STANDING MONOLAYER GRAPHENEKe CaoXidian University


132

#475—MULTI-ORDER NONLINEARITIES AND RESULTING COHERENT OSCILLATIONS OF THE STATES IN QUANTUM DOT-NANOMECHANICAL RESONATOR HYBRID SYSTEMXinhe Wang, Lin Cong, Guangwei Deng, Kaili Jiang, Xiaoyang Lin and Weisheng ZhaoBeihang University

#476—INVESTIGATION THE MINIMUM MEASUREMENT POINTS FOR CALIBRATION A HIGH PRECISION NTC THERMISTORS IN CRYOGENIC FIELDGong Xun, Xiaohe Tang, Yanjie Li, Minmin You, Zude Lin and Jingquan LiuUniversity of Shanghai Jiao Tong

#477—IMPROVE THE EFFICIENCY OF SIDEWALL REFLECTOR-TYPE OPTICAL SWITCH BY COMBINING INDUCTIVELY COUPLED PLASMA AND FOCUSED-ION-BEAM ETCHINGHaoran Xu, Jin Xie, Kaiquan Li, Zhuang Xiong, Weikang Dong, Kometani Reo and Jun DaiBeijing Institute of Technology

#478—A TRIBOELECTRIC NANOGENERATOR WITH GEAR TRANSMISSION FOR HARVESTING ELASTIC POTENTIAL ENERGYXiaobo Lin, Lanxin Yang, Junfeng Zhong, Zhaoming Deng, Chenyang Xing, Bo Meng and Zhengchun PengShenzhen University

#479—A FACILE LOW-COST WIRELESS SELF-POWERED FOOTWEAR SYSTEM FOR MONITORING PLANTAR PRESSUREHuayi Huang, Ziya Wang, Zhihao Zhu, Waner Lin and Zhengchun PengShenzhen University

#480—INVESTIGATION OF THE RELIABILITY OF THE INTERCONNECTION BETWEEN METAL ELECTRODE AND SILICON ANCHOR IN SILICON-ON-GLASS PROCESSMengxia Liu, Xianshan Dong, Jian Cui and Qiancheng ZhaoPeking University

#481—A BISTABLE CRITERION FOR THE V-BEAM MECHANISMMin Liu, Weidong Wang, Xiao Wang, D SY, Yingmin Zhu, Zimin Huo and Yijia DuXidian University

#483—SELF-ADAPTIVE MICROJET ARRAY COOLING FOR RF HIGH POWER GAN INTEGRATION ON SILICONMiao YuNanjing University

#485—WEARABLE WIRELESS SENSING SYSTEM WITH ULTRASENSITIVE AND SELF-CLEANING PRESSURE SENSOR FOR ELECTRONIC SKINXuan Li, Meng Wang, Weidong Wang and Libo GaoXidian University

#486—EFFECT OF DEPOSITION PRESSURE ON THE TRIBOLOGICAL PROPERTIES OF TI/WS2 COMPOSITE FILMS DEPOSITED BY MAGNETRON SPUTTERINGJun Ye


133

Henan University of Science and Technology

#487—HIGH-TEMPERATURE THIN FILM TEMPERATURE SENSOR MADE OF POLYMER-DERIVED CERAMICS FOR HARSH ENVIRONMENTZaifu Cui, Guochun Chen, Xiaochuan Pan, Zhenyin Hai and Daoheng SunXiamen University

#490—A CONTACTLESS SWITCH FOR CELL SORTING BY AREA COOLINGYigang Shen, Yaxiaer Yalikun and Yo TanakaOsaka Univeristy

# 4 9 2 — L I G H T- C O N F I N E D P L A S M O N I C P R O B E F O R P H O T O E L E C T R I C CHARACTERIZATION BY ATOMIC FORCE MICROSCOPYYaoping Hou, Chengfu Ma, Wenting Wang and Yuhang ChenUniversity of Science and Technology of China

#494—ALUMINA COMPOSITE COATINGS ELECTRICAL INSULATING PROPERTIES ON NI-BASED SUPERALLOYChao Wu and Daoheng SunXiamen University

#495—A MULTI-PARAMETER FLEXIBLE SENSOR FOR DETECTION OF WATER-QUALITY AND AQUATIC ANIMAL ACTIVITIESZhihong Wang, Zheng Gong, QIpei He, Deyuan Zhang and Yonggang JiangBeihang University

#496—REAL-TIME MONITORING AND ANALYSIS OF JET BEHAVIORS IN ELECTROHYDRODYNAMIC DIRECT-WRITINGYifang Liu, Junyu Chen, Jiaxin Jiang, Guoyi Kang, Huatan Chen, Jianyi Zheng and Gaofeng ZhengXiamen University

#499—MOLECULAR INSIGHTS INTO DISTINCT DETECTION PROPERTIES OF Α-HEMOLYSIN, MSPA, CSGG, AND AEROLYSIN NANOPORE SENSORSWanqi ZhouNanjing University of Aeronautics and Astronautics

#501—LARGE-SCALE UNIFORMLY HYBRID MICRO-NANO STRUCTURE WETTING SOLID SUBSTRATE FOR SURFACE-ENHANCED RAMAN SPECTROSCOPYFanhong Chen, Qi Qi, Yupeng Zhao, Shaoxun Zhang, Yongmin Zhao, Anjie Ming and Changhui MaoGRINM GROUP CORPORATION LIMITED

#505—ANTIBACTERIAL POLYMERIC FILMS WITH KILLING AND ANTIFOULING PROPERTIES SYNTHESIZED BY INITIATED CHEMICAL VAPOR DEPOSITIONQing SongNorthwestern Polytechnical University

#506—ELECTROOSMOTIC FLOW IN WILD-TYPE AND MUTATED CGSG NANOPOREGiovanni Di Muccio, Blasco Morozzo della Rocca and Mauro ChinappiUniversità di Roma Tor Vergata

#512—SURFACE FREE ENERGY CHARACTERIZATION OF SOFT MATERIALS


134

THROUGH COMPUTATIONAL EXPERIMENTSFrancesco Maria Bellussi, Annalisa Cardellini, Lorenzo Chiavarini, Pietro Asinari and Matteo FasanoPolitecnico di Torino

#514—AN IMPROVED ADAPTIVE PERIODICAL SEGMENT MATRIX ALGORITHM FOR SIGNAL DENOISING IN REAL-TIME ECG SENSINGXinggu Liu, Liang He, Jinhua Li and Zhuqing WangSichuan University

#516—DATA ANALYSIS WITH MACHINE LEARNING FOR HIGH-ACCURACY MULTI-TARGET GAS SENSOR ARRAYQihong Ning, Chun Huang, Liang He, Jinhua Li and Zhuqing WangSichuan University

#517—BUCKLED STRUCTURE FORMATION ON THE SURFACE OF STRETCHABLE CONDUCTIVE FIBERS AND APPLICATION FOR HYDROGEN SENSORKukro Yoon and Taeyoon LeeYonsei University

#518—A TUNABLE QUASI-ZERO STIFFNESS MECHANISM FOR THERMAL COMPENSATION OF A MEMS GRAVIMETERXiaopeng Zhang, Xueyong Wei, Yang Gao, Minghui Zhao, Yonghong Qi, Libo Zhao and Zhuangde JiangXi’an Jiaotong University; Northwest Institute of Nuclear Technology, Xi’an, China

#520—EFFECT OF A HYDROPHOBIC GAS ON THE EVAPORATION OF WATER IN CONFINEMENTAntonio Tinti, Gaia Camisasca and Alberto GiacomelloSapienza University of Rome

#521—ELECTROOSMOTIC FLUX IN UNCHARGED SOLID-STATE NANOPORES: AN ATOMISTIC SIMULATION STUDYMatteo Baldelli, Sébastien Balme and Mauro ChinappiUniversity of Rome Tor Vergata

#522—THE REALIZATION OF ZROXNY TEMPERATURE SENSORS WITH GOOD SENSITIVITY AND STABILITY IN THE TEMPERATURE RANGE ABOVE 150KYanjie LI, Minmin YOU, Gong Xun, Xiuyan LI, Zude LIN and Jingquan LIUShanghaiJiaoTong University

#523—NEMS SENSORS BASED ON SUSPENDED GRAPHENEXuge Fan and Frank NiklausKTH Royal Institute of Technology

#524—ON-CHIP MICRO/NANO DEVICES FOR ENERGY CONVERSION AND STORAGELin Xu and Liqiang MaiWuhan University of Technology

#525—A MINIATURE INFRARED EMITTER WITH ULTRA-HIGH EMISSIVITYDongsheng Shu, Jifang Tao, Yan Li and Xinye FanSchool of information science and engineering, Shandong University


135

#526—ULTRATHIN ELASTIC SHAPE SENSOR USED FOR SHAPE RECONSTRUCTION OF ENDOSCOPELeixin Meng, Yuan Zhuang, Liqiang Wang and Qing YangZhejiang Lab


136

Day3 - Wednesday, 28 April

16:30 - 18:30Poster Session III(Accept Posters from No.527 to No.720)

#564—PHOTONIC CHIP-BASED ULTRAFAST RAMAN SOLITON SOURCEZhao Li, Qingyang Du, Chaopeng Wang, Jinhai Zou, Juejun Hu and Zhengqian LuoDepartment of Electronic Engineering, Xiamen university

#566—RESPONSIVE DNA HYDROGEL FACILITATES ISOLATION AND RETRIEVAL OF CIRCULATING TUMOR CELLSShuguang Xuan, Hongtao Feng, Yulin Zhou, Yuqing Huang and Yan ChenShenzhen Institute of Advanced Technology

#597—ELECTRON-BEAM GRAYSCALE LITHOGRAPHY USING SOLID ANISOLERui Zheng, Ding Zhao and Min QiuWestlake University

#649—VELOCITY RANDOM WALK MODELLING OF A SILICON MEMS RESONANT ACCELEROMETER BASED ON NON-AGC CONTROL LOOPDong Li, QianCheng Zhao and Jian CuiPeking university

#665—A PIEZORESISTIVE PRESSURE MICROSENSOR BASED ON SIMPLIFIED FABRICATION PROCESSESQingGang Meng, Yulan Lu, Junbo Wang, Deyong Chen, Jian Chen and Bo XieThe State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences and also with the School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences

#668—FABRICATION AND VERIFICATION OF A NOVEL LOW-G MEMS INERTIAL SWITCHMin Liu, Weidong Wang, Xiao Wang, D SY, Yingmin Zhu and Yijia DuXidian University

#669—SPECTROMETER-FREE REFRACTOMETRIC SENSING USING IMAGE RECOGNITION ON CENTIMETER-SCALE GRADIENT NANOSTRUCTURESSiyi Min, Shijie Li, Zhouyang Zhu, Yu Liu, Chuwei Liang, Jingxuan Cai, Fei Han, Yuyan Li, Xing Cheng and Wendi LiThe University of Hong Kong

#527—SENSITIVE ACETONE GAS SENSORS BASED ON MOF-DERIVED CARBON NANOPARTICLES-DECORATED MESOPOROUS FE2O3 NANORODS ON MEMSLiyuan Zhu, Kaiping Yuan, Xueyan Wu, Taotao Wu and Hongliang Lu


137

Fudan University

#530—HOLLOW MXENE SPHERE-BASED FLEXIBLE E-SKIN FOR MULTIPLEX DETECTION OF APPLIED FORCEXuefeng Zhao, Xiaohong Wen, Mengyang Liu and Hongliang LuFudan University

#531—TRIBOELECTRIC NANOGENERATOR POWERED ELECTROWETTING-ON-DIELECTRIC ACTUATORSDongyue Jiang, minyi xu, Jie Tan, Yutao Wang and Penghao TianDalian University of Technology

#534—MASS FABRICATION OF 4H-SIC HIGH TEMPERATURE PRESSURE SENSORS BY FEMTOSECOND LASER ETCHINGLukang Wang, You Zhao, Yulong Zhao, Yu Yang, Bo Li and Taobo GongState Key Laboratory for Mechanical Manufacturing Systems, Xi’an Jiaotong University, Xi’an, China.

#535—3D HIERARCHICAL NANOARCHITECTURE AUNPS/MXENE@PAMAM BASED BIOSENSOR FOR CTNT DETECTION IN HUMAN SERUMXin Liu, Yong Qiu, Hao Wan, Liujing Zhuang and Ping WangZhejiang University

#536—INSIGHT OF VOLATILE BENZENES SENSING MECHANISMS FOR CONJUGATED POLYMER BASED GAS SENSORSJian Song, Tengfei Guo, Meng Liu, Yuelin Wang and Tie LiShanghai Institute of Microsystem and Information Technology

#537—MULTIDIMENSIONAL CHARACTERIZATION OF OPTOGENETICALLY ENGINEERED CELLS BASED ON AN INTEGRATED PLATFORMJia Yang, Lipeng Zu, Wenxue Wang, Ning Xi and Lianqing LiuState Key Laboratory of Robotics, Shenyang Institute of Automation (SIA) Chinese Academy of Sciences(CAS)

#541—DESIGN AND OPTIMIZATION OF MICROFLUIDIC SYSTEM BASED ON ENERGY MINIMIZATIONYike Zhou and Daoheng SunXiamen University

#543—EFFECT OF SCAN LINE SPACING ON LASER-REDUCED GRAPHENE OXIDE BASED TEMPERATURE SENSINGRui Chen, Wei Zhou, Chiqian Xiao and Tao Luo

#545—HIGH CURRENT DENSITY ELECTRON WIND FORCES IN METALLIC GRAPHENE NANORIBBONSJi Zhang, Tarek Ragab and Cemal BasaranSchool of Mechano-Electronic Engineering, Xidian University

# 5 4 7 — A T E N G - P R E S S U R E C O M B O - S E N S O R F O R A C C U R AT E M AT E R I A L IDENTIFICATIONWeifeng Chen, Ning Li, Zhuhui Yin, Yue Jiang, Jiabin Peng and Zhengchun PengShenzhen University


138

#549—INVESTIGATION OF FLEXIBLE SWEAT SENSOR FOR SODIUM-ION CONCENTRATION WITH A COMBINATION OF TWO SENSING MECHANISMSJiufu Zheng, Xuankai Xu, Yunzhi Hua, Xiaojin Zhao and Wei XuShenzhen University

#553—LONG - LINE TRANSMISSION DESIGN OF OCEAN MULTI - PARAMETER SENSOR DATA BASED ON CR600Xuan Wang, Yongqiu Zheng, Juan Cui and Haoling ZhangNorth University of China

#554—SENSITIVE WIDE-FREQUENCY-RESPONSE ACOUSTIC SENSOR BASED ON EVANESCENT FIELD EXCITED IN SEMI-BURIED OPTICAL WAVEGUIDE RING RESONATORYongqiu Zheng, chen chen, Jiamin Chen, Liyun Wu, Yuan Han and Chenyang XueNorth University of China

#558—FABRICATION OF MONODISPERSE MAGNETIC NANORODS FOR IMPROVING HYPERTHERMIA EFFICACYShan Zhao, Nanjing Hao, John X.J. Zhang, P.Jack Hoopes, Fridon Shubitidze and Zi ChenDartmouth College

#567—PYRO-ELECTROSPINNING FOR THE FABRICATION OF NANOFIBER MEMBRANE-EMBEDDED 3D DEVICESBin Qiu, feng xu, Shouju Yao, Wenchang Tu, yike zhou, Shanshan You, lingling liu, Tianhao Wu and Daoheng SunXiamen University

#569—PHOTOTHERMAL GEL MICROVALVE APPLIED TO PRECISE FLOW CONTROL OF MICROFLUIDIC CHIPKhan Chen, Jingwen Pan, Minghao Xu, Shuai Wang and wenqiang zhangChina Agricultural University

#570—ALN HYBRID-COUPLED RESONATOR WITH PHONONIC CRYSTAL REFLECTORKangfu Liu, Yuxi Wang and Tao WuShanghaitech University

#571—MULTILAYERED ELECTRET GENERATOR FOR SELF-POWERED WIRELESS DATA TRANSMISSIONZeyuan Cao, Shiwen Wang, Zibo Wu, Rong Ding and Xiongying YeTsinghua University

#573—OPTIMIZATION OF S1 LAMB WAVE RESONATOR WITH AL0.8SC0.2NShuai Shao, Zhifang Luo and Tao WuShanghaiTech University

#574—STRUCTURE DESIGN AND PARAMETER EXPLORATION OF A NEW TYPE OF PLASMA ANEMOMETERXianlong Liu and Daoheng SunXiamen university


139

#575—PREPARATION OF NANOFIBER MEMBRANE WITH CONTROLLABLE PORE SIZE AND DIAMETER BASED ON AUXILIARY COUNTER ELECTRODELingling Liu and Dangheng SunXiamen University

#577—OPTIMIZING DESIGN, FABRICATION AND CALIBRATION OF THIN FILM HEAT FLUX GAUGE ON ITO/IN2O3 THERMOPILEXin LiSchool of Physical Science and Technology, Xiamen University

#579—SUPER-LIGHTWEIGHT FLEXIBLE WIRELESS OPTOGENETIC STIMULATION DEVICERui Luo, Ziqi Mei, Zheng You and Dahai RenTsinghua University

# 5 8 0 — R E S E A R C H O N T H E B O U N C I N G - B A L L B A S E D T R I B O E L E C T R I C NANOGENERATOR FOR SELF-POWERED VIBRATION FREQUENCY MONITORINGXusheng Zuo, Taili Du, Fangyang Dong, Shunqi Li, Yongjiu Zou, Junhao Zhao, Peng Zhang, Yuewen Zhang, Peiting Sun and Minyi XuMarine Engineering College, Dalian Maritime University

#581—SURFACE MODIFICATION OF 3D PRINTED MICROFLUIDIC CHIPShanshan You, Kunpeng Zhang, Shouju Yao, lingling liu, Tianhao Wu and yike zhou

#582—MICRO-ACTUATORS DESIGN BASED ON LINBO3 THIN FILMYushuai Liu, Zhiyuan Gao, Kangfu Liu and Tao Wu

#585—DESIGN OF A MINIATURE FLAT PLATE-TYPE PROPELLANT ACTUATOR FOR MEMS SAFE AND ARM DEVICESYaoxiong Wang, Jinhong Huang, Bin Tang, Chongfei Zhang and Jun DaiBeijing Institute of Technology

#586—PATTERNING MULTILAYER ALGINATE/PCL SCAFFOLDS FOR CULTURING MYOCARDIAL TISSUEFeng Xu, Qiang Gao, Bin Lin and Daohen SunXiamen University

#588—ELECTROSPUN POLYIMIDE NANOFIBER SEPARATORS FOR LITHIUM-ION BATTERIESWenwang Li, Bangzhou Che, Jinghua Lin, Sinan Fu, Jiaxin Jiang, Gaofeng Zheng and Xiang WangXiamen University of Technology

#590—DESIGN AND RESEARCH ON HIGH OVERLOAD RESISTANCE OF A MICRO-MIRROR STRUCTUREQiwei WangNan Chang University

#592—SIMULATION AND ANALYSIS OF NANO ROBOTIC MANIPULATOR INSIDE SEMZiliang He, Lue Zhang and Zhan Yang


140

#593—PEDOT:PSS-BASED NANOPORE ELECTROCHEMICAL TRANSISTOR SENSORS FOR PARTICLE RECOGNITIONLin Li, Feng Zhou, Qiannan Xue and Xuexin DuanTianjin University

#594—SOFT ROBOTIC MANIPULATION SYSTEM CAPABLE OF STIFFNESS VARIATION AND DEXTEROUS OPERATION FOR SAFE HUMAN-MACHINE INTERACTIONSChangyong CaoMichigan State University

#595—ULTRA-LIGHT METAMATERIAL FOR SOUND ABSORPTION BASED ON MIURA-ORI SANDWICH STRUCTUREYixin Wang, Jingwen Guo, Xingru Chen, Yi Fang, Xin Zhang and Hongyu Yuthe Hong Kong University of Science and Technology

#601—HIGH-TEMPERATURE THIN FILM HEAT FLUX SENSOR MADE OF POLYMER-DERIVED CERAMICS FOR HARSH ENVIRONMENTGuochun Chen, Zaifu Cui, Xiaochuan Pan, Zhenyin Hai and Daoheng SunDepartment of Mechanical and Electrical Engineering, Xiamen University

#603—CFD ANALYSIS OF MIXING PROCESS IN A CROSS-SHAPED MICROMIXERShuai Yuan, Bingyan Jiang, Tao Peng and Mingyong ZhouCentral South University

#604—HIGH-DETECTIVITY INFRARED DETECTOR BASED ON DUAL-LAYER THERMOPILEzhaohui yang, Gaobin Xu, Shirong Chen, Jianguo Feng, Yuanming Ma and Xing ChenHefei University of Technology

#605—A HIGH-PRECISION MODE MATCHING METHOD FOR RATE-INTEGRATING HONEYCOMB DISK RESONATOR GYROSCOPESheng Yu, Xuezhong Wu, Xiang Xi, Jiangkun Sun, Qingsong Li, Dingbang Xiao and Yongmeng ZhangNational University of Defense Technology

#608—DIRECT ELECTRON-BEAM PATTERNING OF MONOLAYER MOS2 WITH WATER ICEGuangnan Yao, Ding Zhao, Yu Hong and Min QiuZhejiang University & Westlake University

#609—ACOUSTOFLUIDIC MICROMIXER WITH BUBBLE INDUCED ULTRASONIC MICROSTREAMINGPeng TaoCentral South University

#610—AN OPTICAL MICROPHONE BASED ON FABRY-PEROT ETALON STABILITY STRUCTURELiyun Wu, Yongqiu Zheng, Jiamin Chen, Chen Chen, Xiaoqiang Hua and Chenyang XueNorth University of China

#611—CAPACITIVE STRETCHABLE STRAIN SENSORS BASED ON WAVY-STRUCTURED METAL ELECTRODES


141

Siqi Yu and Hongyu YuHong Kong University of Science and Technology

#612—FABRICATION OF SOFT MAGNETIC MICROSTRUCTURES FOR MODULATION OF THE MAGNETIC FIELD DISTRIBUTION ON THE MICROMETER SCALEFengshan Shen, Yan Yu, Yuexuan Li, Hongtao Feng and Yan ChenShenzhen Institutes of Advanced Technology, Chinese Academy of Sciences

#614—SOFT INTERFACE DESIGN FOR ELECTROKINETIC ENERGY CONVERSIONJian Zhang and Xu HouCollege of Chemistry and Chemical Engineering

#616—AN UNDERWATER MATERIAL RECOGNITION DEVICE BASED ON THE SEEBECK EFFECTNanxi Chen, Baichuan Shan, Jianhao Liu, Yuhang Fan, Kaiyuan Zhao, Mengze Li and Changxin LiuDalian Maritime University

#618—PATTERNED DIPHENYLALANINE NANOTUBES REGULATE THE BEHAVIOR OF HIPPOCAMPAL NEURONSLipeng Zu, Huiyao Shi, Jia Yang, Yuanyuan Fu, Wenxue Wang, Ning Xi and Lianqing LiuShenyang Institute of Automation, CAS

#619—TEMPERATURE COMPENSATION FOR MEMS MASS FLOW SENSORS BASED ON BACK PROPAGATION NEURAL NETWORKYan Wang, Shijin Xiao and Jifang TaoSchool of Information Science and Engineering, Shandong University

#620—PRESSURE INDUCED TRANSITION FROM WRINKLING TO PERIOD-DOUBLING INSTABILITY IN FLEXIBLE TACTILE SENSORSXiuyuan Li, Kaiming Hu, Yihang Xin, Erqi Tu and Wenming ZhangState Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University

#623—IMPROVEMENT ON THE UNIFORMITY OF DEEP REACTIVE ION ETCH FOR ELECTRICALLY ISOLATED SAMPLESXiao Hu, Zhihan Zhen and Qiyu HuangShanghai Jiao Tong University

#624—DESIGN OF A NOVEL CLOSED-LOOP ELECTROSTATIC VOLTAGE SENSOR BASED ON WEAKLY COUPLED RESONATORSZilong Wang, Zhengwei Wu, Xiangming Liu, Yahao Gao, Simin Peng, Ren Ren, Fengjie Zheng, Yao Lv, Jun Liu, Hucheng Lei, Zhouwei Zhang, Wei Zhang, Jiachen Li and Chunrong PengUniversity of Chinese Academy of Sciences

#626—EFFECT OF THE PITCH ON ELECTROFORMING PROCESS OF THE MICROCHANNELSYanzhuo DongCentral South University

#627—THE TUNABLE DEFORMATION OF MICROFLUIDIC STRAIN SENSOR BASED ON AUXETIC METAMATERIAL


142

Linna Mao, Dengji Guo, Sirong Huang and Taisong PanSchool of Materials and Energy, University of Electronics Science and Technology of China

#628—EFFECT OF THE SUBSTRATE SIZE ON ACCURACY OF IN-SITU STRESS MEASUREMENTSJun Qiang and Bingyan JiangCentral South University

#629—MEASUREMENT OF COMB FREQUENCY AND SPACING STABILITY IN PHONONIC FREQUENCY COMBQiqi Yang, Liu Xu, Ronghua Huan, Zhuangde Jiang, Adarsh Ganesan and Xueyong WeiXi’an Jiaotong University

#630—INDUCTIVE EFFECT OF NANOFIBER DEPOSITION ON GROOVE STRUCTURE ON CELL CULTUREWenchang Tu, Yike Zhou, Bin Qiu, Shanshan You, Lingling Liu and Tianhao WuXiamen University

#632—PATTERNING AND IMMOBILIZATION OF SILVER NANOWIRES FOR FLEXIBLE ELECTRONICS BY USING MICROWAVESara Khademi, Kiyumars Jalili, Hao Wang, Md Eshrat E Alahi and Tianzhun WuShenzhen Institute of Advanced Technology

#634—RAPID FABRICATION OF FLEXIBLE STRAIN SENSOR FOR PLANTS GROWTH MONITORINGYicong Zhao, Jing Niu, Wenxing Huo and Xian HuangTianjin University

#636—TEMPERATURE AND PRESSURE DUAL-PARAMETER SENSING BASED ON FIBER BRAGG GRATINGNa Zhao, Qijing Lin, Liangquan Zhu, Kun Yao, Bian Tian, Libo Zhao and Zhuangde JiangXi’an Jiaotong university

#639—ACHIEVING HIGH ENERGY-STORABLE POLYTHIOUREA DIELECTRIC MATERIALS IN MOLECULAR DESIGN THROUGH TUNING H-BONDSYang Feng, Guanghao Qu, Liuqing Yang, Huan Niu and Shengtao LiXi’an Jiaotong University

#640—OPTICAL ANALYSIS OF PEROVSKITE LIGHT-EMITTING DIODES WITH NANOSTRUCTURED EMISSIVE LAYER VIA ELECTRICAL SIMULATION-ASSISTED DIPOLE LOCATIONLiyang Chen, Zhuofei Gan, Dehu Cui, Jingxuan Cai and Wendi LiUniversity of Hong Kong

#641—ULTRATHIN ELASTIC SHAPE SENSOR USED FOR ENDOSCOPE SHAPE RECONSTRUCTIONLeixin Meng, Yuan Zhuang, Liqiang Wang and Qing YangZhejiang Lab

#642—MICROFLUIDICS FOR SINGLE-CELL MULTI-OMICS ANALYSISXu Xing and Yang Chaoyong


143

Xiamen University

#643—A BIOSENSOR KIT BASED ON CU-MOF FOR SIMULTANEOUS DETECTION THE CORTISOL AND CYFRA21-1 IN HUMAN SALIVAXinyi Wang, Tao Zhang, Shuqi Zhou, Liubing Kong, Wencheng Lin, Hao Wan and Ping WangUniversity of zhejiang university

#644—LASER INDUCED GRAPHENE PATTERNS ON A THIN POLYIMIDE FILM VIA A COOLING PLATEQixiang Chen, Dezhi Wu, Zhiwen Chen, Hang Yu, Qinnan Chen and Daoheng SunDepartment of Mechanical and Electrical Engineering, Xiamen University

#645—A ROBOTIC DYNAMIC TACTILE SENSING SYSTEM BASED ON ELECTRONIC SKINJishen Dai, Yu Xie, Dezhi Wu, Chen Songyue, Ting Fu and Wei ZhouXiamen University

#647—CHARACTERIZATION OF AN ASYMMETRICAL CAPACITIVE MEMS TILT SENSORYang Gao, Xiaopeng Zhang, Yonghong Qi, Maeda Ryutaro, Zhuangde Jiang and Xueyong WeiXi’An Jiaotong University

#648—A REFLECTIVE COLOR FILTER BASED ON ITO-BA0.5SR0.5TIO3-ITO NANOFILMS CAPITALIZING ON A BLACK LAYERRui Wang, Jinying Zhang, Bingnan Wang, Xinye Wang, Defang Li, Jingyi Chen, Chenyu Guo, Xin Wang, Zhuo Li and Suhui YangBeijing Institute of Technology

#653—HIGH-PERFORMANCE RUBBERY ELECTRONICS ENABLED BY ELASTOMERIC COMPOSITE MATERIALSKyoseung SimUlsan National Institue of Science and Technology (UNIST)

#654—A FLEXIBLE ROPE-LIKE STRUCTURE SENSOR BASED ON TRIBOELECTRIC NANOGNERATOR FOR MULTIFUNCTIONAL SENSINGCong Zhao, Anaeli Elibariki Mtui, Xiangyu Liu, Kun Jiang, Jianye Wang, Chuan Wang and Minyi XuDalian Maritime University

#656—GIANT OPTICAL ACTIVITY IN ACHIRAL PLASMONIC AU NANOCONES EMBEDDED INTO ALUMINA NANOHOLE ARRAYSYuyi FengBeijing Institute of Technology

#657—FERROELECTRIC NANOCRACK-BASED NANOELECTROMECHANICAL (NEM) SWITCHES FOR MEMORY AND COMPLEMENTARY LOGICYaodong Guan, Zhe Guo, Qiang Luo, Jeongmin Hong and Long YouHuazhong University of Science and Technology

# 6 5 8 — C O N I C A L H E L M H O LT Z R E S O N AT O R - B A S E D T R I B O E L E C T R I C NANOGENERATOR FOR HARVESTING OF ACOUSTIC ENERGYHongYong Yu, Taili Du, Hongfa Zhao, Qiqi zhang, Ling Liu, yue Huang, Anaeli Elibariki Mtui, Xiu


144

Xiao and Minyi Xu

#659—3D CELL ELECTRICAL IMPEDANCE BIOSENSOR FOR REAL-TIME DRUG PERMEABILITY GRADIENT EFFECT MONITORINGYong Qiu, Xin Liu, Hao Wan, Ping Wang and Liujing ZhuangZhejiang University

#661—TRIBOELECTRIC NANOGENERATOR FOR WIND ENERGY HARVESTING AND SPEED SENSINGYan Wang, Chuanqing Zhu, Mengwei Wu, Hao Wang, Xiu Xiao, Guochang Wang, Jianchun Mi and Minyi XuDalian Maritime University

#662—FLEXIBLE TRIBOELECTRIC NANOGENERATOR FOR FLOW CONTROLChuanqing Zhu, Xiangyi Wang, Mengwei Wu, Jialin Zhang, Chenxing Jia, Guochang Wang, Jianchun Mi and Minyi XuDalian Maritime University

#666—DESIGN AND FABRICATION OF A MULTIMODE OPTICAL FIBER SURFACE PLASMON RESONANCE UREA BIOSENSORJiayin Li, Mengdi Han, Ji Wan and Haixia ZhangPeking University

#670—A RESONANT DIFFERENTIAL PRESSURE MICROSENSOR WITH A STRESS ISOLATION LAYERYadong Li, Chao Cheng, Yulan Lu, Jian Chen, Deyong Chen and Junbo WangAerospace Information Research Institute, Chinese Academy of Sciences

#671—A NOVEL DUAL-CHANNEL HELMHOLTZ RESONANCE ACOUSTIC ENERGY CONVERTER BASED ON FRICTION NANOGENERATORLing Liu, Hongfa Zhao, Zhenhui Lian, Hongyong Yu, Qiqi Zhang, Wenxiang Li, Minyi Xu and Xiu Xiao

#672—FABRICATION OF MULTI-ORIENTED COMPOSITE NANOFIBROUS MEMBRANE BY ELECTROSPINNINGXiang Wang, Yongfu Xu, Jinghua Lin, Sinan Fu, Jiaxin Jiang, Gaofeng Zheng and Wenwang LiXiamen University of Technology

#673—A BREATHABLE AND FLEXIBLE EPIDERMAL GLUCOSE SENSORHailong Chen, Zhihua Pu and Dachao LiTianjin University

#675—DESIGN OF LOW SIDELOBE LEVEL MILIMETER-WAVE PLANAR SLOTTED ARRAY ANTENNA FED BY RIDGE WAVEGUIDECao Yan and Yiming TangNanjing University of Posts and Telecommunications

#679—MODULARIZED HYDROGEL-GATE FIELD-EFFECT-TRANSISTOR BIOSENSORSXiaochuan DaiTsinghua University


145

#680—BANDWIDTH EXPANSION IN ACOUSTIC FILTERS BASED ON ALN-ON-SILICON RESONATORSJiannan Chen, Cheng Tu, Feilong Li and XIAOSHENG ZHANGUniversity of Electronic Science and Technology of China

#681—AN ELECTROMAGNETIC ACTUATOR WITH NONLINEAR PLANAR MICRO-SPRING FOR EXTENDED OUTPUT RANGEXuhan DaiShanghai Jiao Tong University

#682—A HIGH DC CURRENT OUTPUT SALT BATTERY HYBRID AND ENHANCED BY TENGShuangshuang Liu, Jiayi Yang, Zihao Niu, Yan Meng, Wei Xu, Di Feng, Baolong Wang, Meiqi Wang and Xiuhan LiBeijing Jiaotong University

#683—THE INFLUENCE OF ELECTRODE ON ELASTIC CONSTANT C33D EXTRACTION OF SCANDIUM-DOPED ALUMINUM NITRIDE THIN FILM BY THICKNESS-EXTENSIONAL MODE FBARHu XiaXiamen University

#685—ONE-STEP PREPARATION OF UNDERWATER SUPEROLEOPHOBIC ALUMINUM-COATED COPPER MESH BY PULSED LASER CLADDING FOR ENHANCED OIL-WATER SEPARATIONJunjin Lai and Rui ZhouXiamen University

#686—A RESONANT HIGH PRESSURE SENSOR BASED ON DUAL CAVITIES DESIGNJie Yu, Yulan Lu, Deyong Chen, Junbo Wang and Bo XieChinese Academy of Science

#687—MICROFLUIDIC DEVICE FOR ISOLATING CIRCULATING FETAL CELLSHuimin Zhang and Chaoyong Yang

#689—NUMERICAL ANALYSIS OF LASER ABLATED STRUCTURAL SIZE EFFECT ON ENHANCED ANTI-ICING PROPERTY OF TC4 SURFACEZhekun Chen, Rui Zhou, Yuhang Lin, Yi Zhu and Huangping YanXiamen University

#690—FACILE ACCESS TO SOLVENT-DEPENDENT LUMINESCENT CARBON NANOPARTICLES BY LASER ABLATION OF ACTIVATED CARBON POWDERSZhibin Chen, Rui Zhou, Longfan Li and Jingqin CuiXiamen University

#693—FABRICATION OF SUPERHYDROPHOBIC SURFACE BY INKJET PRINTING OF NANO SILVER SEEDS ON POROUS PAPERXinghao Zhang, Jin Xie and YU LIUJiangnan University

#696—A MEMS VOICE COIL MOTOR WITH A 3D SOLENOID COIL


146

Jiamian Sun, Zhi Tao, Haiwang Li, Kaiyun Zhu, Donghui Wang, Tiantong Xu and Hanxiao WuBeihang University

#702—TRIBOVOLTAIC AND TRIBO-THERMOELECTRIC COUPLING EFFECT ON METAL-SEMICONDUCTOR INTERFACEZhi Zhang and Chi ZhangBeijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences

#703—FULL PRINTED FLEXIBLE PRESSURE SENSOR BASED ON MICROCAPSULE CONTROLLABLE STRUCTURE AND COMPOSITE DIELECTRICSXiangyou Meng, Jing Zhao, Yaqin Pan, ziyun Han and Lixin MoBeijing Institute of Graphic Communication

#707—NANOSCALE TRIBOELECTRIFICATION GATED TRANSISTORTianzhao Bu and Chi ZhangBeijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences

#708—MODULATED FLEXIBLE ARTIFICIAL SYNAPTIC TRANSISTOR BASED ON GRAPHENE AND IONIC GELDi FengBeijing Jiaotong University

#709—PREPARATION AND RESEARCH OF ITO THIN FILM STRAIN GAUGETao Yang and Daoheng SunSchool of Aerospace Engineering,Xiamen University

#710—SCREEN PRINTING-BASED WEARABLE MULTI-SENSING DOUBLE-CHAIN THERMOELECTRIC GENERATORTao Feng, Danliang Wen, Haitao Deng and Xiaosheng ZhangUniversity of Electronic Science and Technology of China

#711—OPTICAL FIBER WAVEGUIDING SOFT PHOTOACTUATORS EXHIBITING GIANT REVERSIBLE SHAPE CHANGEYongcheng He, Haohua Liang, Jiulin Gan, Zhongmin Yang and Meihua ChenSouth China University of Technology

#712—STUDY OF STRAIN SENSING BEHAVIOR OF SELF-POWERED STRETCHABLE MECHANOLUMINESCENT OPTICAL FIBERHaohua Liang, Yongcheng He, Meihua Chen, Jiulin Gan and Zhongmin YangSouth China University of Technology

#713—THE LARGE PIEZOELECTRICITY AND HIGH-POWER DENSITY OF A 3D-PRINTED MULTILAYER COPOLYMER IN A RUGBY THE BALL-STRUCTURED MECHANICAL ENERGY HARVESTERXiaoting Yuan, Zhanmiao Li, Zhonghui Yu and Shuxiang DongPeking university at Beijing

#714—TUNING AND VISUALIZING MOTIONAL SIGNAL TRANSDUCTION EFFICIENCY IN ATOMICALLY-THIN NANOELECTROMECHANICAL RESONANT STRUCTURESJiankai Zhu, Jing Li, Xu Bo, Song Wu, Fei Xiao, Yachun Liang, Ting Wen, Fei Wang and Zenghui WangUniversity of Electronic Science and Technology of China


147

#715—PARTICLE-FILLED PHPS SILAZANE-BASED INSULATION COATING WITH HIGH-TEMPERATURE ELECTRICAL INSULATING PROPERTIES ON NI-BASED SUPERALLOY SUBSTRATESJi’an Lin, Qinnan Chen, Zaifu Cui, Zhenyin Hai and Daoheng SunXiamen University

#716—RESEARCH ON TORQUE CALCULATION MODEL OF MR FLUID-BASED MICRO-BRAKE IN THERMAL ENVIRONMENTYan Zhang, Ying Liu and Jun DaiNanchang University

#718—A LOW POWER MEMS MICROHEATER FOR MOS GAS SENSOR APPLICATIONSZiwei LianState key Laboratory of Advanced Materials for Smart Sensing, GRINM Group Co. Ltd

#719—ELECTRON-BEAM-INDUCED 3D DIRECT-WRITING OF A NANOELECTRODE ARRAY FOR INTRACELLULAR ELECTROPHYSIOLOGICAL RECORDINGWenqi Zhang and Lixin DongDepartment of Biomedical Engineering, City University of Hong Kong

#720—ELECTRICALLY-RESPONSIVE COLLOIDAL PARTICLE ASSEMBLY IN IONIC SURFACTANT SOLUTIONSMinqi Yang, Lisha Luo, Haiyang Fu, Hongjie Yin, Zhibin Yan, Mingliang Jin, Huicheng Feng, Guofu Zhou and Lingling ShuiSouth China Normal University

邮箱：联系人：陈经理电话：

光电显示：量子点、像素点、、光提取等

电子传感：薄膜器件、可拉伸器件、电极线等

材料生物：晶体生长、薄膜沉积、纤维支架等

光学：打印光刻胶、电流体光刻掩膜、微透镜等

武汉华威科智能技术有限公司高分辨率电流体喷印设备—— 系列科研型

系列科研型电流体喷印设备，源自华中科技大学数字制造装备

与技术国家重点实验室的高分辨率电流体喷印原创性技术，获年湖北

省自然科学一等奖和年国际日内瓦发明展金奖；配置高速视觉系统、

高精度多自由度运动平台、精密供墨系统等功能模块，适用粘

度的有机无机墨水，集成按需点喷、纺丝直写、雾化制膜三种打印模式，

支持矢量图、位图等图形输入，高精度制备微纳级点点阵、线曲线、薄膜

结构等复杂微纳图案。

产品介绍

雾化制膜纺丝直写按需点喷

功能模式

✓ 定位重复运动精度达± ±1μm

✓ 高帧率在线观测精密定位相机

✓ 支持矢量图位图格式

✓ 可定制化：曲面补偿、熔融纺丝等

✓ 兼容墨水粘度范围：

点喷最小直径 μm

打线最小线宽 μm

制膜最小厚度

产品应用

光刻胶，刻蚀微沟道微米级微透镜，光敏树脂占空比

，生长纳米雾化石墨烯薄膜纤维支架点阵

专注MEMS制造技术为客户提供高品质、高效率、安全可信赖的代工服务

西安励德微系统科技有限公司是一家专业提供MEMS（Micro-Electro-Mechanical

System）一体化解决方案的技术创新企业。公司建有标准化MEMS产线一条，涵盖深硅

刻蚀、双面光刻、薄膜、清洗、键合和隐形划片等全产业链工艺设备和对应的测试能力，

能够快速完成硅基、玻璃、SOI和聚合物等微器件的工艺开发、工艺验证和小批量生产工

作。同时励德建立了国内首家微纳快速制造云平台，在线对接客户需求、获得报价并完成

下单，打破地理局限，为客户提供便捷、可靠、高品质、高效率的专业微纳制造服务。

XI’AN LEADMEMS SCI&TECH CO.,LTD. 地址 Add. : 西安市高新区西部大道119号

网址 Web. : http://www.leadmems.com

邮箱 E-mail. : [email protected]

电话 Tel. : +86-29-88316320

手机 Cel. : 134-8826-1989 (刘先生)

MEMS陀螺仪玻璃通孔微流控芯片 MEMS微振镜

湿法腐蚀超高深宽比结构深槽阵列微夹持器

Welcomes you all for NEMS 2021

IEEE-NEMS

2022IEEE-NEMS

2022 The 17th IEEE International Conference on Nano/Micro Engineered & Molecular Systems

April 14-17, 2022 Chang Gung University, Taoyuan, Taiwan

Conference scope:＊Micro/Nano Electro-Mechanical Systems (M/NEMS)＊Micro/Nano/Molecular Fabrication＊Nanomaterials＊Nanomaterial Based Devices and Systems＊Nanophotonics and Nanoscale Imaging＊Nanoscale Robotics, Assembly, and Automation＊Molecular Sensors, Actuators, and Systems＊Micro/Nano Fluidics＊Micro/Nano Mechanics＊Nanobiology/Nanomedicine

Conference Committee:General Chair: Eric Pei-Yu Chiou (University of California at Los Angeles)General Co-chair: Pin-Chuan Chen (National Taiwan University of Science and Technology)Program Chair: Kin Fong Lei (Chang Gung University)Program Co-chair: Aaron Ohta (Hawaii University)Organizing Chair: Cheng-Hsin Chuang (National Sun Yat-sen University)Invited Session Chairs:Guangyi Shi (Peking University)Sung Yong Park (San Diego State University)Tim Yeh (University of Texas at Austin)

Two-Page Abstract Deadline (both Oral & Poster): October 15, 2021 ** Best paper competition: A full paper (4 to 6 pages) is required by October 15, 2021 to enter best paper contests.

Notification of Acceptance: December 1, 2021

Full-paper Submission Deadline: January 15, 2022(Only required to publish papers in Xplore)

＊The conference is now accepting Invited Session proposals. Please send Invited Session proposals to Prof. Kin Fong Lei ([email protected]). ＊Conference Website: https://ieee-nems.org/2022/.

Key Info:

Important Dates:

Connect the world and Universe 联结世界和宇宙

打造以“创新、科技、教育”为主题的集教育、传播、服务为一体的国际创新生态系统！

ican-x.com

IEEE-NEMS 2021The 16th IEEE International Conference on Nano/Micro Engineered & Molecular Systems


IEEE-NEMS.org/2021April 25-29 , 2021, Xiamen, China

PROGRAM

IEEE-NEMS 2021

Documents

Transcript of IEEE-NEMS 2021