HSQ 300 / 330 MF - Heraeus · 2020-05-13 · HSQ® 300 / 330 MF HSQ® 300/330 MF is a quartz glass...
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HSQ ® 300 / 330 MF HSQ ® 300/330 MF is a quartz glass material manufactured by electric fusion. It combines excellent physical properties with excellent visual appearance and high purity. The low OH content makes it suitable for high-temperature applications. HSQ ® 330S is a new selected grade that guarantees particularly low metal concentrations as required for super high purity semiconductor materials. HSQ ® MF material is the first choice for demanding high temperature semiconductor . Technical features n Very low bubble and inclusion content n High purity n High transmission n Outstanding high temperature stability n Superior thermal shock resistance n High-end material for demanding requirements
Transcript of HSQ 300 / 330 MF - Heraeus · 2020-05-13 · HSQ® 300 / 330 MF HSQ® 300/330 MF is a quartz glass...
HSQ® 300 / 330 MF
HSQ® 300/330 MF is a quartz glass material manufactured by electric fusion. It combines excellent physical properties with excellent visual appearance and high purity. The low OH content makes it suitable for high-temperature applications.
HSQ® 330S is a new selected grade that guarantees particularly low metal concentrations as required for super high purity semiconductor materials.
HSQ® MF material is the first choice for demanding high temperature semiconductor .
Technical featuresn Very low bubble and inclusion contentn High purityn High transmissionn Outstanding high temperature stabilityn Superior thermal shock resistancen High-end material for demanding requirements
Trace element concentration (ppm)
Typical Visual Appearance
Fine Bubble and Inclusion Content (10 – 300 µm)
HSQ® 300/330
Li Na K Mg Ca Fe Cu Cr Ni Mn Ti Zr Al OH
HSQ® 300 0.5 0.2 0.3 < 0.03 0.5 0.1 0.01 < 0.01 < 0.01 < 0.03 1.1 1.0 15 < 30**
HSQ® 330 0.5 0.1 0.2 < 0.03 0.5 0.1 < 0.01 < 0.01 < 0.01 < 0.03 1.1 1.0 15 < 30** ** OH content can be reduced via additional annealing.
www.heraeus-conamic.com
Germany
Heraeus Quarzglas GmbH & Co. KG
Heraeus Conamic
Reinhard-Heraeus-Ring 29 63801
Kleinostheim
Phone: +49 (6181) 35-74 44
conamic.basematerials.eu
@heraeus.com
USA
Heraeus Quartz North America LLC
Heraeus Conamic
Base Materials Division
Chandler, AZ 85226, USA
Phone: +1 (512) 989 05 03
conamic.basematerials.us
@heraeus.com
P. R.
Heraeus ShinEtsu Quartz (China) Inc.
Room 1702,
No. 620 Zhangyang Road, East Tower,
Zhongrong Hengrui International Plaza,
Pudong, Shanghai 200122, China
Phone +86 (21) 68672266-809
HSQ 300 MF Single step electric arc-fused quartz Single step electrically fused quartz
10 mm 10 mm10 mm
100
90
80
70
60
50
40
30
20
10
0
Tran
smis
sion
(%)
Wavelength (nm)
200
100
90
80
70
60
50
40
30
20
10
0
UV range IR range
1 mm sample
10 mm sample
5 33 0 0 030
5 5 1 0 0
600
400
200
6015 10
700
500
300
20 20 20
0
100
200
300
400
500
600
700
800
40 – 60 µm 60 – 80 µm 80 – 100 µm 100 – 120 µm 120 – 140 µm > 140 µm
HSQ® 300/330 MFTSC-3® (Flame fused quartz)
Single step electric arc-fused quartzSingle step electrically fused quartz
Typical Values ( = Statistical Average Value)
UK
Heraeus Conamic UK Ltd.
Neptune Road
Wallsend, Tyne & Wear
NE28 6DD, United Kingdom
Phone +44 (0)191.2598411
conamic.basematerials.eu
@heraeus.com
300 400 500 1.0 2.0 4.0 5.0
Wavelength (nm)
3.0
The
data
in th
is b
roch
ure
are
valid
for July 2
019.
We
rese
rve
the
right
to m
ake
alte
ratio
ns.
HCA_SemiQG_13.0
/E/07.
2019
