HOW SMALL CAN WE TAKE THIS? HOW SMALL CAN WE TAKE THIS? - ART OF MINIATURIZATION- ART OF MINIATURIZATION

Timeline of MEMS and Timeline of MEMS and MEMEMEME

Micro-Electrical-Mechanical Systems

Same fabrication techniques usedfor electrical VLSI

Micro-Electrical-Mechanical Equipments

So what are MEMS?So what are MEMS?

Microelectromechanical systems (MEMS) Microelectromechanical systems (MEMS)

► small integrated devices or systems that combine small integrated devices or systems that combine electrical and mechanical componentselectrical and mechanical components

► range in size from the sub micrometer (or sub micron) range in size from the sub micrometer (or sub micron) level to the millimeter level, and there can be any level to the millimeter level, and there can be any number, from a few to millions, in a particular systemnumber, from a few to millions, in a particular system

► MEMS extend the fabrication techniques developed for MEMS extend the fabrication techniques developed for the integrated circuit industry to add mechanical the integrated circuit industry to add mechanical elements such as beams, gears, diaphragms, and elements such as beams, gears, diaphragms, and springs to devices.springs to devices.

1750s First electrostatic motor (Benjamin Franklin, Andrew Gordon)

Silicon discovered

1927 Field effect transistor patented (Lilienfield)

1947 Invention of the transistor (Germanium) at Bell TelephoneLaboratories. (23 December)

1948 Schockley, Bardeen, and Brattain won the Nobel Prize

1954 C.S. Smith., “ Piezoresistive effect in Germanium andSilicon”

1955 The IC concept was conceived by several groups, andincluded RCA's Monolithic Circuit Technique for hybrid circuits

Timeline of MEMSTimeline of MEMS

Timeline of MEMSTimeline of MEMSPiezo Pressure Sensors

1958 Silicon strain gauges commercially available

1958 Jack Kilby of Texas Instruments in 1958, using Ge devices

1959 A patent was issued to Kilby

A few months later, Robert Noyce of Fairchild Semiconductor announced the development of a planar Si IC

1961 First silicon pressure sensor demonstrated (Kulite)

Timeline of MEMSTimeline of MEMS

Timeline of MEMSTimeline of MEMSSurface Micromachining

1967 Invention of surface micromachining (Nathanson, ResonantGate Transistor)

Sensors and MicroMirror

1970 First silicon accelerometer demonstrated (Kulite)

1977 First capacitive pressure sensor (Stanford)

1980 K.E. Petersen, “ Silicon Torsional Scanning Mirror”

Timeline of MEMETimeline of MEMESide Drive Motor

1982 Disposable blood pressure transducer (Foxboro/ICT, Honeywell, $40)

1984 First polysilicon MEMS device (Howe, Muller)

1988 Rotary electrostatic side drive motors (Fan, Tai, Muller)

Electro Comb Drive Actuator

1989 Lateral comb drive (Tang, Nguyen, Howe)

Commercial Polysilicon Surface Micromachining

1992 MCNC starts the Multi User MEMS Process (MUMPs)

ADXL and DRIE of SOI

1993 First surface micromachined accelerometer sold (ADXL50)

1994 XeF2 used for MEMS

1994 Bosch process for Deep Reactive Ion Etching is patented

Timeline of MEMETimeline of MEMEBioMEMS and Optical MEMS

1995 Bio-MEMS comes of age

1998 The premiere of Star Wars shown on TI’s Digital Mirror Device

2000 Optical fiber switches becomes big business

What is the Next Big MEMS What is the Next Big MEMS Things?Things?

Optical MEMS

Projection displays Diffractive optics

Optical-fiber switches

Adaptive optics, photonic crystals

Sub-wavelength structures are well suited for implantation in MEMS

This will lower the cost and also add functionality

Promising application areas include

environmental monitoring biomedicine

security optical interconnects

surveillance optical wireless communications

MEMS Patents issued by MEMS Patents issued by yearyear

Figure 1. Worldwide and U. S. patents on MEMS as a function of year. The totalnumber of patents in this distribution is 861, of which 247 are from the U. S.

Patent ActivityPatent Activity

MEMS Folks like bugs?!MEMS Folks like bugs?!

First Commercial ProductFirst Commercial Product

MEMS – Become OpticalMEMS – Become Optical

►Reflective metalReflective metal GoldGold AluminumAluminum

Optical MEMS become Optical MEMS become CommercialCommercial

DLP SystemDLP System

2x2 Optical Switch2x2 Optical Switch

Cross State

Bar State

NxN Optical LinkNxN Optical Link

3D Optical Switch3D Optical Switch

Agilent Bubble SwitchAgilent Bubble Switch

MEMS Add/DropMEMS Add/Drop

Sensor: Spectrometer on Sensor: Spectrometer on ChipChip

ReferencesReferences

► http://mems.colorado.edu/c1.res.ppt/http://mems.colorado.edu/c1.res.ppt/► http://www.csa.com/hottopics/mems/http://www.csa.com/hottopics/mems/

abstracts_s.phpabstracts_s.php► http://www.aero.org/publications/helvajian/http://www.aero.org/publications/helvajian/

helvajian-1.htmlhelvajian-1.html► Manchester University Experimental Transistor Manchester University Experimental Transistor

Computer 1953Computer 1953► http://www.computer50.org/kgill/transistor/http://www.computer50.org/kgill/transistor/

trans1.giftrans1.gif► Close-up of the Experimental Transistor ComputerClose-up of the Experimental Transistor Computer► http://www.computer50.org/kgill/transistor/http://www.computer50.org/kgill/transistor/

trans2.giftrans2.gif