Home - Silicon Saxony e.V. - OUR EXHIBITORS · 2019. 11. 4. · Azbil Europe NV 14. MCRT Micro...
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SEMICON Europa 2019 Hall B1 / Booth 221 OUR EXHIBITORS
Transcript of Home - Silicon Saxony e.V. - OUR EXHIBITORS · 2019. 11. 4. · Azbil Europe NV 14. MCRT Micro...
SEMICON Europa 2019Hall B1 / Booth 221
OUROUREXHIBITORS
OUR EXHIBITORS
Adenso GmbH 12
Arcade Engineering GmbH 14
ATT Systems GmbH 16
Azbil Europe NV 17
camLine Dresden GmbH 22
cleanpart Group GmbH 18
CS Clean Solutions GmbH 20
EBARA Precision Machinery Europe GmbH 24
Entegris GmbH 23
Fabmatics GmbH 26
Fraunhofer ENAS 28
Fraunhofer IZM-ASSID 29
Horiba Europe GmbH 30
Inficon GmbH 32
InnoLas Semiconductor GmbH 34
isel Germany AG 35
LH Dresden, Amt für Wirtscha�sförderung 36
MCRT Micro Cleanroom Technology GmbH 37
MKS Instruments Deutschland GmbH 38
Particle Measuring Systems Germany GmbH 39
Pfei�er Vacuum GmbH 40
Photronics MZD GmbH 41
Picosun Europe GmbH 42
Rudolph Technologies Europe BV 44
SEMPA Systems GmbH 43
SEMSYSCO GmbH 46
Solayer GmbH 47
Spea GmbH 48
Systema GmbH 49
Umicore AG + Co. KG 50
Wirtscha�sförderung Sachsen GmbH 51
znt Zentren für Neue Technologien GmbH 52
Picture credits title page: © sdecoret / fotolia.com
Die TechnologieZentrumDresden GmbH (TZD) bietet Ihnen – Mittelstand oder Startup – günstigste Bedingungen für die Ansiedlung an einem der innovativsten und wachstumsstärksten Standorte in Sachsen.
The new location for your ideas and innovation:
Facts:Opened in May 2019Individually designed roomsAttractive event location with additional roof terraceRent your needs-oriented space up to 1000 sq.m!
presents
Web: www.tzdresden.de
Phone:+49 351 8547 8665
E-Mail:[email protected]
Facebook: www.facebook.com/tzdresden
Universelle WerkeTechnology and Innovation CenterZwickauer Str. 46, 01069 Dresden, Germany
Industry Focus:DigitalizationLife-ScienceMaterial Science
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TUESDAY, NOVEMBER 12th 2019
11:00 – 11:10 LineWorks CDM
camLine Dresden GmbH
12:00 – 12:30 Hermetic Encapsulation with ALD for Improved
Performance and Lifetime of Medical Devices
Picosun Europe GmbH
13:00 - 13:10 Latest generation of leak detection with UL3000
Fab
Inficon GmbH
14:00 – 14:30 Innovation in heater jacket and temperature
controller technology – MKS Instruments Series
49 heater jacket in combination with touch
screen based GUI
MKS Instruments Deutschland GmbH
15:00 – 16:00 Saxon Match Making Hour
sponsored by Dresdner Ka�eerösterei &
Wirtscha�sförderung Sachsen GmbH
WEDNESDAY, NOVEMBER 13th 2019
11:00 - 11:10 LineWorksSPACE
camLine Dresden GmbH
12:00 – 12:10 Photronics 50 Years Young!
Photronics MZD GmbH
13:00 – 13:20 Picosun ALD Solutions for Satellite Applications
Picosun Europe GmbH
14:00 – 14:10 Enabling Smart Manufacturing with Comprehen-
sive WIP Management
Inficon GmbH
15:00 -16:00 Saxon Match Making Hour
sponsored by Dresdner Ka�eerösterei &
Wirtscha�sförderung Sachsen GmbH
18:00 – 22:00 Silicon Saxony Booth Party
sponsored by znt Zentren für Neue Technologien GmbH
18:30 – 19:30 Japanese Hour
Booth visit by the Embassy of Japan in Germany
sponsored by EBARA Precision Machinery Europe GmbH
THURSDAY, NOVEMBER 14th 2019
11:00 – 11:10 Die Lu� ist rein! - Cleanroom technology and
contamination control today and in the future
MCRT Micro Cleanroom Technology GmbH
12:00 – 12:10 Enabling the Future of Smart Process Control
Systems
Inficon GmbH
13:00 – 13:10 Collaborative approach to defectivity challenges
in the automotive industry
Entegris GmbH
14:00 – 14:10 InFrame Synapse MES
camLine Dresden GmbH
15:30 – 16:30 Saxon Match Making Hour
sponsored by Dresdner Ka�eerösterei &
Wirtscha�sförderung Sachsen GmbH
FRIDAY, NOVEMBER 15th 2019
11:00 – 11:10 LineWorksPulse
camLine Dresden GmbH
12:00 – 12:10 PICOSUN® Morpher – Disrupting the ALD Produc-
tion in Wafer Markets up to 200 mm
Picosun Europe GmbH
13:00 – 14:00 Saxon Match Making Hour
sponsored by Dresdner Ka�eerösterei &
Wirtscha�sförderung Sachsen GmbH
OUR BOOTH PROGRAM
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BOOTH NAVIGATION
1. INFICON GmbH
2. SEMSYSCO
3. znt Richter
4. Fabmatics GmbH
5. SYSTEMA
6. Entegris GmbH
7. Solayer GmbH
8. Particle Measuring Systems
Germany GmbH
9. Fraunhofer IZM-Assid
10. InnoLas Semiconductor
11. Horiba
12. Adenso GmbH
13. Azbil Europe NV
14. MCRT Micro Cleanroom
15. Pfei�er Vacuum GmbH
16. camLine GmbH
17. Ebara Precision Machinery
18. Arcade Engineering GmbH
19. Picosun Europe GmbH
20. Photronics MZD GmbH
21. ATT Systems GmbH
22. SEMPA SYSTEMS GmbH
23. CS CLEAN SOLUTIONS AG
24. MKS Instruments
Deutschland GmbH
25. Fraunhofer ENAS
26. Cleanpart Group GmbH
27. Rudolph Technologies Europe BV
28. isel Germany AG
29. Umicore AG + Co. KG
30. SPEA GmbH
31. Wirtscha�sförderung Sachsen
GmbH
32. Landeshauptstadt Dresden
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With around 350 members, Silicon Saxony is the largest high-tech network in Saxony and one of the largest microelectronics and IT clusters in Germany and Europe. Since its foundation in 2000, Silicon Saxony has been a self-financed association linking manufactur-ers, suppliers, service providers, universities, research institutes, public institutions as well as industry-relevant start-ups in Saxony and beyond.
The cluster’s focus is on technological trends of the present and future - e.g. Artificial Intel-ligence, Robotics, Automation, Internet of Things, Sensors, Energy E¥ciency as well as Neuromorphic and Edge Computing.
As a high-profile information, communica-tion and cooperation platform, the association promotes regional, national and international networking of its members by participating in and organizing industry events. www.silicon-saxony.de
SILICON SAXONY – THE HIGH-TECH NETWORK FOR GLOBAL SUCCESS!
NETWORKING
INTERNATIONALIZATION
NETWORKINGLOBBYING
INTERNATIONALIZATIONINTERNATIONALIZATIONINTERNATIONALIZATIONINTERNATIONALIZATIONINTERNATIONALIZATIONINTERNATIONALIZATIONINFORMATION
NETWORKING
INFORMATIONINFORMATIONMARKETING
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“Silicon Saxony” is Europe’s largest microelec-tronics cluster and the fifth largest worldwide. Every third chip produced in Europe bears the label “Made in Saxony.” In Dresden, GLOBAL-FOUNDRIES, Infineon Technologies, and – start-ing in 2021 – Bosch operate some of the most modern semiconductor production sites to be found anywhere on the globe.
A unique concentration of about 2,400 compa-nies with a total of 64,000 employees provid-ing extensive expertise in the sectors micro and nano electronics, organic & flexible electronics, 5G, MEMS / sensors, automation technology, and advanced software solutions is found in the region.
Saxony demonstrates its innovative power in various fields: At the “5G Lab Germany”, more than 600 scientists are working together on the development of 5G key technologies for autono-mous driving and smart factories. The “Center for Tactile Internet with Human-in-the-Loop (CeTI)” conducts interdisciplinary research which focuses on achieving a breakthrough in the field of human-machine cooperation. And in the research project “Power2Power, ” 43 partners from all over Europe are jointly developing innovative power semiconductors with more power density and energy efficiency – under the leadership of Infineon Technologies Dresden.
www.business-saxony.com
MICROELECTRONICS/ ICT IN SAXONY
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Contact:
Adenso GmbH
Am Weiher 3
OT Boxdorf/Dresden
01468 Moritzburg
Germany
+49 351 79 59 79 7-0
www.waferhandling.solutions
Adenso.Solution: adControl
Expandable modules, stand-alone, Hardware-independent,
reliable. Communication with the customer’s process control
system takes place securely via the Adenso.Interface.
This adControl setup is based on the Adenso waferhandling
hardware platform and covers the necessary effort for setting
up a fully operational stand-alone central handling unit.
The advantage of adControl:
This central system can be setup in parallel to the setting up
and commissioning of the process modules – this saves time
and guarantees smooth integration – a stable foundation for
process commissioning by the customer.
www.adControl.solutions
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One Partner for all your Industrial Projects!
InstallationInspection
Software EngineeringAudit
Clean RoomHook up
Instrumentation
Ultrapure WaterRecycling Plant
Commissioning
As an innovative engineering company, Arcade is
your qualified partner for plant engineering. More than
150 employees belong to the team at our locations in
Europe and Asia. Electrical and mechanical engineering,
the construction of water and process plants as well
as control cabinets represent our main competences.
Industrial construction and customer service complete
our portfolio.
Contact:
Arcade Engineering GmbH
Meißner Straße 151 a
01445 Radebeul
+49 351 89567600
www.arcade-engineering.com
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Meeting today’s and tomorrow’s requirements
$ Best performance for wafer testing at most
extreme temperatures and conditions
-75°C – 600°C
$ Air cooled and liquid cooled wafer chucks
for 150 / 200 / 300 / 450 mm wafer diameters
$ Accuracy better than ±0.5°C
$ Temperature uniformity better than ±0.5K
$ Planarity better than ±5µm
Azbil Europe NV
Contact:
AZBIL EUROPE NV
Lilienthalstraße 29
D-85399 Hallbergmoos
+49 (0) 811 541 543 10
http://eu.azbil.com
$ Wet process sensors
Leakage & Level detection with easy installation
$ Ultra small range liquid flow meter
0.0001 l/min liquid flow measurement without
bubble influence
$ Line heater solutions
High durability line heaters with PID controllers
$ Sapphire capacitance manometer
Long life time in harsh vacuum environment
Solutions for WET and Vacuum processes
7. Measuring range starts with
0.13 mbar (0.1 Torr) F.S. & Self-
heating function up to 200°C
8. Heat resistance up to 350°C &
customized cable length
9. Compact design & fast response
4. Temperatures up to 450°C
prevent exhaust- & forelines from
condensation & clogging
5. Heat your equipment to guarantee
a stable process
6. Control & monitor your temperature
Your advantages:
1. Eliminates air bubbles & droplets
2. Compact design & PFA wetted parts
3. High accuracy for less than
100 cc/min rangeWashing machine
1. Liquid Level Sensor
2. Liquid leakage sensor with WHG Certificate
3. Ultra small range liquid flow meter
Line heating
4.Jacket heaters for exhaust line
5. Silicon rubber heatersSilicon rubber heatersfor gas linefor gas line
6.C7G Controller
CVD/ALD machine
7.Capacitance manometer
8.Vacuum fiber sensors
9. Mass flow controller
WHG Certificate
Contact:
ATT Systems GmbH
Fraunhoferstr. 11
D-82152 Planegg
+49 (0) 89 8994820
www.att-systems.com
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Market leader in precision cleaning & coating
$ Thermal Spray Coatings
Plasma Spray
Twin Wire Arc Spray
$ Thin Film Coatings
PECVD (DLC)
$ Analytical Services
Material & surface analysis
$ Precision Cleaning
$ Abrasive Blasting
Dry & Wet, CO2
$ Spare parts manufacturing & supply
Contact:
Cleanpart Group GmbH
Siemensstraße 1
D-71679 Asperg
+49 (0) 7141 681160
www.cleanpart.com
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WORLDWIDE TAKE BACKRefill Service
Contact:
CS CLEAN SOLUTIONS AG
Fraunhoferstraße 4
D-85737 Ismaning
+49 (0)89 9624000
www.csclean.com
Exhaust Gas AbatementSafe and eco-friendly solutionswhere you need them
$ Safe, dry chemical conversion of toxic gases
to stable solids
$ Proprietary CLEANSORB® media
$ No handling of toxic waste
$ Practically maintenance-free
$ Local refill service worldwide
$ Over 30 years of experience
$ More than 5000 installations worldwide
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Solutions for Manufacturing Excellence
Global Software Solutions Provider for 30 Years
$ Advanced Quality Solutions based on
LineWorks SPACE
$ Supplier Quality Management with LineWorks SQM
$ Scalable Asset Performance Management
with LineWorks MMS
$ Global Recipe Management with LineWorks RM
$ Chemicals Distribution Management System with
LineWorks CDM
Contact:
camLine GmbH
Jochen Kinauer
Industriering 4a
85238 Petershausen, Germany
Phone: +49 8137 935-0
www.camLine.com
The Science of Innovation
$ Car recalls impact the margins and reputations of
car makers
$ Semiconductor suppliers need to reach the next
level in defectivity and chip reliability
$ This challenge requires a new collaborative approach
throughout the supply chain
$ Materials, materials purity, and materials handling
could play key enabler roles
$ Entegris has expertise in purity and contamination
control
Contact:
ENTEGRIS GmbH
Hugo-Junkers-Ring 5
D-01109 Dresden
+49 (0) 351 795970
www.entegris.com
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200 mm300 mm
Contact:
EBARA Precision Machinery Europe GmbH
Marie-Curie-Straße 1
D-63457 Hanau
+49 (0) 6181 18760
www.ebara-pm.eu
Peace of Mind with leading-edge vacuum technology
EBARA Precision Machinery Europe is a leading global
supplier for vacuum solutions and wafer processing
systems. The EBARA components portfolio includes a
wide range of dry and turbo molecular vacuum pumps as
well as gas abatement systems. EBARA markets leading-
edge CMP, electro-plating and bevel polishing systems.
Customers value the quality, stability and low cost of
ownership of EBARA products.
CMP tools: F-REX300X & F-REX200M2 Dry vacuum pump model EV-S20P
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Contact:
Fabmatics GmbH
Zur Steinhöhe 1
D-01109 Dresden
+49 (0) 351 652370
www.fabmatics.com
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RESEARCH & DEVELOPMENT OF SYSTEMS AND TECHNOLOGIES
Fraunhofer ENAS
$ Micro and nanoelectronics
$ Sensor and actuator systems
$ Technologies and systems for smart power
and mobility, smart health, smart production
Center for Microtechnologies at TU Chemnitz
$ Technologies and components for micro and nano
systems
$ Innovative processes and materials for micro and
nanoelectronics
© TU Chemnitz / Jürgen Lösel
Contact:
Fraunhofer ENAS
Technologie-Campus 3
D-09126 Chemnitz
+49 (0) 371 45001204
www.enas.fraunhofer.de
Heterogeneous Wafer Level System Integration
Contact:
All Silicon System Integration Dresden – ASSID
M. Jürgen Wolf
Ringstraße 12
01468 Moritzburg
Phone: +49 (0) 351 / 7955 72-10
Fax: +49 (0) 351 / 79 55 72-19
www.izm.fraunhofer.de
www.3D-integration.fraunhofer.de
The center “All Silicon System Integration Dresden –
ASSID” operates Fraunhofer IZMs leading edge, industry-
compatible 200/300mm 3D wafer-level process line with
process modules for TSV formation, TSV post-process-
ing, pre-assembly, wafer-level assembly, stack formation.
ASSID is focusing on process development, material &
equipment evaluation as well as R&D services for hetero-
geneous SiP solution.
Performance Silicon Interposer Module with micro-fluidic channels and TSV‘s
Fraunhofer ENAS is part of
Demonstrator Module Universal Sensor Platform USeP
Interposer Transponder Module with flexible interconnect
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Contact:
HORIBA Europe GmbH
Hans-Mess-Str. 6
D-61440 Oberursel
+49 (0)6172/1396 0
www.horiba.com
Your Partner for Process Diagnostic and Control
SC-1 Pure Water OzoneChemical Solution Monitoring Conductivity H202
Dissolved Oxygen SC-2 TMAH BHF SPM
O3 / Peroxide Monitor
High Resolution TMAH Monitor
Dissolved Oxygen Monitor
Chemical Concentration
Monitor
Your Partner for Measurement and Control
$ Fluid Control (Gas & Liquid),
Mass Flow, Vaporizer, Pressure control
$ Dry Process Monitoring in real time by OES &
Interferometry
$ Gas Concentration Monitoring
$ Wet Process Monitoring
SC-1, SC-2, SPM. HF, Ozone, Peroxide,
Dissolved Oxygen, TMAH, Micro-pH
$ Particle Inspection for PhotomasksYour Partner for Process Diagnostic and Control
SC-1 Pure Water OzoneChemical Solution Monitoring Conductivity H202
Dissolved Oxygen SC-2 TMAH BHF SPM
PR-PD3EPPR-PD3EPRP-1RP-1
LLitithography hography Particle DetectionParticle DetectionParticle DetectionParticle DetectionParticle RemovalParticle Removal EUVP EUVP
MonitorO3 / Peroxide High Resolution
TMAH MonitorDissolved
Oxygen MonitorChemical
Concentration Monitor
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Contact:
INFICON GmbH
Bonner Str. 498
50968 Cologne
Tel: +49 221 56788 100
www.inficon.com
Source Drain
Gate
Channel
Buried Oxide (BOX)
Drain
Gate
Channel
Buried Oxide (BOX)
Source
Gate
Channel
Buried Oxide (BOX)
Maximizing Productivityand Yield
$ Industry-leading Gas Analyzers
Process diagnostics and monitoring in ALD,
CVD, PVD, and Etch
$ High-performance Leak Detectors
Testing flexibility in all measurement ranges
$ World-class Vacuum Gauges and Components
Precise pressure measurement and control
throughout the vacuum range
$ Customer-focused Support
Global access to installation, training, application and
service support
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Contact:
INNOLAS SEMICONDUCTOR GMBH
Neubruch 2
D-82266 Inning am Ammersee
+49 (0)8143 24195-0
www.innolas-semiconductor.com
Wafer Marking and Sorting Equipment
The InnoLas Semiconductor GmbH is a German based
company which is focussed on high quality wafer marking
as well as wafer sorting systems for the semiconductor
industry. For more than 24 years it is our core business to
devlop and produce individual customized solutions that fit
the needs of our customers perfectly.
Furthermore we supply manufacturers of wafer inspection
modules such as Rudolph, ISRA Vision and others with our
reliable wafer handling and automation equipment.
Fully automatic crack scan inspection module after wafer dicing
IL C3000 (300mm Wafer Marking System) IL 2600 (2" – 200mm Wafer Sorting System)
Contact:
isel Germany AG
Bürgermeister-Ebert-Straße 40
D-36124 Eichenzell
+49 (0) 6659 981700
www.iselrobotik.com
Components for Semiconductor Industry
iselRobotik provides a wide range of first-class products
for the semiconductor industry, made in Germany. Our
products handle wafers, masks, substrates and meet the
strict requirements for clean rooms of ISO 1. Even custom
solutions can be turned around quickly with our in-house
engineering and production.
$ Wafer-Handler
$ Prealigner
$ Linear Units
$ Software
$ Endeffectors
$ Accessories
isel three-axis edge handling prealingerisel Wafer Handling Robot with dual arm
isel Wafer Handling Robot with 2-link arm
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Dresden is home to the entire microelectronics valueadded
chain, from microchip design, high-volume wafer produc-
tion and processing to a wide range of companies in the
supply and service sectors and the end-user industry.
Half of all microchips made in Europe come from Dresden,
which enjoys a worldwide reputation as the largest, most
innovation microelectronics location on the continent.
Dresden is also one of the world’s most innovative ICT
clusters - expanding its strong hardware skills to also
include software and connectivity. This will see it form
Germany‘s new Smart System Hub to deliver future appli-
cations for mobility and the Internet of Things to the world.
Players from the worlds of business and science count on
leading-edge technology to tap new markets:
$ Industry 4.0 & Energy efficiency
$ Nanoelectronics
$ Organic & flexible electronics
$ 3D system integration
The office of Economic Development of the City of
Dresden is your contact and partner as entrepreneur or
investor. Our service ensures that your investment in
Dresden can be realized without delay.
Welcome to Dresden!
Contact:
City of Dresden, Office of Economic Development
Ammonstraße 74
D-01067 Dresden
+49 (0) 351 4888701
www.dresden.de/invest
City of Dresden – The Marketplace for Microelectronics Innovation
MCRT – Flexible solutions for your cleanroom
$ Filter-Fan-Units and Cleanroom Cabins:
standard and customized
$ Minienvironments: adapted and integrated for ISO 1
$ Clean-Air-Management-Systems: EUV compatible,
nitrogen purged, temperature and humidity
controlled
$ Clean-Air-Control-Unit: smart and intelligent
parameter management
$ Airborne-Molecular-Filtration: efficient and
cost effective
$ Rent a Tent: temporary and flexible
Contact:
MCRT Micro Cleanroom Technology GmbH
Ludwig-Rinn-Straße 14 – 16
D-35452 Heuchelheim
+49 (0) 641 94886-0
www.mcrt.de
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HPGP-101-C High Pressure Gas Probe
Lasair® III 110 Airborne Particle Counter
Chem 20™ Chemical Particle Counter
pmeasuring.com
Experts in Contamination MonitoringWhy MKS Instruments
Particle Measuring Systems Inc. (PMS), a subsidiary of
Spectris plc, is a global technology leader in contamination
monitoring, the inventor of laser particle counting, and is now
the leading provider of solutions for monitoring and controlling
many forms of contamination that impact companies that
manufacture in ultra-clean environments.
$ COMPREHENSIVE PORTFOLIO
Largest breadth of products and services for the
Semiconductor market
$ CRITICAL TECHNOLOGIES
World-class technology and development capabilities for
leading-edge processes
$ PROVEN PARTNER
Recognized leader that delivers innovative and reliable
long-term solutions, helping our customers solve the
most complex problems
Contact:
MKS Instruments Deutschland GmbH
Schatzbogen 43
81829 München Germany
Tel:+49-89-420008-0
Fax: +49-89-42-41-06
www.mksinst.com
Contact:
Particle Measuring Systems Germany GmbH
Im Tiefen See 45
64293 Darmstadt
06151 6671 632
www.pmeasuring.com/de
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Contact:
Pfeiffer Vacuum GmbH
Berliner Str. 43
D-35614 Asslar
+49 (0) 6441 802-0
www.pfeiffer-vacuum.com
Vacuum solutions for the Semiconductor Market
Pfeiffer Vacuum offers turbopumps, dry pumps, leak
detectors and measuring devices for the following
Semiconductor applications:
$ Deposition (PVD, CVD and ALD)
$ Diffusion
$ Etching
$ Ion implantation
$ Inspection
$ Lithography
$ Transfer and load lock
HiPace 2300 T
Longest proven maintenance interval Superior by-product handling Low power consumption
A4X Series
High corrosion resistance Superior powder handling Low power consumption
ASM 390 Helium Leak Detector
Suitable for applications where ultra cleanliness and high pumping speeds are essential
Fastest time to test: unrivaled performances on large volumes
Contact:
Photronics MZD GmbH
Maria-Reiche-Straße 4
D-01109 Dresden
+49 (0) 351 885-28-0
www.photronics.com
Global Leader in Photomaskand Imaging Solutions
$ Mature 1X Masks and beyond!
$ Advanced Binary Reticles with OPC & Phase Shift
$ Technologies to 7nm & EUV
$ FPD – Large Area Masks – AMOLED
$ Best in class support from 11+ sites worldwide
- Long term growth, strategic investments
- Access our global network via local support
For 50 years we have pioneered and delivered the best in
Photomask manufacturing and technology, our specialized
products deliver world-class performance, we continue evolv-
ing to support leading-edge technologies for both integrated
circuits (IC) and flat panel displays (FPD). Our robust technol-
ogy solutions are recognized worldwide, enabling customers
to build state-of-the art technologies in a cost-effective man-
ner. Outstanding customer service, great value, and flexibility
in listening to/meeting customer requirements helps us win
awards and earn great customer partnerships. April 2019
saw two China grand opening ceremonies: Xiamen for IC &
Hefei for FPD. Summer 2019 also sees Photronics globally
celebrate our 50th Anniversary!!
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AGILE ALD® for companiesdriven by innovation
Picosun is the leading AGILE ALD ® (Atomic Layer
Deposition) solutions provider for
$ IC, III-V
$ MEMS, LEDs
$ Medical devices
$ Specialty electronics protection
$ 3D components
$ Powders, particles
ALD equipment portfolio from fully automatic, SEMI-compatible
300 mm industrial systems to pre-pilot and R&D tools.
Special dedication to cost-efficient, turn-key ALD solutions for
up to 200 mm wafer markets.
Contact:
Picosun Europe GmbH
Dr. Christoph Hossbach, General Manager
World Trade Center
Freiberger Str. 39
01067 Dresden, Germany
+49 1522 449 49 11
www.picosun.com
HIGH PURITY GAS – AND CHEMICAL SUPPLY SYSTEMS
SEMPA SYSTEMS GmbH is your choice for highest purity
gas, chemical and precursor supply systems. Our turn
key product solutions span from tubing installations over
gas (GAS’BOT) and chemical delivery (CHEM’BOT) to
advanced evaporator (VAPOR’BOT) systems. We serve
a global customer base in semiconductor, photovoltaic,
glass fiber, printed electronics, automotive and pharma-
ceutical industries.
Contact:
SEMPA SYSTEMS GmbH
Grenzstrasse 13
01109 Dresden
+49 351 888 100
www.sempa.de
NEW FROM PICOSUN 2019: PICOSUN® Morpher ALD pro-duction platform.
Fast, cost-efficient batch processing for up to 200 mm wafer markets.
Gas Cabinets
UHP Facility Installations
Precursor Systems
Applications: MEMS, LEDs, lasers, power electronics, optics, 5G.
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Contact:
Rudolph Technologies B.V.
Oude Middenweg 17
2491 AC Den Haag
The Netherlands
www.rudolphtech.com
A Partner for ProcessSolutions at Every Step
Leader in inspection and metrology
for MEMS, RF, power
$ Bare silicon to final package
$ 2D/3D defect and bump inspection
Advanced packaging lithography
with largest field size
$ Submicron imaging for wafer and panel
$ Feed-forward adaptive shot technology
Smart manufacturing software
$ Process control and analysis
$ Big data capable with genealogy
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Contact:
Semsysco GmbH
Karolingerstraße 7c
A-5020 Salzburg
+ 43 662 2221 0
www.semsysco.com
Contact:
SOLAYER GmbH
Sachsenallee 28
01723 Kesselsdorf
+49 35204 269900
www.solayer.com
TECHNOLOGY BY INNOVATION Enabling Surface Technology
SEMSYSCO is a global company, specialized in providing
wet process solutions for the semiconductor industry.
Long-term experience of qualified engineers enables us
to provide cutting edge, reliable and sustainable quality
on a continuous basis. With the innovative processing
platforms, it is possible to scale processes from horizontal
wafer to vertical panel processing.
SOLAYER GmbH is a leading global innovator in vacuum
coating and surface technology equipment. Our global
operations are supported from two technology centers
located in Germany.With our AVIOR M-300, we deliver
film uniformities down to ±0.2 % through Magnetron
Sputtering. Our Modular Cluster Deposition tool with Flash
Lamp Annealing addresses the unique requirements of the
semiconductor industry.
GALAXY | Batch Wafer Platform
TRITON | Single Wafer Platform
VHS-P | Vertical Panel Processing
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Contact:
SYSTEMA Systementwicklung
Dipl.-Inf. Manfred Austen GmbH
Manfred-von-Ardenne-Ring 6
D-01099 Dresden
+49 (0) 351 882460
www.systema.com
Manufacturing Excellence Through Software Solutions
Art of Automation
$ Integrated Manufacturing Execution
Shop Floor Integration with the “Digital Twin”
$ Dispatching based on Process Capabilities
Dealing with today’s Complexity in Manufacturing
$ Streamline global Operations
Consulting on best practice solutions
SPEA – The answer for yourtest challenges
SPEA’s semiconductor product range offers the
modular Turn-Key solution concept
MEMS Test Cell – stimulation & test of MEMS
and sensors at defined temperature
Smart Card Test Cell – High Productivity LF, HF &
UHF test solution for Smart Card & RFID modules
Power Module Test Cell – test of IGBT, Power,
HV and LV MOSFET modules
Comptest MX series – Mixed Signal Testers
1
Contact:
SPEA GmbH
Ruhberg 2
D-35463 Fernwald
+49 (0) 6404 6970
www.spea.com
Digital Transformationfor ManufacturingYour Requirements, Our Experience –Together Enabling the Smart Factory
48 49
Contact:
Saxony Economic Development Corporation –
Wirtschaftsförderung Sachsen GmbH
Bertolt-Brecht-Allee 22
D-01309 Dresden
+49 (0) 351 21380
www.wfs.saxony.de
www.business-saxony.com
Saxony Economic Development Corp.(Wirtschaftsförderung Sachsen GmbH)
Founded by the State of Saxony, the Saxony Economic
Development Corporation builds bridges for Saxony’s
companies on their way to the world’s markets and for
investors on their way to Saxony.
Since 1991 we have been lending a helping hand in the
search for cooperation partners, for suitable business
locations and qualified suppliers. Our services include
procurement of the latest data on Saxony’s economy,
customized business site location services, contacts with
regional decision makers, information on opportunities
for subsidy programs, as well as assistance in initiating
cooperative partnerships.
Developing New Electronic Precursors
At Umicore, we specialise in developing chemicals
that can be applied to new electronic industries. We
offer a range of solutions that involve gallium, cobalt, tantalum,
ruthenium, molybdenum or tungsten-based metal precursors. Our
chemical portfolio of electronic precursors is constantly evolving,
and we tailor our solutions to individual challenges.
Contact:Umicore AG & Co. KG Rodenbacher Chaussee 4 63457 Hanau-Wolfgang
+49 6181 59 2471 [email protected] www.pmc.umicore.com
50 51
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znt Zentren für Neue Technologien GmbH
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Lena-Christ-Straße 2
D-82031 Grünwald
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www.znt-richter.com
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March 30 – April 1, 2020Provence, FRANCE
20th
EUROPEAN ADVANCEDPROCESS CONTROL
AND MANUFACTURINGCONFERENCE
15th
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SAVE THE DATE SAVE THE DATE
400+ Participants
60+ ICT Expert
Presentations
400+ ParticipantsHardware,
So�ware & Connectivity
Exhibition & Expert
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CONNECT.EXCHANGE.GROW.Ballsport Arena Dresden / May 27, 2020
BOOTH PARTYNOVEMBER 13, 2019 | 6 P.M.MESSE MÜNCHEN / HALL B1 / BOOTH 221
Let’s celebrate and enjoy fine food, cool music and good company. We look forward to welcoming you!
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