Hiroshi Yokoyama Nanotechnology Research …Super Inkjet Technology: Trend in On-Demand...
Transcript of Hiroshi Yokoyama Nanotechnology Research …Super Inkjet Technology: Trend in On-Demand...
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AIST
Strategic Nanotechnology Global Networking:
Current Status and Proposal of AIST
Hiroshi Yokoyama
Nanotechnology Research InstituteNational Institute of
Advanced Industrial Science and Technology(AIST)
Strategic Nanotechnology Global Networking:
Current Status and Proposal of AIST
Hiroshi Yokoyama
Nanotechnology Research InstituteNational Institute of
Advanced Industrial Science and Technology(AIST)
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AIST
NanotechnologyNanotechnology
“Creation of Useful Materials, Devices and Systems by Manipulation of Materials with Atomic and Molecular
Precision.”This concept of nanotechnology has existed since or even from before the famous APS
address by Nobel Physicist, Richard Feynman in 1959. Owing to the tremendous development of nanometer scale science in the last two decades, such as the invention of
the scanning probe microscopy, the nanotechnology is now evolving into a real from hype with a great deal of industrial expectations in the 21st century in diverse fields from electronics, information technology, materials engineering to biotechnology. The start of the National Nanotechnology Initiative in USA in the year 2000 was, among others,
the epoch that fueled the field to become as active as it is today.
10nm
100nm
1µm
10µm
100µm
1mm
1nm
Business: Layer 5Business: Layer 5
Development: Layer 4Development: Layer 4
Basic Research: Layer 3Basic Research: Layer 3
Infrastructure / Facility: Layer 2Infrastructure / Facility: Layer 2
Strategy & Policy: Layer 1Strategy & Policy: Layer 1
What is crucial:
Productive Alliance for Leveraging Individual R&D Efforts
and
Making Possible Continual Stream of Innovations from Basic Research to Market Place
Ex. Adaptive / On-demand Production System
enabling Less Costly & More Environmental Friendly Manufacturing
What is crucial:
Productive Alliance for Leveraging Individual R&D Efforts
and
Making Possible Continual Stream of Innovations from Basic Research to Market Place
Ex. Adaptive / On-demand Production System
enabling Less Costly & More Environmental Friendly Manufacturing
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AIST
Quantum Leap of Industrial Quantum Leap of Industrial TechnologyTechnology
Destructive Technology! For Destructive Technology! For Existing IndustriesExisting Industries
NanotechnologyNanotechnology
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AIST
TOYOTA’s latest hybrid car on the market:
35 km/l !
What if we could make it What if we could make it 100km/l100km/l or larger or larger by nanotechnology?by nanotechnology?
Consumers are becoming more and more Consumers are becoming more and more environment and cost conscious. environment and cost conscious.
So are we!So are we!
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AIST
~16μm
従来の従来の
インクジェット技術インクジェット技術
超微細超微細
インクジェット技術インクジェット技術 2 μ
>>20μm サブμm
従来の 1/1000以下の体積空気中
基盤上
~16μm
Conventional Inkjet Super-Inkjet
2pl Less than 1 fl
>>20μm Sub μm
1/1000In Air
Substrate
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AIST
Super Inkjet Technology: Trend in On-Demand Manufacturing
10µm
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AIST20µm Nature, November 14, 2002.
Multi-stable Liquid Crystal Device:
AFM-Fabricated Microscopic Surface Pattern
Appl. Phys. Lett. 78 (3035) 2001.
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AIST
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AIST
Spintronic Device: Spintronic Device: SingleSingle--crystalcrystal--junction TMR junction TMR
for Gbit MRAMfor Gbit MRAM
TMR: Tunneling Magnetic Resistance, MRAM: Magnetic RAM
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AIST
Carbon Nanotube Quantum EffectCarbon Nanotube Quantum Effect TransistorTransistor
(a) Single electron transistor(SET) (b) CNT channel
(c) Schematic view of SET with defect induced CNT channel
(d) I-V characteristics of SET
Source
Gate
DrainDrain Source
CarbonNanotube
Source
SiO2
Si Substrate
Defect Induced CNT
Drain
Gate
Collaboration with Fujitsu
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AIST
NanotechnologyNanotechnology
“Creation of Useful Materials, Devices and Systems by Manipulation of Materials with Atomic and Molecular
Precision.”This concept of nanotechnology has existed since or even from before the famous APS
address by Nobel Physicist, Richard Feynman in 1959. Owing to the tremendous development of nanometer scale science in the last two decades, such as the invention of
the scanning probe microscopy, the nanotechnology is now evolving into a real from hype with a great deal of industrial expectations in the 21st century in diverse fields from electronics, information technology, materials engineering to biotechnology. The start of the National Nanotechnology Initiative in USA in the year 2000 was, among others,
the epoch that fueled the field to become as active as it is today.
10nm
100nm
1µm
10µm
100µm
1mm
1nm
Business: Layer 5Business: Layer 5
Development: Layer 4Development: Layer 4
Basic Research: Layer 3Basic Research: Layer 3
Infrastructure / Facility: Layer 2Infrastructure / Facility: Layer 2
Strategy & Policy: Layer 1Strategy & Policy: Layer 1
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AIST
General Council of Science and Technology General Council of Science and Technology
3
General Council of Science and TechnologyGeneral Council of Science and Technology
Chair: Prime Minister
National Institute for Materials Science
AISTAIST
RIKEN
Ministry of Economy, Trade & Industry (METI)
Ministry of Education, Culture, Sports, Science and Technology (MEXT)
Universities
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AIST
Japanese Government is ever more strongly committed to Science & Technology to revive her economy, making pledge to invest
250 Billion US$
over 5 years.
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AIST
2001
2002
2003
EU
USA
Japan
Germany
0
200
400
600
800
1000
1200
Global Funding (M USD)
Courtesy Lerwen Liu, NanoGlobe Ltd.
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AIST
Chugoku 34
Shikoku 31
Kansai 188
Chubu 143
Tohoku 35
Hokkaido 68
Kyushu 56
Tsukuba 1,832
Research Bases of AIST around JapanResearch Bases of AIST around Japan
Tokyo Waterfront 39
Researcher: 2400
Total: 3100
Visitor: 3000
Annual Budget: ~ 1 B US$
Researcher: 2400
Total: 3100
Visitor: 3000
Annual Budget: ~ 1 B US$
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AIST
R & D: 220 M
Utility Expense & Others: 110 M
Grants from Government: 110 M
Contract Research & Research Grants: 180 M
+ Extra: 700 M
Other Income: 30 M
Funds from Sectors other than Government: 70 M
Payroll: 310 M
FY2002 AIST RevenueFY2002 AIST Revenue(total budget: (total budget: ~~1B US$)1B US$)
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AIST
Life Science & Technology15.4%
Information Technology19.0%
Environment & Energy28.0%
Nanotechnology, Materials & Manufacturing20.7%
Standards & Measurement 7.7%
Geological Survey& Geoscience, Marine Science 9.2%
+ Extra: 700 M
FY2002 FY2002 Distribution of R&D InvestmentDistribution of R&D Investment(total budget: (total budget: ~~1B US$)1B US$)
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AIST
NanotechnologyNanotechnology
“Creation of Useful Materials, Devices and Systems by Manipulation of Materials with Atomic and Molecular
Precision.”This concept of nanotechnology has existed since or even from before the famous APS
address by Nobel Physicist, Richard Feynman in 1959. Owing to the tremendous development of nanometer scale science in the last two decades, such as the invention of
the scanning probe microscopy, the nanotechnology is now evolving into a real from hype with a great deal of industrial expectations in the 21st century in diverse fields from electronics, information technology, materials engineering to biotechnology. The start of the National Nanotechnology Initiative in USA in the year 2000 was, among others,
the epoch that fueled the field to become as active as it is today.
10nm
100nm
1µm
10µm
100µm
1mm
1nm
Business: Layer 5Business: Layer 5
Development: Layer 4Development: Layer 4
Basic Research: Layer 3Basic Research: Layer 3
Infrastructure / Facility: Layer 2Infrastructure / Facility: Layer 2
Strategy & Policy: Layer 1Strategy & Policy: Layer 1
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AIST
Sequential Deployment of Nanotech Outputs Sequential Deployment of Nanotech Outputs for Sustainable R&Dfor Sustainable R&D
•Molecular Device/ Quantum Computer
•Artificial Photo-Synthesis
•Computational Materials Design
Manufacturing:•Super-Inkjet•Probe fabrication
Display Technology:•CNT FED•Multi-Stabe LCD
Drug Delivery System:•Sugar/Protein DDS•Cubic LC Absorbent•Nano-particle (DNA Tag)
Characterization Tool:•CNT Probe
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AIST
AIST Nano-technology R&D
Nano-Materials, Processing
Current Nanotechnology Programs in AISTCurrent Nanotechnology Programs in AIST
JST Program
MEXT
CREST” Functional High-Axial-Ratio Nanostructure Assembly for Nano-Space Engineering”
Focus21
Advanced Semi-conductorDevice Project
Nanostructure Polymer Project
Nanostructure Coating Project
Nanotechnology Glass Project
Synthetic Nano-Function Materials Project
Nanotechnology Material Metrology Project
MIRAI (Millennium Research for Advanced Information Technologies) Project
Yokoyama ERATO Project Tokura ERATO Project
Nanotechnology Carbon Project
Nanotechnology Support Project
Advanced Diamond Technology Project
Advanced Nanocarbon Application Project
Nano Structure Forming for Ceramics Integration Project
R & D of 3D NanoScale Certified Reference Materials Project
Nano-Manufacturing, Measuring
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AIST17
-
1
2
3
4Government R & D InvestmentGovernment R & D Investment
96 97 98 99 2000 2001 2002
Billion US$In
vest
men
t (B
illio
n U
S$)
Extra Spending for Economic Stimulus
?
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AIST
NanotechnologyNanotechnology
“Creation of Useful Materials, Devices and Systems by Manipulation of Materials with Atomic and Molecular
Precision.”This concept of nanotechnology has existed since or even from before the famous APS
address by Nobel Physicist, Richard Feynman in 1959. Owing to the tremendous development of nanometer scale science in the last two decades, such as the invention of
the scanning probe microscopy, the nanotechnology is now evolving into a real from hype with a great deal of industrial expectations in the 21st century in diverse fields from electronics, information technology, materials engineering to biotechnology. The start of the National Nanotechnology Initiative in USA in the year 2000 was, among others,
the epoch that fueled the field to become as active as it is today.
10nm
100nm
1µm
10µm
100µm
1mm
1nm
Business: Layer 5Business: Layer 5
Development: Layer 4Development: Layer 4
Basic Research: Layer 3Basic Research: Layer 3
Infrastructure / Facility: Layer 2Infrastructure / Facility: Layer 2
Strategy & Policy: Layer 1Strategy & Policy: Layer 1
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AIST
Nanotechnology Support ProjectNanotechnology Support ProjectNanoFoundryNanoFoundry GroupGroup
MEXT
NNanoanoPProcessing rocessing PPartnership artnership PProgram (rogram (NPPPNPPP))
http://www.nanoworld.jp/nppp/index.hthttp://www.nanoworld.jp/nppp/[email protected][email protected]
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AIST
Resources/ActivityResources/Activity Strengthening of R&D InfrastructureStrengthening of R&D Infrastructure → →
Lowering the Entrance BarrierLowering the Entrance Barrier
Lowering the Cost of R&DLowering the Cost of R&D
••Expensive EquipmentsExpensive Equipments
••Huge KnowHuge Know--HowsHows
MaterialsMaterials----------DevicesDevices--------------------BioTechBioTech
InfrastructureInfrastructure
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AIST
AIST NPFAIST NPF-- NPPPNPPP
WasedaWaseda Univ.Univ.Tokyo Inst. Tech.Tokyo Inst. Tech.
Osaka Univ.Osaka Univ.
Hiroshima Univ.Hiroshima Univ.
E-Beam
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AIST
NanotechnologyNanotechnology
“Creation of Useful Materials, Devices and Systems by Manipulation of Materials with Atomic and Molecular
Precision.”This concept of nanotechnology has existed since or even from before the famous APS
address by Nobel Physicist, Richard Feynman in 1959. Owing to the tremendous development of nanometer scale science in the last two decades, such as the invention of
the scanning probe microscopy, the nanotechnology is now evolving into a real from hype with a great deal of industrial expectations in the 21st century in diverse fields from electronics, information technology, materials engineering to biotechnology. The start of the National Nanotechnology Initiative in USA in the year 2000 was, among others,
the epoch that fueled the field to become as active as it is today.
10nm
100nm
1µm
10µm
100µm
1mm
1nm
Business: Layer 5Business: Layer 5
Development: Layer 4Development: Layer 4
Basic Research: Layer 3Basic Research: Layer 3
Infrastructure / Facility: Layer 2Infrastructure / Facility: Layer 2
Strategy & Policy: Layer 1Strategy & Policy: Layer 1
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AIST
Nanotechnology Business Creation Initiative, consisting of 300 member companies, is now being established in Japan by METI’s lead.
Its mission is to enhance competence of Japanese nanotech community in the highly competitive international arena.
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AIST
NanotechnologyNanotechnology
“Creation of Useful Materials, Devices and Systems by Manipulation of Materials with Atomic and Molecular
Precision.”This concept of nanotechnology has existed since or even from before the famous APS
address by Nobel Physicist, Richard Feynman in 1959. Owing to the tremendous development of nanometer scale science in the last two decades, such as the invention of
the scanning probe microscopy, the nanotechnology is now evolving into a real from hype with a great deal of industrial expectations in the 21st century in diverse fields from electronics, information technology, materials engineering to biotechnology. The start of the National Nanotechnology Initiative in USA in the year 2000 was, among others,
the epoch that fueled the field to become as active as it is today.
10nm
100nm
1µm
10µm
100µm
1mm
1nm
Business: Layer 5Business: Layer 5
Development: Layer 4Development: Layer 4
Basic Research: Layer 3Basic Research: Layer 3
Infrastructure / Facility: Layer 2Infrastructure / Facility: Layer 2
Strategy & Policy: Layer 1Strategy & Policy: Layer 1
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AIST
Expectation on NetworkExpectation on Network
•• Complementary R&DComplementary R&D
•• Mutual Benefit (Technology, Mutual Benefit (Technology, Information, Patent, BusinessInformation, Patent, Business……))
•• Human Resource DevelopmentHuman Resource Development
•• StandardizationStandardization
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AIST
Toward Nanotechnology Global NetworkToward Nanotechnology Global Network
• CNRS, France
• KISTI, Korea
• ITRI, Taiwan
• Cambridge University, UK (in progress)
• etc.
•• CNRS, FranceCNRS, France
•• KISTI, KoreaKISTI, Korea
•• ITRI, TaiwanITRI, Taiwan
•• Cambridge University, UK (in progress)Cambridge University, UK (in progress)
•• etc.etc.
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AIST
EUUSA
Asia
2002
2003
2004
0
200
400
600
800
1000
1200
1400
Million USD
Global Public Funding Comparison
Courtesy Lerwen Liu, NanoGlobe Ltd.
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AIST
0
1002003004005006007008009001000
Million USD
Australia China Hong Kong Korea India Malaysia NewZealand
Singapore Taiwan Thailand
Asian Funding during 2003-2007
China
Korea
Taiwan
Courtesy Lerwen Liu, NanoGlobe Ltd.
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AIST
AISTToward the Gateway to Nanotech AsiaAcross All Layers of Nanotechnology
-- Call for Further Joint Research ProgramsCall for Further Joint Research Programs
And MoreAnd More……
-- 22ndnd Asian Nanotech Forum Summit in Thailand, March Asian Nanotech Forum Summit in Thailand, March 2004. Jointly Sponsored by Royal Thai Government and 2004. Jointly Sponsored by Royal Thai Government and NEDO, METI & AISTNEDO, METI & AIST-- Networking of Nanotech Support Facilities (MEXT)Networking of Nanotech Support Facilities (MEXT)
-- Nano2B AIST Symposium at Nanotech 2004 in March, 2004Nano2B AIST Symposium at Nanotech 2004 in March, 2004
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AIST
LetLet’’s enjoy nanotechnology!s enjoy nanotechnology!
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AIST
Government R&D Investment: FY2001Government R&D Investment: FY2001
MEXT
METI
US$100MNanotechnology : US$ 500 MNanotechnology : US$ 500 M
IT
Environment
US$100M
Medical & Biotech
Materials
MetrologyGrant
National Project
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AIST
1nm
1µm
1970 1980 1990 2000 2010 2020
Bottom-up
Top-down
Moore’s Law
Crossover of Top-down and Bottom-up Technologies
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AIST
MaterialsMaterials Life SciencesLife Sciences ElectronicsElectronics EnvironmentEnvironmentEnergyEnergy
Carbon NanotubeSingle Electron
TransistorDrug Delivery High-efficiency Solar Cell
Molecular MachineUltra-hight density Storage
Manipulation of Matter with Manipulation of Matter with atomic and molecular atomic and molecular precisionprecision
DNA, Quantum Devices
Toxic Compound Filter
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AIST
Schematic Cross Section of CMOS Transistor/Interconnect and Five R&D Focuses of MIRAI Project
Millennium Research for Advanced Information Millennium Research for Advanced Information Technology (MIRAI) Project (FY 2001Technology (MIRAI) Project (FY 2001--2007)2007)
Next Generation Semiconductor TechnologyNext Generation Semiconductor Technology
70-50nm node and beyond for SoC
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AIST
Noritake-Ise Electric/AIST 40-Inch CNT FED Panel
Nanotech 2003 + Future
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AIST
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AIST
Emitter-Grid Voltage
Emitt
er-G
rid E
lect
ron
Emis
sion
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AIST
50µm
Sate1 State2 State3
90150 30 90150 210 90-30 30
Patterned Surface
Liquid Crystal
Nature, November 14, 2002.
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AIST
The world's largest HighThe world's largest High--TcTcsuperconducting film superconducting film
a) YBa2Cu3O7 superconducting film (30cm x 10cm) made by coating pyrolysis process.
b) Superconductive characteristic of the film.
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AIST
100 nm 20 nm
Use of Carbon Use of Carbon NanotubeNanotube SPM Tip for DNA ImagingSPM Tip for DNA Imaging
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AIST
Oxide lines on n-type silicon. 10 V, 0.2 micron/s
Electrons
Anodically Oxidized Line
silicon, metal
Scanning Probe
Adsorbed Water
10 - 100 nm
Scanning
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AIST
Humidity Controller
Environment SPM
Sensor
Environment Control + in situ Current Measurement
Joint Development with Seiko Instruments