Quality glass processing by Laser Induced Backside Wet Etching
High Performance Etching. Horizontal Processing Equipment.
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Transcript of High Performance Etching. Horizontal Processing Equipment.
![Page 1: High Performance Etching. Horizontal Processing Equipment.](https://reader038.fdocuments.us/reader038/viewer/2022110322/56649d205503460f949f4e5a/html5/thumbnails/1.jpg)
High Performance Etching
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Horizontal Processing Equipment
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Old Transport Characteristics
0.005” core transport guaranteed 0.002” core transport with custom modifications
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New Transport Characteristics
0.002” core transport guaranteed 0.0013” core transport with custom modifications
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Old Etching Characteristics
Standard or Fine Line Manifold Oscillation (quick wear rate) 240mm from product surface Spray bars 200mm on center 45° nozzle angle 60° spray angle In-line nozzles Expensive to manufacture 0.00025” Etch Line Loss Standard Deviation
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New Etching Characteristics
High Performance Etching Manifold Non-oscillating (less wear) 100mm from product surface Spray bars 100mm on center 0° nozzle angle 15° spray angle 8mm nozzle offset Higher reliability, 0.00008” ELSD in tests
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Offset Spray Pattern – 50mm
High Performance Etching Manifold
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Staggered Nozzle Pattern – 8mm (nozzle alignment in direction of travel)
High Performance Etching Manifold
Direction of Travel
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Nozzle Alignment Angle – 0 (fan footprint angle)o
High Performance Etching Manifold
Direction of Travel
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Left
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STANDARD MANIFOLD NO ON/OFF( SCALE .0031-.0051")
Old-Style Standard Etching ManifoldStandard Deviation 0.00008 ( 1 oz Cu & 0.0013 DF )
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Left
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A Trailing
B
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P1
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FINE LINE MANIFOLDSide to Side Plus Sinus ( SCALE .0028-.0048")
Old-Style Fine-Line Etching ManifoldStandard Deviation 0.00008 ( 1 oz Cu & 0.0013 DF )
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Left
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Trailing A
BC
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High Performace Etch System( Scale 0.001-0.003")
New-Style High Performance Etching ManifoldStandard Deviation 0.00008 ( 1 oz Cu & 0.0013 DF )
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Data
Alkaline Etch Tests.003"-.006" width lines CAT Pattern 22 test points in direction of travel for each lettered test row
BOTTOM TOPAVE. MAX. MIN. AVE. MAX. MIN.
P 2.4059 2.4138 2.3980 P 2.8345 3.0232 2.6375O 2.5215 2.5259 2.5172 O 2.7821 2.9186 2.6683N 2.3951 2.4000 2.3902 N 2.7811 2.8334 2.6884M 2.4388 2.4398 2.4378 M 2.7504 2.7770 2.7158L 2.3614 2.3709 2.3519 L 2.7476 2.7818 2.6930K 2.3748 2.3805 2.3690 K 2.7212 2.7437 2.6817J 2.3614 2.3614 2.3614 J 2.7023 2.7343 2.6705I 2.4320 2.5611 2.3076 I 2.6820 2.8819 2.5576H 2.4214 2.5302 2.3370 H 2.6684 2.7818 2.5740G 2.3122 2.3222 2.3022 G 2.6742 2.6998 2.6267F 2.3333 2.3463 2.3204 F 2.6944 2.7367 2.6616E 2.3435 2.3482 2.3388 E 2.6988 2.7250 2.6661D 2.2869 2.2896 2.2843 D 2.7154 2.7460 2.6839C 2.3797 2.4000 2.3595 C 2.7410 2.7818 2.7204B 2.2942 2.3094 2.2790 B 2.7531 2.8793 2.5802A 2.4423 2.4748 2.4098 A 2.7787 2.8741 2.6550
readings in mils
AVE. MAX. MIN. STD DEV. AVE. MAX. MIN. STD DEV.2.4055 2.5611 2.2790 0.0695 2.7427 3.0232 2.5576 0.0848
TOTAL FOR BOTTOM SIDE TOTAL TOP
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Data
Cupric Chloride Etch.003"-.006" width lines CAT Pattern 22 test points in direction of travel for each lettered test row
BOTTOM TOPAVE. MAX. MIN. AVE. MAX. MIN.
P 2.41 2.51 2.31 P 2.42 2.55 2.31O 2.35 2.44 2.23 O 2.41 2.59 2.29N 2.42 2.54 2.33 N 2.46 2.59 2.36M 2.44 2.6 2.33 M 2.53 2.67 2.41L 2.44 2.55 2.34 L 2.55 2.67 2.43K 2.45 2.53 2.34 K 2.54 2.71 2.43J 2.44 2.55 2.35 J 2.53 2.64 2.42I 2.42 2.49 2.29 I 2.51 2.67 2.4H 2.41 2.56 2.30 H 2.52 2.64 2.39G 2.42 2.48 2.29 G 2.51 2.66 2.39F 2.41 2.55 2.31 F 2.47 2.59 2.36E 2.40 2.47 2.29 E 2.42 2.55 2.3D 2.41 2.55 2.33 D 2.49 2.65 2.16C 2.41 2.51 2.29 C 2.53 2.72 2.1B 2.39 2.54 2.30 B 2.46 2.67 2.33A 2.42 2.69 2.30 A 2.38 2.5 2.26
readings in mils
AVE. MAX. MIN. STD DEV. AVE. MAX. MIN. STD DEV.2.41 2.69 2.23 0.0626 2.48 2.72 2.10 0.0949
TOTAL FOR BOTTOM SIDE TOTAL TOP
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Data
Cupric Chloride Etch.003"-.006" width lines CAT Pattern 22 test points in direction of travel for each lettered test row
BOTTOM TOPAVE. MAX. MIN. AVE. MAX. MIN.
P 2.34 2.48 2.23 P 2.38 2.5 2.26O 2.33 2.46 2.23 O 2.40 2.49 2.3N 2.39 2.49 2.24 N 2.47 2.56 2.37M 2.40 2.49 2.31 M 2.56 2.62 2.49L 2.42 2.51 2.26 L 2.57 2.65 2.48K 2.42 2.56 2.32 K 2.56 2.65 2.49J 2.41 2.51 2.28 J 2.55 2.64 2.46I 2.41 2.58 2.31 I 2.56 2.69 2.49H 2.41 2.49 2.29 H 2.53 2.71 2.4G 2.42 2.57 2.29 G 2.54 2.62 2.43F 2.41 2.51 2.26 F 2.51 2.76 2.39E 2.41 2.57 2.29 E 2.46 2.55 2.11D 2.43 2.55 2.28 D 2.54 2.69 2.42C 2.43 2.59 2.31 C 2.59 2.69 2.48B 2.41 2.61 2.24 B 2.49 2.65 2.36A 2.44 2.69 2.08 A 2.46 2.65 2.39
readings in mils
AVE. MAX. MIN. STD DEV. AVE. MAX. MIN. STD DEV.2.40 2.69 2.08 0.0797 2.51 2.76 2.11 0.0875
TOTAL FOR BOTTOM SIDE TOTAL TOP
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Nozzle Impact
0.0526*( Gallons per minute @ Pressure )*( spraying pressure, psi)
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Nozzle Impact Per Square Inch
Nozzle Impact Number Divided by the square inches of the foot print on the substrate
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Nozzle Impact Per Square Inch
Impact Per sq inch (psi)
Fan Angle
Distance From Work
Pounds/ sq. inch Through Nozzle
Gallons/min Through Nozzle
Sq. inches (spray
footprint) ImpactInpact/sq in
(psi)
15 degree 4" 60 0.72 0.55 0.293 0.53315 degree 4" 40 0.59 0.55 0.196 0.35715 degree 4" 20 0.42 0.55 0.099 0.18015 degree 4" 10 0.29 0.55 0.048 0.088
50 degree 4" 60 0.72 2.99 0.293 0.09850 degree 4" 40 0.59 2.99 0.196 0.06650 degree 4" 20 0.42 2.99 0.099 0.03350 degree 4" 10 0.29 2.99 0.048 0.016
50 degree 10" 40 1.34 18.91 0.446 0.02450 degree 10" 30 1.1 18.91 0.317 0.01750 degree 10" 20 0.59 18.91 0.139 0.00750 degree 10" 10 0.42 18.91 0.070 0.004
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Nozzle IPSI vs Puddle
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More complete coverageRinse-to-DrainCascade RinseFresh Rinse3-5 gpmLess dragout of particulatesHigher reliability
Rinse to Drain Concept