Gene Humphrey International Test Solutions, Inc. Livermore, CA … · 2017-03-26 · Probe Card...
Transcript of Gene Humphrey International Test Solutions, Inc. Livermore, CA … · 2017-03-26 · Probe Card...
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1June 2000
Probe Card On-line Cleaning
Gene HumphreyInternational Test Solutions, Inc.
Livermore, CA 94550SWTW 2000
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2June 2000
Contributors
• John Reynolds Motorola APRDL
• Bill Fulton Wentworth Laboratories
• Monte Laskosky Gel-Pak
• Sadafumi Tamakoshi Tokyo Seimitsu Co., Ltd.
• J. D. Ross FormFactor, Inc.
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3June 2000
Off-line Cleaning
• Abrasive or Destructive cleaning• Alcohol, Air, Q-Tips, Lapping Film
• Debris Removal and Collection• Increased Handling and Damage• Downtime/Reduced Throughput
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4June 2000
On-Line Cleaning
• Remove Loose Debris• Remove Embedded or Bonded Debris• Tip conditioning/Reshaping• Minimize handling and damage• Increase Throughput• Stable and Accurate Test Results
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5June 2000
Industry Needs
• Cost Effective On-Line Cleaning• Effectiveness of Abrasive Cleaning• Characteristic of Non Abrasive Cleaning• Non-Abrasive Debris Collection• Wide Temperature Applications –40°C to
150°C• Easy to Use Products• Environmentally Safe Products
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6June 2000
Product Families
• FormFactor Cleaning Wafer - 1997• Probe Clean – Non-Abrasive Debris Collection
– Recommended for all Probe Types• Probe Scrub – Light Scrub
– Reduces CRES for flat tip• Probe Polish – Removes and Collects
Embedded or Bonded Debris– Reduces CRES for flat, radius, round tips and Cobra
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7June 2000
Probe Clean
• Basic Material for all Products• Non-Abrasive Highly Crossed Linked Polymer
– Collects Debris– Reduces CRES by Removing Loose Debris– Extends Probe Card Life– Leaves No Residue on Probes or in Prober– -50°C to 200°C Operating Temperature
• Use with all Probe Materials and Tips
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8June 2000
Before Probe Clean
Contact 5000 times(Mag: 1500�
Pictures Courtesy TSK
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9June 2000
After Probe Clean
After Cleaning (Mag: 1500�
Pictures Courtesy TSK
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10June 2000
Probe Clean Results
Motorola APRDL
27 SEP 99
0.00
1.00
2.003.00
4.005.00
6.007.00
8.009.00
10.0011.00
12.0013.00
14.0015.00
16.0017.00
18.0019.00
20.0021.00
22.00
CRE
S O
HMS
2 3 4 5 6 7 8 9 10 11 12
RANDOM FLAT Re W PROBES
PROBE CLEAN TEST RESULTS
Before Ohms
After Ohms
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11June 2000
PROBE CLEAN vs SANDPAPER
65
70
75
80
85
90
95
100
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
WAFER LOT NUMBER (25 WAFERS PER LOT)
YIEL
D
PROBE CLEANSANDPAPER
Probe Clean Yield Improvement
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12June 2000
Need for Aggressive Cleaning
Contact 5000 times
Contamination
Clean Probe Before Test
Pictures Courtesy TSK
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13June 2000
Need for Aggressive Cleaning
Cleaning 100 times Probe CleanCleaning 50Times Probe Clean
Pictures Courtesy TSK
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14June 2000
Debris Collection
Picture Courtesy TSK
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15June 2000
Probe Scrub
• Light Abrasion• Traps Debris
– Reduces CRES for flat tip – Environmentally Safe
• Use with Flat Tip Probes
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16June 2000
Probe Scrub
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17June 2000
Probe Scrub Results
SV PROBE
API ANALYZER
20 OCT 99
PROBE SCRUB TEST RESULTS
0.000
1.000
2.000
3.000
4.000
5.000
6.000
7.000
8.000
9.000
10.000
1 3 5 7 9 11 13 15 17 19 21 23 25 27 29 31 33 35 37 39 41 43 45 47 49
RANDOM PROBE MEASUREMENTS
CRE
S O
HMS
Before
After
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18June 2000
Probe Polish
• Reduces CRES by Lightly Polishing Probes• Use with Flat, Rounded, Radius, Sharp Tip or
Cobra Probes• Removes Loose, Embedded and Bonded Debris• Environmentally Safe
– Collects Heavy Metal Residue– Traps Debris for Disposal
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19June 2000
Probe Polish
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20June 2000
Probe Polish Results
CUSTOMER DATA
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21June 2000
Complete Cleaning Solution
• Several Cleaning Options• Several Backing Materials
– Polyester– Silicon Wafer– Ceramic
• Installs on Prober Abrasion Plate• All Wafer Sizes for Prober Cleaning Trays
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22June 2000
On-line Cleaning Benefits
• Increases Revenue– Increases Yield
• Proven on Production Floors– Cuts Cycle Time – Increases Throughput
• Reduces Off-Line Cleaning – Cost Effective
• Cleaning is In-Line• Less Abrasive Cleaning Required• Extends Probe Card Life