FORS300 (P6.5-009) Communication Specifications · 2015-01-22 · FORS300(P6.5-009) - 1 - 1....

FORS300 (P6.5-009) Communication Specifications

First edition (January 10, 2003)

――――Table of Contents――――

1. Outline ............................................................................................................................. 1

1.1 Resolution of each axis of the SYSTEM .................................................................... 1 1.2 Operation position ........................................................................................................ 2

2. Basic specifications ...................................................................................................... 3 2.1 Communication control method .................................................................................. 3 2.2 Communication format ................................................................................................ 5 2.3 Status change .............................................................................................................. 7 2.4 External PI/O ................................................................................................................ 8

3. Commands ..................................................................................................................... 9 3.1 Main commands ........................................................................................................... 9 3.2 Subcommands ............................................................................................................. 28

Revision history ......................................................................................................................... 50

FORS300(P6.5-009)

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1. Outline The specifications described in this document apply to the command specifications of RORZE's FORS300 (referred to as "SYSTEM" hereinafter). The configuration of the SYSTEM is as follows:

The specifications described in this document define the communication interface between "Host PC" and "SYSTEM PC" as shown in the above figure.

1.1 Resolution of each axis of the SYSTEM Y-axis: 1000 pulses/3mm Z-axis: 1000 pulses/1mm

Host PC

RS-232C SYSTEMPC

RS-485 FORS300

FORS300(P6.5-009)

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1.2 Operation position The operation positions are as follows. The operation positions can be checked by the "GPOS" command.

Y-axis position = 1 Undock position

Y-axis position = 2Wafer transfer

possible position

Y-axis position = 3Dock position

Y-axis position = 4Short undock

position

Z-axis position = 1 Waiting position

Z-axis position = 2 Wafer transfer

possible position

Z-axis position = 3Wafer search start position

Z-axis position = 4 Wafer search

complete position

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2. Basic specifications

2.1 Communication control method Synchronous full-duplex method by RS-232C

Baud rate: 9600 bps Data bit: 8 bits Parity check: No parity Stop bit: 1 bit

The communication from the host to the SYSTEM and the communication from the SYSTEM to the host are performed at any time without transmitting/receiving the synchronizing characters. Therefore, when allowing an event, the host must operate without confusing the event with the responses to commands.

2.1.1 Confirming start-up

First the host must confirm that the preparation of the SYSTEM has been completed.

Host SYSTEM

Status request

Status response

Example for confirmation: oSTG1.STAT aSTG1.STAT:00000/0000 oSTG1.STAT aSTG1.STAT:10000/0000 If the status becomes "10000/0000", the preparation has been completed.

Status request

Status response

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2.1.2 Confirming motion complete a) If the event is not to be allowed:

The event is not allowed in the initial status. The operation immediately after the power is turned on is as follows:

b) If the event is to be allowed: The event is not allowed in the initial status. To allow the event, the event must be allowed by the event setting command.

Host SYSTEM

Status request

Status response

Response The host issued the motion command. The host must repeat the status request until the motion of the SYSTEM completes.

Motion command

Host SYSTEM

Event

Response

The host issued the motion command. The motion start event is generated immediately after the motion command is returned. If the motion of the SYSTEM is completed, the motion complete event is generated.

Event

Motion command

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2.2 Communication format

1) SOH Character code 01H. Indicates the beginning of communication data. 2) LEN Indicates the length from HED to CSI of the communication data by 1 bite. 3) HED Header. Indicate the header classification by 1 character.

'o' : Instruction from the host (order) 'a' : Proper response (ack) 'n' : Abnormal response (nak) 'c' : Cancel response (cancel) 'e' : Event (event)

4) ID Identification characters for stages Consists of "STG", one character of hexadecimal numeral from"0" to "F", and a period, making 5 characters in total. 5) DATA Command identification code, argument, parameter, status, and so on 6) CSh, CSl Checksum. Indicates the lower 8 bits of the simple sum of each character from LEN to DATA by a 2-digit hexadecimal numeral. 7) ETX Character code 03H. Indicates the end of communication data.

2.2.1 Identification characters The fourth character of the identification characters is the Body No. of the robot controller. For example; If the Body No. is "1", the identification characters are "STG1.". If the header is not "o", or the identification characters are not identified as the same, no response is returned to the host.

2.2.2 Abnormal response If a received data cannot be identified, an abnormal response is returned. Example: If "oSTG1.ABCDEFG" is received, nSTG1.ABCDEFG

SOH LEN HED ID DATA CSh CSl ETX

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2.2.3 Cancel response If a command that cannot be executed is received, a cancel response is returned with a cancel code added. Cancel code: 0001 Command not designated 0002 The designated target motion not equipped 0003 Too many/too few elements 0004 Command not equipped 0005 Too many/too few parameters 0006 Abnormal range of the parameter 0007 Abnormal mode 0008 Abnormal data 0009 System in preparation 000A ORIGIN search not completed 000B Moving 000C No motion 000D Abnormal flash memory 000E Insufficient memory 000F Error-occurred state 0010 ORIGIN search is completed but the motion cannot be started.

Example: If ORIGIN search is going to be executed ("oSTG1.ORGN" is received) while moving, cSTG1.ORGN:000B

2.2.4 Valid characters a) All spaces included in HED, ID, DATA will be ignored (deleted) when the command is interpreted.

The spaces are not ignored when the command is received, so the checksum will contain all spaces included in the characters.

b) Uppercase character and lowercase characters are identified.

2.2.5 Example of communication data

SOH Character code 01h (1 bite binary data) LEN Number of characters of , , , and (1 bite binary data) HED Character code 6Fh (1 character) ID Identification characters (5 characters) DATA Command identification code (4 characters or more) CSh,CSl Checksum (2-digit hexadecimal numeral) ETX Character code 03h (1 bite binary data)

01 0C o S T G １ . O R G N F E 03

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2.3 Status change The status changes as follows:

In the above figure, when the command "PAUS" or "STOP" is executed, the command processing status is "1", then it will change to "0" after the command has been processed. "RSTA (n)": n = 0 or 1

Initializing STAT:00000/0000

Waiting STAT:11000/0000

INIT

ORIGIN search not completed STAT:10000/0000

STOP

ORGN

DuringORIGIN search STAT:10010/0000

ORIGIN search completed

Error occurred

Temporarily stopping STAT:10020/0000

PAUS RSTA(0) STOP

RSTA(1)

RSTA(n)

Moving STAT:11010/0000

Error occurred stateSTAT:11000/****

Temporarily stopping STAT:11020/0000

PAUS RSTA(0) STOP

RSTA(1)

Motion command

Error occurred stateSTAT:10000/****

RSTA(n)

INIT

Error occurred

RSTA(0)

STOP

Turning on the power

Initialization completed

Motion completedSignificant error occurred

Light error occurred

Light error occurred

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2.4 External PI/O The following parallel signals are prepared:

Pin No. Name Direction Contents

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15

OK to Operate Door Open Carrier Port Ready Presence Operational Status Valuable Placement (NC) Response for Signal 1 Response for Signal 2 Response for Signal 3 Response for Signal 4 Response for Signal 5 Response for Signal 6 Response for Signal 7

Input Output Output Output Output

Input

Output

Functions as input signal "bit0" (emergency stop). Door open notification Work fixed notification Work presence notification Control possible notification. Equivalent to output signal "bit0". Functions as input signal "bit1" (temporarily stop). Work properly placed notification

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3. Commands The descriptions on the following pages are only for the header (HED), identification characters (ID), data part (DATA). The Body No. is assumed to be "1". Some parameters of the data part can be omitted. If the parameter is omitted, " , " before is also omitted. If all parameters are omitted, " ( " and " ) " are also omitted. 3.1 Main commands

The main commands apply to the whole of the SYSTEM.

3.1.1 Motion command To move the SYSTEM, use the following motion commands. The operations are possible only when ORIGIN search has been completed except for the operations of "ORGN" command. In the error-occurred state, all motion commands are cancelled. a) ORIGIN search

Performs ORIGIN search of the SYSTEM. If the parameter is "0" or omitted, normal ORIGIN search is performed. As for the normal ORIGIN search completes after closing the door of the FOUP if the FOUP is placed on the stage. If "9" is designated for the parameter, perform ORIGIN search without placing anything on the stage.

Command

o S T G 1 . O R G N ( n )

Parameter n = 0: Performs normal ORIGIN search. (It can be omitted.) 9: Performs self test.

Proper response

a S T G 1 . O R G N :

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b) Fixing the work Performs fixing operation (preparation) of the work. If the first parameter is "n = 0", the operation corresponding to the work set by the "SWID" command is performed. If the first parameter is "n = 7, 8, or 9", the designated operation is performed regardless of the setting of "SWID". If the second parameter is omitted, the mapping is performed according to the setting of "DPRM".

Command

o S T G 1 . C L M P ( n , d )

Parameter n d Contents of operation

0 Opens pod door. Mapping is performed. ("n" and "d" can be omitted.) 0

1 Opens pod door. Mapping is not performed. 0 Closes pod clamp. Mis-clamp is checked. (Pod is fixed.)

1 1 Closes pod clamp. (Mis-clamp is not checked.)

2 Designationnot allowed Moves to Y-axis position 3 after fixing the pod.

3 Designationnot allowed Turns on vacuum chuck.

4 Designationnot allowed Closes latch key.

5 Designationnot allowed Contains mapper.

0 Performs preparing operation for the FOSB. Mapping is performed. 7

1 Performs preparing operation for the FOSB. Mapping is not performed.

0 Performs preparing operation for the 25-slot open cassette. Mapping is performed. 8

1 Performs preparing operation for the 25-slot open cassette. Mapping is not performed.

0 Performs preparing operation for the 13-slot open cassette. Mapping is performed. 9

1 Performs preparing operation for the 13-slot open cassette. Mapping is not performed.

Proper response

a S T G 1 . C L M P :

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c) Releasing the work Performs releasing operation of the work. If the first parameter "n = 0", the operation corresponding to the work set by the "SWID" command is performed. If the first parameter "n = 7 or 8", the designated operation is performed regardless of the setting of "SWID". Mapping operation can be performed when lifting the Z-axis by changing the setting of "DPRM".

Command

o S T G 1 . U C L M ( n , ps )

Parameter

n ps Contents of operation

0 Closes pod door to be in the transfer possible state. Clamp opens. ("n", and "ps" can be omitted.) 0

1 to 6 Closes pod door, and moves Y-axis to the designated position. Clamp does not perform any motion.

1 Designationnot allowed Releases pod clamp.

2 Designationnot allowed

Closes pod door, and moves to the carry-out position. (Clamp does not perform any motion.)

3 Designationnot allowed Turns off vacuum chuck.

4 Designationnot allowed Opens latch key.

5 Designationnot allowed Prepares mapper.

0 Moves to the waiting position for the FOSB. Clamp opens.

7 1 to 6

Moves to the waiting position for the FOSB. Y-axis moves to the designated position. Clamp does not perform any motion.

0 Moves to the waiting position for the open cassette. Clamp opens.

8 1 to 6

Moves to the waiting position for the open cassette. Y-axis moves to the designated position. Clamp does not perform any motion.

ps Contents 1 Undock position 2 Wafer transfer possible position 3 Dock position 4 Short undock position 5 Y-axis position 5 6 Y-axis position 6

Proper response

a S T G 1 . U C L M :

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d) Mapping Performs wafer mapping. This command can be executed while the pod door is opened, and only the mapping operation is performed. To acquire the mapping pattern, execute the "GMAP" command after mapping operation is completed. (Refer to Section 3.1.3, "Other commands; c) Mapping pattern acquisition".)

Command

o S T G 1 . W M A P

Proper response

a S T G 1 . W M A P :

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3.1.2 Status operation command

a) Event Sets the event disable/enable setting. If the event is enabled, the same information as that is obtained by "a) Acquiring status", "b) Acquiring input/output signals", "h) Acquiring stopping position", and "i) Acquiring work type" in Section 3.1.3, "Other commands" is issued as the event. The event is issued when the status has changed. Refer to "a) Acquiring status", "b) Acquiring input/output signals", "h) Acquiring stopping position", and "i) Acquiring work type" in Section 3.1.3, "Other commands" for the details of the events. The enabled event always occurs once immediately after it is enabled.

Command

o S T G 1 . E V N T ( en , n )

Parameter

en n Contents 0 Disables all events. 0 1 Enables all events. 0 Disables status event.

1 1 Enables status event. 0 Disables PI/O event.

2 1 Enables PI/O event. 0 Disables stopping position event. 3 1 Enables stopping position event. 0 Disables work ID event. 4 1 Enables work ID event.

Proper response

a S T G 1 . E V N T :

Event

en = 1

en = 2

en = 3

en = 4

e S T G 1 . S T A T : s1 / s2

e S T G 1 . G P I O : pi / po

e S T G 1 . G P O S : p1 / p2

e S T G 1 . G W I D : p1 / p2

FORS300(P6.5-009)

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b) Error reset Resets the error. Use this command to restart the motion from the temporarily stopped condition.

Command

o S T G 1 . R S T A ( n )

Parameter n Contents

0 Resets the error. Restarts the operation if the motion is temporarily stopped.

1 Resets the error, and then stops the motion.

Proper response

a S T G 1 . R S T A :

FORS300(P6.5-009)

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c) Initializing the status

Only the flag of the event disable/enable is held, and all statuses are returned to their initial conditions.

Command

o S T G 1 . I N I T

Proper response

a S T G 1 . I N I T :

d) Emergency stopping the motion Emergency stops the motion while the robot is operating, and sets the ORIGIN search completion flag to "0". If this command is executed while the robot is in the temporarily stop condition, the robot stops. In this case and in the case that the "STOP" command is executed while the robot is in the stop condition, the ORIGIN search completion flag does not change.

Command

o S T G 1 . S T O P

Proper response

a S T G 1 . S T O P :

e) Temporarily stopping the motion

Temporarily stops the motion. If the "PAUS" command is executed while the robot is in the stop condition, the SYSTEM does not enter the temporarily stop condition.

Command

o S T G 1 . P A U S

Proper response

a S T G 1 . P A U S :

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f) Operation mode

Changes the operation mode If the mode is changed from "Maintenance mode" to "Remote mode", the origin search completion flag becomes "0".

Command

o S T G 1 . M O D E ( n )

Parameter

n Contents

1 Remote mode

2 Maintenance mode

Proper response

a S T G 1 . M O D E :

g) Storing the data Stores the memory data into the disk drive.

Command

o S T G 1 . W T D T

Proper response

a S T G 1 . W T D T :

h) Reading the data again Reads the data stored in the disk drive into the memory.

Command

o S T G 1 . R T D T

Proper response

a S T G 1 . R T D T :

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i) Transferring the data Transfers the data stored in the memory to the controller.

Command

o S T G 1 . T R D T

Proper response

a S T G 1 . T R D T :

j) Setting the operation speed

Changes the operation speed in "Maintenance mode". Setting the parameter to be from "1" to "10" corresponds to 10% to 100% of the operation speed set in "Maintenance data". The speed lower than the normal operation speed is set in "Maintenance data".

Command

o S T G 1 . S S P D ( n )

n = 0 : Normal operation speed 1 to 10 : Low operation speed

Proper response

a S T G 1 . S S P D :

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k) Changing the output signal Changes the output signal. Batch designation up to 64 bits and 1 bit designation can be performed. The flashing time can be designated in the case of "bt = 40 to 55".

Command (batch designation)

o S T G 1 . S P O T ( dt )

Parameter dt: Hexadecimal numeral within 16 digits

Command (1 bit designation)

o S T G 1 . S P O T ( bt , n )

Parameter bt: Bit designation (0 to 63) n : OFF/ON designation

0 : OFF 1 : ON

100 to 20000: Flashing time (unit: msec, effective only for "bt = 40 to 55")

Proper response

a S T G 1 . S P O T :

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3.1.3 Other commands

a) Status acquisition Acquires all statuses.

Command

o S T G 1 . S T A T

Proper response

a S T G 1 . S T A T : s1 / s2

First digit of s1: Operation mode (0: Initializing/1: Remote/2: Maintenance/3: Recovery) Second digit of s1: ORIGIN back completion (0: Not completed/1: Completed) Third digit of s1: Processing command (0: Stop/1: Processing) Fourth digit of s1: Operation status of the SYSTEM (0: Stop/1: Moving/2: Temporarily stop) Fifth digit of s1: Operation speed (0: Normal/1 to A: Maintenance) First and second digits of s2: Identification code for the error-occurred controller(s) Third and fourth digits of s2: Error code

Commands changing the status s1

Command First digit Second digit Third digit Fourth digit Fifth digit

ORGN HOME CLMP UCLM WMAP STEP

◎ △ △ △ △ △

◎ ◎ ◎ ◎ ◎ ◎

RSTA INIT

STOP PAUS MODE TRDT SSPD

◎

○

○ ○ △ ○ △ △

◎ ◎

◎ ◎

○ ○ ○ ○

○

○

○

Note: Commands Only the "STEP" command is a subcommand. All others are main commands.

Note: Meaning of the marks ◎ : Always changes. ○ : Changes according to the conditions. △ : Becomes "0" while moving or if an error occurs while processing the command.

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Identification codes of the controllers Code Contents Code Contents

00 01 02 03 04 05 06

Others Y-axis Z-axis I/O controller 1 I/O controller 2 I/O controller 3 I/O controller 4

11

Mapper

Error codes

Significant errors Light errors Code Contents Code Contents

01 02 03 04 05 06 07 08 09 0A 0B

Stall Limit Emergency stop Command error Communication error Vacuum chuck sensor abnormal (Reserved) Finger caught detecting sensor Second ORIGIN sensor abnormal Mapping sensor abnormal Wafer protrusion detecting sensor abnormal

90 91 92 93 94 95 96 97 98 99 9A

9C

(Reserved) (Reserved) Pod clamp disabled Pod unclamp disabled Latch key lock disabled (Reserved) Latch key release disabled Mapping sensor preparation disabledMapping sensor containing disabled Vacuum chuck on disabled Wafer protrusion Work improperly taken

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b) Input/output signal acquisition Acquires the input/output signal status. If the extensional function of PI/O is enabled, both input and output can acquire information of 64 bits (16-digit hexadecimal characters). If it is disabled, information of 32 bits (8-digit hexadecimal characters) can be acquired.

Command

o S T G 1 . G P I O

Proper response

a S T G 1 . G P I O : pi / po

pi : 32/64 bits input signal (8/16-digit hexadecimal characters) po : 32/64 bits output signal (8/16-digit hexadecimal characters) Note: The flashing signal is always "ON".

I/O mapping

Input bit Contents bit Contents 0 1 2 3 4 5 6 7

(Signal not connected) (Signal not connected) (Signal not connected) (Signal not connected) (Signal not connected) (Signal not connected) Protrusion (Signal not connected)

3233343536373839

(Signal not connected) (Signal not connected) (Signal not connected) (Signal not connected) (Signal not connected) (Signal not connected) (Signal not connected) (Signal not connected)

8 9 10 11 12 13 14 15

Pod door left close Pod door left open Pod door right close Pod door right open Mapping sensor containing Mapping sensor preparation Upper pressure limit Lower pressure limit

4041424344454647

LOAD SW UNLOAD SW (Signal not connected) (Signal not connected) (Signal not connected) (Signal not connected) (Signal not connected) (Signal not connected)

16 17 18 19 20 21 22 23

Pod clamp open Pod clamp close Presence left Presence right Presence middle Info pad A (Option)Info pad B (Option)Info pad C (Option)

4849505152535455


24 25 26

27 28 29 30

31

Info pad D (Option)Presence FOSB identification sensor (Signal not connected)Finger caught detecting sensor Door detection A Door detection B Open cassette detecting sensor (Signal not connected)(Signal not connected)

565758

59606162

63


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Output

bit Contents bit Contents 0 1 2 3 4 5 6 7

Preparation completed (Signal not connected) Temporarily stop (Signal not connected)Significant error (Signal not connected) Light error (Signal not connected) (Signal not connected) (Signal not connected) (Signal not connected) (Signal not connected)

32

33343536373839


8 9 10 11 12 13 14 15

(Signal not connected) (Signal not connected) Pod clamp close Pod clamp open Pod door lock open Pod door lock close (Signal not connected) (Signal not connected)

4041424344454647

(Signal not connected) (Signal not connected) (Signal not connected) (Signal not connected) (Signal not connected) LOAD LED UNLOAD LED PRESENCE LED

16 17 18 19 20 21 22 23

Mapping sensor preparation Mapping sensor containing Vacuum chuck on Vacuum chuck off (Signal not connected) (Signal not connected) (Signal not connected) (Signal not connected)

4849505152535455

PLACEMENT LED AUTO LED ALARM LED RESERVE LED (Signal not connected) (Signal not connected) (Signal not connected) (Signal not connected)

24 25 26

27

28

29 30 31

Door open (External output) Work clamp (External output) Cassette presence detecting sensor ＯＮ (External output) Preparation completed (External output) Cassette properly loaded (External output) (Signal not connected) (Signal not connected) (Signal not connected)

565758

59

60

616263


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c) Mapping pattern acquisition

Acquires the mapping pattern. The mapping pattern is updated by the "WMAP" command. (Refer to Section 3.1.1, "Operation command; d) Mapping".) The first character is for the very bottom slot and the last character is for the very top slot for the pattern that can be acquired. The number of the characters of the pattern changes according to the number of slots and the cassette type. (Refer to Section 3.2.7, "Mapper date".)

Command

o S T G 1 . G M A P

Proper response

a S T G 1 . G M A P : nnnn…

n = 0: Wafer does not exist. 1: Wafer exists. 2: Thickness abnormal (thick wafer) 3: Cross 4: Front sag 7: Two or more wafers exist in the same slot. 8: Thickness abnormal (thin wafer)

d) Version acquisition

Acquires the version of the firmware for the SYSTEM.

Command

o S T G 1 . G V E R

Proper response

a S T G 1 . G V E R : msg

msg = RORZE STD_STG FORS300(P6.5-004) Ver 1.00 (2000/00/00)

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e) Log acquisition Notifies of the designated number of the operation logs storing in the firmware of the SYSTEM as the event.

Command

o S T G 1 . G L O G ( n )

Parameter n = 1 to 7281: "100" if omitted. It becomes "7281" automatically if it is more than 7281.

Proper response

a S T G 1 . G L O G :

Event

e S T G 1 . G L O G : msg

msg: 103 characters at the maximum

f) Setting date and time Sets the date and time of the SYSTEM's PC.

Command

o S T G 1 . S T I M ( year , mon , day , hour , min , sec )

Parameter year: Year (2000 to..) mon: Month (1 to 12) day: Date (1 to 31) hour: Time (0 to 23) min: Minute (0 to 59) sec: Second (0 to 59)

Proper response

a S T G 1 . S T I M :

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g) Date and time acquisition Acquires the date and time of the SYSTEM's PC.

Command

o S T G 1 . G T I M

Proper response

a S T G 1 . S T I M : year , mon , day , hour , min , sec

Parameter year: Year (2000 to..) mon: Month (1 to 12) day: Date (1 to 31) hour: Time (0 to 23) min: Minute (0 to 59) sec: Second (0 to 59)

h) Stopping position acquisition Acquires the stopping position of each axis. The data of two-digit decimal numerals ("00” to "06" and "99") can be acquired. In the case of "00", the stopping position is ORIGIN. In the case of "99", the stopping position is not fixed.

Command

o S T G 1 . G P O S ( n )

Parameter n = Omitted: Acquires stopping positions of all operation axes as a batch. 1: Acquires stopping position of the Y-axis. 2: Acquires stopping position of the Z-axis.

Proper response (When parameter is omitted.) (standard type)

a S T G 1 . G P O S : p1 / p2

p1: Y-axis p2: Z-axis

Proper response (When parameter is designated.)

a S T G 1 . G P O S : p

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i) Work type acquisition Acquires the set type of the work and the type of the work placed on the SYSTEM as characters. The following characters can be acquired:

“AUTO”: Automatic identification “FOUP”: FOUP “FOSB”: FOSB “OC25”: 25-slot open cassette “OC13”: 13-slot open cassette “ELSE”: Others (special cassette) “FP01”: FOUP for 1 “FP13”: 13-slot FOUP “----”: Work not identified

If it is "n = 3", inputs of the info pad can be acquired. The following characters can be acquired in the initial state:

“----”: All off “---D”: D is on. “A---”: A is on. “A--D”: A and D are on. “-B--”: B is on. “-B-D”: B and D are on. “AB--”: A and B are on. “AB-D”: A, B, and D are on. “--C-”: C is on. “--CD”: C and D are on. “A-C-”: A and C are on. “A-CD”: A, C, and D are on. “-BC-”: B and C are on. “-BCD”: B, C, and D are on. “ABC-”: A, B, and C are on. “ABCD”: All on

Command

o S T G 1 . G W I D ( n )

Parameter n = Omitted: Acquires all work types as a batch. 1: Acquires identification method of work types. 2: Acquires the work type placed on the SYSTEM. 3: Acquires inputs of info pad.

Proper response (When parameter is omitted.)

a S T G 1 . G W I D : p1 / p2

p1: Identification method of work types p2: Work type placed on the SYSTEM


a S T G 1 . G W I D : p

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j) Setting work types Sets work types. The parameters except "AUTO" follow the settings in Section 3.2.9, "The data by cassette types".

Command (Setting work types)

o S T G 1 . S W I D ( n )

Parameter n = “AUTO”: Automatic identification

“FOUP”: FOUP “FOSB”: FOSB “OC25”: 25-slot open cassette “OC13”: 13-slot open cassette “ELSE”: Others (special cassette) “FP01”: FOUP for 1 “FP13”: 13-slot FOUP

Proper response

a S T G 1 . S W I D :

k) Checksum acquisition Acquires the checksum of the data. The checksum is 8-digit (32 bits) hexadecimal numeral characters and is the total of the results of each bite of the data multiplied by a weight while incrementing the weight.

Command

o S T G 1 . G S U M


a S T G 1 . G S U M : s

s: 8-digit hexadecimal numeral characters

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3.2 Subcommands The targets of the subcommands are each motion axis and data.

3.2.1 Motion axis

The operations are possible only when ORIGIN search has been completed except for the operations of "ORGN" command. In the error-occurred state, all motion commands are cancelled. The following names can be used:

YAX1: Y-axis ZAX1: Z-axis RCA1: Mapper RCB1: I/O controller 1 RCB2: I/O controller 2 RCB3: I/O controller 3 RCB4: I/O controller 4 The following operation commands "a) to c)" cannot be used for RCA1, RCB1, RCB2, RCB3, and RCB4 because the operation axis is not attached to the mapper and I/O controller.

a) ORIGIN search Command

o S T G 1 . Y A X 1 . O R G N ( n )

Parameter n = 0: Performs ORIGIN search and adjusts the center of the stall sensor (can be omitted). 1: Performs ORIGIN search. 2: Adjusts the center of the stall sensor.

Proper response

a S T G 1 . Y A X 1 . O R G N :

b) Moving to the home position Command

o S T G 1 . Y A X 1 . H O M E ( n )

Parameter n = 0: Moves to ORIGIN (can be omitted). 1 to 6: Moves to the set position.

Proper response

a S T G 1 . Y A X 1 . H O M E :

FORS300(P6.5-009)

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c) Teaching operation If the operation speed is set to 10% by the operation setting, fixed quantity motion is performed according to "Fixed quantity motion pulses for Teaching" in "Maintenance data". If the operation speed is set among 20% to 100% by the operation setting, continuous operation is performed by continuing issuing this command within "Repeating time" in "Maintenance data". Relative movement can be performed by designating the movement quantity with a code.

Command

o S T G 1 . Y A X 1 . S T E P ( id )

Parameter id = '+' : Moves in the CW direction. '-' : Moves in the CCW direction. ±nnnnnnn : Relatively moves to +（in CW direction) or -(in CCW direction).

Proper response

a S T G 1 . Y A X 1 . S T E P :

d) Position acquisition Acquires the current position if the parameter is omitted, and acquires the position data stored in the controller if the parameter is designated.

Command

o S T G 1 . Y A X 1 . G P O S ( n )

Parameter n = 0 to 999 : Internal address of the controller

Proper response

a S T G 1 . Y A X 1 . G P O S : pls

pls: Current position or position data e) Direct commands

o S T G 1 . Y A X 1 . D C M D ( cmd , len )

Parameter cmd: Commands except Body No. len: Number of returning characters for command

Proper response

a S T G 1 . Y A X 1 . D C M D : dt

dt : Return characters

FORS300(P6.5-009)

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3.2.2 Stage data Setting, acquiring, and initializing of the parameters that determine the movement position of the SYSTEM can be performed. Each data can be accessed by the element number, and the numbers are listed in the following table.

p Parameter format Initial value Contents 0 1 2 3 4 5 6 7 8 9 10 11 12 13

14 15 16 17 18 19 20

±nnnnnnn ±nnnnnnn ±nnnnnnn ±nnnnnnn ±nnnnnnn ±nnnnnnn ±nnnnnnn ±nnnnnnn

±nnnnnnn ±nnnnnnn ±nnnnnnn ±nnnnnnn ±nnnnnnn ±nnnnnnn

±nnnnnnn ±nnnnnnn ±nnnnnnn ±nnnnnnn

nnnnn nnnnn

Within 63 characters

+0000000+0000000+0000000+0000000+0000000+0000000+0000000+0025000

+0024500+0013666+0000000+0000000-0003500+0376500

+0046000+0298000+0000000+0000000

03000 00000

""

Not used Not used Not used Not used Not used Not used Y-axis pulse 1 (waiting position) Y-axis pulse 2 (wafer carry-out and carry-in possible position)Y-axis pulse 3 (Door chuck position) Y-axis pulse 4 (Z-axis lowering possible position) Y-axis pulse 5 Y-axis pulse 6 Z-axis pulse 1 (waiting position) Z-axis pulse 2 (wafer carry-out and carry-in possible position)Z-axis pulse 3 (mapping start position) Z-axis pulse 4 (mapping complete position) Z-axis pulse 5 Z-axis pulse 6 Not used Not used Comment

Note: Description of the format

±: "+" or "-" ("+" if omitted) n: one-digit numeral ("0" to "9")

FORS300(P6.5-009)

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a) Batch setting of the stage data Command

o S T G 1 . D S T G . S T D T = 0, 0, …

Proper response

a S T G 1 . D S T G . S T D T :

b) Individual setting of the stage data Command

o S T G 1 . D S T G . S T D T [ p ] = 0

Proper response

a S T G 1 . D S T G . S T D T :

c) Batch acquisition of the stage data Command

o S T G 1 . D S T G . G T D T

Proper response

a S T G 1 . D S T G . G T D T : 0, 0, …

d) Individual acquisition of the stage data Command

o S T G 1 . D S T G . G T D T [ p ]

Proper response

a S T G 1 . D S T G . G T D T : 0

FORS300(P6.5-009)

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e) Reading the stage initial data Command

o S T G 1 . D S T G . I N I T

Proper response

a S T G 1 . D S T G . I N I T :

f) Transferring the stage data Command

o S T G 1 . D S T G . T R D T

Proper response

a S T G 1 . D S T G . T R D T :

FORS300(P6.5-009)

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3.2.3 SYSTEM data Setting, acquiring, and initializing of the parameters that determine the operation of the SYSTEM can be performed. Each data can be accessed by the element number, and the numbers are listed in the following table.

p Parameter format Initial value Contents 0 1 2 3 4 5

Within 63 characters n n nn

nnnnnn.n nnnnnn.n

"" 0 1 12

000300.0 000300.0

Serial No. of the SYSTEM IP address of the host Line number of the host PC Not used Not used Not used

6 7 8 9 10

11

12

13

14 15 16 17 18 19 20 21 22 23

～ 36 37

nn n n n n n n n

nnnnnn nnnn nnnn nnnn nnnn

nnnnnn nnnn nnn nnnn

n ～

n nnnnn

1 0 1 0 2 2 2 2

50000 3000 3000 3000 3000 50000 1000 090 3000

0 ～

0 0

Body No. 0 to 15 Event enabling flag Software switch Not used Emergency stop signal 0: Negative logic, 1: Positive logic, 2: InvalidTemporarily stop signal 0: Negative logic, 1: Positive logic, 2: InvalidVacuum source pressure signal 0: Negative logic, 1: Positive logic, 2: InvalidAir source pressure signal 0: Negative logic, 1: Positive logic, 2: InvalidY-axis OS after vacuum chuck off Operating time of pod clamp (unit: msec) Operating time of door lock key (unit: msec) Operating time of mapping sensor (unit: msec) Door chucking time (unit: msec) Y-axis OS for short undock Weight when starting mapping (unit: msec) Y-axis OA for short undock Not used Not used Not used Not used Initial value of mapping data

38 39 40

～ 69

n n n

～ n

0 0 0

～ 0

Not used Line number of the controller 0: Invalid, 1 to: ValidNot used Not used Not used

70 Within 63 characters "" Comment Note: Description of the format

±: "+" or "-" ("+" if omitted) n: 1-digit numeral ("0" to "9")

Note: Software SW

bit0: Disabling/enabling cross wafer detection during mapping operation bit1: Disabling/enabling command retrying when a light error has been occurred. bit3:Disabling/enabling extensional function of PI/O

FORS300(P6.5-009)

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a) Batch setting of the SYSTEM data Command

o S T G 1 . D E Q U . S T D T = 0, 0, …

Proper response

a S T G 1 . D E Q U . S T D T :

b) Individual setting of the SYSTEM data Command

o S T G 1 . D E Q U . S T D T [ p ] = 0

Proper response

a S T G 1 . D E Q U . S T D T :

c) Batch acquisition of the SYSTEM data Command

o S T G 1 . D E Q U . G T D T

Proper response

a S T G 1 . D E Q U . G T D T : 0, 0, …

d) Individual acquisition of the SYSTEM data Command

o S T G 1 . D E Q U . G T D T [ p ]

Proper response

a S T G 1 . D E Q U . G T D T : 0

FORS300(P6.5-009)

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3.2.4 Initializing data Setting, acquiring, and initializing of the parameters for performing initial settings of the SYSTEM can be performed. Each data can be accessed by the element number, and the numbers are listed in the following table.

p1 Contents 0 1 2 3 4 5 6

For Y-axis For Z-axis I/O controller 1 I/O controller 2 I/O controller 3 I/O controller 4 Mapper

p2 Data format Contents 0

～ 31 32


Initial data Comment

Initial values

p1 p2 0 1 2 3 0 1 2 3 4 5 6 7 8 9 10 11 ～32

"$1E0" "$1QS1" "$1EA00" "$10B0"

"$10S1333" "$1Q2048" "$1OC100"

"$1OS200000" "$1OL02000"

"$1OH030000" "" "" "" ""

"$2E0" "$2QS1" "$2EA0F" "$20B0"

"$20S1500" "$2Q2500" "$2OC100"

"$2OS1000000" "$2OL12000"

"$2OH175000" "$2KA,8,1"

"" "" ""

"$3E4" "" "" "" "" "" "" "" "" "" "" "" "" ""

"$4E4" "" "" "" "" "" "" "" "" "" "" "" "" ""

p1

p2 4 5 6 0 1 2 3 4

～32

"$5E4" "" "" "" "" "" ""

"$6E4" "" "" "" "" "" ""

"$2WIS0" "$2WUS0"

"$2WJSC:1,T:1,S:0" "$2WQSSL0,ST0,WC0"

"" "" ""

FORS300(P6.5-009)

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a) Batch setting of the initial data Command

o S T G 1 . D R C I . S T D T [ p1 ] = 0, 0, …

Proper response

a S T G 1 . D R C I . S T D T :

b) Individual setting of the initial data Command

o S T G 1 . D R C I . S T D T [ p1 ] [ p2 ] = 0

Proper response

a S T G 1 . D R C I . S T D T :

c) Batch acquisition of the initial data Command

o S T G 1 . D R C I . G T D T [ p1 ]

Proper response

a S T G 1 . D R C I . G T D T : 0, 0, …

d) Individual acquisition of the initial data Command

o S T G 1 . D R C I . G T D T [ p1 ] [ p2 ]

Proper response

a S T G 1 . D R C I . G T D T : 0

e) Reading the initialization initial data Command

o S T G 1 . D R C I . I N I T

Proper response

a S T G 1 . D R C I . I N I T :

FORS300(P6.5-009)

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3.2.5 Normal operation data Setting, acquiring, and initializing of the parameters that determine the operation speed for the normal operation of the SYSTEM can be performed. Each data can be accessed by the element number, and the numbers are listed in the following table.

p1 Contents 0 1

For Y-axis For Z-axis

p2 Data format Contents 0

～ 31 32


Normal operation data Comment

Initial values

p1 p2 0 1 0 1 2 3

～32

"$1OS200000" "$1OL00200"

"$1OH030000" "" "" ""

"$2OS1000000" "$2OL00500"

"$2OH175000" "" "" ""

FORS300(P6.5-009)

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a) Batch setting of the normal operation data Command

o S T G 1 . D R C S . S T D T [ p1 ] = 0, 0, …

Proper response

a S T G 1 . D R C S . S T D T :

b) Individual setting of the normal operation data Command

o S T G 1 . D R C S . S T D T [ p1 ] [ p2 ] = 0

Proper response

a S T G 1 . D R C S . S T D T :

c) Batch acquisition of the normal operation data Command

o S T G 1 . D R C S . G T D T [ p1 ]

Proper response

a S T G 1 . D R C S . G T D T : 0, 0, …

d) Individual acquisition of the normal operation data Command

o S T G 1 . D R C S . G T D T [ p1 ] [ p2 ]

Proper response

a S T G 1 . D R C S . G T D T : 0

e) Reading the normal operation initial data Command

o S T G 1 . D R C S . I N I T

Proper response

a S T G 1 . D R C S . I N I T :

FORS300(P6.5-009)

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3.2.6 Maintenance data Setting, acquiring, and initializing of the parameters used when performing maintenance works of the SYSTEM can be performed. Each data can be accessed by the element number, and the numbers are listed in the following table.

p1 Contents 0 1

For Y-axis For Z-axis

p2 Data format Contents 0 1 2 3 4 5 6 7

±nnnnnnn ±nnnnnnn nnnnnn nnnnnn nnnnnn

±nnnnnnn nnnnnn


Movable minimum pulses Movable maximum pulses Maximum value of OH for Teaching Reserved OL for Teaching Fixed quantity motion pulses for Teaching Repeating time of STEP command (msec) Comment


±: "+" or "-" ("+" if omitted) n: 1-digit numeral ("0" to "9")

Initial values

p1 p2 0 1 0 1 2 3 4 5 6 7

+0000000 +0025000

001000 001000 000500

+0000016 +0000200

""

-0004500 +0346500

005000 005000 000500

+0000050 +0000200

""

FORS300(P6.5-009)

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a) Batch setting of the maintenance data Command

o S T G 1 . D M N T . S T D T [ p1 ] = 0, 0, …

Proper response

a S T G 1 . D M N T . S T D T :

b) Individual setting of the maintenance data Command

o S T G 1 . D M N T . S T D T [ p1 ] [ p2 ] = 0

Proper response

a S T G 1 . D M N T . S T D T :

c) Batch acquisition of the maintenance data Command

o S T G 1 . D M N T . G T D T [ p1 ]

Proper response

a S T G 1 . D M N T . G T D T : 0, 0, …

d) Individual acquisition of the maintenance data Command

o S T G 1 . D M N T . G T D T [ p1 ] [ p2 ]

Proper response

a S T G 1 . D M N T . G T D T : 0

e) Reading the maintenance initial data Command

o S T G 1 . D M N T . I N I T

Proper response

a S T G 1 . D M N T . I N I T :

FORS300(P6.5-009)

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3.2.7 Mapper data Setting, acquiring, and initializing of the parameters required for the mapping operation of the SYSTEM can be performed. Each data can be accessed by the element number, and the numbers are listed in the following table.

p Data format Initial value Contents 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25

+nnnnnnn nnn

+nnnnnnn +nnnnnnn +nnnnnnn

nn +nnnnnnn +nnnnnnn +nnnnnnn +nnnnnnn +nnnnnnn +nnnnnnn

n nn

+nnnnnnn +nnnnnnn +nnnnnnn +nnnnnnn +nnnnnnn +nnnnnnn ±nnnnnnn ±nnnnnnn ±nnnnnnn ±nnnnnnn ±nnnnnnn


+0002500064

+0000200+0001300+0000000

00 +0054000+0000000+0294000+0000000+0000000+0000000

1 25

+0000000+0000000+0000000+0000000+0000000+0000000+0000000+0000000+0000000+0000000+0000000

""

Allowable quantity Interruption Minimum thickness Maximum thickness Front sag detecting pulse Not used Very top slot 1 Very top slot 2 Very bottom slot 1 Very bottom slot 2 Offset 1 Offset 2 Number of sensors Number of slots (2 to 25) Not used Not used Not used Not used Not used Not used Not used Not used Not used Not used Not used Comment


±: "+" or "-" ("+" if omitted) +: "+" ("+" if omitted) n: 1-digit numeral ("0" to "9")

FORS300(P6.5-009)

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a) Batch setting of the mapper data Command

o S T G 1 . D M P R . S T D T = 0, 0, …

Proper response

a S T G 1 . D M P R . S T D T :

b) Individual setting of the mapper data Command

o S T G 1 . D M P R . S T D T [ p ] = 0

Proper response

a S T G 1 . D M P R . S T D T :

c) Batch acquisition of the mapper data Command

o S T G 1 . D M P R . G T D T

Proper response

a S T G 1 . D M P R . G T D T : 0, 0, …

d) Individual acquisition of the mapper data Command

o S T G 1 . D M P R . G T D T [ p ]

Proper response

a S T G 1 . D M P R . G T D T : 0

e) Reading the mapper initial data Command

o S T G 1 . D M P R . I N I T

Proper response

a S T G 1 . D M P R . I N I T :

FORS300(P6.5-009)

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3.2.8 Cassette identifying data Setting, acquiring, and initializing of cassette types by the on/off patterns of the info pad can be performed. Each data can be accessed by the element number, and the numbers are listed in the following table.

p Data format Initial value Info pad 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15

4 characters 4 characters 4 characters 4 characters 4 characters 4 characters 4 characters 4 characters 4 characters 4 characters 4 characters 4 characters 4 characters 4 characters 4 characters 4 characters

"AUTO" "AUTO" "AUTO" "AUTO" "AUTO" "AUTO" "AUTO" "AUTO" "AUTO" "AUTO" "AUTO" "AUTO" "AUTO" "AUTO" "AUTO" "AUTO"

All off A is on. B is on. A and B are on. C is on. A and C are on. B and C are on. A, B, and C are on. D is on. A and D are on. B and D are on. A, B, and D are on. C and D are on. A, C, and D are on. B, C, and D are on. A, B, C, and D are on.


“AUTO”: Follows the default automatic identification “FOUP”: FOUP “FOSB”: FOSB “OC25”: 25-slot open cassette “OC13”: 13-slot open cassette “ELSE”: Other cassettes “FP01”: FOUP for 1 “FP13”: 13-slot FOUP The initial settings are as shown above, all of them except "AUTO" follow the settings in Section 3.2.9, "The data by cassette types"

FORS300(P6.5-009)

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a) Batch setting of the cassette identifying data Command

o S T G 1 . D C S T . S T D T = AUTO, …

Proper response

a S T G 1 . D C S T . S T D T :

b) Individual setting of the cassette identifying data Command

o S T G 1 . D C S T . S T D T [ p ] = 0

Proper response

a S T G 1 . D C S T . S T D T :

c) Batch acquisition of the cassette identifying data Command

o S T G 1 . D C S T . G T D T

Proper response

a S T G 1 . D C S T . G T D T : AUTO, …

d) Individual acquisition of the cassette identifying data Command

o S T G 1 . D C S T . G T D T [ p ]

Proper response

a S T G 1 . D C S T . G T D T : 0

e) Initializing the cassette identifying data Command

o S T G 1 . D C S T . I N I T

Proper response

a S T G 1 . D C S T . I N I T :

FORS300(P6.5-009)

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3.2.9 The data by cassette types Parameters can be set by cassette types. Each data can be accessed by the element number, and the numbers are listed in the following table. p1 = 0 to 15

p2 Data format Contents 0 nnn The first parameter of "CLMP" command

1 n Mapping flag

bit0: When docking 0: Enable/1: Disable bit1: When undocking 0: Enable/1: Disable

2 3 4 5 6 7 8 9 10 11 12 13 14 15 16

n nn

nnnnnnnn nnnnnnnn nnnnnnnn ±nnnnnnn ±nnnnnnn ±nnnnnnn ±nnnnnnn ±nnnnnnn ±nnnnnnn ±nnnnnnn ±nnnnnnn ±nnnnnnn


Clamp flag 0: Enable/1: Disable Number of slots Slot pitch (pulse) Minimum thickness (pulse) Maximum thickness (pulse) Height offset (pulse) Front sag detecting pulse (pulse) (Reserved) (Reserved) (Reserved) (Reserved) (Reserved) (Reserved) (Reserved) Cassette identification characters (effective only the first four characters)



FORS300(P6.5-009)

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Initial values

p1 p2 0 1 2 3 4 5 0 1 2 3 4 5 6 7 8 16

000 2 0 25

00010000 00000200 00001300 +0000000 +0000800 "FOUP"

007 2 0 25

00010000 00000200 00001300 +0000100 +0000700 "FOSB"

008 2 1 25

00010000 00000200 00001300 +0011000 +0001500

"OC25"

009 2 1 13

00010000 00000200 00001300 +0011000 +0001500

"OC13"

000 2 1 25

00010000 00000200 00001300 +0000000 +0001300

"ELSE"

010 2 0 01

00010000 00000200 00001300 +0000000 +0001300

"FP01"

p1 p2 6 7 8 9 10 11 0 1 2 3 4 5 6 7 8 16

011 2 0 13

00010000 00000200 00001300 +0000000 +0001300

"FP13"

000 2 0 25

00010000 00000200 00001300 +0000000 +0001300

"CST7"

000 2 0 25

00010000 00000200 00001300 +0000000 +0001300

"CST8"

000 2 0 25

00010000 00000200 00001300 +0000000 +0001300

"CST9"

000 2 0 25

00010000 00000200 00001300 +0000000 +0001300

"CSTA"

000 2 0 25

00010000 00000200 00001300 +0000000 +0001300 "CSTB"

p1

p2 12 13 14 15 0 1 2 3 4 5 6 7 8 16

000 2 0 25

00010000 00000200 00001300 +0000000 +0001300 "CSTC"

000 2 0 25

00010000 00000200 00001300 +0000000 +0001300 "CSTD"

000 2 0 25

00010000 00000200 00001300 +0000000 +0001300 "CSTE"

000 2 0 25

00010000 00000200 00001300 +0000000 +0001300

"CSTF"

FORS300(P6.5-009)

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a) Batch setting of the initial data Command

o S T G 1 . D P R M . S T D T [ p1 ] = 0, 0, …

Proper response

a S T G 1 . D P R M . S T D T :

b) Individual setting of the initial data Command

o S T G 1 . D P R M . S T D T [ p1 ] [ p2 ] = 0

Proper response

a S T G 1 . D P R M . S T D T :

c) Batch acquisition of the initial data Command

o S T G 1 . D P R M . G T D T [ p1 ]

Proper response

a S T G 1 . D P R M . G T D T : 0, 0, …

d) Individual acquisition of the initial data Command

o S T G 1 . D P R M . G T D T [ p1 ] [ p2 ]

Proper response

a S T G 1 . D P R M . G T D T : 0

e) Reading the initialization initial data Command

o S T G 1 . D P R M . I N I T

Proper response

a S T G 1 . D P R M . I N I T :

FORS300(P6.5-009)

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3.2.10 Counters Setting, acquiring, and initializing of counters can be performed. These data are automatically stored when the "WLOG" command is received, when an error occurred while moving, and when the date is changed during operation. Normally do not perform setting and initialization. Each data can be accessed by the element number, and the numbers are listed in the following table.

p Data format Initial value Info pad 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15

nnnnnnnnnnnn nnnnnnnnnnnn nnnnnnnnnnnn nnnnnnnnnnnn nnnnnnnnnnnn nnnnnnnnnnnn nnnnnnnnnnnn nnnnnnnnnnnn nnnnnnnnnnnn nnnnnnnnnnnn nnnnnnnnnnnn nnnnnnnnnnnn nnnnnnnnnnnn nnnnnnnnnnnn nnnnnnnnnnnn nnnnnnnnnnnn

0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0

Time interval since the power is turned on Total operation time Reception number of times of motion command Number of times of motion error (Not used) (Not used) (Not used) (Not used) (Not used) (Not used) (Not used) (Not used) (Not used) (Not used) (Not used) (Not used)



FORS300(P6.5-009)

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a) Batch setting of counters Command

o S T G 1 . D C N T . S T D T = 0, …

Proper response

a S T G 1 . D C N T . S T D T :

b) Individual setting of counters Command

o S T G 1 . D C N T . S T D T [ p ] = 0

Proper response

a S T G 1 . D C N T . S T D T :

c) Batch acquisition of counters Command

o S T G 1 . D C N T . G T D T

Proper response

a S T G 1 . D C N T . G T D T : AUTO, …

d) Individual acquisition of counters Command

o S T G 1 . D C N T . G T D T [ p ]

Proper response

a S T G 1 . D C N T . G T D T : 0

e) Counters initialization Command

o S T G 1 . D C N T . I N I T

Proper response

a S T G 1 . D C N T . I N I T :

FORS300(P6.5-009)

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Revision history

First edition (January 10, 2003) Prepared for P6.5 -009

FORS300 (P6.5-009) Communication Specifications · 2015-01-22 · FORS300(P6.5-009) - 1 - 1....

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Transcript of FORS300 (P6.5-009) Communication Specifications · 2015-01-22 · FORS300(P6.5-009) - 1 - 1....