FM Collection & Identification Services Taywin ChannoAsst. QA & Lab Manager

Agenda

Microelectronic Laboratory Overview

How We Can Help You?

Contamination Analysis

Source of Contamination

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02

03

04

Main Functions

Chemical & Material

Qualification

Contamination & Failure

Analysis

DI Plant & Product

Cleanliness

• Polyester wiper

• Foam wiper

• Foam swab

• MiraSAT wiper

• CoverMAX

• Deionized water

• FM collection samples from

customer’s work area/tooling

• Product contamination

• Process mapping

• Detergent

• Chemical

• Raw material

• Cleanroom bag

• Gloves

• Hair Net/Shoe Cover etc.

Analytical Equipment and Techniques

1. Scanning Electron Microscopy - Energy Dispersive X-ray

Spectroscopy (SEM-EDX)

2. Inductively Coupled Plasma - Mass Spectrometry (ICP-MS)

3. Attenuated Total Reflectance - Fourier Transform Infrared

Spectroscopy (ATR-FTIR)4. Fourier Transform Infrared Spectroscopy (FTIR)

5. Ion Chromatography (IC)

6. Liquid Particle Counter (LPC)

7. Total Organic Carbon (TOC)

8. Non Volatile Residue (NVR)

SEM/EDX

ICP-MS

ATR-FTIRFTIR

LPC IC

TOC

NVR

Do You Have These Problems?

High defective/failure trend in production line

Fiber or particle contamination in process

Unable to identify root cause or source of

contamination

How to eliminate or reduce fiber & particle

contamination

How We Can Help ?

F M SAMPLE COLLECTIONIdentify fiber and particle contamination from

customer’s work surface, tooling and components

during normal operations with existing cleaning

SOP’s

Collect samples of consumables used in current

production or suspected materials to assist in

identifying sources of fiber or particle

contamination

Contamination Analysis Flow

Sample

receiving and

background

information

Sample

Preparation

SEM/EDX

Analysis

ATR-FTIR

Analysis

Analysis

Report

Sample Receiving & Background Information

Check and review sample includes the

following information:

a) Sample identification

Using a permanent marker, mark the zip lock

bag to denote the sample’s name, sample

collection area/work surface or component

that has been cleaned

b) Number of sampleSample after collection at work

surface/tooling should be placed in an

individual cleaned zip lock bag

c) Analysis turnaround time (TAT)

Unless notified otherwise, all samples

received will be logged and processed for

standard turnaround times

(15 Business Days, sample submitted ≤ 10)

Ink is smeared and illegible

Place 2 samples after collection in same cleaned zip lock bag

Sample Preparation

b Touch adhesive carbon dot to particulates

Fiber/Particle Sampling a) Press a double-sided adhesive carbon

tape to the surface of an SEM sampling

stub

b) Touch adhesive carbon dot to

particulates

c) Visual inspection the sampled

particulates under 40X microscope

a

Sampled particulates

c

EDX spectrum of Organic Material

To identify unknown material, we usually begin by imaging and

sizing of unknown material using Scanning Electron

Microscopy in conjunction with Energy Dispersive X-Ray

Spectroscopy (SEM/EDX). EDX is an elemental analysis

technique to identify type of unknown material that it is

inorganic or organic material.

Tin (Sn)

Copper (Cu)

Tin (Sn) EDX

(elemental analysis)

Organic Material

EDX spectrum of Inorganic Material

Tin (Sn)

Background

Sample

Stainless Steel

(SST300s)

Stainless Steel

(SST300s)

SEM/EDX Analysis

ATR-FTIR Analysis

If it was identified as being organic, as its spectrum

contained only carbon (C) and Oxygen (O). We will do

further analysis by Fourier Transform Infrared (FTIR)

spectroscopy employing a Diamond Attenuated Total

Reflectance (Diamond-ATR) identified the unknown

organic material and possible source of the

contamination by compare the collected spectra with

the FTIR libraries.

EDX

(elemental analysis)

Organic Material

SEM image

SEM image of unknown Organic material

Unknown Material

Polyester Material

Result of a library search of the unknown material. It matches with

polyester material.

Analysis Report: Contamination on PolyCHECK Wiper after wiped Customer’s Tooling

Stainless Steel

(SST300s)

1

2

3

1

23

Cellulose fiber

Cellulose fiber

Stainless Steel

(SST300s)

FTIR analysis, fiber contaminations were identified as

cellulose base material.

Analysis Report: Fiber Contam on Foam Swab, collected from Customer’s Work Area

1

1

Cellulose fiber

FTIR analysis, fiber

contamination was identified

as cellulose base material.

Analysis Report:Consumable Used in Current Customer Production

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2

3

1

2

3

Aluminum Oxide @ 1000x magnification

Aluminum Oxide @ 1000x magnification Aluminum Oxide @ 700x magnification

Aluminum Oxide (Al/O)

Aluminum Oxide particles (Al/O)

on UltraFine Sponge

Analysis Report:Consumable Used in Supplier site

Polypropylene residue

FTIR analysis, Cotton swab Tip & handle were identified as

cellulose base material

SEM Image – Cellulose fibers from Cotton Swab (Tip)Cotton Swab (Tip)

Cotton Swab (Handle)

Sources of Contamination

People • Skin flakes, oil and fluid

• Cosmetics & perfume

• Clothing debris

(lint, fiber etc.)

• Hair

• Human activities

Tool Generated• Metal to metal

• Friction and wear

particle

• Lubricants and

emissions

• Vibrations

Facilities• Walls, Floors and ceilings

• Paint and coatings

• Air conditioning debris

• Furniture, table and chairs, fittings etc.

• Water supply, spills and leaks

• Static electricity generation

Indirect Materials• Packing material

• Stationery like paper and pen

• Cleaning chemical

• Plasticizers (outgases)

• Wiper, Tape, Swab, Sponge

• Mops and dusters

• Hair nets & shoe covers

Sources of Contamination (Continue)

Polycellulose• Polycellulose wiper

• Non-Woven wiper

• Cleanroom paper

• Cotton swab

• Label

Polyester• Polyester wiper

• CR bunny suit

• Garment

Polypropylene

• Shoe cover

• Hair Nets

• Medical tray

Metal Particles (Stainless Steel, Aluminum, Iron, etc.)

• Tool generated

(M2M, friction & wear particle)

• Scratch on working surface, table

Others• Hair - Human

• Talcum (MgSiO) - Powder/Environment

• Aluminum oxide - Sponge

Polystyrene/Polycarbonate

• Packaging material

Polydimethylsiloxane (Si/O)

• Silicone sealant

Human hair

Talcum

THANK YOUFor more information or to discuss an FM audit of your facility, please contact us at

www.foamtecintlwcc.com/contact

https://www.foamtecintlwcc.com/contact