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Background Statement for SEMI Draft Document 5469NEW STANDARD: SPECIFICATION OF COMMUNICATION INTERFACES FOR HIGH BRIGHTNESS LED MANUFACTURING EQUIPMENT (HB-LED ECI)Notice: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this Document.

Notice: Recipients of this Document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

Background

What is the problem being solved? This specification is the first step in standardizing the equipment communication interface in HB-LED manufacturing. The specification establishes standard technology to enable the factory to control and monitor the manufacturing equipment.

What is the history of this issue and ballot?This is the first ballot for equipment communication interfaces. The HB-LED Equipment Automation Task Software Working group developed this specification during 2012 and 2013.

Who will this affect? How? Why?The document affects HB-LED equipment manufacturers and HB-LED factories, and any other parties involved with equipment communication in HB-LED factories.

Is this a change to an existing solution, or, is it a new activity?This is a new activity and a new specification.

Revision Control

Version Changed By Comments

0.1 Karl-Heinz Buechel First Creation0.2 Brian Rubow Adding requirements for E5 & E37.10.3 Karl-Heinz Buechel Editing chapter 4, 5 & 60.4 Karl-Heinz Buechel Editing specification for E300.5 Karl-Heinz Buechel0.6 Karl-Heinz Buechel Adding results & agreements of TF Meeting

on Nov. 1st& 15th 20120.7 Karl-Heinz Buechel Addings remarks & comments of TF

Meeting on Feb. 12th 20130.8 Karl-Heinz Buechel Addings remarks & comments of TF

Meeting on Feb. 19th 20130.9 Karl-Heinz Buechel Addings remarks & comments of TF

Meeting on March. 5th 20130.10 Karl-Heinz Buechel0.11 Brian Rubow Remarks & comments of the Working Group

face to face meeting on April 4, 2013 at SEMI HQ in San Jose, CA.

0.12 Brian Rubow General Cleanup, in preparation for ballot submission.

1.0 Brian Rubow General clean-up, and changes based on working group member feedback. The ballot is considered feature complete, and is ready

for final reviews.1.2 Brian Rubow Changes based on working group member

feedback and group meeting from April 25, 2013.

1.3 Brian Rubow Final ballot based on working group feedback.

Review and Adjudication InformationTask Force Review Committee Adjudication

Group: HB-LED Equipment Automation Task Force, Software Working Group

North America HB-LED Committee

Date: Thursday, July 11, 2013 Thursday, July 11, 2013Time & Timezone: 9:00 AM to 2:30 PM, Pacific Time 3:00 PM to 5:00 PM, Pacific TimeLocation: San Francisco Marriott Marquis Hotel San Francisco Marriott Marquis HotelCity, State/Country: 55 Fourth Street

San Francisco, California 9410355 Fourth StreetSan Francisco, California 94103

Leader(s): Jeff Felipe (Entegris)Daniel Babbs (Brooks Automation)Brian Rubow (Cimetrix), WG leader

David Reid (Silian)Chris Moore (Semilab)Iain Black (Philips-Lumileds)Bill Quinn (WEQ Consulting)

Standards Staff: Paul Trio (SEMI NA)408.943.7041 /[email protected]

Paul Trio (SEMI NA)408.943.7041 / [email protected]

This meeting’s details are subject to change, and additional review sessions may be scheduled if necessary. Contact Standards staff for confirmation.

Telephone and web information will be distributed to interested parties as the meeting date approaches. If you will not be able to attend these meetings in person but would like to participate by telephone/web, please contact Standards staff.

DRAFTDocument Number:

Date: 5/8/23

SEMI Draft Document 5469NEW STANDARD: SPECIFICATION OF COMMUNICATION INTERFACES FOR HIGH BRIGHTNESS LED MANUFACTURING EQUIPMENT (HB-LED ECI)1 Purpose 1.1 The purpose of this standard is to define the equipment automation interface for communication and control of process, automation and metrology equipment used in HB-LED manufacturing. It intends to produce economic benefits for both manufacturers and equipment suppliers by identifying a subset of relevant functionalities out of the existing SEMI communications standards for the application in HB-LED manufacturing facilities. On one hand this standard should reduce the effort of manufacturers to integrate equipment in their IT factory automation system. On the other hand equipment suppliers could reduce their effort for developing and maintaining a variety of equipment communication interfaces. It is expected to provide a proven set of communication functionality to reduce both costs and time for ramp-up of new equipment in the manufacturing production environment.

1.2 The document references a collection of SEMI and other standards and should give guidance on how to apply them in the HB-LED manufacturing environment in order to establish a reliable and extensible communication framework for the IT integration of equipment.

2 Scope2.1 This specification for HB-LED equipment communication interface applies to all HB-LED manufacturing equipment including process, automation and metrology systems used in the Front-End and Back-End production area. However, it is not limited to these areas of application.

2.2 The scope of this standard is limited to the communication interface used to integrate equipment within factory automation systems.

2.3 This standard can be applied to single wafer equipment as well as batch equipment.

2.4 This standard intends to lay the foundation for a reliable and extensible IT integration framework for HB-LED manufacturing based on proven standards using a multi-layered approach. The standard references existing SEMI communication standards to realize these layers as much as possible. The resulting framework is referred to as HB-LED ECI

2.4.1 This standard defines a physical/data link layer based on Ethernet.

2.4.2 This standard utilizes SEMI E37/E37.1 for message transfer.

2.4.3 This standard defines a message and data item set based on SEMI E5.

2.4.4 This standard defines the behavior of HB-LED equipment communication interface based on SEMI E30.

2.5 The SEMI standards named in this Scope are used essentially in the same manner as in the Semiconductor industry. However, a small set of restrictions and new features have been defined to simplify their application in the HB-LED industry and thereby to improve the level of acceptance and consistency. This standard contains one subsection for each layer that describes the restrictions that apply for HB-LED manufacturing. Nevertheless, it should be easy to adjust interface implementation developed for semiconductor industry to fulfill these restrictions

NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.

3 Limitations3.1 This standard is not an all-inclusive list of applicable standards. Additional standards may be applicable and used as needed.

3.2 This standard is focused on the abilities of the equipment. How a host system uses the equipment communication interface is beyond the scope of this specification.

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

Page 1 Doc. jn l SEMI

Semiconductor Equipment and Materials International3081 Zanker RoadSan Jose, CA 95134-2127Phone: 408.943.6900, Fax: 408.943.7943


Date: 5/8/23

3.3 This standard does not intend to express requirements for data processing (e.g., computation of mean-values, etc.).

3.4 This standard does not specify the implementation of material management, process job management or control job management between equipment and a host system in the HB-LED industry. Such features will be outlined in an additional specification.

4 Referenced Standards and Documents4.1 SEMI Standards and Safety Guidelines

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services

SEMI E37.1 — High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS)

SEMI E40 — Standard for Processing Management

SEMI E87 — Specification for Carrier Management (CMS)

SEMI E94 — Specification for Control Job Management

SEMI E148 — Specification for Time Synchronization and Definition of the TS-Clock Object

4.2 IEEE Standards1

IEEE 802 — IEEE Standard for Local and Metropolitan Area Networks

4.3 ISO Standards2

ISO 8601 — Internet standard for date/time format

ISO/IEC 11578— Information Technology3

ISO 19005-1 — PDF/A-1

ISO 19005-2 — PDF/A-2

4.4 Other Documents

NTP Version 3 (RFC 1305) — Network Time Protocol4

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

5 TerminologyRefer to the SEMI Standards Compilation of Terms (COTs) for a list of the current Abbreviations, Acronyms, Definitions, and Symbols.

5.1 Abbreviations and Acronyms

5.1.1 HB-LED — High Brightness Light Emitting Diode

5.1.2 HB-LED ECI — HB-LED Equipment Communication Interface

5.1.3 GEM — Generic Model for Communications and Control of Manufacturing Equipment

5.1.4 HSMS — High Speed SECS Message Service

1 Institute of Electrical and Electronics Engineers, 3 Park Avenue, 17th Floor, New York, NY 10016-5997, USA; Telephone: 212.419.7900, Fax: 212.752.4929, http://www.ieee.org2 International Organization for Standardization, ISO Central Secretariat, 1 rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland; Telephone: 41.22.749.01.11, Fax: 41.22.733.34.30, http://www.iso.ch3 International Electrotechnical Commission, 3 rue de Varembé, Case Postale 131, CH-1211 Geneva 20, Switzerland; Telephone: 41.22.919.02.11, Fax: 41.22.919.03.00, http://www.iec.ch4Network Time Protocol (NTP); http://www.ntp.org




http://www.ntp.org/

http://www.iec.ch/

http://www.iso.ch/

http://www.ieee.org/


Date: 5/8/23

5.1.5 SECS — SEMI Equipment Communication Standard

5.2 Definitions

5.2.1 HB-LED ECI — The HB-LED Equipment Communication Interface is a SECS-II compliant interface. Messages are transmitted via an Ethernet network using HSMS protocol. The functionality is based on SEMI E30 with the restrictions and additions as defined in this document.

5.2.2 HB-LED Equipment — A manufacturing equipment that implements the HB-LED ECI Specification.

6 Conventions6.1 Requirements Identification

6.1.1 The following notation specifies the structure of requirement identifiers.

6.1.1.1 The following requirements prefix format shall be used at the beginning of the requirement text:

[HBxx.00-RQ-nnnnn-nn]

6.1.1.2 To mark the end of the requirement text the following suffix format must be used:

[/RQ]

6.1.2 Requirement IDs apply across the row (left to right) of a table unless otherwise specified.

Table 1 Requirement Identifiers

Format Notation Purpose

HBxx.00 SEMI Standards specification identifier. Examples: E087.00, E087.01, E134.00.RQ Indicates this is a requirement identifier.nnnnn Unique five digit number within this specification. 90000–99999 are reserved for use by SEMI.-nn Two-digit number that indicates version level of the requirement (-00 is used for the first version of a

requirement)./RQ Indicates the end of a requirement.

7 Summary of Practice7.1 Compliance

7.1.1 [HBxx.00-RQ-00001-00] In order to comply with this specification, HB-LED equipment shall implement each of the SEMI standards listed below as dictated in each respective section. All requirements in the listed standard are required except when explicitly excluded in the respective section or when conditional requirement cannot be applied to the equipment. [/RQ]

7.1.2 This specification references other SEMI standards. Some of the features or requirements of these referenced standards are not applicable to the HB-LED industry; therefore this specification identifies when specific requirements are not required. In some cases, additional requirements are also specified either to make implementations more consistent or to add new features essential to HB-LED manufacturing.

7.2 Implementation of Physical Layer

7.2.1 [HBxx.00-RQ-00002-00] The equipment shall provide an Ethernet (per IEEE 802®) port that allows the equipment to connect to the factory network. HB-LED equipment shall support state of the art communication data rates. The capabilities of the HB-LED ECI described in this specification shall be available through this port. [/RQ]

7.3 Implementation of HSMS

7.3.1 Details on how HB-LED equipment shall implement SEMI standards E37 and E37.1

7.3.1.1 [HBxx.00-RQ-00003-00] The equipment shall provide an implementation of the application layer compliant to SEMI E37.1 (HSMS-SS). [/RQ]





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7.4 Implementation of SECS-II

7.4.1 Details on how HB-LED equipment shall implement SEMI standard E5

7.4.1.1 [HBxx.00-RQ-00004-00] Messages and data items in the messages shall be based on SEMI E5. [/RQ] The SEMI E5 standard is essentially a library for use by other standards. Equipment are not required or expected to support all messages defined in SEMI E5. Instead only a subset of SEMI E5 messages is required as defined in other standards like this specification and E30.

7.4.1.2 [HBxx.00-RQ-00005-00] All SECS-II messages shall be sent as Single-Block Messages (See SEMI E5 section “Blocking Requirements”). [/RQ] Multi-Block Messages are for compatibility with the SECS-I standard but are inefficient when used with the HSMS standard.

7.4.1.3 [HBxx.00-RQ-00006-00] Equipment initiated inquire/grant/send/acknowledge conversations shall not be used (See SEMI E5 section “Types of Conversations”). Instead the inquire/grant/send/acknowledge conversations shall be replaced by send/acknowledge conversations where the inquire/grant portion of the conversation is skipped. [/RQ] The inquire/grant conversation is used for granting permission to send multi-block messages. For example, GEM uses an S6, F5/F6 exchange to precede multi-blocked S6, F11/F12 exchanges. Multi-block messages are inefficient when using E37.1 HSMS-SS.

7.4.1.4 [RQ] If the host sends an inquire/grant conversation and the corresponding send/acknowledge is supported, then equipment shall grant permission. [/RQ] Allow the host to use multi-block messages.

7.4.1.5 [HBxx.00-RQ-00007-00] SECS-II Message S1, F3 shall use the newer list structure (See SEMI E5 message S1, F3). [/RQ]



7.4.1.8 [HBxx.00-RQ-00010-00] SECS-II Messages shall use the allowed format listed below in table “Allowed Data Item Format” where applicable. [/RQ] These format restrictions make implementations more consistent and therefore easier to integrate with host communication solutions.

Table 2 E5 Allowed Data Item Format

E5 Data Item#1 Allowed Format(s)#2

ALID 54CEID 54CPNAME 20DATAID 54DATALENGTH 54DVID 54ECID 54PPBODY 10, 20PPID 20RCMD 20REPGSZ 54RPTID 54SMPLN 54TOTSMP 54TRID 54VID 54

#1 See E5 section 9.6 Table “Data Item Dictionary”.

#2 See E5 section 9.3.1 Table “Item Format Codes” and section 9.6 Table “Data Item Dictionary”.





Date: 5/8/23

7.4.1.9 [HBxx.00-RQ-00011-00] Custom SECS-II Messages shall not be used to implement HB-LED standard functionality. Only SECS-II Messages defined in SEMI E5 and SEMI E30 shall be used to support HB-LED standard features. [/RQ] For example, an S1,F13/F14 exchange and only an S1,F13/F14 exchange shall be used to establish communication.

7.5 Implementation of GEM

7.5.1 Details on how HB-LED equipment shall implement SEMI standard E30

7.5.1.1 [HBxx.00-RQ-00012-00] The equipment shall comply with the “Fundamental GEM Requirements” as defined in SEMI E30. [/RQ] Simple example Equipment Processing State Models are provided as Related Information at the end of this specification. HB-LED equipment are encouraged to implement a similarly simple Equipment Processing State Model in order to facilitate later adoption of the SEMI E40 and SEMI E94 standards.

7.5.1.2 [HBxx.00-RQ-00013-00] The equipment shall comply with the following “Additional Capabilities” as defined in SEMI E30:

Establish Communications

Dynamic Event Report Configuration

Variable Data Collection

Trace Data Collection

Status Data Collection

Alarm Management

Equipment Constants

Material Movement

Clock

Control (Host-Initiated). [/RQ]

7.5.1.3 The GEM Additional Capabilities which are not listed are not required for HB-LED ECI compliance. Communication

7.5.1.3.1 [HBxx.00-RQ-00014-00] Equipment-initiated heartbeat functionality shall be implemented using message S1,F1/F2. [/RQ]

7.5.1.3.2 The preferred heartbeat frequency is 0.1 Hertz.

7.5.1.4 Remote Control

7.5.1.4.1 [HBxx.00-RQ-00015-00] When the optional Remote Control functionality is supported, the PP-SELECT, START, STOP, PAUSE, RESUME, and ABORT remote commands specified in SEMI E30 shall be supported only when process job management & control job management are not implemented according to SEMI E40 & E94.[/RQ] SEMI E40 and E94 have remote control features that supersede these specific GEM remote commands.

7.5.1.4.2 The equipment can also support custom remote commands to implement equipment-specific control.

7.5.1.4.3 [HBxx.00-RQ-00016-00] Remote commands shall be transmitted only with Remote Command function S2,F41/F42 or the Enhanced Remote Command S2,F49/F50. [/RQ]

7.5.1.4.4 The use of CEPVAL of List type B as stated in SEMI E5 for S2,F49 is highly discouraged. If CEPVAL is a LIST, use type A with the first-level parameters list of the remote command structure as specified in SEMI E5.

7.5.1.5 Process Program Management

7.5.1.5.1 Although not required, it is highly encouraged that the equipment supports the SEMI E30 section “Additional Capability Process Program Management.”

7.5.1.5.2 [HBxx.00-RQ-00017-00] When the optional Process Program Management is supported, the equipment shall support either unformatted process programs or large unformatted process programs as defined in SEMI E30.





Date: 5/8/23

[/RQ] Table 3 below, “Process Program Management SECS-II Messages”, is provided for convenience to summarize the list of applicable SECS-II messages when either Process Management option is implemented.

Table 3 Process Program Management SECS-II Messages

Unformatted Process Programs Large Unformatted Process Programs

Hosts-Initiated Equipment-Initiated Hosts-Initiated Equipment-Initiated

S7,F1/F2S7,F3/F4S7,F5/F6S7,F17/F18S7,F19/F20

S7,F3/F4S7,F5/F6

S7,F17/F18S7,F19/F20S7,F37/F38S7,F41/42S13,F3/F4S13,F5/F6S13,F7/F8

S7,F27/F28S7,F29/F30S7,F37/F38S7,F41/42S13,F1/F2S13,F3/F4S13,F5/F6S13,F7/F8

7.5.1.5.3 Support for the SEMI E42 section “Recipes, SEMI E139 Recipe and Parameter Management,” SEMI E30 section “Formatted Process Programs,” and SEMI E30 section “Large Formatted Process Programs” are not required.

7.5.1.5.4 Process program parameters are name/value pairs used to override specific settings within a process program. The list of supported process program parameters is determined by the equipment supplier. In SEMI E40, they are part of process tuning; called recipe variables and recipe variable parameters.

7.5.1.5.4.1 [HBxx.00-RQ-00018-00] If SEMI E40 and process program parameters are supported, then the setting of process program parameters shall only be supported through the features defined in SEMI E40. [/RQ]

7.5.1.5.4.2 [HBxx.00-RQ-00019-00] If SEMI E40 is not supported and process program parameters are supported, then the process program parameters shall be specified as command parameters in the S2,F41 or S2,F49 message. The CPNAME data items shall contain the process program parameter names. The CPVAL data items shall contain the respective process program parameter values. [/RQ]

7.5.1.5.4.3 [HBxx.00-RQ-00020-00] If SEMI E40 is not supported and the setting of process program parameters is supported during process program selection, then the process program parameters shall be available with the PP-SELECT remote command as command parameters as defined in the SEMI E30 Remote Control feature. [/RQ]

7.5.1.5.4.4 [HBxx.00-RQ-00021-00] If SEMI E40 is not supported and the setting of process program parameters during process program execution is supported, then the equipment shall support the PP-UPDATE remote command. The process program parameters shall be available with the PP-UPDATE remote command as command parameters as defined in the SEMI E30 Remote Control feature. [/RQ] All process program parameters are not required to be supported both during process program selection and during process program execution.

7.5.1.5.4.5 [HBxx.00-RQ-00022-00] If process program parameters are supported, then the equipment shall support DVVAL “ProcessProgramParameterHistory” for the SEMI E30 Processing Completed and Processing Stopped collection events. [/RQ] See Table 6, “HB-LED ECI Variable Item List,” below for more information.

7.5.1.5.4.6 [HBxx.00-RQ-00023-00] If process program parameters are supported, then the equipment must document the process program parameter names, descriptions of the allowable process program parameter values and whether the process program parameters are available to be specified with PP-SELECT and PP-UPDATE remote commands. [/RQ] A process program parameter allowed with PP-SELECT is not required to be allowed with PP-UPDATE.

7.5.1.5.4.7 Table 4, “Process Program Paramater Example,” below illustrates how the values within a process program are overridden using process program parameters, initially with PP-SELECT and then later with PP-UPDATE.





Date: 5/8/23

Table 4 Process Program Parameter Example

Comments Effective values used by the equipment thereafter until processing is completed.

Param1 Param2 Param3

Process Program “PPA” 25 true 1.245

PP-SELECT selects “PPA” Param2=false 25 false 1.245

PP-UPDATE Param1=26, Param3=2.432 26 false 2.432

PP-UPDATE Param1=27 27 false 2.432

Processing completes.

Process Program “PPA” Note that the values in “PPA” are unchanged by the previous PP-SELECT and PP-UPDATE.

25 true 1.245

PP-SELECT selects “PPA” 25 true 1.245

PP-UPDATE Param1=21, Param3=1.667 21 true 1.667

7.5.1.6 Alarm Management

7.5.1.6.1 [HBxx.00-RQ-00024-00] One generic collection event “AlarmDetected” and one generic collection event “AlarmCleared” is required for all available alarms of the equipment. The equipment shall provide Data Variables for “AlarmID”, “AlarmText” and “AlarmCode” for both collection events. [/RQ] See Table 6, “HB-LED ECI Variable Item List,” below for more information.

7.5.1.6.2 [HBxx.00-RQ-00025-00]The generic collection events “AlarmDetected” and “AlarmCleared” shall not be sent if the collection events are enabled but the alarm itself is disabled. [/RQ]

7.5.1.6.3 The SEMI E30 “AlarmnDetected” and “AlarmnCleared” collection events for each individual alarm are not required. HB-LED equipment which provide the SEMI E30 “AlarmnDetected” and “AlarmnCleared” collection events for each individual alarm are acceptable in addition to the generic collection events “AlarmDetected” and “AlarmCleared”.

7.5.1.7 Material Movement

7.5.1.7.1 [HBxx.00-RQ-00026-00] The equipment shall provide a variable data item “PortID” associated with the Material Received and Material Removed collection events. [/RQ] See Table 6, “HB-LED ECI Variable Item List,” below for more information.

7.5.1.8 Clock

7.5.1.8.1 [HBxx.00-RQ-00027-00] HB-LED equipment shall use the SEMI E5 TimeFormat = 2 (ISO 8601:2004) only. The Time Zone Designator (TZD) shall be set to Z only. [/RQ] With this restriction, time stamping worldwide will use UTC. For example: 2006-11-05T13:15:30.500Z corresponds to November 5, 2006, 01:15:30.500 pm, UTC.

7.5.1.8.2 [HBxx.00-RQ-00028-00] The equipment shall support NTP version 3 for factory network components time synchronization. [/RQ] Note that this is in addition to supporting SECS-II messages S2,F31 and S2,F17.

7.5.1.8.3 [HBxx.00-RQ-00029-00] The time used by the equipment to communicate through the HB-LED ECI shall be synchronized if network time synchronization is enabled by the EC “UseTimeSync”. [/RQ] See Table 6, “HB-LED ECI Variable Item List,” below for more information.

7.5.1.8.4 [HBxx.00-RQ-00030-00] The equipment shall be responsible for time synchronization of all of its subsystems’ clocks. [/RQ] The mechanism by which subsystem synchronization is achieved is beyond the scope of this document.

7.5.1.9 SECS-II Message Subset

7.5.1.9.1 The equipment shall support a subset of the SECS-II messages defined in SEMI E30.





Date: 5/8/23

7.5.1.9.2 [HBxx.00-RQ-00031-00] The equipment shall support the SECS-II messages defined in SEMI E30, section “SECS-II Message Subset,” except those listed in Table 5, “Optional SECS-II Messages in SEMI E30” below and subject any specified conditions. [/RQ]

Table 5 Optional SECS-II Messages in SEMI E30

Stream, Function Name Comment

S2,F39/F40 Multi-Block Inquire/Grant See section “Implementation of SECS-II” in this specification.

S2,F43/F44 Reset Spooling Streams and Functions GEM Additional Capability Spooling is optional.

S2,F45/F46 Define Variable Limit Attributes GEM Additional Capability Limits Monitoring is optional.

S2,F47/F48 Variable Limit Attributes Request GEM Additional Capability Limits Monitoring is optional.

S2,F49/F50 Enhanced Remote Command See section “Remote Control”.S6,F5/F6 Multi-block Data Send Inquire/Grant See section “Implementation of

SECS-II” in this specification.S6,F23/F24 Request Spooled Data GEM Additional Capability

Spooling is optional.Stream 7 Messaging GEM Additional Capability Process

Program Management is optional. See section “Process Program Management” in this specification.

S7,F1/F2 Process Program Load Inquire/Grant See section “Implementation of SECS-II” in this specification.

S7,F23/F24 Formatted Process Program Send/Acknowledge See section “Process Program Management” in this specification.

S7,F25/F26 Formatted Process Program Request/Data See section “Process Program Management” in this specification.

S7,F29/F30 Process Program Verification Inquire/Grant See section “Implementation of SECS-II” in this specification.

S7,F39/F40 Large Formatted Process Program Send/Acknowledge See section “Process Program Management” in this specification.

S7,F43/F44 Large Formatted Process Program Request/acknowledge See section “Process Program Management” in this specification.

All Stream 10 messaging GEM Additional Capability Terminal Services is optional.

All Stream 13 messaging See section “Process Program Management” in this specification.

All Stream 14 messaging Support for Object Services is outside the scope of this document.



7.5.1.10 Variable Item List

7.5.1.10.1 [HBxx.00-RQ-00032-00] The following variable data items are required in addition to the Variable Item List in SEMI E30. [/RQ]





Date: 5/8/23

Table 6 HB-LED ECI Variable Item List

Variable Name Format Comment

DVVALsAlarmID 54 Same as ALID defined in SEMI E5 Data item dictionary.

AlarmCode 10 Same as ALCD defined in SEMI E5 Data item dictionary.AlarmText 20 Same as ALTX defined in SEMI E5 Data item dictionary.ProcessProgramParameterHistory 0 Structure

L, n L, 2 <TIME>, empty string at if specified with PPSELECT. Else the time when the PPUPDATE was implemented. <COMMANDPARAMETERS>Where n is the number of times process program parameters were accepted.

TIME shall be an empty string for command parameters specified with the PPSELECT remote command. Otherwise, TIME shall be formatted as defined in SEMI E5 and as configured by E5 TimeFormat. TIME shall reflect when the PPUPDATE command was accepted.

When the process program parameters are set using S2,F41, then COMMANDPARAMETERS shall have the following format:<L, m> L, 2 <CPNAME1> <CPVAL1> … L, 2 <CPNAMEm> <CPVALm>Where m is the number of specified process program parameters. CPNAME and CPVAL are as defined in SEMI E5.

When the process program parameters are set using S2,F49, then COMMANDPARAMETERS shall have the following format:<L, m> L, 2 <CPNAME1> <CEPVAL1> … L, 2 <CPNAMEm> <CEPVALm>Where m is the number of specified process program parameters. CPNAME and CEPVAL are as defined in SEMI E5.

PortID 51 PortID is defined SEMI E87. ECV’sUseTimeSync 11 UseTimeSync is defined in SEMI E148.





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7.6 Interface Documentation Requirements

7.6.1 Besides other criteria, the effort for equipment integration is highly dependent on an equipment supplier’s documentation quality. The following requirements are defined in addition to the SEMI E30, GEM documentation requirements.

7.6.2 Format

7.6.2.1 [HBxx.00-RQ-00033-00] The equipment supplier shall make ECI documentation available to the factory in PDF/A format. [/RQ] Any standard PDF/A version is acceptable.

7.6.2.2 [HBxx.00-RQ-00034-00] The ECI documentation shall allow for copy/paste actions. [/RQ]

7.6.2.3 [HBxx.00-RQ-00035-00] Variable Data Items, Equipment Constants, Alarms, Collection Events, including description and characteristics, shall be provided in separate, stand-alone electronic format. [/RQ] For example, XML or CSV files which can be parsed by a software application.

7.6.3 Content

7.6.3.1 [HBxx.00-RQ-00036-00] The ECI documentation shall document which data variable values (DVVALs) are valid for each collection event. [/RQ]

7.6.3.2 [HBxx.00-RQ-00037-00] The ECI documentation shall identify which versions of the standards are implemented; including SEMI E5, E30, E37, and HB-LED ECI. [/RQ]

7.6.3.3 [HBxx.00-RQ-00038-00] The ECI documentation shall include Compliance Statements from the other SEMI standards referenced in this specification, as required by each respective SEMI standard as well as the other documentation required by each SEMI standard. [/RQ] This includes a GEM Compliance Statement (SEMI E30, Table “GEM Compliance Statement”) and other SEMI E30 documentation requirements.





Date: 5/8/23

APPENDIX 1STATEMENT OF COMPLIANCENOTICE: The material in this Appendix is an official part of SEMI [designation number] and was approved by full letter ballot procedures on [A&R approval date].

A1-1 Statement of ComplianceA1-1.1 [HBxx.00-RQ-00039-00] An equipment supplier shall create a compliance document to summarize compliance to this specification including a completed copy of the Capability Requirements Table A1-1. [/RQ]

A1-2 Compliance Table A1-2.1 [HBxx.00-RQ-00041-00]For each requirement in the Capabilities Requirement table, the equipment supplier shall declare Compliance with the following values: C – Comply, NC – Not Comply or WC – Will Comply. [/RQ]

A1-2.2 [HBxx.00-RQ-00042-00]For each requirement with the Compliance declared as NC, an explanation is required as a footnote to the Capabilities Requirement table. [/RQ]

Table A1-1 Capability Requirements

Section Requirement ID Parent Requirement ID Condition/Selection Criteria Compliance(C/NC/WC)

Compliance

7.1 [HBxx.00-RQ-00001-00]

A1-1 HBxx.00-RQ-00039-00

A1-1 HBxx.00-RQ-00040-00

A1-1 HBxx.00-RQ-00041-00

A1-1 HBxx.00-RQ-00042-00

Implementation of Physical Layer

7.2 [HBxx.00-RQ-00002-00]

Implementation of HSMS

7.3 [HBxx.00-RQ-00003-00]

Implementation of SECS-II

7.4 [HBxx.00-RQ-00004-00]

7.4 [HBxx.00-RQ-00005-00]

7.4 [HBxx.00-RQ-00006-00]

7.4 [HBxx.00-RQ-00007-00]

7.4 [HBxx.00-RQ-00008-00]

7.4 [HBxx.00-RQ-00009-00]

7.4 [HBxx.00-RQ-00010-00]

7.4 [HBxx.00-RQ-00011-00]

Implementation of GEM

7.5 [HBxx.00-RQ-00012-00]

7.5 [HBxx.00-RQ-00013-00]





Date: 5/8/23

7.5 [HBxx.00-RQ-00014-00]

7.5 [HBxx.00-RQ-00015-00] Remote Control functionality is supported

7.5 [HBxx.00-RQ-00016-00] Remote Control functionality is supported

7.5 [HBxx.00-RQ-00017-00] Process Program Management is supported

7.5 [HBxx.00-RQ-00018-00] Process Program Parameters are supported.

7.5 [HBxx.00-RQ-00019-00] Process Program Parameters are supported. SEMI E40 is not supported.



7.5 [HBxx.00-RQ-00022-00] Process Program Parameters are supported.

7.5 [HBxx.00-RQ-00023-00]

7.5 [HBxx.00-RQ-00024-00]

7.5 [HBxx.00-RQ-00025-00]

7.5 [HBxx.00-RQ-00026-00]

7.5 [HBxx.00-RQ-00027-00]

7.5 [HBxx.00-RQ-00028-00]

7.5 [HBxx.00-RQ-00029-00]

7.5 [HBxx.00-RQ-00030-00]

7.5 [HBxx.00-RQ-00031-00]

7.5 [HBxx.00-RQ-00032-00]

Interface Documentation Requirements

7.6 [HBxx.00-RQ-00033-00]

7.6 [HBxx.00-RQ-00034-00]

7.6 [HBxx.00-RQ-00035-00]

7.6 [HBxx.00-RQ-00036-00]

7.6 [HBxx.00-RQ-00037-00]

7.6 [HBxx.00-RQ-00038-00]





Date: 5/8/23

RELATED INFORMATION 1 IMPLEMENTATION GUIDELINESNOTICE: This Related Information is not an official part of SEMI [designation number] and was derived from the work of the global [committee name] Technical Committee. This Related Information was approved for publication by full letter ballot procedures on [A&R approval date].

R1-1 Example Equipment Processing State ModelsR1-1.1 SEMI E30 requires all equipment to implement an Equipment Processing State Model. SEMI E30 also includes an example state model, but this state model can be difficult to coordinate with the SEMI E40 Process Job State Model. This related information includes two simplified state models which can be easily coordinated with SEMI E40. The first sample has only three states: INIT, IDLE, and PROCESSING.

Figure R1-1HB-LED Equipment Processing State Model Example 1

R1-1.2 The second sample adds an additional MAINTENANCE state which might be useful for some equipment.





Date: 5/8/23

Figure R1-2HB-LED Equipment Processing State Model Example 2

R1-2 Host Initiated Control State ChangesR1-2.1 The SEMI E30 standard specifies that the operator sets the LOCAL/REMOTE switch. Allowing the host to set the LOCAL/REMOTE switch might undermine the intentions of the SEMI E30 standard. Nevertheless, some factories require this functionality on equipment to facilitate setup.

R1-2.2 If an equipment implements remote commands that allow the host to set the equipment’s SEMI E30 GEM Control State LOCAL/REMOTE switch, then remote command names “GO-LOCAL” and “GO-REMOTE” are recommended. The purpose of this recommendation is to make implementations more consistent.

NOTICE: Semiconductor Equipment and Materials International (SEMI) makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice.

By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their own responsibility.




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