FCCL Web Coater (Roll to Roll)

8/9/2019 FCCL Web Coater (Roll to Roll)

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VTS Sputter Roll Coater


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VTS ’s Web/Roll Systems for the Converting Industry are individually

designed to meet each customer’s specific requirements.

The system presented in this brochure allos the user to develop

a process using state!of!the!art components and then go into

production.VTS ’s multi!process high vacuum Web/Roll Coating system is designed

to coat "olyimide #ilm$ %ylar$ foil and other thin plastic or metallicmaterials

stored in continuous roll form.

Typical process stations ithin the high vacuum chamber can include

sputter sources$ electron beam guns$ thermal sources$ substrate heat$

ion beam sources and "lasma "rocess &ar.

VTS ’s Sputter Roll Coater

Introduction


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'WC!(() Sputter Roll Coater

"roduct Information

Technology

&y 'WC!(()$ metals ill be deposited to one side of the film to form a multi! layer at high rate.

Ion beam source is equipped ith gas inletsystem for argon and reactive gases.

*quipment Technique%ulti!Chamber!System consisting of chambers forinding$ pretreatment$ coating$ intermediate pumping

+ne coating drum to cool the film duringthe coating process

Cooling/heating equipment for coating drum

"ump equipment for short pump don ithturbomolecular pumps

"re!treatment by Ion beam source

,p to four standard -C magnetrons for

metallic sputter processes

*lectronically controlled inding system ith driving motors

Technical -ata

Substrate %aterial "lastic film "*T$ "I$ etc.0

Roll diameter ma1. 2)mm

Width up to (() mm

Thic3ness 4( to

4)) #ilm Speed ).5 to ( %/min


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6inear Ion &eam Source

"roduct Information

0 10 20 30 40 50 60 70

0

10

20

30

40

50

60

70

C u r r e n t D e n s i t y (

m A / C m 2 )

Probe Position (Cm)

120 sccm

80 sccm

40 sccm

VTS ’s 6inear Ion &eam Source #eatures / &enefits

7o #ilaments or 8rids

Truly production Worthy!lo maintenance$no consumables$ lo cost

Reactive gas compatible ! I.e.5))9 o1ygen 6o temperature

+perates at %agnetron "ressures).5!(mTorr0

Si:e #ree

7o need for multiple poer supplies!hence easy integration

;igh *nergy

;igh Current -ensity

Stability of &eam ,niformity

Current -ensity -istribution "rofile


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-C magnetrons Sutter Source

"roduct Information

4 6 8 10 12 14 16 18 20 22

0!4

0!6

0!8

1!0

1!2

1!4

1!6

1!8

2!0

2!2

C u

" # i c $ n e s s (

)

Po%er (&%)

"oer vs -eposition Rate

"osition vs -eposition Profile

0 10 20 30 40 50 60

0

500

1000

1500

2000

2500

3000

3500

C u

" # i c $ n e s s (

)

Position (Cm)

Å

㎛

/ m i n

VTS ’s 6inear Sputter Source #eatures / &enefits

Truly production Worthy!lo maintenance$ noconsumables$ lo cost

6o temperature

+perates at %agnetron "ressures).2! (mTorr0

Si:e #ree

;igh "oer compatible

;igh -eposition Rate

Stability of Coating ,niformity


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PI film Tielayer DepositionPretreatment Electro-Plating Patterning

Web coating

PRODUCTION PROCESS OF FCC

Fine Pitch

"olyimide#ilm

Copper

VTS ’s Technical -ata for #CC6


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! "!"#

"!"$

"!"%

!

"!

&!

'!

(!

)!

#!

$!

%!

*!

+as C

+as ,

+as -

W e t t i n g a n

g l e (

)

Ion dose ( /cm2)

0 1016

1017

1018

40

50

60

70

80

'0

()s C

()s *

()s A

S u r f a c e E n e r g y

( m N / m )

Ion Dose ( /cm2 )

Wetting angle of polyimide ith various-oses by irradiated at ions

Surface energy of polyimide ith various-oses by irradiated at ions

Surface %odification of "olyimide film by ATEC ’s 6inear Ion &eam Source


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0 1016

1017

1018

0

20

40

60

80

W e t t i n g a n g l e .

θ /

Ion Dose .0cm&/


0!0

0!1

0!2

0!3

0!4

0!5

0!6

0!7

0!8

0!'

()s C

()s *

()s A

, 1 2 e s i o n s t r e n g t 2 . 3 g 0 c m

/

Wetting angle of polyimide ith different ioncurrent by irradiated at ions

'dhesion strength ith different gases

by irradiated at ions

6o Current -ensity

;igh Current -ensity

Surface %odification of "olyimide by ATEC ’s 6inear Ion &eam Source


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Schematic draing of the polymeric repeat unitof "%-'+-'.


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S'% -ata of modified polyimide film by Ion &eam Source

&y 8as ' > C

By Gas A

&y 8as C

Ra4 Film


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1+16 1+17

0!2

0!3

0!4

0!5

0!6

0!7

0!8

P e e , S t r e n - t #

( & - . / C m )

on Doses (Dose/Cm2)

i-# Current Density

o% Current Density

"eel strength ith various doses

by

irradiated at ions

1+16 1+17

0!2

0!3

0!4

0!5

0!6

0!7

0!8

P e e , S t r e n -

t #

( & - . / C m )

on Doses (Dose/Cm2)

s C

s A

"eel strength ith various

doses

by irradiated at ions

Surface %odification of "olyimide film by Ion Source


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=TS’s Technical -ata for #CC6

1+16 1+17

0!05

0!10

0!15

0!20

0!25

0!30

0!35

P e e , S t r e n - t #

( & - . / C m )

on Doses (Dose/Cm2)

Cu Thic3ness vs "eel Strength

㎏

f / ㎝

㎛0 2 4 6 8 10 12 14 16 18 20

0!0

0!2

0!4

0!6

0!8

1!0

1!2

P e e , S t r e n - t #

(

)

Cu "#ic$ness ( )

Curing Test 5() $ 5?2h0℃

"eel strength ith various doses

byirradiated at ions


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재 표

면

&y 8as ' > C

&y 8as C

Pee, Stren-t#

0

1!2

0!15

0!3

0!45

0!6

0!75

0!'

1!05

S

t r e

s

s

( $

-

. / c

m

)

0 15020 40 60 80 100 120 140

Stro$e (mm )

1

2

3

4

Pee, Stren-t#

0

1!2

0!15

0!3

0!45

0!6

0!75

0!'

1!05

S

t r e

s

s

( $

-

.

/ c

m

)

0 15020 40 60 80 100 120 140

Stro$e (mm )

1

2

3

Pee, Stren-t#

0

1!2

0!15

0!3

0!45

0!6

0!75

0!'

1!05

S

t r e

s

s

(

$

-

. / c

m

)

0 15020 40 60 80 100 120 140

Stro$e (mm)

1

2

3

Test Condition

Sample Width @ ㎜

Sample "osition @ %- C

"I Thic3ness @ 2

Cu Thic3ness @ A

"eeling mode @ verticalA)B0

"eeling Speed @ () ㎜ / min

%ean @ ).2) 3gf/cm

7ormal Temperature

%ean @ ). 2 3gf/cm

HCL Test

KOH Test

%ean @ ).A 3gf/cm

Chemical Test



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재 표

면 By Gas A

&y 8as ' > C &y 8as C

Conclusion

VTS ’s Web/Roll Systems @ State!of!the!art *quipment

VTS ’s 6inear Ion &eam Source @ ;igh Current -ensity Stability of &eam ,niformity Si:e #ree

VTS ’s 6inear -C %agnetron Sputter Source @ ;igh -eposition RateStability of Coating ,niformity

Si:e #ree

Surface %odification of "l by 8as C Ion @ ;igh Surface *nergy #ast Surface %odification ;igh "eel Strength Ion Source of ;igh Current -ensity @ ;igh Surface *nergy ;igh "eel Strength

Curing Test @ ).4 3gf/㎝

Chemical Test @ ).2 3gf/㎝

FCCL Web Coater (Roll to Roll)

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