Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and...
Transcript of Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and...
![Page 1: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/1.jpg)
Événement - date
Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias
Changjian Zhou1, Anshul Vyas2, Patrick Wilhite2, Phillip Wang3, Mansun Chan1,
and Cary Y. Yang2 1Hong Kong University of Science and Technology, Hong Kong
2Santa Clara University, Santa Clara, CA, USA 3Applied Materials Inc. Santa Clara, CA, USA
![Page 2: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/2.jpg)
Événement - date
2
Outline
Introduction CNT Via Test Structure Electrical Characterization Results and Discussion Summary
![Page 3: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/3.jpg)
Événement - date
3
Outline
Introduction CNT Via Test Structure Electrical Characterization Results and Discussion Summary
![Page 4: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/4.jpg)
Événement - date
4
New interconnect materials needed Current copper interconnect suffers
from electromigration at current density ~ 1 MA/cm2
Increase of resistivity due to width-dependent scattering
Source: ITRS 2011
![Page 5: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/5.jpg)
Événement - date
5
Nanocarbons
The first transistor
Intel CPU ~2000
~1960
~1947
![Page 6: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/6.jpg)
Événement - date
6
Nanocarbons as Interconnect Materials Physical properties of CNT: High current carrying capability > 107 A/cm2 (Cu ~ 106 A/cm2) Electromigration resistant High mobility and ballistic transport (6.45 KΩ/shell) Low resistance High thermal conductivity ~3000 W/K.m (Cu ~ 400 W/K.m)
![Page 7: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/7.jpg)
Événement - date
7
Objective and Approach Objective: To determine electrical characteristics of CNT on-chip via
interconnects as a potential replacement for Cu.
CNT Via Interconnect Analysis for Advanced Nodes
CNT array Dielectric fill
CNT array Dielectric fill
Sub-1000 nm vias Sub-150 nm Vias Individual CNTs
![Page 8: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/8.jpg)
Événement - date
8
Outline
Introduction CNT Via Test Structure Electrical Characterization Results and Discussion Summary
![Page 9: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/9.jpg)
Événement - date
9
Fabrication of Sub-1000 nm Vias
Deposit oxide and ground metal
Deposit oxide Deposit metal for pads
Patterning Vias Photoresist removal Via pad separation
![Page 10: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/10.jpg)
Événement - date
10
Fabrication of Sub-1000 nm Vias
Ni Electroplating CNT Growth
500 nm 500 nm
Dielectric Deposition and Polishing
SEM image after CNT growth SEM image after polishing
![Page 11: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/11.jpg)
Événement - date
11
Fabrication of Sub-150 nm Vias
Top-view and cross-sectional SEM image of 60 nm vias for CNT growth
S i
S iO 2C ra -S i/L T O
P R N i
(a ) V ia p a tte rn in g (b ) D ry e tc h in g a n d P R re m o v a l
(c ) C a ta ly s t d e p o s it io n a n d p o lis h in g
S i S i
wh
![Page 12: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/12.jpg)
Événement - date
12
Fabrication of Sub-150 nm Vias
![Page 13: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/13.jpg)
Événement - date
13
Fabrication of Sub-150 nm Vias Estimation of CNT areal density in via, DCNT
90 nm CNT via
~2.2×1011/cm2 ~1.7×1011/cm2
60 nm CNT via
![Page 14: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/14.jpg)
Événement - date
14
Fabrication for Individual CNT Probing
CNT grown on Ti/Si
After final polish
Si
Ti 80 nm
Growth
Si
Ti 80 nm
Epoxy encapsulation
Si
Ti 80 nm
After polish
2 µm
25 µm
1 µm
After encapsulation & partial polish
100 nm
200 nm
300 nm
![Page 15: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/15.jpg)
Événement - date
15
Outline
Introduction CNT Via Test Structure Electrical Characterization Results and Discussion Summary
![Page 16: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/16.jpg)
Événement - date
16
Measurement setup for Single CNT Via
Pt Si
probe probe
I + -
V
CNT array inside via
2 µm
In situ nanoprobing inside SEM Sub-1000nm CNT via
![Page 17: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/17.jpg)
Événement - date
17
Measurement setup for Single CNT Via In situ nanoprobing inside SEM Sub-150nm CNT via
Tip radius ≤ 50nm
Probing a single CNT Via
+
V
Cr SiO2
Si
I + -
![Page 18: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/18.jpg)
Événement - date
18
Outline
Introduction CNT Via Test Structure Electrical Characterization Results and Discussion Summary
![Page 19: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/19.jpg)
Événement - date
19
103 kΩ
1.4 kΩ
Electrical Characteristics of Sub-1000 nm Vias
![Page 20: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/20.jpg)
Événement - date
20
Electrical Characteristics of Sub-1000 nm Vias
![Page 21: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/21.jpg)
Événement - date
21
05
10152025303540
5 - 10 10 -15
15 -20
20 -25
25 -30
30 -35
35 -40
40 -45
45 -50
50-55 55-60 60-65 65-70 70-75
CN
T co
unt
CNT diameter (nm)
CNT diameter distribution
0.4um via
0.5um via
0.6um via
0.7um via
0.8um via
1 um via
CNT diameter distribution in Sub-1000 nm Vias
![Page 22: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/22.jpg)
Événement - date
22
1
10
100
1000
10000
0 200 400 600 800 1000 1200
Via
Resi
stan
ce/L
engt
h (Ω
/μm
)
Via width (nm)
Measured
Extrapolated
2.88 kΩ at 30 nm
Projected resistance from Sub-1000 nm Vias
![Page 23: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/23.jpg)
Événement - date
23
Electrical Characteristics of a 60 nm Via
![Page 24: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/24.jpg)
Événement - date
24
R = 21 kΩ R = 567 Ω
Before Current Stressing After Current Stressing
W-probe enlarges during probing
High-current annealing (~3.5 mA) improves probe contact
Electrical Characteristics of Single CNT
![Page 25: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/25.jpg)
Événement - date
25
Electrical Characteristics of Single CNT
Diameter of probed samples: ~50 nm
Ni/Ti
RC
![Page 26: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/26.jpg)
Événement - date
26
Further Consideration Metal-CNT Contact
Side Contact
End Contact
Chemical bonding at end contact – Saturated C-bonds – Conduction modes of graphitic
structure is unaffected – Interface with concentric walls
Van der Waals bonding at side contact – Larger interfacial separation – C-bonds remain unsaturated,
inhibiting conduction – Interface with outermost wall only
![Page 27: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/27.jpg)
Événement - date
27
Side and End Contacts
R ~ 700 Ω
Wang et al., Adv. Mater. 22, 5350 (2010)
R ~ 10 kΩ
(a)
(b)
![Page 28: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/28.jpg)
Événement - date
28
• I-V nonlinearity reduced by stress current • Interfacial gap remains large • Contact resistance ~ few kΩ
Contact improvement Joule Heating
Kitsuki et al, APL 92, 173110 (2008) Yamada et al, JAP 107, 044304 (2010)
![Page 29: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/29.jpg)
Événement - date
29
• Resistance with W-deposited contacts reduced significantly and independent of stress current
• Contact resistance minimized
Contact improvement Deposited Tungsten
Kitsuki et al, APL 92, 173110 (2008) Saito et al, APL 93, 102108 (2008)
![Page 30: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/30.jpg)
Événement - date
30
Total resistance reduced from 300 kΩ to 116 Ω
Kim et al, IEEE Trans Nanotech. 11, 1223 (2012)
EBID-C deposition at edges
Contact improvement EBID-C + Joule Heating
![Page 31: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/31.jpg)
Événement - date
31
Outline
Introduction CNT Via Test Structure Electrical Characterization Results and Discussion Summary
![Page 32: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/32.jpg)
Événement - date
32
CNT vias down to 60 nm width fabricated and characterized – Linear I-V characteristics for vias and individual CNTs – “Best” projected resistance for 30 nm CNT via ~ 5 x W via
resistance Ongoing efforts to decrease CNT diameter and increase CNT
packing density to reduce via resistance Additional contact engineering needed to reduce overall
resistance Further considerations on contact resistance reduction with
CNT growth process improvements
Summary
![Page 33: Fabrication and Characterization of Sub-100 nm Carbon ... · Événement - date Fabrication and Characterization of Sub-100 nm Carbon Nanotube Vias Changjian Zhou1, Anshul Vyas 2,](https://reader033.fdocuments.us/reader033/viewer/2022060211/5f04d2807e708231d40fe161/html5/thumbnails/33.jpg)
Événement - date
Thank You…
33