Eurocomp Elektronik GmbH - Menlo Micro · 2017. 11. 23. · 400V/2A RF Relay. Smart RF and Power...
Transcript of Eurocomp Elektronik GmbH - Menlo Micro · 2017. 11. 23. · 400V/2A RF Relay. Smart RF and Power...
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Menlo MicroIntroduction
October 2017
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Menlo Micro Proprietary & Confidential
Company Background & Management Team
Overview of Menlo Micro’s Technology & Differentiation
Reliability & Test Highlights
Packaging (TGV)
Key Differentiation; The Menlo Micro Advantage!
Applications & Markets
Menlo Micro Product & Solution Highlights
MRI
Industrial & Military Radio
High-Power RF Switching
Power Relays
Q&A and the “Bottom Line”
1
Topics
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Menlo Micro Proprietary & Confidential
Menlo Micro is a new startup based in Irvine, CA which is being spun out of General Electric’s Global Research Center
$40M in GE R&D since 2004, closed a $18.6M series A in Dec 2016
Focused on high performance RF and Power switching products, using GE’s proprietary Digital-Micro-Switch (DMS) technology
2
Company Background
+ =
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Menlo Microsystems Proprietary
Management Team
Russ GarciaCEO
• 30+ yrs semiconductors, exec management, startup, M&A experience• EVP Microsemi, CEO Wispry, CEO uNav, TI, Silicon Systems, Hughes
Chris GiovannielloCo-Founder, SVP Product Development & Marketing
• 20+ yrs semi & semi equip exp. in Sales, Marketing, & Bus. Dev.• VP GE Ventures, Sales/Service/ Biz. Dev. Applications. Teradyne
Chris KeimelCo-Founder, CTO
• 12+ yrs material science and MEMS process development• Senior Research Scientist - GE Global Research
Jeff BalounSVP Manufacturing Operations
• 25+ yrs semi manufacturing & operations, front-end & back-end• GM Deca Technologies, CEO Imbera, GM Unisem, ASAT, LSI
3
Lew BooreSVP Sales & Business Development
• 30+ yrs semi product development, marketing & sales• VP Silanna, Cavendish Kinetics, WiSpry, HP/ Agilent, M/A-COM
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Menlo Microsystems Proprietary
Ohmic contact switch with cantilever beam and electrostatic actuation
What is GE Digital-Micro-Switch Technology?A novel micro-mechanical switch architecture based on an ultra-reliable material set, incorporating new design and processing techniques
400V/2A RF Relay
Smart RF and Power relay systemsHigh-power, High-reliability
Over 10+ years of development, over 40 patent families and know-how covering materials & fabrication processes, as well
as system architecture, design, test
Gold
GE-0
GE-2
Beam lifetime comparison under accelerated test conditions
GE DMS technology can enable new, disruptive products:High-power, High-reliability SMART RELAY SYSTEMS
240V/10A AC/DC Relay
Beam
Substrate
Gate
Contact
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Menlo Microsystems Proprietary
5
The GE Approach
• GE approached MEMS reliability issues not as a semiconductor company, but with decades of experience in high-performance alloys
• GE’s breakthrough innovations in materials and processing enable true Product Development Platform:
• High-Reliability: Shipping in production to a 3B cycles spec
• High-power capable: Opens up new markets, larger TAM
• Simple design, <12 mask layers: Can scale with volume to very low cost
• Simple design, wide design space: Shorter design cycles = more products
9mm x 9mm
1mm x 1.5mm
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Menlo Microsystems Proprietary
How is Menlo Unique in the Contact Switch Industry?
Omron• Target market: Consumer and Industrial RF• Status: Stopped in mid-2014 - reliability/size/cost
ADI • Target market: Industrial RF• Status: Active – shipping to ATE market
DelfMEMS(Startup)
• Target market: Consumer RF• Status: Stopped operations in Jan 2016 – reliability/size/cost
Over $100M spent by industry in the past 6-7 years going after reliable, cost-effective MEMS ohmic switch technology
NXP-Epcos • Target market: Consumer RF and Power• Status: Stopped program in ~2012 - reliability
Radant(Startup)
• Target market: Aerospace/Defense and Industrial RF• Status: Stopped operations in May 2015 – reliability/manufac.
RFMD• Target market: Consumer RF• Status: Stopped program in ~2011 - reliability
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Menlo Microsystems Proprietary
Extensive Reliability Experience and Testing at GE
Continuous reliability testing for accelerated life evaluation:
• Multiple parallel automated testers capable of 20 die evaluation
• 3 ovens in operation at 3 different acceleration temperatures
• >10,000 die evaluated
Very stable resistance <0.4Ω for over 12 Billion cycles
(MM3100)
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Menlo Microsystems Proprietary
Extensive reliability experience and testing at GE
Weibull data shows zero early life failures and confidence to 3B operations, with hot-switching at 0dBm
ReliaSoft Weibull++ 7 - www.ReliaSoft.com
Probability - Weibull
Cycles
Un
reli
ab
ilit
y,
F(
t)
100.000 1.000E+111000.000 10000.000 100000.000 1000000.000 1.000E+7 1.000E+8 1.000E+9 1.000E+100.100
0.500
1.000
5.000
10.000
50.000
90.000
99.000
0.100
Probability-Weibull
Data 1Weibull-3PMLE SRM MED FMF=15/S=43
Unadj PointsUnadjusted L ine
Marco AimiGE4/11/201310:56:45 AM
3 Billion cycles
20 Billion cycles
(MM7100)
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Menlo Microsystems Proprietary
Key Differentiation
Core Metallurgy and Process Know-how and IP
Power Performance: Very High Power Handling
Quality & ReliabilityRF Performance:
Linearity & Insertion Loss
• Mature & already shipping in high-value GE systems
• Billions of switch events• Simple Manufacturing…Cost!
• 50W+ designs• Metal on glass processing
superior RF specs
• DC and AC, 200V+• Superior thermal performance
• Auto Charging, Home control, Industrial Automation
Horizontal Product Applications
• Wireless Infrastructure: RRH, Small Cell, Wireless Backhaul
• Military/First Responder Radio and Radio Networks
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Menlo Microsystems Proprietary
10
Digital-Micro-Switch ApplicationsStep function improvements in power handling and reliability
1W 10W 100W 1kW 10kW 100kW 10MW 100MW
Other ohmic MEMS
Mobile Communications
Relays
Residential/Comm/Indus. Breakers
Base Station Comm.
Test Equipment
DC Bus Arch. / DC Protection
Power Supply Protection
PIN Diode & GaAs Apps.• Smaller size, higher power, higher
frequency for RF switching
• Fast-switching, arc-free protection for Power switching
1MW
Benefits of micromechanical contact switch brought to many more applications
3.5kW
Digital-Micro-Switch(single die)
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Menlo Microsystems Proprietary
11
Horizontal Market Breadth
Power IoT:Home Auto, EV Charging,
UPS, Solar, Auto…
AC&DC Power Switch
GE, Tesla, Nest, Honeywell….
$10B+ TAM(2019)
Vertical:
Target Customers:
Product:
Medical
Reed Relay
GE internal & Med Equip Suppliers
$525M TAM(2019)
Present
Revenue
• GE Qualified• Expansion to
other MR coil manufacturers
Mil Radio& Wireless
Infrastructure
RF Switch & Filter ProductsNetwork Equip
Mil Radio Suppliers
$1.4B TAM(2019)
Initial Products
Focus
• RRH Filters• Small Cell Filters• Mil Radio Filters
Mobile, IoT
Process
Mobile RFSuppliers
$1B TAM(2019)
License
Model
• Initial partners validated and in discussions
Strong Early Base:
Revenue and Customer Traction
Future
Power RF Switch
RF Switch
ATE,Cable, Telecom, Defense
Initial Products
Focus
• General Purpose RF Switch products
$750M TAM(2019)
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Menlo Microsystems Proprietary
Menlo Product Portfolio – 2017/2018
MM7100 MM7110 MM3100
MM5120 Smart Power Relay Prototype
• Target Markets: A/D, Industrial• Target Applications: Tunable UHF/VHF/HF radios,
general purpose EM relay replacement, WPT
• 6mm x 6mm LGA • 6 channels, 25W/channel• DC to 3GHz• Embedded controller
• 9mm x 9mm LCC• WL bonded• 500V/1A <128MHz
• 6mm x 14mm SIP• 1000V/1A <128MHz
• Integrated driver, passives
• Target Markets: MRI, general purpose HV switch
• Target Market: Industrial, Test & Measurement
• 3” x 2” proto board• 200V/10A DC power relay• Integrated current sense• No heat sink
• Target Market: A/D, Test & Measurement, Wireless Infra.• Target Applications: Switched filters, switch matrix, high
power RF switching, EM replacement
• 5mm x 5mm QFN• SPDT, 25W/channel• DC-12GHz• Embedded controller with Vboost• Bare-die option to 18GHz+
HV Switch Products RF Tuning Products
Power Relay ProductsRF Switching Products
Samples: availableProduction: Q3 2017
Samples: availableProduction: Q3 2018
Samples: availableProduction: Q3 2018
Proto Samples: Q3 2017First Product: 2019
Samples: Q4 2017Production: Q4 2018
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High Voltage Switch Products
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Menlo Microsystems Proprietary
GE Healthcare MRI
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Menlo Microsystems Proprietary
The MRI Problem Statement
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Menlo Microsystems Proprietary
DMS Products for MRI – MM7100“Replacing the PIN diode”
Key SpecsGE
MEMS
Blocking Impedance
(Real)~100KΩ
Blocking Impedance
(Reactive)~300fF
Standoff Voltage400V DC
Resistance<0.3 Ω
Peak Current >2A
Cycle 3B+
Switching Time <4 uS (on)
<1uS (off)
SPST 400V/2A AC/DC Relay
High Voltage RF Relay
2014-2015 2016-2017MM7100
Hermetic LCC9x9mm ceramic package
WL Glass Capin 9x9mm package
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Menlo Microsystems Proprietary
Signa Pioneer 3.0TEngineering Execution
Digital coils, no manual tuning of PIN-diode networksFaster, cheaper NPI
Patient/Customer BenefitsLighter, thinner and silent coilsFrom 40W to 0.4W per coil: heat free
Higher reliability, lower down time
Enabling TechnologyPath to “wireless coils”Completely new system architectures
Cost ReductionOver $10K reduction in COGS per system
Digital MRI Coils – Already in production!
2600 MEMS switches per system
HV/MR Components:MR SPST MM7100 MM7110 (SIP)
2016 2018+ Aux coils2017
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RF Tuning Products
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Menlo Microsystems Proprietary
DMS Products for Tuning/Filtering – MM3100Replacing PIN diodes & EM Relays for impedance matching
Six individually controlled, reconfigurable “loss-less” contact switches in a low-profile SMT package
2016/2017MM7100
WL Glass Capin 9x9mm package
WL Glass Capin 6x6mm BGA
2017/2018MM3100
© 2017 Menlo Microsystems, Inc. – All Rights Reserved – www.menlomicro.com Page 1 Doc.Rev MM3100.1.1 21-Jun-2017
MM3100 – 6 Channel SPST Digital-Micro-Switch Preliminary Product Overview Features:
DC to > 3 GHz Frequency Range 25 Watt (CW), 200W (Pulsed) Max Power Handling Low On-State Insertion Loss < 0.3 dB @ 3 GHz Low On-State Resistance < 0.75 Ω 25dB Isolation @ 3 GHz Maximum voltage (AC or DC): +200 Volts on RF Input < 10us On/Off Switching Time High Reliability > 3 Billion Switching Operations Integrated SPI Bus Gate Control Hermetic 6mm x 6mm x 1.3mm LGA Package
Applications: Functional Diagram:
High-Power Tunable Resonators and Filters Broadband Power Amplifier Impedance Matching Electronically Steerable Antennas and Phase Shifters Automated Test and Measurement Systems
Markets:
Defense and Aerospace Scientific and Medical Wireless Infrastructure
Description:
The MM3100 device is a high power 6-channel SPST micro-mechanical switch offered by Menlo Micro, which has developed a new Digital-Micro-Switch (DMS) fabrication process, and applied it to DC and wideband RF/microwave switch applications. This innovative DMS technology enables robust and highly reliable switches capable of > 25 watts. Each switch provides ultra low on-state insertion loss and high off-state isolation from DC to > 3 GHz with greater than 3 billion switching cycles at elevated +85ºC temperatures. Each switch is individually controlled by a standard Serial Peripheral Interface (SPI) synchronous bus. An external +5 VDC logic supply and high voltage +77 VDC bias source is required for operation of the internal switch driver. 6-bit, high-voltage tuning
capability in small SMT package
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Menlo Microsystems Proprietary
Applications: Mil-Radio & Commercial Infrastructure
Electronic phase shifter
• High cost ($500+ for phase shifters & filters)
• Weight: wind load for smaller towers
• Space: for multi-band support
• Reliability: due to mechanical components
• Lack of flexibility: for future wireless bands
Objective:• Replace bulky, heavy mechanical fixtures with
lightweight, electronic, tunable versions based on high-power MEMS components
Tunable filter
Pain Points:
Macro & Small Cell
RF Tuning/Switching:
MM3100SIP
• TGV shrink, mmWave• SP4T, SPxT, embedded passives• RF Subsystem-on-a-chip
Future Directions:MM5120SIP, die
“Rethink” the architecture w/low cost, reliable, high-power RF microsystemsImprove on key RF specs & miniaturize critical subsystems for Infrastructure
Broadband PA Impedance matching
2017 2018 2018+
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Menlo Microsystems Proprietary
(48) high reliability cantilever switches in a 3.6mm x 4mm die
Six channels each capable of carrying 25W RF or > 1A/channel DC
Scalable Design Platform
MM3100
w/integrated controller and 6mm x 6mm package
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Menlo Microsystems Proprietary
RF Tunable Filter – Reduce Size, Weight & Power for RF MM3100 Replacing PIN Diodes in Tunable Radios
Potential to enable high power handling (5W-20W) in a 2W form factor
UHF interstage (2W) UHF interstage (20W)
Benefits:
Max input: <2W 20W+ •10x increase in power handling
Size: 200+ components (2-sided board) 50% area for complex pin-diode switch biasing
~25 componentsNo pin-diodes, single-sided board, simple bias scheme
•80%+ reduction in components•75% reduction in board size•Reduced need for thermal management, smaller box
Insertion Loss: > 3dB @ 500MHz < 2dB @ 500MHz •33% reduction in RF losses, less heat, longer battery life
Power Consumption:
1.2W <100mW •90% reduction in DC losses, less heat, longer battery life
Linearity: IP3: ~40dBm IP3: ~85dBm •Reduced distortion, higher data rates
Ex. Mil Radio
Key metrics:• Fast frequency tuning• Lightweight• Long battery life• Reliability
With PIN Diode With DMS Technology
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Menlo Microsystems Proprietary
23
MM3100 – High Power Handling
Robust materials, simple design and fab, scalable architecture enable a high power RF MEMS switch
• A MEMS switch capable of handling 25W RF (CW) @ 3GHz
• Stable insertion loss across entire power range
• Peak (10% duty cycle) RF power capable to 200W/channel
• Power handling increases as frequency decreases, > 70W CW
0
20
40
60
80
100
120
140
0 20 40 60 80 100
QFN
Pa
ckag
eT
em
pera
ture
(⁰C
)
AverageInputPower(Watts)
CWInputPowervsQFNTemperature
2.45GHz
1.90GHz
900MHz
300MHz
100MHz
20MHz
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Menlo Microsystems Proprietary
Stable Insertion Loss with Hot-Switching
• MM3100 device hot-switched at +15dBm
for >1B cycles and still functional
• Insertion loss change of +/-0.010dB
measured over ALL hot switch cycles before test stopped
• Hot switch stability and operations are a result of Ruthenium contact material and hermetic package
• Insertion loss at 1 GHz <0.3dB
Cold Switched
(<0dBm)
Hot Switched
(+15dBm)
Typical
Mechanical relay
1-10M operations <<1-10M operations
Typical
Menlo DMS relay
3-10B operations1000x to 3000x
improvement
>1B operations5000x to 10,000x
improvement!
Change in insertion loss over 1B hot-switch cycles
dB
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RF Switching Products
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Menlo Microsystems Proprietary
Ron*Coff comparison of DMS Technology
Peregrine
• Menlo DMS requires only stack of 1 for 200V voltage handling• MM3100 RonCoff = 40fs, <10fs with TGV for 2018
• Glass is ultimate substrate platform for high RF linearity, >90dBm IP3
~10fs
Most of SOI switch industry
• For SOI, RonCoff is measured for single transistor
• Actual switch product uses transistor stacks (up to 20!) for up to 80V
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Menlo Microsystems Proprietary
Next Generation High-Power RF SwitchingMM5120 SPDT in QFN package w/integrated driver (3D simulations)
-35
-30
-25
-20
-15
-10
-5
0
0 2 4 6 8 10 12 14
retu
rnlo
ss(
dB
)
Frequency(GHz)
RETURNLOSS
-1
-0.9
-0.8
-0.7
-0.6
-0.5
-0.4
-0.3
-0.2
-0.1
0
0 2 4 6 8 10 12 14
inse
rtio
nl
oss
(dB
)
Frequency(GHz)
INSERTIONLOSS
-45
-40
-35
-30
-25
-20
-15
-10
-5
0
0 2 4 6 8 10 12 14
isol
atio
n(
dB)
Frequency(GHz)
ISOLATION
MM5120 to be offered in:• 5x5 QFN (w/integrated 70V Vboost)• Hermetic, WL capped bare-die
Functional Block Diagram
CTRL
RFC
RF2RF1
5mm
5m
m
(QFN) (QFN)
(QFN)
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Menlo Microsystems Proprietary
Menlo DMS Technology vs. RF Electromechanical
MM5120SPDT
EM (SMT) SPDT
EM (coax)SPDT DMS Benefits
Power Handling 25W (CW)>150W (pulsed) 50W 50W-100W
Hot Switch <0dBm No No Hot-switch capable
Isolation >25dB @ 6GHz 25dB 70dB
Linearity (IP3) >85dBm 62dBm
DC Capable Yes Yes Yes
Max Frequency 12GHz 6GHz 18GHz
Insertion Loss 0.35dB @ 6GHz 0.8dB @ 6GHz 0.2dB @ 6GHz
Power Consumption <25pA 140mW 420mA @ 12V > 1,000,000x lower power
Reliability >3B operations 10M 1-5M 1000x to 3000x more reliable
Switching speed <10us 3-5ms 10-20ms 1000x faster
Size/Ch. Density 25mm3
5 x 5 x 1 mm QFN1280mm3
16 x 8 x 10 mm SMT30,000mm3
50 x 50 x 12 mm COAX >95% reduction in VOLUME
Offering the power handling and RF/electrical performance of an RF EM relay with the size, weight, reliability, and speed of solid-state
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Menlo Microsystems Proprietary
MM5120 Applications
Test & Measurement
• General purpose RF muxing• Digital step attenuator• Replacing mechanical relays which
are big, slow, and short lifetime
Mil Radio
• General purpose RF muxing• Switched filter banks• Replacing mechanical relays which
are big, slow, and short lifetime
Set-Top-Box
• Docsis3.1• High-performance RF switch• Ultra-high linearity• Replacing SOI devices
Satellite/Cable Matrix
• Huge (2048x2048) switch matrix• Replacing low density mechanical
relays which take up racks of board space
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Menlo Microsystems Proprietary
MM5120 Applications
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Menlo Microsystems Proprietary
MM5120 Applications
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Menlo Microsystems Proprietary
From DC to mmWave
Initial simulations of DMS unit cell show mmWave performance is achievable
3D simulation of Menlo DMS unit cell switch
WL Glass Cap w/TGV CSP
MM3100 WL Glass Cap
in 6x6mm QFN
Advances in packaging will enable DMS products to achieve much higher BW
Everything gets better from RF view:• Lower parasitics• Lower bulk resistance/IL• Improved thermals, better power
handling
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Menlo Microsystems Proprietary
Advanced Materials Low-Cost Packaging Supply Chain
1Business Name.
Corning Restricted ..
Precision Glass Solutions 1.
Corning Restricted ..
Through Glass Via Solutions
1
Precision glass with precision holes for semiconductor packaging
Product Applications
End Market Applications
Corning Value Proposition
Why Glass
• RFFE (Radio Frequency Front End)
• Ohmic MEMS Switch
• Interposer
• Consumer Electronics
• Ability to deliver glass at desired thickness level – from 100μm to 700μm - enables shorter line length
and smaller packaging
• Low insertion loss material- savings in battery power / cost
• Pristine surface quality- enables fine line spacing
• Glass Strength - reliability maintained after
downstream processing
• Capability- available in wafer or panel
format
- design according to customer pattern
• Industry partnerships
.
© 2017 Corning Incorporated ..
2Business Name.
Corning Restricted ..
Precision Glass Solutions 2.
Corning Restricted ..
TGV formation and metallization
Corning and the industry have made significant progress
Glass size:Wafers: 100mm=>300mmPanels: à508mm*508mm
Thickness: 100-700µmPositional Accuracy: <+/-5µmPitch: Minimum 2x hole dia.Hole Diameter: 100µmà10µm
Throughput:Improved 10x in 2 yearsHigh-volume (10X) by 2018
Supply chain:Several global companies investing in glass cutting, handling and metallization equipment
SUPERIORHOLEQUALITYPrecision Holes
.
© 2017 Corning Incorporated ..
WL Glass Cap w/TGV
1x1mm CSP
MM7100
MEMS in hermetic9x9mm package
WL Glass Capin 6x6mm QFN
MM3100
2018/2019
WL Glass Cap w/TGVer)
4x4mm SIP
2016 2017
Corning + Menlo partnership on TGV packaging enables the scale-up of a low cost supply chain
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Power IoT Products
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Menlo Microsystems Proprietary
Digital-Micro-Switch Advantages for Switching & Protection
Fast, Reliable, Small & Arc-free switching
•Technology scalable from relays to protection•Voltage and current scalable, 1000V+ and 50A+•>100M operations (without zero crossing)•Arc free switching on demand, < 10us switching•Relays <1cm3 / Breakers <10cm3
•AC & DC equivalent architecture•Passively cooled, no heat sink required• Integrated current sensing & over-current protection•1st Type 3 protection technology (resettable)
Disruptive protection and relay technology in chip scale format
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Menlo Microsystems Proprietary
10X more industrial internet machines than people in the world, waiting to be connected
3
Smart Power Relays with DMS technology can enable the Industrial IoT vision
Industrial
IoT
Brilliant Power
Brilliant Factory
Logistics Optimization
Factory Optimization
Smart Grid
ConnectedMachines
Hospital Optimization
Real-timeNetworkPlanning
Brilliant Hospital
Brilliant RailYard
Shipment Visibility
© GeneralElectricCompany,2014. AllRightsReserved.
Intelligent Medical Devices
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Menlo Microsystems Proprietary
Key Technologies:Electromechanical, SS
Market Segments:Industrial
Markets - Power Relay
Key Technologies:SSR, Electromagnetic,
Reed
Market Segments:Industrial, Telecom, Automotive,
Home Automation
AC/DC Printed Circuit Board
Relays
Key Technologies:Electromechanical, SS
Market Segments:UPS, PV, Wind, EV Charging
AC/DC Low Voltage
Contactors
Key Technologies:Electromechanical, SS
Market Segments:Residential, Industrial
Mini-Circuit-Breaker & RSD
(<100A)
AC/DC Electronic Control Relays
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Menlo Microsystems Proprietary
Power Relay – Size, Weight & Power for Industrial IoT“Smart Power Relay” Replacing SSR and EM Relay
Menlo DMS Technology SS DC
RelayEM Relay
Benefits:Size: < 6mm x 40mm x 25mm
6,000 mm3 / channel
(no heat sink)
45mm x 57mm x 22mm
56,430 mm3 / channel(w/o heat sink)
44mm x 35mm x 35mm
53,900 mm3 / channel
•85% reduction in volume
•90% reduction in weight
•No heavy heat sink
•Higher density possible
Turn on time: <20us <100us 30ms •5x faster than SSR
•>1000x faster than EMR
Power Consumption:
10mW <60mW 1.5W •80% reduction from SSR
•150x reduction from EMR
Lifetime: 10B operations, decades of life
>10B operations, decades of life
100k operations •Lifetime similar to SS
technology
Features: Current Sense and over-current protection
•Extra features for
monitoring & protection
Ratings: 200V/10A DC 200V/10A DC 240V/10A AC •Scalable to higher V/I
3” x 5”
40mm x 25mm SMT
Low losses & power handling of EMR with speed, size, cost, and reliability of SS
Home, Auto, Battery, Industrial, UPS, Solar,
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Menlo Microsystems Proprietary
DMS Power Relay Prototype (Rev0)
MEMS
Driver
Q1MEMS
Switch
IS IQ1
ILOAD
Q1 Gate
Control
P1
P2
Vg1
C1
C2
On-Off
Signal
Power
Circuits
MEMS Relay
I sense
Isolation
Power
On-Off
Parallel Voltage Limiting Circuit
Voltage and current: 200V / 10A
On resistance: < 30mΩ
Over current protection: 15A
Operating frequency: Min 10KHz
Isolation voltage: 2,500Vac (higher if needed)
Control voltage and current: 5V / 1mA
Package: SMT LGA:40mm x 25mm x 3mm
Key Features:• Much lower on resistance (~30mΩ vs. ~200mΩ for SSR)
• Isolation voltage of 2,500Vac (higher if needed)
• Over current protection (for higher reliability)
• 10x lower control current (~1mA versus ~10mA)
• 10x higher operating frequency (>10KHz versus 1KHz)
• Current sensing information available at control side
• Surface mount component, no heat sink needed
• No de-rating up to 85C
Target specs
39
*Over 20 granted patents & applications around system-level, MEMS-based industrial relay & breaker designs
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Menlo Microsystems Proprietary
Temperature vs. Current load
5A 7.5A 10A 11A
MEMS#14 37.9 51.8 71.9 79.9
MEMS#15 35.1 45.6 61 67.4
MEMS#16 39.9 56.2 79.5 89.3
0
10
20
30
40
50
60
70
80
90
100
Tem
per
atu
re (
deg
ree)
Temperature of each MEMS
High current handling capable, and scalable, no heat sink needed
40
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Menlo Microsystems Proprietary
40mm
25mm
Multi-Chip-Module surface mount SIP• 2-4 DMS switches• 3-4 active ICs• <10 passives
• Ability to shrink form factor significantly with advanced packaging
DMS Power Relay – Integration Strategy
With advanced packaging (TGV) and simple integration, DMS technology can create disruptive industrial relay and controls products
2017 2018-2019
41
DMS Power Relay Proto EVK
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Menlo Micro Proprietary & Confidential
Menlo provides proactive support at all stages of design
Data Sheets & Application Notes
Evaluation Kits (EVKs) provide the Customer with first-level product validation and working metrics
Menlo Models provide a direct link between the device design and systems design
ADS/ S-parameters
Corporate device & systems design engineering support
Schematic capture & layout analysis
Design review
42
Menlo Micro Technical Support
Menlo Micro is focused on supporting each stage of Customer design & manufacturing
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Menlo Micro Proprietary & Confidential
Menlo Micro’s “roots run deep” as a Legacy of GE Innovation & Reliability
Menlo’s Management Team has the experience & history of success to support & grow our targeted Customers
Menlo’s PROVEN key differentiation enables small size & high performance within our targeted markets & applications
• Medical
• Power RF Switch for Mil Radio, Space & Industrial Applications
• Power IoT
Menlo is SHIPPING in VOLUME !
We are focused on a select-few (Strategic) Customers
How can we support YOU?
43
The “Bottom Line”
THANK YOU!
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www.menlomicro.com