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Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAGJune, 2016 Brooks® SLA58xx/SLAMfxx EtherCAT®

EtherCAT® Supplemental Manual for Brooks®

SLA58xx and SLAMf SeriesMass Flow Controllers and Meters

Brooks® SLA5851 Serieswith EtherCAT® Communications

Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng

Part Number: 541B208AAGJune, 2016Brooks® SLA58xx/SLAMfxx EtherCAT®


Dear Customer,

We recommend that you read this manual in its entirety as this will enable efficient and proper use of theEtherCAT® thermal mass flow controllers and meters. Should you require any additional information concerning theEtherCAT thermal mass flow controllers and meters, please feel free to contact your local Brooks Sales and ServiceOffice; see back cover for contact information, or visit us on the web at www.BrooksInstrument.com. We appreciatethis opportunity to service your fluid measurement and control requirements, and trust that we will be able to provideyou with further assistance in future.

Yours sincerely,

Brooks Instrument



THIS PAGE WASINTENTIONALLY

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ContentsInstallation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAG

June, 2016 Brooks® SLA58xx/SLAMfxx EtherCAT®

Paragraph PageNumber Number

Section 1 General Information1.1 Introduction ................................................................................................................................... 1-1

Section 2 Definition of Terms2.1 Definition of Terms ........................................................................................................................ 2-1

Section 3 Before Starting3 Before Starting ............................................................................................................................... 3-13.1 Background & Assumptions ........................................................................................................... 3-13.2 Numbers ........................................................................................................................................ 3-1

Section 4 Quick Start4 Quick Start .................................................................................................................................... 4-14.1 Master Hardware ............................................................................................................................ 4-14.2 Physical Interfaces ........................................................................................................................ 4-14.2.1 Power Supply and Analog I/O ........................................................................................................ 4-14.2.2 RUN and MOD LEDs ..................................................................................................................... 4-34.2.3 EtherCAT MFC Slave Hardware ..................................................................................................... 4-34.3 EtherCAT Theory ............................................................................................................................ 4-44.4 Frames (EtherCAT vs Ethernet) ..................................................................................................... 4-44.5 Speed ............................................................................................................................................ 4-44.6 EtherCAT Examples ...................................................................................................................... 4-54.7 EtherCAT Explained ....................................................................................................................... 4-7

Section 5 Slave Configuration5.1 Introduction .................................................................................................................................... 5-15.2 Outputs (Master Side) .................................................................................................................... 5-15.3 Inputs (Master Side) ...................................................................................................................... 5-25.4 COE Online Attributes.................................................................................................................... 5-35.4.1 Device Attributes ............................................................................................................................ 5-35.4.2 Flow Sensor ................................................................................................................................... 5-45.4.2.1 Flow Sensor Zero Adjust ................................................................................................................ 5-55.4.2.2 Flow Sensor Status ........................................................................................................................ 5-55.4.3 Temperature Sensor ....................................................................................................................... 5-65.4.3.1 Temperature Sensor Status ........................................................................................................... 5-75.4.4 Setpoint Controller ......................................................................................................................... 5-85.4.4.1 Setpoint Controller Status .............................................................................................................. 5-95.4.5 Valve Actuator Attributes ................................................................................................................ 5-95.4.6 Service Transfer Attributes ............................................................................................................ 5-105.4.7 Calibration Object Attributes ......................................................................................................... 5-105.4.8 Exceptions ................................................................................................................................... 5-115.4.8.1 Alarm- and Warning Details .......................................................................................................... 5-115.4.8.2 Exception Status .......................................................................................................................... 5-125.4.9 PDC (Product Description Code): I/O and Model Code ................................................................. 5-125.4.10 Tables ........................................................................................................................................... 5-13

Section 6 TwinCAT® Master6 Beckhoff Automation: TwinCAT® (A PC Master Option) .................................................................. 6-16.1 Establishing a PC Ethernet Master (TwinCAT) ............................................................................... 6-16.1.2 AUTO SETUP - PC Ethernet Master (TwinCAT) ............................................................................. 6-16.2 MANUAL SETUP - PC Ethernet Master (TwinCAT) ........................................................................ 6-36.3 COE Online Attributes - MAking Changes (Beckhoff Automation: TwinCAT) ................................... 6-4

Warranty, Local Sales/Service Contact Information ...................................................................... Back Cover

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Contents Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng

Part Number: 541B208AAG

June, 2016Brooks® SLA58xx/SLAMfxx EtherCAT®

Figure FigureNumber Number

4-1 EtherCAT Top Cover ....................................................................................................................... 4-14-2 M8 Male Device Connector Pin Layout, Pin Side View .................................................................. 4-24-3 M8 Female Mating Cable ............................................................................................................... 4-24-4 M8 Female Mating Cable Connector Pin Layout ............................................................................ 4-2

5-1 Output PDOs ................................................................................................................................. 5-15-2 Input PDOs .................................................................................................................................... 5-25-3 Device Attributes ............................................................................................................................ 5-35-4 Flow Sensor Attributes ................................................................................................................... 5-45-5 Flow Sensor Zero Adjust Attribute .................................................................................................. 5-55-6 Flow Sensor Status Attributes ....................................................................................................... 5-55-7 Temperature Sensor Attributes ....................................................................................................... 5-65-8 Temperature Sensor Status Attributes ............................................................................................ 5-75-9 Setpoint Controller Attributes ......................................................................................................... 5-85-10 Setpoint Controller Status Attribute ................................................................................................ 5-95-11 Valve Actuator Attributes ................................................................................................................ 5-95-12 Valve Actuator Status Attributes .................................................................................................... 5-105-13 Service Transfer Attributes ............................................................................................................ 5-105-14 Calibration Object Attributes ......................................................................................................... 5-10

6-1 AUTO SETUP - PC Ethernet Master, Scanning for Compatible Devices ........................................ 6-16-2 AUTO SETUP - PC Ethernet Master, I/O Devices Found ............................................................... 6-16-3 AUTO SETUP - Pop-Up Screens ................................................................................................... 6-26-4 AUTO SETUP - Proper Communications: Master and Slave (Beckhoff Automation: TwinCAT) ....... 6-26-5 MANUAL SETUP - PC Ethernet Master, Scanning for Compatible Devices ................................... 6-36-6 MANUAL SETUP - Pop-Up Screen ................................................................................................ 6-36-7 COE Online: Changing the Active Gas Page (and other devices) ................................................... 6-46-8 COE Attributes - Pop-Up Screen ................................................................................................... 6-4

Table TableNumber Number

4-1 Pin Labeling of M8 Male Device and Female Mating Cable Connector ........................................... 4-24-2 Wire Labeling of M8 Female Mating Cable Connector .................................................................... 4-34-3 M8 Female Mating Cable Part Numbers ........................................................................................ 4-34-4 MOD LED Specification ................................................................................................................. 4-3

5-1 Valve Override Values (vdOverride) ................................................................................................ 5-135-2 Flow Data Units (fmUnits) ............................................................................................................. 5-135-3 Temperature Data Units (tmUnits) ................................................................................................. 5-135-4 Setpoint Control Mode (fcControlMode)......................................................................................... 5-135-5 Valve Drive Data Units (vdUnits) .................................................................................................... 5-13

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Section 1 IntroductionInstallation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAG


1.1 Introduction

Many applications of Flow Controllers/Meters are moving to increase theuse of automation. Automation comes in many forms: PLC’s (ProgrammableLogic Controllers, such as the Siemens S7 300/4000), DCS’s (DistributedControl Systems, such as Emerson’s Digital V), PC based solutions(National Instruments Labview TM), and Ethernet based field buses. Digitalcommunications from these varied systems and the devices they measureand control, are a very effective means of not only accomplishing moreeffective and rapid system integration, but also providing greatly improvedsystem diagnostics and maintainability. EtherCAT is an Ethernet basedcommunication system and is known for its high cycle time and costefficient cabling and master application solutions. Brooks Instrument nowintroduces the EtherCAT interface on its SLA Enhanced Series platform.

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Section 1 Introduction Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng




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Section 2 Definition of TermsInstallation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAG


2.1 Definition of Terms

Abbreviation DescriptionByte A Byte refers to 8 consecutive bits.CoE CANOpen over EtherCATCRC Checksum

Cycle A cycle is defined as the process of sending a command, waiting for aresponse, and processing it in order to be ready to send a new command.

EEPROM Electrically Erasable Programmable Read Only Memory.ESC EtherCAT Slave ControllerESI EtherCAT Slave Information file. (Device description in XML format)EtherCAT Ethernet for Control and Automation Technology

Frame The transportation unit in a network, also known as a packet. (Contains aHeader followed by the data to be sent).

Header The Header is part of the Frame and contains all protocol definedconstructs for addressing, size, etc.

LSB Least Significant Bit

MAC Media Access Control is responsible for address checking and is most oftendone in the hardware of a NIC.

Master A Master is a unit which controls the Slaves, feeding them commands andreceiving status reports in exchange.

MFC/MFM Mass Flow Controller / Mass Flow MeterMSB Most Significant Bit

MTUMaximum Transmission Unit. The maximum payload that a standardEthernet Frame can hold. The MTU is set at 1500 bytes (Not consideringtheHeader and Checksum).

NIC Network Interface Controller. A hardware component that connects acomputer to a network.

OSI ModelA standardized representation for how a communication system can beorganized. (e.g., a protocol stack) The model is divided into layers, eachresponsible for a part of the communication.

PDO Process Data ObjectPDU Protocol Data Unit. A Slave commandRO Read OnlyRT Real time. A system that adheres to strict timing demands.RW Read / WriteSDO Service Data Object

SII Slave Information Interface. Data stored on an EEPROM in the Slave,containing information about it and its operation.

Slave A Slave is a unit (node) on the EtherCAT network (e.g., an MFC). The Slaveis connected to a Master.

Stack A synonym for the implementation of the layers of a protocol. (e.g., aMaster)

Topology The way a network (Master & Slaves) is connected. The overall layout.(e.g., Star, Tree, Line Topology)

WO Write Only

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Section 2 Definition of Terms Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng




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Section 3 Before StartingInstallation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAG


3 Before Starting

3.1 Background & Assumptions

This manual is a supplement to the Brooks SLA Enhanced Seriesinstallation and operation manual. It is assumed that the owner of thisEtherCAT MFC/MFM is thoroughly familiar with the theory and operation ofthis device. If not, it is recommended that the owner read the installation andoperation manual first before continuing with this supplement.This manual assumes basic knowledge and understanding of EtherCAT (itstopology and its method of logically accessing the data or parameters withinthis device). This manual is not intended to be a replacement to theEtherCAT specifications. It is recommended but not required, for thepurposes of this manual, that the user obtains a copy of the EtherCATspecifications (www.ethercat.org).This manual does not make any assumptions about any particularmanufacturer of equipment or custom software used by the user tocommunicate with the Brooks device, but assumes that the user hasthorough understanding of such equipment and any configuration software.Application Notes and FAQ’s are available at the Brooks Instrument website (www.BrooksInstrument.com).

3.2 Numbers

Numeric values used throughout this manual will be clearly denoted as tothe base numeric system it represents. All hexadecimal numbers (base 16)will be prefixed with a 0x, like “0xA4”. All binary numbers (base 2) will besuffixed with a b, like “1001b”. All other numbers not annotated this way willbe assumed decimal (base 10).

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Section 3 Before Starting Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng




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Section 4 Quick StartInstallation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAG


4 Quick Start

This section assumes that the owner of the Digital Series device has a fullyoperational and trouble-free communications network with appropriate powersupplies. This section also assumes that an EtherCAT master application isconnected to the network capable of PDO and mailbox data communication.Both types of data communication modes are supported by theBrooks SLA 5800 ‘E’ Series EtherCAT device

4.1 Master Hardware

Various companies provide EtherCAT master applications, e.g. TwinCATfrom Beckoff, or offer EtherCAT master stacks to develop a masterapplication, e.g. Acontis. A P.C. can be used to run most EtherCAT masterapplications but needs dedicated EtherCAT hardware to support the highcycle times and kernel mode operations of the master applications, seewww.beckoff.com. Screen dumps of master applications used in this manualare taken from the EtherCAT Configurator tool or TwinCAT 3® applicationsfrom Beckoff Inc.

4.2 Physical Interfaces

The available physical interfaces on the EtherCAT device are listed below:• 5 pin M8 threaded male connector for power and Analog I/O, indicated by pwr.• In and Out ports with RJ-45 connectors.• 2.5mm female jack for RS485 diagnostic port indicated by ‘DIAG’, refer to

the SLA 5800 Series installation and operation manual for more details.

4.2.1 Power Supply and Analog I/O

Power needs to be supplied via the M8 connector. This connector alsoprovides access to analog I/O signals, see Table 4-1.

Figure 4-1 EtherCAT Top Cover

SLA58xx Top Cover SLAMfxx Top Cover

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Section 4 Quick Start Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng



Figure 4-3 M8 Female Mating Cable

Pin Label Function at Remote Connector

P_COM Power Supply Common

+VPWR Positive Power Supply Voltage

V_AUX_OUT Flow Output 0-5VAGND Analog I/O CommonV_AUX_IN Auxiliary Input 0-5/10V for Future Use

Table 4-1 Pin Labeling of M8 Male Device and Female Mating Cable Connector

Figure 4-2 M8 Male Device Connector Pin Layout, Pin Side View

Figure 4-4 Female Mating Cable Connector Pin Layout

Mating Side Female Cable Connector

M8 mating cables can be purchased as a second line item, details given below.

SLA58xx

SLAMfxxSLA58xx

4-3



Wire Color Wire Label Function at Remote Connector

Blue P_COM Power Supply CommonBrown +VPWR Positive Power Supply VoltageBlack V_AUX_OUT Flow Output 0-5VWhite AGND Analog I/O CommonGrey V_AUX_IN Auxiliary Input 0-5/10V for Future Use

Table 4-2 Wire Labeling of M8 Female Mating Cable Connector

Supplier Part Number Description

Brooks 124X049AAA M8 Mating Cable 2mInstrument 124X050AAA M8 Mating Cable 5m

124Z170AAA ECAT to DB15 Male

Table 4-3 M8 Female Mating Cable Part Numbers

Flash Code Description

Flashing The device is in the Self-Test mode.Red/GreenSolid Green All Self-Tests have passed. No faults have been detected.

Flashing Red A recovering alarm has been detected.

Flashing Green A recovering warning has been detected.Solid Red An unrecoverable fault has occured.

Table 4-4 MOD LED Specification

4.2.2 RUN and MOD LED's

The MOD LED indicates that the device is supplied sufficiently with power.The MOD LED will indicate the following:

4.2.3 EtherCAT MFC Slave Hardware

The main parts of the EtherCAT MFC are:• Standard Ethernet Physical Layer Components• EtherCAT Slave Controller (ESC) and EEPROM (ESC configuration dataand application specific data)• For intelligent slaves with an application controller: Host controller

4-4




4.3 EtherCAT Theory

Ethernet for Control and Automation Technology

• Uses standard Ethernet hardware, Cat 5 cabling, and Network InterfaceCards (NIC).

• Streamlines Ethernet communication at the hardware level.• Data processing on Slave devices is handled “on-the-fly” via FPGA or

ASIC, minimizing latency.• Initial setup and configuration is required.

4.4 Frames (EtherCAT vs Ethernet)

Ethernet Header:• Ether type 0x08A4 specifies EtherCAT

EtherCAT Header:• Data Length: 11bits• Reserved: 1bit• Protocol type: 4bits (0x01 indicates CoE/Can over EtherCAT)

EtherCAT Data:• 46 – 1496 bytes

Working Counter:• 2 Bytes

CRC (Checksum):• 4 Bytes

Ethernet Frame

14 bytes 46 1500 bytes 4 bytes

EtherCAT Frame

14 bytes 2 bytes 46 1496 bytes 2 bytes 4 bytes

4.5 Speed

• The EtherCAT protocol reduces the addressing overhead by letting aMaster communicate with all Slaves using a single frame, instead of oneframe per device.

• This One Frame holds messages to any or all slaves on the network.

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4.6 EtherCAT Examples

Header

Analogy: Fast Train.

• “Train” (EtherCAT Frame) does not stop.

• Even when watching “Train” through narrow window one sees the entire “Train”

• “Car 27” (Sub-Telegram) has variable length. (46-1496 bytes)

• One can “extract” or “insert” single “persons” (Bits) or entire “groups”(Bytes) – even multiple groups per train… This is done without the trainever having to stop!

• An EtherCAT Master initially maps out the location and addresses of all ofthe slaves.

• The single EtherCAT Frame (the train) has instructions loaded on-board forsome or all of the slaves.

• Only the instructions that are specifically addressed to a specific slave aredelivered to that slave.

• So, for example, if there is a specific instruction on-board the EtherCATFrame for a slave (node) with the Station ID, then only that slave with thataddress, will receive that specific instruction. The slave (node) will ignore allinstructions on the EtherCAT frame Except for those instructions that arespecifically addressed to it.

4-6




Another Example of the EtherCAT process...

• Each cubicle is an EtherCAT slave containing an engineer (a SLA58xx).

• Each engineer is told where to sit by its hardware address (Station ID).

• The Engineer is assigned specific tasks (by SDO’s).

• The Boss (Master) identifies each engineer by first and last name, whatthey look like, and where exactly they are sitting.

• The Boss is the EtherCAT Master, sending instructions (PDO’s) out to theengineers each morning and picking up their work at the end of the day.

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4.7 EtherCAT Explained

1. EtherCAT Communication• Each slave on the network has a unique address, set by hardware.• Master/Slave configuration with the EtherCAT Master sending and

requesting data from the Slave.• Data not addressed to a particular slave are forwarded along to the

network.• Minimal processing time can provide cycle update rates of up to 32kHz.• Network physical layout is limited only by the allowable lengths of CAT5

Ethernet cable, up to 100m.• Increased noise immunity due to reliance on Ethernet physicalcomponents.

2. SDO’s and PDO’sData is moved along an EtherCAT network using two protocols: SDO’s and PDO’s

SDO: Service Data Object• SDO’s can be sent at any time… before, after or during real time operation

of the network but require additional communication overhead.• As a result, SDO usage is typically only used for Network SetupCommands.

PDO: Process Data Object• PDO’s contain the raw operational data with minimal overhead and thus

are used for real time processes, like motion and I/O control.• PDO’s can only be used once they have been mapped using SDO’s.• Mapping sets up which byte in each PDO goes to which memory address

on the slave.

3. EtherCAT Master• Can be software and or hardware configured to assemble, send and

receive EtherCAT datagrams.• Requires only standard Ethernet physical layer components for

communication.• Facilitates coordination between EtherCAT slaves, writing and receiving

data from each slave in an EtherCAT frame.• In motion control applications, the relevant data sent to the drives are

profiling data.• The data requested are position and input status.

4. EtherCAT Slave• Reads and processes profiling data.• Can be configured for multiple modes of operation.• All slaves contain specific spaces in memory where data can be written• These spaces are called Objects… The entire memory space is called the

Object Dictionary.• Each Object has its own address, specified as an index/sub index.

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5. SDO vs PDD Summary

SDO PDO

Transfer Confirmation No Transfer Confirmation

Client/Server Model Peer to peer Model

Device Configuration, PDO Mapping High priority transfer of small amounts of Data.

Can be sent at any time Can only be used after configuration using SDO’s

Significant communication overhead No additional protocol overhead.

6. The EtherCAT Slave State Machine

STATE Allowed Communication

INIT No User Communication

Pre OP SDO Communication Only

Safe OP SDO, PDO Communication AllowedOutput PDO Info ignored

OP SDO & PDO Communication Allowed

X607A X6060 X6040

MASTER (PC) PDO EXCHANGE EXAMPLE SLAVE (MFC)

X6041 X6062 X6061 X60FD

Incoming PDOLocation Function

X607A Target Setpoint

X6060 Mode of Operation

X6040 Control Word

Outgoing PDOLocation Function

X6041 Status word

X6062 Setpoint Demand Value

X6061 Mode of Operation

X6064 Setpoint Actual Value

X60FD Digital Input Status

5-1

Section 5 Slave ConfigurationInstallation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAG


Figure 5-1 Output PDOs

5.2 Outputs (Master Side)

The request message, sent from master to slave, consists of the fieldsindicated in Figure 5-1, these fields will be described in the sections below.

5.1 Introduction

Based on the information provided by the EtherCAT Slave Information File(ESI, device description in XML format) and/or the EEPROM, masterapplications are able to configure the EtherCAT networkFor the EtherCAT network configuration of the SLA 5800 Series devices, thefollowing ESI file is provided on the Brooks Instrument website.(www.BrooksInstrument.com):• ‘Brooks SLA Enh.xml’ – SLA5800 Series Mass Flow Controller/Meter

Output PDO Data Units DescriptionFlow Controller Setpoint(Real) Specified by Setpoint Controller

Data UnitsSetpoint specified in theselected Data Units

Actuator Override vdOverrideTable 5 1 Valve Override Values(vdOverride)

Valve Override

Pressure ControllerSetpoint(Real)

Specified by Setpoint ControllerData Units

Setpoint specified in theselected Data Units

Act Inst ControllerSetpoint(Real)

TBD TBD

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Section 5 Slave Configuration Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng



Figure 5-2 Input PDOs

5.3 Inputs (Master Side)

Input PDO Data Units DescriptionSensor AI MF (Flow, Real) Specified by Flow Sensor Data

UnitsFlow specified in Flow SensorData Units

Temperature (Real) Specified by TemperatureSensor Data Units

Temperature specified inTemperature Sensor Data Units

Actuator Drive Value (Real) % Valve drive valueFlow Controller Setpoint (Real) Specified by Setpoint Controller

Data UnitsSetpoint specified in SetpointController Data Units

Sensor AI MF Flow Totalizer cm Flow totalizer valueActuator Override vdOverride

Table 5 1 Valve Override Values(vdOverride)

Valve Override

Pressure (Real) Specified by Pressure SensorData Units

Pressure specified in PressureSensor Data Units

Pres Controller Setpoint (Real) Specified by Pressure ControllerData Units

Pressure specified in PressureController Data Units

Input PDO Data Units DescriptionActive Instance Setpoint (Real) TBD TBDException Status Bit Mask Summary of Alarm and Warning

detailAlarm Detail Bit Mask AlarmsWarning Detail Bit Mask Warnings

5-3



Figure 5-3 Device Attributes

5.4 COE Online Attributes

5.4.1 Device Attributes

5-4




5.4.2 Flow Sensor

Figure 5-4 Flow Sensor Attributes

Flow sensor attributes Data Units DescriptionAlarmEnable Enable (1)

Disable (0)Enable/Disable the high and lowflow Alarm

WarningEnable Enable (1)Disable (0)

Enable/Disable the high and lowflow Warning

Alarm Trip Point High To be specified in selected flowdata units

Flow alarm high limit

Alarm Trip Point Low To be specified in selected flowdata units

Flow alarm low limit

Warning Trip Point High To be specified in selected flowdata units

Flow warning high limit

Warning Trip Point Low To be specified in selected flowdata units

Flow warning low limit

Data Type Real (202) Data type is fixed to RealData Units fmUnits

Table 5 2 Flow Data Units(fmUnits)

Flow Data Units

Alarm Settling Time Time:ms Time in milliseconds that thealarm condition needs to bepresent before an alarm israised

Warning Settling Time Time:ms Time in milliseconds that thewarning condition needs to bepresent before an warning israised

Reset Flow Totalizer 0 Writing the value 0 to thisattribute will reset the flowtotalizer

5-5



Figure 5-5 Flow Sensor Zero Adjust Attribute

Figure 5-6 Flow Sensor Status Attributes

5.4.2.1 Flow Sensor Zero Adjust

5.4.2.2 Flow Sensor Status

Service Transfer Attribute Data Units DescriptionPerform Zero 1 The Flow Sensor can be zero

adjusted by writing a 1 to thisattribute. Refer to theinstruction manual for properinstructions

Flow sensor status attributes Data Units DescriptionStatus

B00000001 (0x01)B00000010 (0x02)B00000100 (0x04)B00001000 (0x08)

Flow sensor status bit maskindicating high or low flowalarms and warningsHigh Flow AlarmLow Flow AlarmHigh Flow WarningLow Flow Warning

Zeroing Status 01

0 = Idle1 = Zero Adjust in Process

5-6




Figure 5-7 Temperature Sensor Attributes

5.4.3 Temperature Sensor

Temperature sensor attributes Data Units DescriptionTemperature AlarmEnable Enable (1)

Disable (0)Enable/Disable the high and lowtemperature Alarm

Temperature WarningEnable Enable (1)Disable (0)

Enable/Disable the high and lowtemperature Warning

Alarm Trip Point High To be specified in selectedTemperature data units

Temperature alarm high limit

Alarm Trip Point Low To be specified in selectedTemperature data units

Temperature alarm low limit

Warning Trip Point High To be specified in selectedTemperature data units

Temperature warning high limit

Warning Trip Point Low To be specified in selectedTemperature data units

Temperature warning low limit

Data Type Real (202) Data type is fixed to RealData Units Table 5 3 Temperature Data

Units(tmUnits)

Temperature Data Units

Alarm Settling Time Time:ms Time in milliseconds that thealarm condition needs to bepresent before an alarm israised

Warning Settling Time Time:ms Time in milliseconds that thewarning condition needs to bepresent before an warning israised

5-7



Figure 5-8 Temperature Sensor Status Attribute

5.4.3.1 Temperature Sensor Status

Temperature sensor statusattributes

Data Units Description

Status

b00000001 (0x01)b00000010 (0x02)b00000100 (0x04)b00001000 (0x08)

Temperature sensor status bitmask indicating high or low flowalarms and warningsHigh Temperature AlarmLow Temperature AlarmHigh Temperature WarningLow Temperature Warning

5-8




5.4.4 Setpoint Controller

Figure 5-9 Setpoint Controller Attributes

Setpoint Controller attributes Data Units DescriptionAlarm Enable Enable (1)

Disable (0)Enable/Disable the Setpointerror band Alarm

Warning Enable Enable (1)Disable (0)

Enable/Disable the Setpointerror band Warning

Alarm Settling Time Time:ms Time in milliseconds that thealarm condition needs to bepresent before the warning israised

Alarm Error Band To be specified in the selectedflow data units

Error band in fmUnits where analarm will occur when the pv(output) is outside of this band

Warning Settling Time Time:ms Time in milliseconds that thewarning condition needs to bepresent before the warning israised

Warning Error Band To be specified in the selectedflow data units

Error band in fmUnits where awarning will occur when the pv(output) is outside of this band

Data Type Real (202) Data type is fixed to RealData Units fmUnits

Table 5 2 Flow Data Units(fmUnits)

Setpoint controller data units

Control Mode fcControlModeTable 5 4 Setpoint ControlMode(fcControlMode)

The setpoint control is fixed tothe digital EtherCAT interface(future enhancement: analogsetpoint source)

Ramp Time Time:ms Time in milliseconds to reach anewly configured setpoint

5-9



5.4.4.1 Setpoint Controller Status

Figure 5-10 Setpoint Controller Status Attribute

5.4.5 Valve Actuator Attributes

Figure 5-11 Valve Actuator Attributes

Setpoint Controller statusattributes


Status

b00000001 (0x01)b00000010 (0x02)

Setpoint Controller status bitmask

Setpoint Error Band AlarmSetpoint Error Band Warning

Valve Actuator attributes Data Units DescriptionAlarm Enable Enable (1)

Disable (0)Enable/Disable the high and lowValve Drive Alarm

Warning Enable Enable (1)Disable (0)

Enable/Disable the high and lowValve Drive Warning

Data Type Real (202) Data type is fixed to RealData Units vdUnits

Table 5 5 Valve Drive Data Units(vdUnits)

Valve Drive Data Units, fixed topercent.

Alarm Trip Point High To be specified in selected valvedrive data units (percent)

Valve Drive alarm high limit

Alarm Trip Point Low To be specified in selected valvedrive data units (percent)

Valve Drive alarm low limit

Warning Trip Point High To be specified in selected valvedrive data units (percent)

Valve Drive warning high limit

Warning Trip Point Low To be specified in selected valvedrive data units (percent)

Valve Drive warning low limit

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Figure 5-12 Valve Actuator Status Attributes

5.4.6 Service Transfer Attributes

Figure 5-13 Service Transfer Attributes

5.4.7 Calibration Object Attributes

Figure 5-14 Calibration Object Attributes

Setpoint Controller statusattributes


Status

b00000001 (0x01)b00000010 (0x02)b00000100 (0x04)b00001000 (0x08)

Valve Actuator status bit maskindicating high and low valve drivealarms and warnings.High Valve Drive AlarmLow Valve Drive AlarmHigh Valve Drive WarningLow Valve Drive Warning

Service Transfer attributes Data Units DescriptionPerform Zero 1 Refer to section 5.3.2.1

Flow Sensor Zero AdjustSelect Flow Gas Table 1…6 Selected process Gas PageFlow Full Scale Range Real Full scale range being the flow at

100%Flow Full Scale Range Units Table 5 2 Flow Data Units

(fmUnits)Data unit of the full scale range

Calibration Object attributes Data Units DescriptionLast Calibration Date Date Date at which the device was

calibrated

Next Calibration Due Date Date Date at which the device needed tobe calibrated

Run Hours Time:Hours Time that the device has observedflow in the range of 0 100%

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5.4.8 Exceptions

5.4.8.1 Alarm- and Warning Details

The device, flow, temperature, setpoint controller and valve actuator relatedexceptions are collected in the alarm and warning detail byte sequences.

Access to the Bit-Map data requires Terminal Access through ‘cal204’or ‘checkMFC’ applications via the AWE Engine.

The Bitmasks are shown below:

Byte NR Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0

CommonExceptionDetailSize

0 0 0 0 0 0 0 1 0

CommonExceptionDetail 1stbyte

1 0 0 0 0 0 0 0 0

CommonExceptionDetail 2ndbyte

2 0 0 0 0 0 0 0 0

DeviceExceptionDetailsize

3 0 0 0 0 0 0 1 0

DeviceExceptionDetailsize

4 0 0

ValveAlarm/WarningHigh

ValveAlarm/WarningLow

FlowControlAlarm/Warning

FlowAlarm/WarningHigh

FlowAlarm/WarningLow

FlowSensorReadingnot valid

Manuf.ExceptionDetailSize

5 0 0 0 0

PressureControlAlarm/Warning

PressureAlarm/WarningHigh

PressureAlarm/WarningLow

PressureSensorReadingnot valid

Manuf.ExceptionDetail 1stbyte

6 0 0 0 0 0 0 0 1

Manuf.ExceptionDetail 2ndbyte

7 0 0 0 0

TempAlarm/WarningHigh

TempAlarm/WarningLow

0 0

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5.4.8.2 Exception Status

The device, flow, temperature, setpoint controller, and valve actuator relatedexceptions are collected in the alarm and warning detail byte sequences.

The Bitmasks are shown below:

5.4.9 PDC (Product Description Code): I/O and Model Code

Please see the SLA 5800 Series Instruction/Operators manual for a complete andcomprehensive breakdown of the Product Description Code.

Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0

ExceptionStatus 0

Manufspecificwarning

Devicespecificwarning

Commonexceptionwarning

0Manufspecificalarm

Devicespecificalarm

Commonexceptionalarm

Communications I/O:

EtherCAT DeviceNET* RS 485 Profibus* FoundationFieldbus* None

E D, J, K, L, V S P,R,T F, M, N, Q A*I/O letter designation is dependent on the type of connector

Example Model Code(PDC):

SLA5850E1BAB1A2A1

•Base Model Number (Delta class) • • Certification

•Model Revision Level • • Output Enhancements

•Package/Finish specs. • • Power Supply Inputs

•Function (MFC, MFM, PC, etc.) • • Analog I/O Communications

•Body Size • • Valve Type

•Digital I/O Communications • • Valve Seat Material

• Mechanical Connections • • O Ring Material

V V V•••

5-13



5.4.10 Tables

Table 5-1 Valve Override Values (vdOverride)

Table 5-2 Flow Data Units (fmUnits)

Table 5-3 Temperature Data Units (tmUnits)

Table 5-4 Setpoint Control Mode (fcControlMode)

Table 5-5 Valve Drive Data Units (vdUnits)

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LEFT BLANK

6-1

Section 6 TwinCAT® MasterInstallation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAG


Figure 6-1 AUTO SETUP - PC Ethernet Master, Scanning for Compatible Devices

6 Beckhoff Automation: TwinCAT® (A PC Master Option)

6.1 Establishing a PC Ethernet Master (TwinCAT)

6.1.2 AUTO SETUP - PC Ethernet Master (TwinCAT)

In the Solution Explorer, Right click on“Devices”, under the I/O Icon.

From the drop down menu select”Scan” to automatically scan your PCfor EtherCAT compatible EthernetAdapters.

A pop up box appears reminding theuser that “Not all devices can befound automatically”. Select “OK”.

Figure 6-2 AUTO SETUP - PC Ethernet Master, I/O Devices Found

6-2

Section 6 TwinCAT® Master Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng



Figure 6-3 AUTO SETUP - Pop-Up Screens

Figure 6-4 AUTO SETUP - Proper Communications: Master and Slave (Beckhoff Automation: TwinCAT)

In the TwinCAT Solution Explorer display to the right, “Device 2”represents the EtherCAT Master.

“Box 1 (GF04x SPI Slave)” represents the Slave device. (In thisexample the slave is a single GF 40 device) .

Inputs: Attribute(s) reported from the Slave device to theMaster. (e.g. “Sensor Flow AI MF”)

Outputs: An explicit attribute change sent from the Masterto the Slave device. (e.g. “Controller Setpoint”)

Add to Watch: Puts the data stream into a separate windowwhich provides the user with real time monitoringcapability.

Master

Slave

6-3

Section 6 TwinCAT® MasterInstallation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-engPart Number: 541B208AAG


6.2 MANUAL SETUP - PC Ethernet Master (TwinCAT)

Figure 6-5 MANUAL SETUP - PC Ethernet Master, Scanning for Compatible Devices

Sometimes when you Right click on“Devices” and select “Scan”, youmay receive a response of: “No NewI/O Devices Found”.

If you receive this reply fromTwinCAT, you must set up theEthernet connectionmanually byinstalling it.

From the ‘TwinCAT’ drop down tablocated in the main toolbar, select“Show Realtime EthernetCompatible Devices”.

Figure 6-6 MANUAL SETUP - Pop-Up Screen

A pop out screen appears (similar tothis one) that displays all of theEthernet Adapters that were found byTwinCAT on your PC.

Some of the adapters are listed under“Compatible” and others may belisted under “Incompatible. Thedifference is the current status of theEthernet Device Driver.

Click on the Ethernet Adapter thatrepresents a LAN connection for yourPC. Then click on the “Install” buttonand follow on screen instructions.

Note: EtherCAT operates on anavailable LAN connection and is notcurrently suitable for wireless internetoperation. Selecting the WirelessEthernet Adapter would not work inthis case.

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Section 6 TwinCAT® Master Installation and Operation ManualX-DPT-EtherCAT-SLA58xx-SLAMFxx-Series-RevB-MFC-eng



6.3 CoE Online Attributes - Making Changes (Beckhoff Automation: TwinCAT)

Figure 6-7 CoE Online: Changing the Active Gas Page (and other device attributes)

Figure 6-8 CoE Attributes - Pop-Up Screen

Assuming that you are alreadyconnected to the device using eitherTwinCAT or EtherCAT configurator,click once on the gf 40 box so thatthere is a display screen on the rightwith menu tabs (General, EtherCAT,Process Data, Startup, CoE Online,Online).

The tab we are interested in is “CoEOnline”…. Please click on that tab.

You are presented with a table thatlists all of the device attributes with atitle header of: “Index”, “Name”,“Flags”, and “Value”.

You will notice that under the “Flags”title: RW is Read/Write. RO is ReadOnly. Only those attributes with anRW flag can be changed.

You change the attribute ‘Value’ bydouble clicking on the attribute. Youwill get a pop up window to enter thenew information. After you click ‘OK’,verify that the attribute did indeedchange.

The attribute for gas page is Index:B000:03 “Select Gas Table”(withBechhoff “EtherCAT Configurator”)

Just enter in the new gas pagenumber here and click ‘OK’.



TRADEMARKSBrooks ..................................................................... Brooks Instrument, LLCAll other trademarks are the property of their respective owners.

LIMITED WARRANTY

Visit www.BrooksInstrument.com for the terms and conditions of our limited warranty.

BROOKS SERVICE AND SUPPORTBrooks is committed to assuring all of our customers receive the ideal flow solution for their application, along withoutstanding service and support to back it up. We operate first class repair facilities located around the world to providerapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy andreliability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to therelevant International Standards.Visit www.BrooksInstrument.com to locate the service location nearest to you.

START-UP SERVICE AND IN-SITU CALIBRATIONBrooks Instrument can provide start-up service prior to operation when required.For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or(re)calibrate the products periodically. In many cases this service can be provided under in-situ conditions, and theresults will be traceable to the relevant international quality standards.

CUSTOMER SEMINARS AND TRAININGBrooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenancepersons.

Please contact your nearest sales representative for more details.

HELP DESKIn case you need technical assistance:

Americas 1 888 554 FLOW

Europe +31 (0) 318 549 290

Asia +81 (0) 3 5633 7100

Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject tochange without notice.

EtherCAT Supplemental Manual for Brooks …/media/brooks/documentation...Various companies provide...

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