ESD SYSTEM OVERVIEW
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Transcript of ESD SYSTEM OVERVIEW
ESD SYSTEM OVERVIEW
Sample Holder plate
Bias Filament
Cu Sample1
2
B-A gaugeRGA
Bias Sample
Electrometer
Butterfly valve
Pumping group
ConductanceGas Injection Line
Filament
Filament Power Supply
Transport rod
Full Range Gauge
ESD SYSTEM OVERVIEW
Cu SAMPLES
Cu Samples
w/o etch
Passivation
SLAC etch
w/o etch
Passivation
SLAC etch
w/o etch
Passivation
SLAC etch
w/o etch
Passivation
SLAC etch
w/o etch
Passivation
SLAC etch
w/o etch
Passivation
SLAC etch
w/o etch
Passivation
SLAC etch
w/o etch
Passivation
SLAC etch
w/o etch
Passivation
SLAC etch
CERN 2 2 2 2 2 2 2 2 2 2 2 2 24
Bodycote 2 2 2 2 2 2 2 2 2 18SLAC 2 2 2 2 2 4 14
2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 4 56
Hydrogen (1 bar)
elliptical
Vacuum REFERENCE Vacuum Argon (mbar) H2 (mbar) H2 (1 bar) Vacuum Argon (mbar) Hydrogen (mbar)
main steps: Machining Cleaning Heat
treatment ESD
Bake – out: lower part
12
3
4
5
6/11 78
9
10
TC Part of the system Equip. Description T ( C ̊ )1 TMP valve 1 Jacket + 1 TC 1502 T flanges 3 Collars + 1TC 1503 T body 1 Tape +1TC 1504 Full Range Gauge 1 Tape +1TC 1505 Cross chamber flanges 3 Collars + 1 TC 150
6 &11 RGA 4(2+2) Collars + 2 TC 2007 B-A Gauge 2 Collars + 1 TC 2508 Sample Holding 1 Tape +1TC 1509 Butterfly valve 1 Tape +1TC 12010 Filament 2 Tapes +1TC 150
Bake – out: upper part
1B
2B3B
4BTC Part of the system Equip. Description T ( C ̊ )
1B (12) Cross body 1flange+1cross body+1viewport + 1TC 1502B Rod 1Tape+1TC 803B Pirani + Penning 1 Tape + 1 TC 1804B Elbow body + Elbow flange+bellow 2 Tape +1 flange + 1TC 150
TMP rack TMP Valve 1 jacket 150
RGA scans
RGA scans (valve closed)
Circuit
A
A
V
V
+15 V
2-3 A
35 KV
Degassing: 9 Cycles @ 0.35KV
0 50 100 150 200 250 300 350 400 450
5.00E-008
5.20E-008
5.40E-008
5.60E-008
5.80E-008
6.00E-008
6.20E-008
6.40E-008
P (m
bar)
Time (s)
0.35 KV
0 2 4 6 8 10 12
1E-12
1E-11
1E-10
1E-9
Ion
Cur
rent
Cycle
H2 H2O N2/CO O2 F Ar CO2
0.35KV
H2 % H2O%
N2/CO % O2 % F % Ar % CO2
%9.56 34.1 16.9 13 12.4 9.25 36.9
Degassing: 9 Cycles @ 0.70KV
0 50 100 150 200 250 300 350 400 450 500 5507.00E-008
8.00E-008
9.00E-008
1.00E-007
1.10E-007
1.20E-007
1.30E-007
P (m
bar)
Time (s)
0.70 KV
0 3 6 9 121E-12
1E-11
1E-10
1E-9
Ion
Cur
rent
Cycle
H2 H2O N2/CO O2 F Ar CO2
H2 % H2O%
N2/CO % O2 % F % Ar % CO2
%23 34 30.8 40 18.9 16.2 44.9
Degassing: 9 Cycles @ 1.5KV
0 50 100 150 200 250 300 350 400 450 5001.47E-007
1.48E-007
1.49E-007
1.50E-007
1.51E-007
1.52E-007
1.53E-007
P (m
bar)
Time (s)
0.70 KV
0 3 6 9 121E-12
1E-11
1E-10
1E-9
Ion
Cur
rent
Cycle
H2 H2O N2/CO O2 F Ar CO2
1.5KV
H2 % H2O%
N2/CO % O2 % F % Ar % CO2
%0.94 -0.22 0.77 3.7 -0.44 -3.29 1.47
Calibration: H2
0.000000 0.000001 0.000002 0.000003 0.000004 0.000005 0.000006
0.00E+000
3.00E-008
6.00E-008
Ion
Cur
rent
[A]
PSVT [mbar]
Equation y = a + bAdj. R-Squa 0.99465
Value Standard ErrIon Current Intercept 7.21842E- 4.74445E-10Ion Current Slope 0.00846 2.0664E-4
Calibration Factor
Calibration: N2
0.000000 0.000001 0.000002 0.0000030.00E+000
1.00E-010
2.00E-010
3.00E-010
Ion
Cur
rent
PN2
Equation y = a + b*Adj. R-Squar 0.99296
Value Standard ErroB Intercept 2.35101E-1 3.10656E-12B Slope 9.60535E-5 2.69433E-6
Calibration Factor
Calibration: N2 2nd set of data
0.0000000 0.0000002 0.0000004 0.0000006
0.00E+000
2.00E-010
4.00E-010
Ion
Cur
rent
[A]
PSVT [mbar]
Equation y = a + b*xAdj. R-Squa 0.9997
Value Standard ErrIon Current Intercep -1.00073E-1 1.0463E-12Ion Current Slope 7.16529E-4 3.78484E-6
Calibration Factor
Degassing: 30 Cycles @ 0.35 KV
0 600 1200
-6.00E-013
-4.00E-013
-2.00E-013
0.00E+000
2.00E-013
4.00E-013
6.00E-013
Cur
rent
(A)
Time (s)
0 200 400 600 800 1000 1200 1400 1600
3.00E-007
3.20E-007
3.40E-007
3.60E-007
3.80E-007
P (m
bar)
real time (s)
0.35 KV
0 10 20 30
1E-12
1E-11
1E-10
Ion
Cur
rent
Cycle
2 18 28 32 38 40 44
0 5 10 15 20 25 30
1.00E-010
1.50E-010
2.00E-010
Ion
Cur
rent
#Cycle
2 18 28
CURRENT!!!!!
0 100 200 300 400 500 600
0.0
4.0x10-7
8.0x10-7
1.2x10-6
1.6x10-6
I
Time
Desorption Yield
kTIeSpp
S
jjjj
)( )0()1(
Desorption Yield
0 1x1015 2x1015 3x1015 4x1015 5x1015
10-4
10-3
10-2
10-1
(m
ol/e
- )
Dose (e-/cm2)
H2 CH4 H2O N2 C2H6 CO2
2010_09_22
0.0 2.0x10144.0x10146.0x10148.0x10141.0x10151.2x1015
10-4
10-3
10-2
10-1
(m
ol/e
- )
Dose (e-/cm2)
H2 CH4 H2O N2 C2H6 CO2
Des Yield 2010_09_24
• 15 RGA Cycles for background Signal + biassing of the sample• 15 RGA Cycles with the filament switched on• filament + sample degassing
Desorption Yield
• switch on the filament• 15 RGA Cycles for background pressure• 15 RGA Cycles with the sample biased
0.0 3.0x1014 6.0x1014 9.0x1014 1.2x1015 1.5x1015 1.8x1015-9.0x10-4
-6.0x10-4
-3.0x10-4
0.0
(m
ol/e
- )
Dose(e-/cm2)
H2 CH4 H2O N2 C2H6 CO2