equipment - Focal
Transcript of equipment - Focal
Semicon equipment and tooling
• Laser beam delivery and shaping
• Alignment and metrology
• Wafer inspection
• Lithography
Laser annealing in the semicon market is growing rapidly.
The elementary module for the laser annealing process is
a laser beam delivery system that conditions the laser beam
such that uniform annealing is achieved over the surface.
Demcon, in cooperation with a system integrator, has
developed a laser annealing module.
Our contribution:
• The development of a custom made F-theta lens with
a long working distance
• Reduction of angular displacement errors due to manufacturing tolerances
• Tooling for optical alignment and qualification
Project specifics
• Focal length of 280 mm
• Scan range of 7 mm with ± 4 degree (Gaussian) input beams
• 500 W laser with wavelength of 500 nm
• F-theta distortion less then 0.01%
Accurate pre-alignment of wafers is key for each individual
processing step. Contactless wafer edge measurement requires
a dedicated optical head. Demcon has developed an optical head
that is capable of detecting, statically and dynamically, the edge
of a wafer with respect to the gripper and wafer marker.
Sub-micron accuracy is achieved in all three dimensions with
extended depth of focus and flat field. One of the key enablers of
such performance is the use of custom optical and opto-
mechanical designs for imaging and through lens illumination.
• Up to 6 mm out-of-focus, precision XY < 1 µm
• Up to 12 mm out-of-focus, precision XY < ~2 µm
• 24 mm field-of-view with TTL illumination
Wafer fab equipment - wafer annealing
Wafer fab equipment - wafer alignment
We are specialized in pre-trained deep learning network for
automated feature extractions including a two-step network layer
which the customer can create and train themselves, without
having knowledge of deep learning or neural networks. We also
offer the generation of synthetic data that can be used to train
the neural network. This will reduce the NRE inspection-module
cost drastically when introducing new designs.
Inspection - image analysisClassification of wafer inspection results requires proper image analysis methods.
Demcon Focal is specialized in designing the proper inspection hardware and also
designing data analysis software, including deep learning and neural
network combinations for recognition and classification purposes.
• Magnification 5x (0.2x)
• Telecentric on image side
• FOV 22 x 22 mm
• Diff limited
• CD < 0.4 um (NA > 0.5)
• High CD uniformity (< 2%)
• Useable DOF ~ 1 µm
• Distortion < 100 nm (maximum over field)
• Magnification needs to be adjustable using back-focus
• Order of magnitude 10 ppm
• Magnification and focus changes due to short term temperature
change as small as possible
• Note short term temperature change +/- 0.1 degree
• Magnification change and focus change due to pressure change
should be compensated using focus and back-focus only
Wafer fab equipment- LithographyDemcon Focal has the capabilities to design, deliver and qualify one of
the most demanding precision optical assemblies: a lithography lens.
Demcon is using state-of-the-art alignment tooling (Opticentric) and
cleanroom facilities to achieve diffraction limited imaging for a large
field of view. We have designed lithography lenses with high NA and
large field of view that is capable of imaging semiconductor structures
on wafers to produce e.g. processors, LEDs, MEMS, USB memory, etc.
Project specifics
www.demcon.com/focal
Demcon Focal is part of the international Demcon group and is specialized in design, engineering and assembly of bespoke opto-mechatronic (sub-)systems, for high technological markets like semiconductor, bio-medical, life science, aerospace, industrial manufacturing and others. Often these systems are used in applications where accuracy, stability and rapid movement or exploitation in extreme environments is required.
Demcon Focal achieves customized design and engineering in a multidisciplinary approach, entailing optical, vision, data, electronic, software, mechanical and system engineering. Activities include high-level requirement engineering, concept optical design, prototyping, detailed engineering, system integration, manufacturing and testing activities.
Demcon Focal also performs specialized volume production that requires trained engineers, dedicated equipment and a clean environment. We can offer system service and support and we have production facilities available for complex optical modules.
Demcon
Institutenweg 257521 PH EnschedeThe NetherlandsT +31(0)88 115 2000
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Kanaaldijk 295683 CR BestThe NetherlandsT +31(0)88 115 2400