Northwestern University’s Atomic and N anoscale C haracterization E xperimental Center

EPIC Electron Probe Instrumentation Center

About EPICEPIC is part of Northwestern University Materials Research Science and Engineering Center (MRSEC), housing one of the most complete arsenals of state-of-the-art electron microscopes in the world.

EPIC is a user facility with a diverse set of instruments ranging from Scanning Electron Microscopes (SEM), Transmission Electron Microscopes (TEM), Scanning Transmission Electron Microscopes (STEM), Focused Ion Beam (FIB) and a full specimen preparation facility (SPF).

EPIC jointly collaborates with the Quantitative Bioelemental Imaging Center core facility and also receives support from the International Institute for Nanotechnology’s NSF-sponsored Nanoscale Science & Engineering Center (NSEC) at Northwestern University through the State of Illinois and Northwestern University.

FIB Facility Instruments

FEI Helios NanoLab

• Dual-beam FIB/SEM; simultaneous FIB milling and SEM imaging

• 5 gas injection systems for localized deposition and enhanced etching

• Bruker Quantax SDD EDS detector

• Oxford/HKL EBSD System

• Omniprobe AutoProbe

• Kleindiek nanomanipulation system

• Capable of subnanometer SEM resolution at 15kV, <1.5nm at 1kV

• Sidewinder FIB column provides 5nm resolution at 30kV and low energy milling capabilities

SEM, TEM & S/TEM capabilities

Hitachi SU8030 & S4800-II SEM• Ultra-high resolution cold source Field Emission

SEM

• Double condenser optics for high resolution

• Large specimen chamber

• Super ExB system allows low kV, high res, BSE engergy filtering

• Oxford X-max 80 SDD EDS detector

• 1.0 nm resolution at 15kV

• 1.3 nm resolution at 1kV

• 5-axis computer controlled stage

• STEM detector for bright and dark field STEM imaging

• ESED II detector, Oxford INCAx-act SDD EDS & Gatan MonoCL Cathodoluminescence system

• Large specimen chamber (up to 8 diameter specimens, 85mm in height)

• 5 axes motorized, computer eucentric stage• 5 segment BSE detector (3D reconstruction

capability)

Variable Pressure Hitachi S3400-N

• Resolution 0.20nm lattice• 40 to 120kV at 100V increments• Magnification of 50-1000x, with 200x -

600,000x zoom• Image rotation +/- 90˚ in 15˚ steps• STEM unit at 1 nm resolution• Bruker EDS system for elementary

analysis

Hitachi HT-7700 Biological TEM

SEM, TEM & S/TEM capabilities

JEOL JEM-2100F FasTEM• Analytical Scanning Transmission Atomic Resolution (A

STAR) Electron Microscope• High brightness Schottky FEG emitter operated at 200kV• 0.1 nm lattice resolution in HRTEM mode• 0.2 nm spatial resolution in STEM and analytical mode• Gatan Image Filter (GIF) system, Oxford EDS system,

Gatan HAADF detector for Z-contrast imaging, Sub-nanoscale EDS & EELS with automated line scans and maps

• Gatan double-tilt heating stage (up to 1100 degrees)

• Low-Z(Be) double -tilt holder for analytical x-ray microanalysis

• Nanofactory electrical probing system

Hitachi H-8100 TEM

SEM, TEM & S/TEM capabilities

FEI Quanta 600F Environmental SEM• Capable of imaging nonconductive and fully

hydrated materials

• Electron Backscatter Diffraction System (EBSD) identifies phases and allows large area crystal orientation mapping

• Energy Dispersive X-ray Analysis (EDS) for elemental analysis

• NPGS nanopatterning system for high resolution electron beam lithography (EBL)

• Resolution of <2nm @ 30kV in high vacuum, <2nm @ 30kV in ESEM and <3.5nm @ 3kV in low vacuum mode

• Gemini column enables high-resolution imaging at low accelerating voltages

• Electrostatic lenses ideal for imaging magnetic samples

• Schottky field emission gun for high resolution and excellent beam stability

• Large specimen chamber capable of accommodating up to a 6” wafer

LEO Gemini 1525

Specimen Preparation Facility Instruments

Instruments for SEM & TEM sample preparation• Fischione IBT systems - ion milling of delicate TEM

samples

• Gatan Precision Ion polishing systems

• Gatan dry pumping station for cryo TEM holders

• Allied High Tech MultiPrepTM polishing system

• South Bay Tech Plasma Cleaner and post-FIB trimmer

• Lesker Nano38 thermal evaporator

• SPI Osmium Coater

• Denton Desk III sputter coater with carbon evaporation

• Image/Data processing software: AnalySIS, Amira 3D reconstruction, Crystal Maker, HREM simulation, MeX stereo image 3D rendering, L-Edit circuit layout editor

• Operation at low kV (75 and 100 kV) for soft and biological materials and 200 kV for inorganic materials

• Large specimen tilt ( +/- 45˚ ) pole piece• In situ analysis with heating stage ( up to 900˚ C)• Cryo-holder (down to approximately -170˚ C)• Gatan TV rate CCD camera for in-situ TEM• CBED, nanodiffraction capabilities

Hitachi H-8100 TEM

Biological and Cryogenic Imaging Facility

Hitachi HD-2300 Dual EDS Cryo STEM• High brightness FEG operated at 80, 120 and 200 kV

• Ultra-sensitive dual-EDS capability, compatible with cryogenic specimen holder and low kV (80,120) operation

• Gatan Enfina EELS system

• Secondary electron detector for SE imaging

• Multiple STEM imaging modalities (BF, ADF, HAADF) down to ~ 0.23 nm

• Gatan Cryo-TEM holder and transfer system

• Low-dose operation mode

• Gatan diffraction CCD for nano-diffraction and diffractive imaging

• Hitachi full-space tilting holder for electron tomography

• Cryo-SEM ideal for imaging whole frozen cells & tissues up to tens of micrometers

• Fully automated, reproducible vitrification of suspensions

• High vitrification quality through controlled environment

• High sample throughput• Easy and flexible instrument control• Maintain relative humidity at 100%• Ultrasonic controlled humidification

FEI Vitrobot Plunge Freezer

Biological and Cryogenic Imaging Facility

Biological & Cryogenic Instrumentation

• Leica UC7/FC7 Cryo-Ultramicrotome

• Emitech K775X Turbo Freeze Dryer (TFD)

• Nikon Eclipse Light Microscope with Instec CLM77K Cryostage

• Gatan dry pumping station for cryo TEM holders

• Leica S6D Stereomicroscope with LED fiber optic light

• Tousimis Samdri 795 Critical Point Dryer (CPD)

• Leica KM3 Knifemaker

EPIC StaffOUTREACH

EPIC facility staff members routinely collaborate with Northwestern faculty and students on research that have been published in journals such as Science, Nature Materials and Nanotechnology.

EPIC maintains vibrant collaborations with academic and cultural institutions in the greater Chicago region, such as the Art Institute of Chicago. These efforts regularly culminate in the publication of research in prominent journals specific to the fields served by these institutions.

EPIC consistently collaborates with industrial partners such as British Petroleum, Nanosonics, Baxter, Monsanto, Cabot Microelectronics, Carpenter, Chugai, JEOL, Battelle, EBeam Devices, Avery Denison, Kraft Inc. as well as many others.

Local teachers, museums and members of the community are encouraged to join the NUANCE family through open house visits, demonstrations and presentations on how nanotechnology affects our daily lives. To schedule a tour for your group, please contact us.

Cover images (clockwise from bottom): • Z-contrast image of a section of a resin-embedded mouse egg, recorded with the

Hitachi HD2300A STEM (image by Reiner Bleher)

• Atomic resolution image of Gold nanoparticles on ultrathin amorphous carbon film, taken with JEOL2100F TEM (pseudo-colored by Dr. Shuyou Li)

• Self-assembled peptide amphiphile microcapsules (sample courtesy of Dr. Rozkiewicz from Stupp laboratory - imaged by Ben Myers)

EPIC Staff

Eric Jay MillerMicroscopy & Imaging Specialist, EPICCook Hall, Rm 1152 Tel: (847) 467-0789eric-miller@northwestern.edu

Ben MyersSEM, FIB Facility Manager, EPIC Cook Hall, Rm 1112A Tel: (847) 491-3439 b-myers3@northwestern.edu

Jinsong Wu, Ph.D. TEM Facility Manager, EPICCook Hall, Rm 1156Tel: (847) 491-7807 jinsong-wu@northwestern.edu

Shuyou Li, Ph.D. TEM Facility Manager, EPICCook Hall, Rm 1156Tel: (847) 491-6723 syli@northwestern.edu

Eric RothResearch Technologist II, EPICSilverman Hall, Rm 4557 Tel: (847) 467-3540 eric-roth@northwestern.edu

Reiner Bleher, Ph.D.Bio-Cryo Facility Manager, EPICSilverman Hall, Rm 4557 Tel: (847) 467-3540r-bleher@northwestern.edu

Vinayak Dravid, Ph.D.Director, NUANCEProfessor, Materials Science & EngineeringCook Hall, Rm 1131 Tel: (847) 467-1363v-dravid@northwestern.edu

General Contact:Jasmine WalkerNUANCE Center, Business MgrPhone: 847.467.2318j-tucker4@northwestern.edu

Mailing Address:NUANCE CenterCook Hall, Rm 20362220 Campus DriveEvanston, IL 60208-3108

http://www.nuance.northwestern.edu

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