Entegris EUV pod testing and status...
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Entegris EUV pod testing and status
update
Sematech TWG- SPIE 12 Feb 2012
Tom Kielbaso – Entegris, Inc.
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Entegris EUV pod testing and status update- TWG Sematech SPIE- 02_2012 | | 2
Agenda
Current Status of EUV pod
Manufacturing
Delivery
Next Generation product
Testing results
Repeatability of Entegris metrology
Open/Close cycle testing
Long Term Storage/Haze testing
Simulated Shipping test results using Type A pod
Summary
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Entegris EUV pod testing and status update- TWG Sematech SPIE- 02_2012 | | 3
Current Status of EUV pod
Manufacturing Product remains in pilot production
▪ RTM schedule pushed to March ‘12
Final clean online in HVM
Delivery Constraints being relieved, capacities being increased to align with demand
Expect resolution to coincide with RTM
Next Generation product (EUV-1007) in development and testing Backwards compatible with EUV-1005
Product testing and release July ’12
▪ See roadmap next slide
Detailed updates and Next Generation details being shared with customers
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High Level Entegris EUV Type A Roadmap (DRAFT)
2011
Q3-2013
EUV-1010 plan is under discussion,
changes (if any) will be data-driven
2013 2012 2014
Description:
CIP changes to
EUV-1007
EUV-1007A release
(parts available for order)
EUV-1010A release
(parts available for order)
Q2-12
(July)
EUV-1005A release
(parts available for order)
Q1-11
Desription: CIP
changes to
EUV-1005
Description:
Current EUV
product
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Entegris EUV pod testing and status update- TWG Sematech SPIE- 02_2012 | | 5
Testing Results- Background
As reported at 2011 EUV symposium, Mask Blank Defect Inspection (MBDI) tool has arrived and is now on line in Technology Characterization Lab
First results available Correlates closely to historical data from others
▪ No surprises
Continued testing planned to gain additional data points
Utilized for performance characterization not for quality control
Slide from 2011 EUV symposium
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Testing Results- Set up and details
Data on following slides collected under following conditions
Transfer to and from Metrology: Manual (<2 adders from manual handling)
Clean Room: Class 10
Pod Type: A pod/EUV-1005
All results reported are backside particle adders
▪ Front side testing in process
2 pods, 3 masks used
▪ Results shown are from 1 mask, 1 pod
Particles scanned down to 81 nm
Reticle Size:
Edge:
Partial Display from software
Total count
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Testing Results- Latching Test in Cleanroom (1)
0
10
20
30
0 1000 2000 3000 4000 5000
Outer pod open/close cycle
Part
icle
counts
(85 n
m o
r la
rger)
Cycle Scan #1 Scan #2 Scan #3 Scan #4 Scan #5
0 15 15 17 15 15
100 16 16 16 16 16
500 16 16 16 17 16
1000 19 19 19 19 20
3000 20 20 20 20 20
5000 21 21 21 21 22
•Area scanned = 148mm2
•Class 10 CR
•Backside results Latching test consists
of latch/unlatch of
outer pod on std
200mm loadport.
Lowering door
~50mm, then
returning door to
outer dome. Mask
was scanned 5x at
each cycle interval
without removal from
inspection tool.
Manual adders not
subtracted.
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Pre-scan 100 & 500 cycle
1,000 cycle 5,000 cycle
Testing Results- Latching Test in Cleanroom (2)
•* Scanned area: 148mmX148mm (2 mm Edge Exclusion)
•Adders are circled in Red (all >131nm)
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Testing Results- Overlay showing particle location from Latch Test
After 5,000 outer pod open/close cycle
Particles detected at mask contact areas (outside Quality Area)
.0012 adders per cycle, all reported adders >131nm
Manual Adders not subtracted
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Testing Results- Long term storage
2 weeks in clean room
Zero Added particles in Quality Area (148mm x 148mm)
Backside results
Prescan 2 weeks later
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Simulated Shipping Test (ISTA 2A) – Vibration Profile
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Simulated Shipping Test (ISTA 2A) – Test System
Vibration Table Inner Package
Secondary Package
Standard
Empty EUV
pod packaging
used.
20”x20”x14”
Drop Testing
NOT performed
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Testing Results- Simulated Shipping (ISTA 2A)
•Scanned area: 148mmX148mm (2 mm Edge Exclusion)
•3 adders >131nm
•1 adder 81-108nm
•Manual adders NOT subtracted
Pre-scan Post-scan
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Summary
RTM and delivery stabilized March ‘12
Next Generation product under development and testing
In house metrology results align with previously published data
Further characterization testing planned
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