Endevco piezoresistive pressure Endevco model 8530B ... · Endevco piezoresistive pressure...
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16 17 Endevco piezoresistive pressure transducers Miniature piezoresistive pressure transducers are designed to measure both dynamic and static pressure to a high degree of accuracy. MEMS sensing elements feature a unique diaphragm design manufactured at Meggitt’s US based MEMS facility, resulting in a range of pressure sensors with an extremely high output signal and high resonant frequency, as well as extraordinary linearity and repeatability, and virtually no hysteresis. All models feature internal temperature compensation to provide stable performance over temperature. The 8540 offers high temperature operation to +260ºC (+500ºF). Absolute pressure sensors are available in ranges as low as 0–15 psia and as high as 0–2000 psia, with gage/differential sensor models available in ranges as low as 0–1 psig and as high as 0–20,000 psig. All units are shipped in specially designed electrostatic discharge (ESD) packaging, to reduce the potentially harmful effects of static electricity on critical components, as well as to further support customer in-house ESD control procedures. Many modifications to our standard pressure transducers are available on request. > Jet airflow fields and inlet pressure > Hypersonic, transonic and “quiet flow” wind tunnel testing > Turbulent airflow measurements > Process control > Blast testing > Automotive airbag inflation testing > Rocket motor analysis > Vehicle transmission testing > Hydraulics measurements Endevco—Piezoresistive pressure transducers Endevco—Piezoresistive pressure transducers Model number 8523 8530B 8530BM37 8530C 8540 Description Gage High temperature Temp compensation Absolute High resonance Temp compensation Absolute Detachable cable ABS braking studies Absolute High sensitivity Temp compensation Absolute High temperature Temp compensation Full scale pressure psi 45 / 115 / 215 / 415 / 1015 200 / 500 / 1000 / 2000 200 / 500 / 1000 / 2000 15 / 50 / 100 15 / 50 / 100 / 200 / 500 Sensitivity mV/psi 20 / 6 / 3 / 1.5 / 0.6 1.5 / 0.6 / 0.3 / 0.3 1.5 / 0.6 / 0.3 / 0.3 15 / 4.5 / 2.25 20 / 6 / 3 / 1.5 / 0.6 Resonance frequency kHz 140 / 240 / 350 / 450 / 900 750 / 1000 / >1000 / >1000 750 / 1000 / >1000 / >1000 180 / 320 / 500 140 / 240 / 350 / 450 / 900 Non linearity (typ) %FSO 0.25 / 0.25 / 0.25 / 0.4 / 0.4 0.2 0.2 0.15 / 0.1 / 0.1 0.25 / 0.25 / 0.25 / 0.4 / 0.4 Operating temperature ˚C (˚F) -54 to +260 (-65 to +500) -54 to +121 (-65 to +250) -54 to +121 (-65 to +250) -54 to +121 (-65 to +250) -54 to +260 (-65 to +500) Burst pressure psi 30 / 100 / 200 / 400 / 1000 800 / 2000 / 4000 / 4000 800 / 2000 / 4000 / 4000 75 / 250 / 400 30 / 100 / 200 / 400 / 1000 Face diameter mm (in) 3.86 (0.152) 3.86 (0.152) 3.86 (0.152) 3.86 (0.152) 3.86 (0.152) Weight gram 8.5 2.3 2.3 2.3 8.5 Mounting method 10-32 UNF-2A 10-32 UNF-2A 10-32 UNF-2A 10-32 UNF-2A 10-32 UNF-2A Model number 8507C 8510B 8510C 8511A 8515C Description Gage High sensitivity Temp compensation Gage Vent tube Temp compensation Gage High resonance Temp compensation Rugged Gage High pressure Pressure sensor 0.03 inch thin Surface mount Full scale pressure psi 1 / 2 / 5 / 15 1 / 2 / 5 / 200 / 500 / 2000 15 / 50 / 100 5000 / 10,000 / 20,000 15 / 50 Sensitivity mV/psi 200 / 100 / 60 / 20 200 / 100 / 60 / 1.5 / 0.6 / 0.15 15 / 4.5 / 2.25 0.1 / 0.05 / 0.025 13.3 / 4.0 Resonance frequency kHz 55 / 70 / 85 / 130 55 / 70 / 85 / 320 / 500 / 900 180 / 320 / 500 <1000 180 / 320 Non linearity (typ) %FSO 1.5 / 1.0 / 0.5 / 0.2 1.0 0.15 / 0.1 / 0.1 1.2 / 2.5 / 2.5 0.2 Operating temperature ˚C (˚F) -54 to +107 (-65 to +225) -54 to +121 (-65 to +250) -54 to +121 (-65 to +250) -54 to +121 (-65 to +250) -54 to +121 (-65 to +250) Burst pressure psi 20 / 40 / 100 / 150 25 / 40 / 100 / 1000 / 2500 / 10,000 75 / 250 / 400 20,000 / 30,000 / 40,000 75 / 250 Face diameter mm (in) 2.34 (0.092) 3.86 (0.152) 3.86 (0.152) 8.13 (0.320) 6.35 (0.25) Weight gram 0.3 2.3 2.3 11 0.08 Mounting method RTV bond 10-32 UNF-2A 10-32 UNF-2A 3/8-24 UNF-2A Adhesive Endevco model 8530B Model 8530B is a miniature, high sensitivity piezoresistive pressure transducer for measuring absolute pressure. The volume behind the diaphragm is evacuated and glass sealed to provide an absolute pressure reference. Full scale output is 300 mV with high overload capability and high frequency response. It is available in ranges from 200 psia to 2000 psia. See model 8530C for lower pressure ranges. Endevco brand pressure transducers feature an active four arm strain gage bridge diffused into a sculptured silicon diaphragm for maximum sensitivity and wideband frequency response. Self-contained hybrid temperature compensation provides stable performance over the temperature range of 0°F to 200°F (-18°C to +93°C). Meggitt’s Endevco brand transducers also feature excellent linearity (even to 3X range), high shock resistance, and high stability during temperature transients. Also available with an integral connector as the M37 option. Piezoresistive pressure transducers
Transcript of Endevco piezoresistive pressure Endevco model 8530B ... · Endevco piezoresistive pressure...
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Endevco piezoresistive pressure transducersMiniature piezoresistive pressure transducers are designed to measure both dynamic and static pressure to a high degree of accuracy. MEMS sensing elements feature a unique diaphragm design manufactured at Meggitt’s US based MEMS facility, resulting in a range of pressure sensors with an extremely high output signal and high resonant frequency, as well as extraordinary linearity and repeatability, and virtually no hysteresis.
All models feature internal temperature compensation to provide stable performance over temperature. The 8540 offers high temperature operation to +260ºC (+500ºF). Absolute pressure sensors are available in ranges as low as 0–15 psia and as high as 0–2000 psia, with gage/differential sensor models available in ranges as low as 0–1 psig and as high as 0–20,000 psig. All units are shipped in specially designed electrostatic discharge (ESD) packaging, to reduce the potentially harmful effects of static electricity on critical components, as well as to further support customer in-house ESD control procedures. Many modifications to our standard pressure transducers are available on request.
> Jet airflow fields and inlet pressure> Hypersonic, transonic and “quiet flow” wind tunnel testing> Turbulent airflow measurements> Process control> Blast testing> Automotive airbag inflation testing> Rocket motor analysis> Vehicle transmission testing> Hydraulics measurements
Endevco—Piezoresistive pressure transducers Endevco—Piezoresistive pressure transducers
Model number 8523 8530B 8530BM37 8530C 8540
DescriptionGageHigh temperatureTemp compensation
AbsoluteHigh resonanceTemp compensation
AbsoluteDetachable cableABS braking studies
AbsoluteHigh sensitivityTemp compensation
AbsoluteHigh temperatureTemp compensation
Full scale pressure psi 45 / 115 / 215 / 415 / 1015
200 / 500 / 1000 / 2000
200 / 500 / 1000 / 2000 15 / 50 / 100 15 / 50 / 100 /
200 / 500
Sensitivity mV/psi 20 / 6 / 3 / 1.5 / 0.6 1.5 / 0.6 / 0.3 / 0.3 1.5 / 0.6 / 0.3 / 0.3 15 / 4.5 / 2.25 20 / 6 / 3 / 1.5 / 0.6
Resonance frequency kHz 140 / 240 / 350 / 450 / 900
750 / 1000 / >1000 / >1000
750 / 1000 / >1000 / >1000 180 / 320 / 500 140 / 240 / 350 /
450 / 900
Non linearity (typ) %FSO 0.25 / 0.25 / 0.25 / 0.4 / 0.4 0.2 0.2 0.15 / 0.1 / 0.1 0.25 / 0.25 / 0.25 /
0.4 / 0.4
Operating temperature ˚C (˚F) -54 to +260 (-65 to +500)
-54 to +121 (-65 to +250)
-54 to +121 (-65 to +250)
-54 to +121 (-65 to +250)
-54 to +260 (-65 to +500)
Burst pressure psi 30 / 100 / 200 / 400 / 1000
800 / 2000 / 4000 / 4000
800 / 2000 / 4000 / 4000 75 / 250 / 400 30 / 100 / 200 /
400 / 1000
Face diameter mm (in) 3.86 (0.152) 3.86 (0.152) 3.86 (0.152) 3.86 (0.152) 3.86 (0.152)
Weight gram 8.5 2.3 2.3 2.3 8.5
Mounting method 10-32 UNF-2A 10-32 UNF-2A 10-32 UNF-2A 10-32 UNF-2A 10-32 UNF-2A
Model number 8507C 8510B 8510C 8511A 8515C
DescriptionGageHigh sensitivityTemp compensation
GageVent tubeTemp compensation
GageHigh resonanceTemp compensation
RuggedGageHigh pressure
Pressure sensor 0.03 inch thinSurface mount
Full scale pressure psi 1 / 2 / 5 / 15 1 / 2 / 5 / 200 / 500 / 2000 15 / 50 / 100 5000 / 10,000 / 20,000 15 / 50
Sensitivity mV/psi 200 / 100 / 60 / 20 200 / 100 / 60 / 1.5 / 0.6 / 0.15 15 / 4.5 / 2.25 0.1 / 0.05 / 0.025 13.3 / 4.0
Resonance frequency kHz 55 / 70 / 85 / 130 55 / 70 / 85 / 320 / 500 / 900 180 / 320 / 500 <1000 180 / 320
Non linearity (typ) %FSO 1.5 / 1.0 / 0.5 / 0.2 1.0 0.15 / 0.1 / 0.1 1.2 / 2.5 / 2.5 0.2
Operating temperature ˚C (˚F) -54 to +107 (-65 to +225)
-54 to +121 (-65 to +250)
-54 to +121 (-65 to +250)
-54 to +121 (-65 to +250)
-54 to +121 (-65 to +250)
Burst pressure psi 20 / 40 / 100 / 150 25 / 40 / 100 / 1000 / 2500 / 10,000 75 / 250 / 400 20,000 / 30,000 /
40,000 75 / 250
Face diameter mm (in) 2.34 (0.092) 3.86 (0.152) 3.86 (0.152) 8.13 (0.320) 6.35 (0.25)
Weight gram 0.3 2.3 2.3 11 0.08
Mounting method RTV bond 10-32 UNF-2A 10-32 UNF-2A 3/8-24 UNF-2A Adhesive
Endevco model 8530BModel 8530B is a miniature, high sensitivity piezoresistive pressure transducer for measuring absolute pressure. The volume behind the diaphragm is evacuated and glass sealed to provide an absolute pressure reference. Full scale output is 300 mV with high overload capability and high frequency response. It is available in ranges from 200 psia to 2000 psia. See model 8530C for lower pressure ranges.
Endevco brand pressure transducers feature an active four arm strain gage bridge diffused into a sculptured silicon diaphragm for maximum sensitivity and wideband frequency response. Self-contained hybrid temperature compensation provides stable performance over the temperature range of 0°F to 200°F (-18°C to +93°C). Meggitt’s Endevco brand transducers also feature excellent linearity (even to 3X range), high shock resistance, and high stability during temperature transients. Also available with an integral connector as the M37 option.
Piezoresistive pressure
transducers
