EE C247B/ME C218: Introduction to MEMS DesignLecture 13w: Beam Combos I

CTN 3/5/20

Copyright © 2020 Regents of the University of California 1

Lecture 13: Beam Combos I

• Announcements:

• HW#3 due Tuesday, 3/10, at 8 a.m.

• Midterm Exam about 2 weeks away, Thursday, March 19, 9:30-11:00 a.m., 521 Cory (right here)

• -------------------------------------

• Reading: Senturia, Chpt. 9

• Lecture Topics:

Bending of beams

Cantilever beam under small deflections

Combining cantilevers in series and parallel

Folded suspensions

Design implications of residual stress and stress gradients

• -------------------------------------

• Last Time:

• Finished stress gradients

• Now, move into beam combos

1 2

EE C247B/ME C218: Introduction to MEMS DesignLecture 13w: Beam Combos I

CTN 3/5/20

Copyright © 2020 Regents of the University of California 2

• … and the result:

• We just quantified this

3 4

EE C247B/ME C218: Introduction to MEMS DesignLecture 13w: Beam Combos I

CTN 3/5/20

Copyright © 2020 Regents of the University of California 3

5 6

EE C247B/ME C218: Introduction to MEMS DesignLecture 13w: Beam Combos I

CTN 3/5/20

Copyright © 2020 Regents of the University of California 4

7 8

EE C247B/ME C218: Introduction to MEMS DesignLecture 13w: Beam Combos I

CTN 3/5/20

Copyright © 2020 Regents of the University of California 5

9 10

EE C247B/ME C218: Introduction to MEMS DesignLecture 13w: Beam Combos I

CTN 3/5/20

Copyright © 2020 Regents of the University of California 6

11 12

EE C247B/ME C218: Introduction to MEMS DesignLecture 13w: Beam Combos I

CTN 3/5/20

Copyright © 2020 Regents of the University of California 7

13 14