Downsizing: the march of micro- and nano-manufacture

8/9/2019 Downsizing: the march of micro- and nano-manufacture

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Small world, wide horizons,

massive potentialThe progressive miniaturisation of manu-factured devices and components is one ofthe most striking aspects of todays industrialworld. As dimensions shrink towards thenanoscale, there is fierce global competition toestablish leadership in the many affected fields.Europe-wide research collaboration is vital indeveloping the technologies needed to maintaincompetitiveness and secure future employment.

The miniaturisation phenomenon is perhaps most

memorably encapsulated in Moores law of 1965,

which stated that the number of transistors on com-

puter semiconductor chips would double at about

every two years. This prediction has proved remark-

ably robust and the focus on manufacture at

ever-decreasing scales triggered remarkable develop-

ments in many more fields of materials, process andproduct innovation.

The trend is driven by societys aspirations for ever im-

proving yet affordable healthcare, higher standards of

living and quality consumer goods, despite the prob-

lems posed by increasing energy costs and depleting

resources. Squeezing more features and more perform-

ance into smaller device dimensions is one way to

satisfy these demands, while also addressing the grow-

ing concern for sustainability and environmental care.

Mainstream of tomorrows industries

Although some extreme forecasts for the size of theloosely-defined worldwide nanotechnology market are

difficult to justify, it is evident that micro- and nano-

manufacturing will become increasingly important

mainstream constituents of the future industrial scene.

Size-reduction is being pursued from two converging

directions: top-down scaling of macro-manufacturing

technologies to handle ever-smaller dimensions and

tighter tolerances, and bottom-up exploitation of the

phenomenon of self-assembly at the atomic level.

Continuing EU support

In the GROWTH programme of the Fifth Framework

Programme, research into these technologies was

included as an option within the first topic of its

Key Action 1 on Innovative products, processes and

organisation.

The growing prominence of micro/nano-manufac-

turing, and the need for more focussed planning

of its research, led to provision for dedicated topics

within the NMP (nanotechnology and nanosciences,

knowledge-based multifunctional materials and new

production processes and devices) Theme of FP6, and

on into FP7.

Largest public investorOver this period, Europe has registered high levels

of success in the underlying research, measured in

terms of registered patents and published scientific

articles, The European Commission alone allocated

1.4 billion to 550 nanotechnology projects in FP6,

making the EU the worlds largest public investor in

this field. Yet, the exploitation of technology transfer

to industrialise and profit from the results remains

a major challenge.


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According to the World Technology Evaluation Centre

(WTEC), the EU continues to lead in the more mechan-

ically-based micro-manufacturing (as opposed to thelithography-based technologies of the semiconductor

industry). This strength has been enhanced since FP6,

largely due to the set-up of flagship projects such as

those described in this brochure. It is likely to provide

a faster route to practical products such as new auto-

motive parts, micro-fuel cells, micro-batteries, micro-

motors and even desktop- or micro-factories.

Overall, however, the Communitys global economic

competitors continue to invest at rates that Europe hasso far failed to equal: its private enterprises contribute

a lower proportion of GDP, and public support is frag-

mented by national/regional budgetary divisions.

Umbrella initiative

As part of a concerted effort to redress the balance,

a core of participants and experts, some of which

were associated with the FP6 Coordinated Actions-Sapient and IPMMAN and the Network of Excel-

lence 4M, created the MINAM (Micro- and nano-

manufacturing) initiative.

Launched in January 2008 with the publication

of a Strategic Research Agenda, MINAM is also

a prime contributor to the existing European Tech-

nology Platform Manufuture. The role of this ETP is

to mobilise the joint resources of industry, research

organisations and consumers; and to collaboratewith national, regional and European funding schemes,

including NMP and the Information Society Techno-

logies (IST) programme.

The platform aims to identify emerging trends and

provide strategic directions for future investment

in R&D to sustain and further enhance the leading

positions of European industry in the field.

In particular, its vision addresses research priorities

in four key areas:

manufacturing of nanomaterials; processing of nanosurfaces; micro-manufacturing processes; development of integrated systems and

platforms for micro- and nano-manufacturing.

Initial findings from a roadmap drawn up by the

members provided input to assist the Commission

in planning the first calls of FP7. Priorities identified

by MINAM are strongly reflected in both the NMP and

IST Themes, which include topics with specific rele-vance to the MINAM community. In addition, the MNT

ERA-NET, launched in 2004 to establish collaboration

between Member State programmes, announced its

third transnational call in 2008. This gathered the

support of 17 funding programmes in coordinating

the implementation of micro- and nano-technologies

(MNT) within industry.

More participants neededAll of this effort is producing world-class results,

but the need remains to strengthen and accelerate

innovation and implementation activities both within

the EU and in wider international collaborations to

address global needs and markets.

The project examples presented in the following

pages show how it is possible to integrate the work

of scientists with the needs of industry to developapplicable results that will boost Europes com-

petitiveness and help to create new employment

opportunities. It is therefore hoped that these insights

will generate further interest from large and small

enterprises, as well as from investors, to generate

industrial successes from the good work started by

European researchers.

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Taking micro-manufacturing to more efficient mass-production levels in order to cut costs and meet the

demand for micro-products requires an integratedeffort and multi-disciplinary approaches. The IntegratedProject MASMICRO therefore spread its research overa range of conventional, unconventional and hybridtechnologies, pooling the expertise of 36 complemen-tary partners.

Coordinated by the University of Strathclyde, the initia-tive focused on three main issues: development of mass production processes based

on micro-forming and micro-mechanical machining; development of miniature/bench-top equipment tobridge the gap between costly large-scale systemsand micro-machines;

application of ultra-precision techniques to improvethe precision of existing miniature/micro machinedesigns.

Industry-ready developments

By the end of its four-year term, this project had pro-duced more than 50 exploitable results, a numberof which were already at an industry-ready stage.

The first machine for high-volume hydroformingof tubular miniature/micro-parts has been built,featuring an active hydraulic drive and a new dynamicsealing concept. This is capable of forming tubes withdimensions as small as 0.8 mm diameter and 40 m

wall thickness.

A new desk-top, linear-motor-driven machine has beendeveloped for the micro-forming of thin metalstrips/parts with thicknesses below 100 m, at ratesup to 1 000 parts/min. The modular machine has a max-imum working space of 400 x 400 mm, and a choice ofset-up options for flexibility in handling and tooling.

One more MASMICRO breakthrough is a linear-motor-

driven press for high-throughput cold forming ofminiature components. It incorporates an innovative

Technology integrationshows the way tocost-effective production

Various competing methods and processeswill have roles to play in meeting thegrowing demand for miniature andmicro-manufacturing. MASMICRO adoptedan integrating approach, embracingtechnologies with the ability to contributeto efficient, cost-effective production chains.

MASMICRO lifecycle concept for the development

of miniature/micro-products.


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parts-handling system and control strategies, togetherwith the first mass-production system for extruding micro-

parts. It is again equipped with a flexible tool system topermit deployment for various micro-forming processes.

Yet another development is the Ultra -Mill: a bench-top five-axis ultra-precision machine for CNC-controlledmicro-milling, drilling and grinding of 3D mechanicalcomponents and micro-featured surfaces. The compactmachine has a resource/energy-efficient design givingsubmicron precision and nanometric surface finishes.

More key advances include design advisory and analy-sis systems, new miniature/micro-materials and testingfacilities, a laser system and laser-assisted formingtools, optimised micro-EDM, photo-chemical etchingand electro-forming processes, new micro-parts han-dling and inspection systems, and more.

System integration is effected with a ManufacturingExecution System, a Knowledge-based Decision Sup-port System and a Robotic Handling System.

Life-cycle concept

Taken together, these developments reflect a life-cycleconcept for implantation in future miniature micro-products industries. Europe-wide implementation of theknowledge and technologies generated within theproject is actively promoted via MASMICROs demon-stration, training and SME take-up programmes.

MASMICRO Integration of manufacturing systemsfor mass-manufacture of miniature/micro-productsTotal cost | 21 409 000EC contribution | 12 500 000Project duration | July 2004-September 2008 (51 months)Coordinator | Dr. Yi Qin University of Strathclyde, UKMore information | www.masmicro.net


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A nano-imprinting stepper device developed forreproduction of large area stamps, photonic devicesand nanoscale bio-analysis platforms uses a small pat-terned silicon chip as a stamp, the pattern of which iscopied onto a polymer layer by imprinting. The polymerlayer either a thermoplastic or UV-cured material is then used for replicating small sub-100 nm scalegeometries onto larger areas. This step and stamp im-print lithography (SSIL) technique is much faster than

e-beam lithography, and less expensive than otheravailable systems.

A roll-to-roll printer combining nanopatterningwith gravure printing and flexographic tech-niques in one process run is currently in operationat VTT. Roll-to-roll printing, in particular, is emerginga strong candidate in the lighting and automotive in-dustry, for cost-effective manufacture of componentssuch as diffractive elements for displays.

The NaPa Library of Processes, which includes proc-

esses for the production of polymer-based opticalelements, organic LEDs and lab-on-a-chip systems, wasofficially released in March 2008.

FP7 follow-up

The programme continues in the FP7 project NaPANIL,which will complete the verification of the existingprocesses, and pursue further innovation in tools,

materials, metrology and modelling to support the nextwave of innovative applications. The work focuses onthree application areas: planar diffractive optical elements for the growing

LED lighting market; light-directional elements integrated in windows

to maximise the use of natural lighting; emissive head-up displays integrating an array

of LED dice onto a transparent substrate, thus elim-inating the need for projection optics.

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NaPa Emerging Nanopatterning MethodsTotal cost | 31 135 000EC contribution | 16 000 000Project duration | March 2004-February 2008 (48 months)Coordinator | Jouni Ahopelto Technical ResearchCentre of Finland (VTT)More information | www.NAPAIP.org

The S.E.T.s Nanoimprinting stepper NPS300

is a cutting-edge lithography tool that offers

E-beam-resolution with higher throughput and

lower cost of ownership. The NPS300 features

hot embossing, UV-NIL and Micro contact

printing capabilities on the same platform.

It accommodates wafers up to 300 mm.

CourtesyofS.E.T.,SmartEquipmentTechnology-S.A.S.


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Advanced glass materials generally outperform plasticsin terms of optical properties and chemical resistance,

but have so far remained too expensive for widespreadcommercial use in products such as mobile phones,medical imaging equipment and automotive safetysystems. Thus, if glass components for micro-opticaland micro-fluidics devices could be produced in highvolume at acceptable costs, they would generate hugedemand.

Moulding route to cost-cutting

Todays micro-production technologies and methodsare often complex and cost-intensive, producing single-purpose components and usually including time-con-suming manual operations. Moulding is one way tosimplify manufacturing and markedly reduce produc-tion costs. But there are no established standards, norprocedures for production planning and costing.

The PRODUCTION4 project is therefore developing

moulding-based manufacturing process chains with theflexibility and scalability to respond cost-effectivelyto the need of system suppliers for complex-shapedglass micro-optical parts. Under the coordination ofthe Fraunhofer Institute for Production Technology,Germany, 20 partner organisations are researching ma-terials, processes, manufacturing integration strategiesand automation technologies for rapid transition fromlab-scale prototypes to reliable component output atindustrial volumes.

Over the first two years, tooling advances includedimproved techniques for precision mould manu-facture, and a new substrate material enablingvery high accuracies to be achieved using grinding,diamond turning and polishing.

Glass preform in moulding setup ready

for the process to start.

Glass micro-mouldingdelivers superior

optical componentsGlass micro-lenses and other miniatureoptical components are needed for newautomotive, biotech, medical and consumerdevices to underpin future economic growthin Europe. PRODUCTION4 aims to developmanufacturing processes that will beapplicable on an industrial scale.


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A simulation process focussing on aspherical geo-metries was optimised to provide higher-than-ever pre-dictability of the shrinkage error in manufactured lenses.

Mould design and construction is underwayfor three types of demonstrator: multi-purposeaspheric lenses, double-sided cylinder lens arrays formedical/laser applications, and diffractive asphericlenses for advanced camera systems.

Among process chain developments are mechanicaland adhesive chucks for automated workpiece fix-

ing and handling, together with a prototype systemproviding directly actuated alignment and a box-carrier transfer unit that enables workpieces tobe transported between process stages under sealedconditions.

Various metrology techniques interferometry, de-flectometry and 3D profiling are being pursuedin both hardware and software aspects.

Also in progress are tools for process chain deriva-tion, product design and cost calculation, as wellas the evaluation of inspection and control tech-niques for quality management.

Realisation of this integrated approach could reducetime to market by up to 60 %, while also halving com-ponent costs, bringing European OEMs opportunitiesto regain ground lost in recent years to US and Asiancompetitors in a global market predicted to grow by at

least 20 % per year.

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PRODUCTION4 Production technologies for micro systemsTotal cost | 15 436 000EC contribution | 9 000 000Project duration | May 2006-April 2010 (48 months)Coordinator | Dr.-Ing. Thomas Bergs Fraunhofer Institutefor Production Technology, Aachen, GermanyMore information | www.production4micro.net

Glass preform, moulded glass lense and glass

moulding form insert.


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Results achieved during the first two years indicatethat the NANO CMM is on course to meet its objectives.

Initial studies have provided a better understandingof the operational scenario and componentrequirements.

Directions for building and integrating the variouscomponents tactile and optical probes, rotary stage,probe and tip changer into the overall metrology frame-work via suitable mechanical, electrical and softwareinterfaces are well established.

A set of algorithms and methods exploiting universalfiducial elements and advanced point cloud stitchingtechniques is in place to improve accuracy and re-duce the uncertainty of nano-metrologymachineswith multisensor and multiorientation measurementcapabilities.

By providing an appropriate metrology platform and theknow-how to apply it, NANO-CMM will boost the devel-

opment of micro- and nano-products. At the same time,the creation of reference standards and testing guide-lines for components, and for the measuring instrumentsthemselves, will remove ambiguities in setting up pur-chase contracts and in verifying compliance. This projectwill thus create opportunities for European SMEs tobecome the suppliers of tomorrows metrology compo-nents and systems.

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NANO CMM Universal and flexible coordinate metrologyfor micro and nano components productionTotal cost | 9 770 000EC contribution | 5 500 000Project duration | December 2006-May 2011 (54 months)Coordinator | Iker Landa Unimetrik, Legutiano-lava, SpainMore information | www.nanocmm.net

Silicon Wafer with Set of Tactile Probes.


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The semiconductor industrys international technologyroadmap predicts that existing electron-beam techniques

for the manufacture of integrated circuit masks and tem-plates will reach their technological limits within the nextfew years. Charged particle multi-beams could providea reliable and affordable alternative for these and otheremerging applications in electronics, photonics, magnet-ics and biotechnology.

Ultra-high-resolution patterning can be achieved viadirect, beam-assisted structuring processes. However,single-beam equipment cannot meet the productivity

levels necessary for industrial-scale manufacture. In theIntegrated Project CHARPAN, coordinated by AustrianSME IMS Nanofabrication, 19 partners representingnine EU Member States plus Australia, Israel andRussia are collaborating in the development of a multi-beam process known as projection mask-less patterning(PMLP).

Unprecedented flexibility

The PMLP approach is to direct a broad ion beam ontoa programmable aperture plate system (APS) with mul-tiple holes that divide the beam into thousands ofdiscrete beamlets of micrometre size. Projection ionbeam optics with 200X reduction then compress thebeamlets into a multitude of high-intensity, parallelcharged-particle streams.

Employing the APS instead of stencil masks gives an

unprecedented degree of flexibility, while the ability touse various ion species makes it possible to vary therate of material removal or surface modification.

A proof-of-concept (POC) tool developed withinthe first two years of the project achieved 16 nmhalf pitch resolution (i.e. lines and spaces) overa 25 m x 25 m exposure field. Even with an APSdemo unit providing four thousand 4.5 x 4.5 m aper-tures, nanopatterning smaller than 30 nm was realised.

3D Argon ion beam patterning of microlens

array in GaAs.

Ion multi-beamtechnology breaks

the nanoscale barrierAs the size of features on electronic chipsand other miniaturised devices shrinksfurther into the nanometre range, an ionmulti-beam technology pioneered in theCHARPAN project promises a flexible,cost-effective alternative to establishedelectron beam lithography techniques forthe fabrication of complex masks andnanoimprint master templates.


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in the development of actuators and sensors; instrategies for feeding, handling, and fixing micro/nano-particles; and in the provision of new algo-rithms for vision feedback and quality control.

The self-assembly partners have produced patterned

surfaces using specially-made molecules andpolymers to control wettability by switching hydro-phobicity under the influence of temperature or electricfields. Systems were also fabricated and tested forhierarchical assembly of nanowires, nanotubesand biological cells. And the appropriate micro- and

nanoscale on-line inspection and quality controltechniques have been identified.

The projects multidisciplinary research will generatea highly innovative production concept that could dra-matically change the face of future manufacturing.

The effective dissemination of HYDROMELs resultsto industry will be ensured by communicating projectresults to an advisory board composed of large com-panies, while the project website provides extensiveinformation and training material.

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HYDROMEL Hybrid ultra precision manufacturing process basedon positional- and self-assembly for complex micro-productsTotal cost | 13 750 000EC contribution | 9 000 000Project duration | October 2006-September 2010 (48 months)Coordinator | Dr. Alexander Steinecker Centre Suissedlectronique et de Microtechnique (CSEM), SwitzerlandMore information | www.hydromel-project.eu

Robot assisted self alignment of micro components of 0.3 mm lateral size

(courtesy of Helsinki University of Technology).


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Laser sintering produces 3D solids by fusing togethersuccessively deposited layers of suitable powdered

materials with a high-powered scanning laser beam.The shape of the resultant object is accurately controlledby programming the path of the focused beam withdata derived from a dimensional description such asa CAD file.

Although able to shape a wide variety of metals,ceramics and plastics, laser sintering is currently limitedto the production of prototypes and short-run compo-nents. The objective of MANUDIRECT is to extend the

materials and process technology, to deliver a platformfor the cost-effective volume manufacture of compo-nents directly from powders, with spatial resolutionbetter than 50 m.

The project involves 18 European partners, coordinatedby CSGI, Italy. To achieve the targeted breakthrough,their research encompasses: development of integrated engineering and mate-

rials design tools;

formulation of nanopowders with the appropriatemechanical, physical and chemical or bioactiveproperties;

provision of a multi-grade powder feeder for gra-dient-structured layering;

implementation of laser heating and focusingsystems;

design and fabrication of in-line geometrical andshape layer monitoring systems;

integration of all hardware and software com-

ponents into a micromanufacturing platform.

Innovation in materials and systems

Industrial partners in the consortium selected a numberof case-study components as test-pieces. These rangefrom cutting tools for surgical procedures and plasticsmachining, to a flexible gear-wheel, turbine parts anda collimator for an x-ray detector.

Developed nanostructured powder: stainless

steel AISI420 powder size 5-20 micron.

From design to productin one step

Laser sintering is currently seen asa method for prototyping or limitedcomponent production. MANUDIRECTaims to develop it into a one-stepprocess with unprecedented accuracyfor volume manufacture of metal andceramic parts.


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Process evaluation carried out using already availablenanopowder grades led to the decision to focus onFe-based systems for the structural applications, Ti-basedsystems for medical devices, and Ni-based systems andintermetallics as high temperature alloys.

By the mid-point of the project, the elements ofthe platform had been developed and integrated including several notable software and hardwareinnovations.

Conversion software for translating CAD files intonumerically-controlled (CNC) machine programming

instructions provides a novel solution for slicing multi-material products into laser-processable segments, withchangeable parameters within a layer or volume.

As well as meeting the physical criteria, the dedicatedpowder feeder includes a special nano-powder han-dling and shipping system to safeguard human andenvironmental safety.

Optical adjustment of the laser beam diameter

between 10 m and 100 m allows a speed/accuracytrade-off, while dual optical inspection of the build-up geometry makes it possible to determine whetherthe finished workpiece will meet customers accuracydemands.

Impact across industries

Realisation of this bottom-up fabrication method will

allow virtual engineering concepts and designs to betranslated into products in one step, without the needfor prototyping stages. MANUDIRECT will thus haveconsiderable economic impact in many industrialsectors, including microengineering, biomedical devices and even in the macro-scale manufacture of partsfor automotive, aeronautical and other applications.

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MANUDIRECT Direct ultraprecision manufacturingTotal cost | 7 842 000EC contribution | 5 000 000Project duration | September 2006-August 2010 (48 months)Coordinator | Prof. Ing. Paolo Matteazzi Consorzio perlo Sviluppo dei Sistemi a Grande Interfase (CSGI), ItalyMore information | www.manudirect.eu

Picture of stereovision measuring system.


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Coating with polymeric films having controlled nano-scale features thickness, porosity, roughness, surface

structure, nanoparticle inclusions, etc. can provide sub-strate materials with radically new chemical or physicalproperties of relevance to industry. Characteristics suchas enhanced barrier efficiency, mechanical protection,hydrophobicity, antireflectivity and conductivity are ap-plicable in sectors from energy production and aerospaceto construction and chemicals.

Nanoscale manipulation of thin polymer films is alsoa route to the miniaturisation of functional micro-

devices for computers, communications and sensing.Moreover, the materials are inexpensive, lightweight,flexible, transparent and energy-saving.

Scale-up crucial

Throughput rate is a critical factor for success in tradi-tional sectors such as large-scale steel and glass sheetmanufacture. The established coil coating, dip coating

and spray techniques are mature, high volume processes but all deposit relatively high coating thicknesses, anddo not exploit the nanostructural potential.

Merging nanoscale control with mass production capa-bility is thus essential to open the door to new generationsof high-added-value products. In the Integrated ProjectNAPOLYDE, this challenge is addressed by a 25-memberconsortium under the coordination of ArcelorMittalResearch, Belgium.

The partners are investigating both plasma-based dep-osition and wet methods. As well as exploring scalabletechnologies for tailoring film properties by nano-layering, nano-clustering and nano-texturing, they aredeveloping design tools and measuring instruments forprocess control on an industrial scale.

On line spectroscopic ellipsometrer for real

time thickness and composition measurement

of nanometric film on a roll-to-roll line.

Nano-featured filmcoatings bring added

value to commoditymaterials

The application of nano-featured thinpolymer film coatings to substratessuch as steel, glass and silicon producescomposite materials with a wide rangeof potentially useful properties. NAPOLYDEis exploring deposition processes combiningcontrol at the nanoscale with the demands

of industrial mass production.


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Despite the great promise of nanotechnology, its indus-trial impact to date has been limited by the lack of

means for cost-effective volume manufacture of toolsoperating on a nanoscale. Scanning proximity probes(SPP) are capable of addressing and engineering sur-faces at the atomic level, but have not so far beenproducible in large enough array sizes to provideexploitable speed of operation.

The goal of the PRONANO project, led by GermanSME Nanoworld Devices, is to develop the technologynecessary to make larger arrays, which could trigger

a wealth of new products and processes.

Construction of massively parallel SPPs will allowdetailed analysis of controlled force and sensing inter-actions between the probes and their environment orunderlying surfaces. Parallel cantilever arrays will func-tion as the molecular equivalent of inkjet printer heads,allowing much more flexible molecular delivery andwriting than is possible with a single probe. They willbe useful for the development of various types of meas-

uring and manipulation tools for imaging and synthesisof molecular structures in bioengineering, drug screen-ing, and chemical and bioelectronic sensing systems.Force and displacement measurements at the molecu-lar level will also be feasible over large areas at highspeeds.

Multi-purpose package

The ultimate product will be a generic platform VLSINEMS chip (very large scale integrated nano-electro-mechanical system) incorporating 128 x128 probes,packaged with control electronics, readout interconnectsand advanced software. SMEs in the 17-member consor-tium will use the technology in a series of demonstratorsperforming sub-10 nm metrology for high-throughputmanufacturing. Selected key applications and theirresults will also be used to educate new generations ofresearchers and technologists.Probe with 32 individually addressable cantilevers.

Fast probe arrays opennew nano-application

opportunitiesScanning proximity probes are powerfuldevices for nanoscale analysis, manipu-lation and bottom-up synthesis, but currentsingle-probe tools are too slow to alloweconomic throughputs. PRONANO aimsto produce massively parallel 2D probearrays that will unlock the full potentialof nano-manufacturing.


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By the end of the third year, a first generation ofpiezoresistive cantilever arrays had been fabricated,

characterised and incorporated into a test measuringmachine from German partner SIOS Messtechnik.

Early problems of crosstalk between probes were re-solved, leading to a second generation array designwith greater noise protection. Following the solution offurther technical difficulties, work began on the demon-strators.

The components for a surface scanning system are

being developed and tested, including hybrid meas-urement-control electronics and software, plusASIC (application-specific integrated circuit) control-ler components that will eventually replace some ofthe hybrid blocks.

Development of FM detector circuitry is also under-way, while testing continues on single and multi-cantilever probes.

Industrial experience

In one actual pilot demonstrator, the integration ofan atomic force microscope into a scanned electron beamapparatus for the repair of semiconductor photomaskshighlighted the need to investigate application-specific

effects such as vibration. This experience is enabling thepartners to evaluate the usability and economic viabilityof the new technology under real industrial conditions.

During the period, a first web-based introductorystudy course was announced, attracting over 180registrations.

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PRONANO Technology for the production of massivelyparallel intelligent cantilever probe platforms fornanoscale analysis and synthesisTotal cost | 14 051 000EC contribution | 8 500 000Project duration | April 2005-March 2010 (60 months)Coordinator | Thomas Sulzbach Nanoworld Devices GmbH,GermanyMore information | www.pronano.org

Probe with 32 individually addressable

cantilevers.


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European Commission

Downsizing: the march of micro- and nano-manufacture

Luxembourg: Office for Official Publications of the European Communities

2009 23 pp. 17 x 24 cm

ISBN 978-92-79-11214-0

DOI 10.2777/60546

Acknowledgements

Special thanks are expressed to the coordinators and the programme officers of

the projects for their contribution, and in particular to Hans Hartmann Pedersen for

the coordination work. Furthermore, the collaboration of Mike Parry, Michael Horgan,

Charlotte Andersdotter and Bingen Urquijo Garay is acknowledged.

J.L. Valls, Head of Unit RTD-G2 New generation of products

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Micro- and nanomanufacturing have the potential to revolutionise the ways in which we use and

manufacture products. It can bring added value by improving functionality, intelligence and sustain-ability of existing products, create new innovative markets and enable new ways of cost-efficient,

flexible and sustainable manufacturing. Micro- and nanomanufacturing are highly important enabling

technologies providing a competitive advantage for all sectors, including consumer electronics, auto-

motive, energy, environment, security, healthcare and defence industries. Developments in micro- and

nanomanufacturing technologies are therefore strategically important for the competitiveness of

European industry and its ambition to continue to play a leading role in the growing global market

for micro- and nanotechnology based products and services. This publication briefly presents nine

examples of European collaborative research projects in the field of micro- and nanomanufacturing,

supported under the European Framework Programmes. They all contribute to the implementation of

the European strategy and vision for industrial growth.

KI-81-09-572-EN-C

Downsizing: the march of micro- and nano-manufacture

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