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DOE-SSL Manufacturing Workshop

Eric Armour Principal Scientist, Process Technology

Turbodisc MOCVD Operations Veeco Instruments

May 7, 2014

Copyright ©2014 Veeco Instruments Inc. 2

Veeco Strategy: Participate in Three-Megatrends Energy Efficiency Personal Mobility Emerging Applications

& Technologies

LED Lighting (MOCVD) Wireless Chips (MBE) Semiconductor Research (MBE)

Hard Disk Drives (Data Storage)

Optical Coatings (Data Storage)

Build on Existing Leadership

Advancing Thin Film Technologies

NOW: ALD for OLED Mobile Displays

Future: ALD for OLED TV Displays

EUV Mask Blanks, Semi

Establish a Strong Position in New Markets Power Devices

Future: ALD for OLED Lighting, Solar,

Batteries

MEMS


US-Based R&D/Engineering With Worldwide Presence Our Approach is a Competitive Differentiator

Proximity to customers is a strategic priority resulting in stronger customer support, better R&D alignment, and new customer conversion

Camarillo, CA

Fort Collins, CO

Plainview, NY St. Paul, MN Somerset, NJ

Poughkeepsie, NY

Santa Clara, CA

Edina, MN Mannheim, Germany

Shanghai, China

Hsinchu City, Taiwan

Penang, Malaysia

Seoul and Suji-gu,Korea

Singapore

Philippines Bangkok, Thailand

Tokyo, Japan

U.S.: ~ 580 Employees Europe: ~ 15 Employees Asia: ~ 200 Employees

Training and Service

Sales and Service

R&D/Engineering/Marketing

Fremont, CA

Contract Manufacturer

Kingston, NY


Veeco MOCVD Success Supported by DOE • SSL Role

‒ Capital MOCVD equipment manufacturer for critical epitaxial device layers

‒ DOE funding accelerated our roadmap, resulting in: Domestic job creation Rapid release of the MaxBright multi-chamber platform Achievement of market-leading MOCVD position

• Veeco’s R&D Footprint ‒ Specialized labs for new product and customer

demonstrations, advanced processing partnerships, and continuous improvement

‒ Comprehensive in-house analytics ‒ Actively engaged in and soliciting external collaborations


Veeco Continues to Lead in MOCVD Market

K465i and MaxBright are the #1 selling MOCVD tools Estimated market share, Veeco and Aixtron only

Veeco Market Share

63% TurboDisc® Reactor Advantages:

• LED performance • Manufacturability • Running cost • Low particles


Veeco Roadmap Facilitating LED Cost Reduction

Veeco Epi Cost reduction is 2X faster than U.S. DOE Forecast (‘10-’12)

0.00

0.05

0.10

0.15

0.20

0.25

0.30

0.35

0.40

0.45

0.50

Nor

mal

ized

Epi

Cos

t ($/µm

.cm

2 )

2010 2013 2015 2020

$50 LED bulb Price

$13

$23

$6 $5

Throughput

Yield (HP) Automation

Cluster Yield

N+1 Platform Next Gen

U.S. Dept of Energy projected bulb cost Actual bulb cost Reduction of Epi cost from Veeco innovations


2006 2007 2008 2009 2010 2011 2012 2013 2014 2015 2016 2017 2018 2019 2020

LED Lighting ~3000+ MOCVD

LED TV 1500 MOCVD

$10 LED Bulb Accelerates Lighting Demand LE

D D

eman

d by

Are

a (B

mm

2 )

Cellphone 250 MOCVD

LED Lighting CAGR 35%

LED TV

Wall Street and Veeco Estimates

Introduction of $10 LED bulbs

LED Lighting projected to grow at 35% CAGR from 2010 to 2020


SSL Market: Still A Ways to Go

• CoO will continue to drive the demand curve for earlier adoption

• The market appears to be focused on 4” production and can benefit greatly from high-capacity, automated equipment with significant floor-space efficiency

• Shift to 6” substrates in early stages

‒ Bigger sapphire substrates not generally considered at this point

• GaN-on-Si LED manufacturing:

‒ Emerging quickly to leverage significant silicon knowledge and capital

‒ Programs can benefit from a high-yield reactor requiring alternate hardware

• GaN substrate technologies focusing on niche applications


Leveraging SSL Technology towards Power Electronics: New Growth Opportunity for MOCVD

Power Supplies

Solar

Consumer Electronics

Wind

Automobile

• Power Electronics device market continues to grow1

• GaN-based power devices offer higher efficiency, switching speed and lower power consumption

• Veeco is positioned at key customer sites around the globe to support this high growth segment

Notes: 1) Yole Nov 2011, 2) IMS Research Feb 2012

GaN

Pow

er D

evic

e M

arke

t2

2011 2012 2013 2015 2018 2021

71% CAGR


Fast-ALD: Veeco’s Product to Accelerate OLED Adoption

A new generation of ALD: Fast deposition

(10x higher than traditional ALD)

Low temperature

Large area format (scalable to very large areas)

Polarizer

Encapsulation layers

OLED Layers

TFT (Plastic)

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