DLC Coating on Food Packaging Film Using PIII-D Technique
Transcript of DLC Coating on Food Packaging Film Using PIII-D Technique
Chiang Mai University
IWPDA2009, 2-3 July, Singapore
DLC Coating on Food Packaging FilmUsing PIII-D Technique
D. BOONYAWANPBPF, Dept of Physics&Mat.Sci., Fac of Science, Chiang Mai University, Thailand
*ThEP Center, CHE, 328 Si Ayutthaya Rd., Bangkok 10400, Thailand
Chiang Mai University
IWPDA2009, 2-3 July, Singapore
Where are us?
Chiang Mai University
IWPDA2009, 2-3 July, Singapore
What is PIII-D?
Chiang Mai University
IWPDA2009, 2-3 July, Singapore
• Higher ion energy (>1 keV)
• Low power (pulsed mode)
• Conducting to non-c materials used
• Selective species
PIII-D benefits
Chiang Mai University
IWPDA2009, 2-3 July, Singapore
DLC- benefits
• Flexible, Reusable & Biocompatible
• Reduced friction & wear
• Reduced gas permeability
(good gas barrier)
• Well adhere to polymer
Diamond-like Carbon ?
Chiang Mai University
IWPDA2009, 2-3 July, Singapore
• PET & PVDC: 60 mm
• Ar sputtering prior deposition: 5 min
• C2H2 Deposit with – 3 kV pulse 20 mS
@200Hz
• Process time: 5, 10, 15 min
Experiment
Chiang Mai University
IWPDA2009, 2-3 July, Singapore
• Oxygen Transmission Rate (OTR)
• Color/transparency
• Atomic Force Microscope
• Raman spectroscopy
Characterization
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IWPDA2009, 2-3 July, Singapore
Result : OTR
Chiang Mai University
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Result: Color
Processing Times L a b ∆E
PVDC
0 (uncoated) 99.93 -0.01 0.02 0.00
5 91.15 0.30 6.02 10.64
10 90.35 0.36 13.14 16.25
15 85.90 1.21 18.11 22.93
PET
0 (uncoated) 100.00 -0.01 0.00 0.00
5 93.56 0.19 6.05 8.84
10 92.46 0.42 12.17 14.32
15 85.36 0.63 18.02 23.23
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PET 5/10/15 min
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IWPDA2009, 2-3 July, Singapore
Result: Transparency
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Result: Thickness I
PVDC 15 minPVDC 5 min
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Result: Thickness II
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IWPDA2009, 2-3 July, Singapore
Result: Raman PET
Chiang Mai University
IWPDA2009, 2-3 July, Singapore
Result: Raman PVDC
Chiang Mai University
IWPDA2009, 2-3 July, Singapore
Conclusions
• DLC coated PET & PVDC using planar PIII-D technique
• Growth rate ~ 10 -15 nm/min
• OTR reduced by 23% for PVDC and 21% for PET
• Films Transparency reached saturation same as OTR results
• Compare with CVD, lower in film growth rate and OTR but better in unwanted compositions
Chiang Mai University
IWPDA2009, 2-3 July, Singapore
Thank you
Chiang Mai University
IWPDA2009, 2-3 July, Singapore
800 1000 1200 1400 1600 1800 2000
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Data: Data1_B
Model: Gauss
Equation: y=y0 + (A/(w*sqrt(PI/2)))*exp(-2*((x-xc)/w)^2)
Weighting:
y No weighting
Chi^2/DoF = 84.52922
R^2 = 0.99601
y0 0 ? 0
xc1 1389.13982 ? 1.02402
w1 325.46658 ? 1.13869
A1 115660.53285 ? 625.0784
xc2 1557.52464 ? 0.25229
w2 129.63881 ? 0.80726
A2 45263.81962 ? 536.92968
G- Peak
D- Peak
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Force applied :Start
Aligning:16 weeks
1 m.
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IWPDA2009, 2-3 July, Singapore
Plasma deposition system
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Cathodic vacuum arc plasma source
Dual filtered cathodic arc plasma,
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IWPDA2009, 2-3 July, Singapore
Chiang Mai University
IWPDA2009, 2-3 July, Singapore
Plasma Enhanced ALD system
Chiang Mai University
IWPDA2009, 2-3 July, Singapore
Chiang Mai University
IWPDA2009, 2-3 July, Singapore
The picture to showed IR-heater, temperature variable from a few ten to
390°c at 200 VAC. and substrate holder area 11×11 cm2.
Chiang Mai University
IWPDA2009, 2-3 July, Singapore
(a) Bottom view
(b) Side view
The picture to showed beam profile of Ar with pressure 3.4×10-1 torr and the microwave plasma 75 watt.
(a) Bottom view
(b) Side view
Chiang Mai University
IWPDA2009, 2-3 July, Singapore
Analysis Techniques :
PIXE, RBS, RBS Channeling, Ion Luminescence
1.7 MV Tandetron accelerator
PIXE IL
e-gun
Sample holder
RBSRBS/Channeling
Analysis Chamber