Coventor Tutorial

Kyoto UniversityHong Kong University of Science and Technology

Coventor Tutorial

Bi-Stable Mechanical Beam Simulation

-Material definition

-Fabrication (Process flow design)

-Layout (Structure design)

-Device fabrication (Meshing and Naming Entities)

-Analyzer setting (Boundary conditions)

-Simulation (Finite State Analysis)

-Viewing result


Coventor-Process : Material Deification Change the electric conductivity of Silicon since it was doped.

For detailed information on Material Deification, please refer to the Section 2.3 of the manual “Designer” ! ! !


Coventor Tutorial








-Viewing result


Coventor-Process : Create Substrate

For detailed information on editing process, please refer to the Section 2.4 of the manual “Designer” ! ! !


Coventor-Process : Oxide Formation


Coventor-Process : Si Formation

Only this Si layer for simulation: Accurate “Thickness”!!

Si layer for layout: Accurate “Layer Name”!!


Coventor-Process : Si Patterning


Coventor-Process : Metal Formation

Metal layer for layout: Accurate “Layer Name”!!


Coventor-Process : Metal Patterning


Coventor Tutorial








-Viewing result


Coventor – Create Layout

For detailed information on editing layout, please refer to the Section 2.5 & 3.2.1 of the manual “Designer”! ! !


Coventor – Check Layers

The layer names are from the pre-defined “Layer Names” in the last Process Editor!!


Coventor – Edit Your Layout

Standard drawing tools

Edit by input

co-ordinate

Other useful functions

For detailed information on editing layout, please refer to the Section 2.5 & 3 of the manual “Designer” ! ! !


Coventor – Edit Your Layout

For detailed information on editing layout, please refer to the Section 2.5 & 3 of the manual “Designer” ! ! !

ForBended beam:The beam and anchor should be merged. How?Select beam and anchor and then using “boolean->Or” for merge.

Otherwise, solid model can’t be built!!

ERROR


Coventor – Finish Layout

Two Layers: SILICON!!METAL!!


Coventor – Finish Layout

The layout should contains TWO Layers with the names of SILICON &METAL!!

The final cell name should be “top cell_Group number”, e.g., “top cell_6a” and “top cell_6b”.


Coventor – Flat Hierarchy

Before exporting the layout to top cell, the top cell should be flattened.

For detailed information on editing layout, please refer to the Section 2.5.7 of the manual “Designer” ! ! !


Coventor – Gds OutChose a file to output the layout.

For detailed information on editing layout, please refer to the Section 2.6.6 of the manual “Designer” ! ! !


Coventor Tutorial








-Viewing result


Coventor – Initial Solid Model

The SILICON is a whole bulk material!

Since only SILICON layer is simulated, other can be hided.

For detailed information on solid model, please refer to the Section 4.5 of the manual “Designer” ! ! !


Coventor – PartitionPartition the Si into several parts.(Partition the beam (moved parts) from the anchor (fixed parts) .

1. Choose 3 points to generate a plane

2. Choose the plane and the Silicon bulk (needed for partition)

3. “Partition” under “Solid Model”

For detailed information on solid model, please refer to the Section 4.5.1 of the manual “Designer” ! ! !


Coventor – Partition (After)

After partition, one Silicon bulk is cut into two parts.

After several times of partition, the beams will be completely separated from the anchor.

For detailed information on solid model, please refer to the Section 4.5.1 of the manual “Designer” ! ! !

After partition, the plane can be hided.

Finally, the one Silicon bulk will be cut into many parts.


Coventor – Add Layer to Mesh Model

Select ALL Silicon parts and add them to Mesh Model

For detailed information on solid model, please refer to the Section 4.7 of the manual “Designer” ! ! !


Coventor – Add Layer to Mesh Model

ALL Silicon parts move into Mesh Model

For detailed information on Mesh model, please refer to the Section 4.7 of the manual “Designer” ! ! !


Coventor – Meshing Settings



Coventor – Generate Meshing


Select ALL Silicon parts and Generate Mesh.


Coventor – Finish Meshing


Coventor –Naming Entities


Name electrodes on the top faces!

“Potential” will be applied on these faces.




Name anchors on the bottom faces!

“Fixall” and “Temperature” will be applied on these faces.




Name the front faces or other needed faces of the actuator, amplifier or bistable beam on the side faces!

“Pressure” or “Displacement” will be applied on these faces


Coventor Tutorial








-Viewing result


Choose the 2nd solver

Choose your mesh model& then Set the solver

Coventor – Solver Setting

For detailed information on editing layout, please refer to the Section 3.5 of the manual “analyzer_standard” ! ! !


Coventor – Solver Setting


Coventor – Surface Boundary conditions

Example: apply voltage to actuator to analysis the temperature, displacement, stress and so on.1.Fixall for anchor2.Set the temperate of all anchor as room temperature (300K). The units is “K”. 3.Apply voltage to electrodes. The units is “voltage”.

For detailed information on setting boundary conditions, please refer to the Section 3.5.3 of the manual “analyzer_standard” ! ! !


Coventor – Surface Boundary conditions

For other simulations:1.“Fixall” and “Temperature” are always applied on anchor faces.2.“Potential” can be applied on electrode faces.3.“Pressure” or “Displacement” can be applied on side faces


Coventor – SBCs for Bistable Beam

Apply one Displacement to get one Force

For detailed information on Simulation methodology of Bistable Beam, please refer to the “Tutorial on simiulation of bistable beam” ! ! !


Coventor – Displacement-Force Simulation

• For simulation, one can not solve an arbitrary displacement directly, according to my experience. Instead, one need to increase the displacement bit by bit from zero, and telling Coventor to start the analysis from the result of the previous one.

• In this manner, the simulation will not fail easily, because defining the displacement resolves the large non-linearity of buckling.


Coventor – One or Multi Point Simulation1. Correspond the displacement to a variable,

“mechBC1”, based on “MemMech” Solver.

2. Start to set Variable

3. Correspond the “mechBC1” to a Trajectory

3. Set the Trajectory

4. Set the value

5. Run here for simulating a series of values

6. Run here for simulating one value


Coventor – Contact Boundary Conditions

Plan: AMP CON2

Plan: BEAM CON

Otherwise, they actuator will move across the amplifier, or the amplifier will move across the beam rather than push it.

Plan: ACT CON

Plan: AMP CON1

If you want to use the actuator to push the amplifier, or use the amplifier to push the beam

you need to define the Planes of actuator, amplifier and beam as contact planes.


Coventor Tutorial








-Viewing result


Real-time Simulation

Progress/health Monitoring

Coventor – Simulation


Coventor – View Resluts

For detailed information on Visualizer, please refer to the Section 9 of the manual “analyzer_standard” ! ! !


Coventor – 3D Result Viewing

For detailed information on Visualizer, please refer to the Section 9 & 9.1 of the manual “analyzer_standard” ! ! !


Coventor – Simulation Result of the Displace-Fore of Bistable Beam


Checking the displacement deformation using Geometry Scaling


Coventor – Simulation Result of the Displace-Fore of Bistable Beam


Checking the Force Value using Table – rxnForces.

Sign of rxnForces changes from + to – or – to +, indicating two stable states.

Coventor Tutorial

Documents

Transcript of Coventor Tutorial