COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave...

59
Semiconductor Module Optics Seminar July 18, 2018 Yosuke Mizuyama, Ph.D. COMSOL, Inc.

Transcript of COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave...

Page 1: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Semiconductor Module

Optics SeminarJuly 18, 2018

Yosuke Mizuyama, Ph.D.

COMSOL, Inc.

Page 2: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

The COMSOL® Product Suite

Page 3: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Governing Equations

Schrödinger Equation

Semiconductor

Semiconductor

Optoelectronics, FD

Semiconductor

Optoelectronics, BE

� · ����� � � � � � �� � �

��

��

��� �

1

�� · �� � ��

��� �

1

�� · �� � ��

� � ���� � � � � ��

� �� � !

"��

� � 0

Semiconductor+

� � $%� � � ���� � � $%� � ��

� ��� �� �

!

"��

�� � 0

�&�� ·�'

2)� �' � �$&

�'

ð�

Semiconductor+

Page 4: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Semiconductor

Page 5: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Governing Equations

� · ����� � � � � � �� � �

��

��

��� �

1

�� · �� � ��

��� �

1

�� · �� � ��

Page 6: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Semiconductor ModelsCarrier statistics

• Arora (LI)

• Caughey-Thomas

Heterojunction

• Quasi-Fermi continuity

• Thermionic emissions

Mobility

• Arora (LI)

• Caughey-Thomas (E)

• Fletcher (C)

• Lombardi surface (S)

• Power law (L)

Recombination

• Auger

• Direct

• Trap-assisted

Generation

• Okuto Crowell

Tunneling

• Fowler-Nordheim

Transition

• Indirect optical

• Optical

Metal contact

• Ideal ohmic

• Ideal Schottky

Band gap narrowing

• Slotboom

• Jain-Roulston

Page 7: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Applications

Page 8: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

PN-Junction 1D

Page 9: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

PN-Diode Circuit

Page 10: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Heterojunction 1D

Page 11: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Bipolar Transistor

Page 12: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

EEPROM

Page 13: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

MOSFET

Page 14: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Breakdown in a MOSFET

Page 15: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Small Signal Analysis of a MOSFET

Page 16: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Bipolar Transistor Thermal

Page 17: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

GaAs PIN Photodiode

Page 18: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

ISFET

Page 19: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

GaAs PN Junction Infrared LED Diode

Page 20: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Lombardi Surface Mobility

Page 21: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Si Solar Cell 1D

Page 22: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Apps

Page 23: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Wavelength Tunable LED

Page 24: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Si Solar Cell with Ray Optics

Page 25: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Model & Features

Page 26: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Semiconductor ModelsCarrier statistics

• Arora (LI)

• Caughey-Thomas

Heterojunction

• Quasi-Fermi continuity

• Thermionic emissions

Mobility

• Arora (LI)

• Caughey-Thomas (E)

• Fletcher (C)

• Lombardi surface (S)

• Power law (L)

Recombination

• Auger

• Direct

• Trap-assisted

Generation

• Okuto Crowell

Tunneling

• Fowler-Nordheim

Transition

• Indirect optical

• Optical

Metal contact

• Ideal ohmic

• Ideal Schottky

Band gap narrowing

• Slotboom

• Jain-Roulston

Page 27: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Carrier Statistics

Maxwell-Boltzmann

+,- . � exp�2/�-.

Fermi-Dirac

+4� . �1

exp2 �24�/�-. � 1

Page 28: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Carrier Statistics

n-type

p-type

Nondegenerate Degenerate

Page 29: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Mobility Models

Electron mobility in a symmetric dual-gate MOSFET computed

using the Caughey-Thomas mobility model.

Electron mobility in a symmetric dual-gate MOSFET computed

using the Caughey-Thomas mobility model.

• Support arbitrary combination of multiple mobility models

• User defined

• Power-law – Effect of phonons

• Arora– Effect of phonons

– Effect of ionized impurities

• Fletcher– Effect of carrier-carrier scattering

• Lombardi Surface– Surface scattering

• Caughey-Thomas– High field velocity scattering

Page 30: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Generation and Recombination Models

• Recombination– User defined

– Direct

– Trap-Assisted

– Auger

• Generation– User Defined

– Impact Ionization

Summary of the implemented recombination processes for direct

(e.g. GaAs) and indirect (e.g. Si) band-gaps.

Summary of the implemented recombination processes for direct

(e.g. GaAs) and indirect (e.g. Si) band-gaps.

Page 31: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Tunneling

• Tunneling through

insulating boundaries

supported

– Fowler-Nordheim

tunneling model

– User defined tunnel

currents

Tunnel current into the floating contact of an EEPROM

device during program and erase events.

Tunnel current into the floating contact of an EEPROM

device during program and erase events.

Page 32: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

(Direct)Optical Transition• Parabolic direct band gap

• Input data:– Transition strength

– Spontaneous life time

– Momentum/dipole matrix element

– Kane 4-band model

• Output:

– Optical absorption

– Spontaneous emission

– Stimulated emission

– Index changeDirect bandgap model for optical transition Direct bandgap model for optical transition

Page 33: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Indirect Optical Transitions

• Input:– Predefined empirical absorption data for Si, or

– Refractive index

– Electric field amplitude

• Output:– Absorption/photogeneration

Empirical absorption data for siliconEmpirical absorption data for silicon

Page 34: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Heterojunction ModelThermionic emissions Homojunction Heterojunction

n p

n p

Page 35: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Bandgap Narrowing• Slotboom: Empirical model

frequently used for Silicon

• Jain-Roulston: Physics based model, associated material properties available for most application library materials

• Arbitrary user defined models– Specify expressions the

proportion from the conduction and valence bands

Page 36: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Doping

• Analytic Doping Model

– Cuboidal region of uniform dopant concentration

– Decays into a background level with Gaussian, Linear, or Error Function

• Geometric Doping Model

– Define from selected boundaries

– Gaussian, Linear, or Error Function profiles

Page 37: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Dopant Ionization

• Complete ionization

• Incomplete ionization

– Standard/Ionization fraction

– Ramping

Page 38: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Dopant Ionization • Both complete and incomplete

ionization is supported– Standard model provided, or

specify user defined ionization fraction

– Continuation now supported for dopant ionization to enable easier model setup

– This enables incomplete ionization effects to be slowly ramped on automatically using the continuation machinery

Page 39: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Traps• Spatial distribution

• Can be added to Thin Insulator Gate, Insulator, Insulator Interface boundaries

• Discrete trap energy levels

• Multiple different discrete energy levels permitted

• Continuous energy distributions can be created

• Gaussian, rectangle, or exponential functions.

Trap Species Carriers Trapped Charge Unoccupied Charge Occupied

Donor Electrons Positive Neutral

Acceptor Holes Negative Neutral

Neutral electron Electrons Neutral Negative

Neutral hole Holes Neutral Positive

Page 40: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Metal-Semiconductor Contacts• Biasing options

– Voltage-driven

– Current-driven

– Power-driven

– Connect to a circuit (acting as either a current source or a voltage source)

• Ideal Schottky contact– Thermionic emission

– Ideal and non-ideal barrier height

• Ideal ohmic contactIdeal SchottkyIdeal Schottky Ideal ohmicIdeal ohmic

Page 41: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Assumptions

• Relaxation-time approximation

• Parabolic energy bands

• Ignore complex physics at the metal-semiconductor interface

(scattering/potential fluctuation/surface roughness/mirror

image, etc.)

• Ignore complex time-dependent conductivity

Page 42: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Simplifications

• Maxwell-Boltzmann (default) for nondegenerate devices

• Majority carrier devices are analyzed by one carrier (majority) only and the minority carrier concentration is estimated by mass action law

Page 43: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Energy Band

• Due to Bragg reflection caused by the periodic

potential of lattice

�&���

2)� Vcos

29:

;' � <'

% �)9

;

Bragg conditionBragg condition

Schrödinger equation for the wave function

for an electron in lattice

Schrödinger equation for the wave function

for an electron in lattice

<

k29

;

9

;

39

;

&���

2)

Page 44: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Solution Method• Finite volume method (default)

– Gives the best accuracy for the current density

– Scharfetter-Gummel scheme

• Finite element log

• Quasi-Fermi level

Example of a finite volume discretization in 1D.Example of a finite volume discretization in 1D.

::>?�:> ��,>?�/�

Mesh boundaryComputational node

(0th order)

��,>?�/� ��> � B

�C�

∆E�>?�

1 � B�

C�

∆E

A basic Scharfetter-Gummel

scheme

∆:

Page 45: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Meshing

�-.F�F�

��

• Mesh needs to resolve the Debye length

Page 46: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Multiphysics

Page 47: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Optoelectronics Multiphysics Interfaces

Electromagnetic Wave

Interface calculates wave

propagation

Semiconductor Interface

calculates absorption from EM

intensity of carrier dynamics

Spontaneous & Stimulated

emission calculated, along with

change in refractive index

New refractive index fed back

into Electromagnetic Wave

Interface

Semiconductor InterfaceElectromagnetic Interface

Page 48: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Thermal Coupling

Semiconductor Heating Source Resulting Temperature

Page 49: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Schrödinger Equation

Page 50: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Governing Equations

�&�� ·�'

2)� �' � �$&

�'

ð�

�&�� ·�'

2)� �' � �2'

Time-dependent

Stationary

Eigenstate

Page 51: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Features

• Single-particle Schrödinger equation

• General quantum mechanical problems in 1D, 2D, and 3D

• Electron and hole wave functions in quantum-confined

systems

• PML for stationary problems

Page 52: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Applications

Page 53: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Quantum Wire

Page 54: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Harmonic Potential

Page 55: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Super Lattice

Page 56: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Double Barrier 1D

Page 57: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Gross-Pitaevskii Equation

Page 58: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Superlattice Band Gap Tool

Page 59: COMSOL Days 036:COMSOL光学・半導体セミナー(東京会 …...Interface calculates wave propagation Semiconductor Interface calculates absorption from EM intensity of carrier

Contact & Information

• www.comsol.com/contact

• www.comsol.com– Blog

– Reference manual

– Application Libraries

– Application Gallery