Colorimeter & Thin Film Thickness & Transmittance ...Thin Film Thickness & Colorimeter &...

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Colorimeter & Thin Film Thickness & Transmittance Combine Measurement System

Transcript of Colorimeter & Thin Film Thickness & Transmittance ...Thin Film Thickness & Colorimeter &...

Page 1: Colorimeter & Thin Film Thickness & Transmittance ...Thin Film Thickness & Colorimeter & Transmittance Combine Measurement System, that using spectrometer. The SCM-2020 has Variable

Colorimeter &

Thin Film Thickness &

Transmittance

Combine Measurement System

Page 2: Colorimeter & Thin Film Thickness & Transmittance ...Thin Film Thickness & Colorimeter & Transmittance Combine Measurement System, that using spectrometer. The SCM-2020 has Variable

The SCM-2020 is Thin Film Thickness & Colorimeter & Transmittance Combine Measurement System, that using spectrometer.

The SCM-2020 has Variable function, Tabletop size. Suitable for touch panel.

Page 3: Colorimeter & Thin Film Thickness & Transmittance ...Thin Film Thickness & Colorimeter & Transmittance Combine Measurement System, that using spectrometer. The SCM-2020 has Variable

Microscope

System size: 400(W) X 500(L) X 500(H)mm

Stage Size: 280 x 270 mm

Travel Distance: 204 x 204 mm

Measurement Lens : 5X, 10X, 50X

Detector

System size: 190(W) X 265(L) X 316(H)mm

Choose Wavelength : 350~1000nm

Fiber diameter: 200um

Tungsten-Halogen stabilized technical lamp

Page 4: Colorimeter & Thin Film Thickness & Transmittance ...Thin Film Thickness & Colorimeter & Transmittance Combine Measurement System, that using spectrometer. The SCM-2020 has Variable

Easy to Use - Just Click ‘Get Reference’ ⇒ ‘Get Dark’ ⇒ ‘Get Sample’ - Choose recipe to measurement function and anther pre-stored setting.

Stable Operation - Permission is divided to ‘Engineer mode’ and ‘Maintenance mode’

Page 5: Colorimeter & Thin Film Thickness & Transmittance ...Thin Film Thickness & Colorimeter & Transmittance Combine Measurement System, that using spectrometer. The SCM-2020 has Variable

-Measurable Wavelength range: 380 ~ 780nm -Detector (Linear Array Type): 2048 pixels -Chromaticity result: XYZ, xy, u’v’, u*v*, Lab, L*a*b*, ΔCCT -Repeatability (1σ): x ≤ 0.001, y ≤ 0.001, Y ≤0.1 (Continuously, Measuring the same point 30 times ) -Semi automatic chromaticity measurement -Measurement results should be saved as Excel format

Chromaticity result XYZ, xy, u’v’, u*v*, Lab, L*a*b*, ΔCCT

Calibration function

Measurement data table

Page 6: Colorimeter & Thin Film Thickness & Transmittance ...Thin Film Thickness & Colorimeter & Transmittance Combine Measurement System, that using spectrometer. The SCM-2020 has Variable

Up to 3 layers

Can use a lot of pre-stored

material data.

-Thickness and optical N,K measurement by a spectrometer with a grating and a linear CCD detector -Wavelength resolution : 2nm -Detector (Linear Array Type) : 2048 pixels -Wavelength range : 350nm ~ 1000nm

-Thickness measurement range : 200Å ~35㎛ -Measurement spot size : φ40㎛(5x), φ20㎛(10x), φ4㎛(50x) -Multi-layer measurement : Up to 3 layers -Measurement Lens : 5X, 10X, 50X -Measurement Result could be saved as Excel format. -Repeatability (1sigma) : ± 10Å at 5000 Å (Continuously, Measuring the same point 10 times)

Page 7: Colorimeter & Thin Film Thickness & Transmittance ...Thin Film Thickness & Colorimeter & Transmittance Combine Measurement System, that using spectrometer. The SCM-2020 has Variable

-Measurable Wavelength range: 380 ~ 1000nm -Light receiving spot size: < 3mm -Repeatability (1σ) ≤ 0.5 % at 550nm

Select wavelength

Calibration function