CNU Planar Hall Resistance - KOCWelearning.kocw.net/contents4/document/wcu/2012/Chungnam/... ·...
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CNU Planar Hall Resistance- Thermal stability & field sensitivity :
Indirect exchange coupling, FM/AFM
- Increasing active area :
Hybrid AMR/PHR sensor
- Wearable biochip sensor:
Flexible MR substrate
-Applications :
o Biochip sensors
o Single bead magnetometry
o Ferrofluid driplet
o Magnetic phase transition
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V. Results Magnetoresistive effects
AMR/PHR
Voltage in magnetic materials
AMR/PHR
II. PHR
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-Navel Research Lab.- 80x5 µm2 (GMR)- 1 bead (2.8 µm)- 2002 ( 1998)
-U. Bielefeld-70 µm diameter-3 beads (0.86 µm)-2002
-Stanford U. -1x1 µm2 (GMR)-1 bead (2.8 µm)-2002
- INESC-2x6 µm2 (GMR)-1 bead (2 µm)-2003
-Philips Research-3x100 µm2
-10 beads (300 nm)-2005
-IMEC-1 bead (300 nm)-2002
Review article in J.MMM, 293 (2005) 702
-Tokyo Inst. of Tech. - Hall effect in InSb-3x5 µm2 (2005)
IEEE . Magn. 41 (2005) 3661
- CNU -- PHR (2006)
GMR sensors
Giant magnetoresistance in magnetic multilayers《Nobel Prize in Physics (2007)》
Basic patent : US 2002/0119470 A1 (NRL), Sensor patents 13
Developed magnetic sensors II. PHR
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Single layer (France)
Bilayers (Denmark)
Spin-valve Structure (Korea, 2006)
SiO2
TaNiFeIrMn
NiFe
SiO2
TaNiFeCu
NiFeIrMn
SiO2
NiFe
L. Ejsing, et. al. . Magn. Magn. Mater. 293, 677 (2005)
F. Nguyen Van Dau et. al, Sensors and Actuators A, 53, 256 (1996)
PHR sensor structure [~ 2009) II. PHR
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Exchange bias in NiFe/Spacer/CoO bilayer
J. Gkemeijer et al., Phys. Rev. Lett., 79, 4270 (1997)
NiFe 30 nm
CoO 30 nm
Spacer
Motivation
CNU: Trilayer structure (2009)
Role of Antiferromagnetic layer
Enhancement of field sensitivity Enhancement of thermal stability
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Reducing shunt current
cm 1.7 :Cucm 20 : NiFe
cm 210 :IrMn
III. Sensitivity
V/Oe 12 V/Oe 0.6 : S
valve)-(spin Oe 20(bilayers) Oe 125
ex
ex
HH V/Oe 0.6 V/Oe 9.0 : S
Cu1.2A) :(trilayers % 60valve)(spin % 30
active
active
II
10-2010-0054238 특허출원, T. Hung et al, JAP 107, 09E715 (2010)
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ᄋNano-Micro-sezed sensor
: Localized information & approaching time
ᄋ Average over overall sample volume
Sensor arrays or Large sensor area
Active sensor area
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R : Radius W : width
r
w
CNU hybrid PHR & AMR III. Sensitivity
- US2011/0175605A1- 한국출원번호 10-2010-0005657- S. Sun et al, Solid state commun. 2011
V/Oe 320 V/Oe 12 : S
Test Materials : NiFe(50 nm)/MnIr(10 nm)
Self-balancing (Whistone-bridge)
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PHR effect
AMR effect
0 2 4 6 80.0
0.5
1.0
1.5
2.0
2.5
3.0
Out
put V
olta
ge (m
V)
R/w ratio of Ring
R : Radius W : width
R
w
-400 -300 -200 -100 0 100 200 300 400-1000
-500
0
500
1000
1500
Vol
tage
(V
)H (Oe)
r = 150 μmw = 20 μm
Ring type sensorTest Materials : NiCo(10 nm)/MnIr(10 nm)
Enhance the output signal with no hysteresis
AMR/PHR performance : ring type
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Multi-ring sensor elements
Off-set adjustment
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Flexible organic substrates
Embedded electrodes
Solar Energy Materials & Solar Cells 95 (2011) 1339
Printed electrodes
KN Eindhoven, The Netherlands
June ,2010 IEEE Xplore,KIMM, Korea
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Flexible organic GMR substrates
(Co/Cu)n deposition on polyester
Appl. Phys. Lett. 69 (1992) 3092
Multilayers & electrode : Sputtering
Weak adhesion
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Hybrid fabrication procedures
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(c)(b)(a) PEN - bilayer
3.387 nm
glass - bilayer
694.671 pm
Si - bilayer
rms roughness -180.821 pm
AFM PEN (Polyethylene naphthalin) film stability
Temperature dependence of PHR
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16 14 12 10 8 6 4 2 00
15
30
45
60
75
90
Distance,D (mm)
Ang
le,
()
PEN film bending
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0 10 20 30 40 50 60 70 80 90-10
-5
0
5
10
15
20
25
Vol
tage
(mV
)
Angel,()
concave convex
D=16 mmD=8 mm
D=0 mm
D=16 mm D=8 mm D=0 mm
Electrode stability: Resistance variation
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Electrode stability: Resistance variation
0 15 30 45 60 75 90-20
-15
-10
-5
0
5
10
15
20
Angel,()
Vol
tage
(mV
)
Au electrode
Ag paste
Contact lost
D=16 mm D=8 mm D=0 mm
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-200 -150 -100 -50 0 50 100 150 200
-3
-2
-1
0
1
2
3
4 0 15 30 45 0
Vol
tage
(mV
)
Field (Oe)
Electrode stability: Resistance variation
0 100 200 300 400 500 600
0
2
4
6
8
10
Vol
tage
(V)
Time (sec)
0 200 4000.44
0.46
0.48
0.50
Θ = 15°
30°45°
0°
15°75°
60°
Multilayers electrodes : Ta/IrMn/NiFe/Ta/PEN
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PEN film – Electrode (Au)
PEN film – Electrode - bend
0 20 40 60 80
0
100
200
300
400
Hig
ht (n
m)
um
약 200 nm
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Magnetic sensor performanceResearch group Sensor type Size (μm2) Sensitivity
(μV/Oe·mA) Label size Biological detection
Molecular resolution
Stanford U. (Shan X. Wang)USA
Rectangle GMR (SV) Strip (32)
TMR
12 × 310 × 2.593 × 1.5
-
35.8-
2.8 μm (Dynabead)100 nm (SAF)
50 nm -3 μm (MNT)50 nm (Macs)
16 nm (MFe2O4)
NoYesNoYesNo
10 pM5 fM (2010)
(Protein)(Biosen. Bioelec. 25
(2010) 2051.)
INESC-MN(P. Freitas) Portugal
Rectangle GMR(SV) array (32)
TMR
80 × 2.540 × 2.515 × 2
35.842.4
130 nm250 nm2.8 μm
NoYesNo
1 fM(2002)(DNA)
(Biosen. Bioelec. 24 (2009) 2690.)
DTU(M. F. Hansen) Denmark PHR-Cross 10 × 10
40 × 40 3.2 2 and 2.8 μm(Dynabead) No
Bielefeld U.(Reiss) Germany
TMR(Elliptical) (20)
GMR (SV) spiral
0.4 × 0.11800(dia.)1(width)
-
16 and 50 nm(Co)2.0 μm
(Dynabead)350 nm and 860 nm
(Bangs)
NoYes
800 fM(2008)(Protein)
(Biosen. Bioelec. 19 (2004) 1149.)
U.Minnesota(J.P. Wang) USA GMR (SV) 80 × 40 600 12 nm (FeCo) Yes
~zM (2009)(Protein)
(Angew. Chem. Int. Ed. 48 (2009) 2764.)
NRL(M.M. Miller) USA AMR (Ring) 5 (dia)
3 (width) 15.2 4.3 μm (NiFe) No
SFIT(P.A. Besse) Swiss Silicon Hall sensor 2.4 × 2.4 17.5 2.8 μm
(Dynabead) No
CNU(C.G. Kim) Korea
PHRHybrid ring
3 × 3300 (dia)5 (width)
12.0
1690
1 and 2.8 μm(Dynabead) No
Philips Research Europe(W.U. Dittmer)
NetherlandsGMR (SV) Strip - - 300 and 500 nm
(Ademtech) Yes
0.8 pM(2008)(Protein)
(J. Immunological Meth. 338 (2008)
40.)
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1D assay application (Cardiac Troponin I (cTnI)
Diffusion processAnalyte binding
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-300 -250 -200
1.35
1.40
1.45
1.50
1.55
Base Signal Mag Bacteria_1 Mag Bacteria_2 Mag Bacteria_3 Mag bead Mag bead remove
Vol
tage
(V)
Field (Oe)
-300 -200 -100 0 100 200 300
0.0
0.5
1.0
1.5
2.0
0 50 100 150 200 250 300
1.44
1.46
1.48
1.50
1.52
Vol
tage
(mV
)
Time (sec)
Bacteria spay
Bead drop
Bead wash
2D assay: Bacteria detection
Magnetosomes
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2D assays
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The voltage change during the repeated drop and washing of bead
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-fluidic channel integrated with sensor
Punch card( ~ 1980s)
See poster: p. 71
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Nanosized Spin-Crossover Materials
TEM image of 250 ± 40 nm nanoparticles and the corresponding size histogram. (The largest dimension of each nanoparticle was used for the statistics.)
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(a) The voltage change associated with change of properties of SCO particles. (b) The diamagnetic/paramagnetic phases are characterised by a lower/higher voltage. (c) The insets show the colour change of the particles: pink in diamagnetic low spin state (d) and white in the paramagnetic high spin phase. (b) Reflectance measurements ( = 550 ±40 nm) (e) of the [Fe(hptrz)3](OTs)2 SCO nanoparticles on the sensor surface.