CMOS Technology Overview
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1 Overview of CMOS Technology 1.1 Introduction Complementary metal-oxide-semiconductor (CMOS) technology has been the most important driving force for the evol ution of almost all ki nds of tech- nology in the last five decades [1, 2]. It has revolutionized the way we live and has expanded our productivities and capabilities. For example, comput- ers and t he Internet, mobile phones and PD As, video game a nd multimedia players, and digital and video cameras, using CMOS chips as the core com- ponents, have become i ndispensable devices for our daily lives and improve the productivities of many disciplines. The CMOS technology has now evolved into two extremes: the gigascale in terms of integration level and the nanoscale in terms of devic e feature sizes. The history of this tech nology development has followed a simple but amazing pattern—scaling, which involves downsizing in device size and upscaling in chip density—and has achieved the legend of “smaller-larger-faster-cheaper” in the exponential rate, or Moore’ s law , for over five decades. This legend will continue for at least another decade, though we are now facing a lot of critical challenges [2]. The density of the microprocessor chip has been quadrupled every three years while the mini mum transistor feature was reduced to some thousandth in the past fiv e decades. This exponential trend was first predicted by Gordon Moore in 1965 and is now known as Moore’s law [3]. Figure 1.1 depicts the integration density of different generations of Intel microprocessors [4]. It fol- lows closely with the t rend as predicted by Moore. Intel fabricated in 1971 its first 4-bit 750 kHz MOS transistor-based single-chip microprocessor (MPU), Intel 4004, and t hus started the m icroprocessor rev olu tion and the MOS tech- nology evolution. At that time, the typical MOS transistor channel length was about 10 μm and the number of transistors or chip density was 2250. Seven years later , the density of an 8-bit 8086 microprocessor reached 29 ,000. In the next four years, the chip density was fu rther raised by more tha n four times, to 120,000, in the 16-bit 80286 microprocessor, which was used as the core of the widely used personal microcomputer at that time. The downsiz- ing of the MOS transistor led to the decrease in capacitance and power con- sumption and to the increase in the ci rcuit operating speed. Meanwhile, the
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