CMM developments at the National Physical...
Transcript of CMM developments at the National Physical...
CMM developments at theNational Physical Laboratory
Andrew Lewis, NPL
Tercera Reunión Anual del Club Mexicano De Usarios de Máquinas De Medición por Coordenadas
Santiago de Querétaro, Mexico, 26 October 2006
OUTLINE
• Introduction to Length metrology at NPL
• Small-scale CMM developments
• Medium-scale CMM developments
• Large-scale CMM developments
• Optical CMM developments
• Introduction to Length metrology at NPL
• Small-scale CMM developments
• Medium-scale CMM developments
• Large-scale CMM developments
• Optical CMM developments
NPL LENGTH METROLOGY
11 research staff
4 calibration staff
• Introduction to Length metrology at NPL
• Small-scale CMM developments
• Medium-scale CMM developments
• Large-scale CMM developments
• Optical CMM developments
SMALL SCALE CMM
50 x 50 x 50 mm range
50 nm uncertainty
CMM z-stem
3 mirrors on probe carrier
length-angle interferometer
autocollimator
probing system
metrology frame
component mount
Laser interferometers measure:
3 axis displacements
3 axis parasitic rotations
3D analogue probe
Math compensation for errors in machine geometry
Overall schematic (one metrology axis shown)
SMALL SCALE CMM: SCHEMATIC
Capacitance gauges, 20 µm gap
Beryllium-Copperflexure
PROBE HEAD
300 µm probe tip
Mass of moving part: 350 mg
Small CMM and host CMM
Value
Type B, Type ASource of uncertainty
3.5 nm, 4 nmInterferometry
12.4 nm, 2.0 nmProbe carrier, including mirrors
9 nmMetrology frame
51 nm, 6 nmMiniature probe system
52 nm, 7 nmTotal (standard uncertainty, per axis)
UNCERTAINTIES
MEASUREMENT TASK
M2
MICROPROBES
• Introduction to Length metrology at NPL
• Small-scale CMM developments
• Medium-scale CMM developments
• Large-scale CMM developments
• Optical CMM developments
STEP GAUGE SYSTEM
CMM verification
Step gauges
L < 1200 mm
(L > 1200 mm)
STEP GAUGE SYSTEM
2 mirrors attached to probe
Column reference interferometer
Length-angleinterferometer
STEP GAUGE SYSTEM: OPTICAL SCHEMATIC
D1D2
DR
∆D1∆D2
∆DR
Compensation for measurements not on the Abbe line: Length (D) and Angle (∆D)
Measurement from two directions but with common reference
OVERALL PERFORMANCE
Run – to – run repeatability:
– typically 70 nm std dev on any face centre
Uncertainty (95% confidence level):
± (0.1 + 0.3L) µm
where L (m) is the distance from the datum step
• Introduction to Length metrology at NPL
• Small-scale CMM developments
• Medium-scale CMM developments
• Large-scale CMM developments
• Optical CMM developments
Build a medium-size CMM1 m range, 0.3 µm uncertainty
Build metrology system for large CMMs1 to 30 m range, 1 to 30 µm uncertainty
EVOLVING REQUIREMENTS
Error mapping of medium &
large sized CMSs
> 1 m range, > 1 µm uncertainty
Multilateration is defined as “a measuring system that determines either two or three dimensional coordinates
by combining only length measurements made from
fixed points”
SOLUTION: MULTI-LATERATION
Fixed measuringstations Movable
target
Li
Use laser trackers as measuring stations
Multilateration using laser trackers:
ensures that the Abbe criterion is always fulfilled (all displacements are, by definition, along the measurement axes [laser beams]);
uses a ‘virtual’ metrology frame, separate from the motion systems;
uses data redundancy for increased confidence or monitoring:
� after n measurements of target: 10 + 3n (unknown) , 4n (known)
� so for n =10, system is solvable, n > 10 gives data redundancy
MULTILATERATION: ADVANTAGES
IMPROVING LASER TRACKERS
Problems of commerciallaser trackers:
misalignment of steering mirror axes
misalignment of reflecting point of laser on mirror surface
small acceptance angle of retro-reflector
relatively poor angle scale uncertainty
Combined bearing and interferometer reference
Spherical bearing
Integrated interferometer
Datum is virtual centre of sphere:
Mechanical centre =
Optical centre
METROLOGICAL LASER TRACKERS
Hemi-spherical retro-reflector
r1 = (n-1)r2
r1 r
2
RETRO-REFLECTOR IMPROVEMENTS
r
Spherical retro-reflector
r1 = r2 = r, when n = 2
n = 2 retro-reflector
r1 = r2 = r
r
Uncertainty contributions
Form error
Homogeneity
Aberrations
But…Wider angle of acceptance
REDUCTION OF RETRO ERRORS
CMM &
trackers agree
on
displacement to
within
200 nm
MULTILATERATION WITH 4 TRACKERS
Only 1 tracker needed
Mounted in 4 positions
CMM must be repeatable
Combined uncertainty
of the tracker system
and the CMM repeatability is about
200 nm (k = 1)
SEQUENTIAL MULTILATERATION WITH 1 TRACKER
Collaboration with PTB:
Heinrich Schwenke
SEQUENTIAL MULTILATERATION WITH 1 TRACKER
-0.014
-0.012
-0.010
-0.008
-0.006
-0.004
-0.002
0.000
0.002
0.004
0 100 200 300 400 500 600 700 800 900 1000
Y (mm)
(mm
)
HORIZONTAL STRAIGHTNESS
Holeplate
Sequential multilateration-0.014
-0.012
-0.010
-0.008
-0.006
-0.004
-0.002
0.000
0.002
0.004
0 100 200 300 400 500 600 700 800 900 1000
Y (mm)
(mm
)
VERTICAL STRAIGHTNESS
Holeplate
Sequential multilateration-0.014
-0.012
-0.010
-0.008
-0.006
-0.004
-0.002
0.000
0.002
0.004
0 100 200 300 400 500 600 700 800 900 1000
Y (mm)
(mm
)
SCALE ERROR
Holeplate
Sequential multilateration
• Introduction to Length metrology at NPL
• Small-scale CMM developments
• Medium-scale CMM developments
• Large-scale CMM developments
• Optical CMM developments
OPTICAL CMM STANDARDS
• NPL Vision CMM
• Laser interferometer
• Grid plate software:
– Error separation
– 4 rotations
– 1 linear shift
• Grid error
• Machine error
• U < 1 µm
OPTICAL CMM STANDARDS
• Grid plates:
– from 60 x 60 mm
– to 600 x 600 mm
OPTICAL CMM STANDARDS: DETAIL OF GRID (TARGETS 30 – 500 µm)
OPTICAL CMM STANDARDS: FORM MEASUREMENT STANDARDS
• Prismatic standards for optical 3D systems
• Calibrated on contact CMM
– 50 mm size
– 100 mm size
– ‘simple’
STANDARDS FOR HUMAN ARTEFACTS: ANTHROPOMETRY
• 3D body scanners – clothing industry, medical, security
• Traceability ?
ANTHROPOMETRY STANDARDS: FIRST GENERATION ARTEFACT
• Anthropometric standard
• 2 m tall
• Prismatic components
• Calibrated to < 50 µm
SUMMARY
• Small-scale CMM developments
– 50 mm CMM to 50 nm
• Medium-scale CMM developments
– Step gauge system
• Large-scale CMM developments
– Multi-part artefact
– Multi-lateration
• Optical CMM developments
– Grid plates
– Form artefacts for optical CMMs
– Anthropometric standards
THANK YOU!