Clean-room Gas Monitor Model CM505 (Impinger)conducted for this purpose is impinger method....
Transcript of Clean-room Gas Monitor Model CM505 (Impinger)conducted for this purpose is impinger method....
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GeneralSpecifications
Clean-room Gas MonitorModel CM505 (Impinger)
Yokogawa Electric Corporation2-9-32, Nakacho, Musashino-shi, Tokyo, 180-8750 JapanTel.: 81-422-52-5617 Fax.: 81-422-52-6792
GS 12Y04F03-01E
GS 12Y04F03-01E©Copyright Jul. 2007
3rd Edition Oct. 10, 2008
n GENERALAs the degree of integration of LSI increases as well as large scaled FPD production is driving forward, removal of gaseous contaminants such as ammonia and acid gases in clean room has become an impor-tant issue. To cope with this requirement, monitoring of air borne contaminants and periodic check of chemi-cal performance is vital measure. Typical test method conducted for this purpose is impinger method. How-ever, conventional impinger method has problem of long measuring time and cross contamination by the operator. The CM505 Clean room gas monitor realize contamination-free, on-line air borne monitoring with impinger method with measuring time of 1 hour. Op-tional multi-stream type (16 points) is also available. The system can monitor both Ammonia (or cations) and Acid gases (Anions) depend on the requirement.
n FEATURES●Gascollectionisdonebyimpingerthusbothgaseous
and particle/mist contaminants are collected● Ammonia gas is measured at a sensitivity of 0.01
µg/m3.● Acidic gases (hydrogen chloride, sulfur dioxide,
nitrogen dioxide, etc.) are measured at a sensitivity of 0.02 µg/m3
●ThesystemcanmonitorCations(sodium,calcium,etc.), Fluoride and organic acid (formic acid, acetic acid), and Boron depend on the requirement.
● Fully automated system and un-manned measure-ment
●Ionchromatography,ahighlyreliableanalyzingtech-nique is used
● The results are monitored on a trend graph from a work station. Optional communication output is avail-able
●Chemicalfilterlifeproductionsoftwareisavailable● Optional multi-stream switching type (up to 16) is available
n SYSTEM CONFIGURATIONThis system consists of a gas collection unit with a im-pinger unit, an ion chromatograph unit and a worksta-tion (personal computer) as human interface.
1. GasCollectionUnitThe gas collection unit is composed of a stream se-lector (optional) and a gas collector (Impinger)
StreamSelector(optional)Thestreamselectorfor16pointsisavailable.Sam-plingtimeisselectable.Maximumsupplytubelengthis 50 m.Tominimize"memoryeffect"duetoabsorptionofsamplestothesurfaceofthetube,thesystemisprovidedwithafunctiontowashthetubefromthestream selector valve to the impinger with pure water. Thesystemalsoprovides"fastloop"tominimizethedelay in measuring time for the case where sample tubeislong.
GasCollector(Impinger)Sample gas is introduced into impinger and those contaminantsinthesample,bothingaseousandparticle/mistformareabsorbedinthepurewater.Afterbubbling(gascollection),thewholeamountof water in the impinger and washing water used is introduced to Ion-chromatograph.
2. IonChromatographUnit(Pi501)The ion chromatograph unit traps the collected ions in the concentration column. After that, those ions are forwardedtotheseparationcolumnbyoperatingtheswitching valve.Theseparationcolumnisfilledwithapackingmate-rial with ion exchanger. The ion components entering thecolumnwillbeseparatedbyitselectrical/physicalcharacteristicsrespectivelyandthenflowistothede-tector. The detector measures concentration of those respective ions separated.
3. Workstation(PC)The workstation is used for operation and data displays, such as system running and operation commands, running status display, chromatogram in-dication,displayofhistoryofanalyzedvalues,alarmindication, a function notifying remaining service life offilter(optional),settingofvariousparameters,etc.
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GS 12Y04F03-01E Oct. 10, 2008-00
Gas collection unit
Stream selector (option)
Stream
selector valve
Stream valveGas introduction pump Eluent
Eluent pump
Sampling pump Concentrationcolumn
Ion ChromatographUnit
Separation columnDetector
Switching valve
Oven
To another impinger unit and ion chromatography
Impinger
Effluent pump
Impinger unit
Gascollection
pump
Pure water
Minimum detection limit*: 0.01μg/m3 for F– and Cl– 0.05μg/m3 for HCOO– 0.10μg/m3 for CH3COO–Measurement cycle: Less than 60 min (at overlap
measurement)(5) Boron measurement
Measurablecomponents: BMeasuring range: 0 to 100 ng/m3Minimum detection limit*: 10 ng/m3Measurement cycle: 140 min
*: Minimum detection limit means the calculated valuebythesenseandnoise(S/N>2)
Measurement accuracy:Range Co-relationwithmanualimpinger
< 0.5 ***0.5 to 1.0 Less than ±40 %
1.0 to 5.0 Less than ±20 %
5.0 to 50 Less than ±15 % ***: Depend on the variation of manual impinger
Measuring points: One point or up to 16 points (optional)Measurement method: Overlap measurement , series measure-
mentCalibration: Calibrationusingstandardsolutions,auto-
maticcalibrationExternal contact input: Measuring stream skip signal, external
alarm signal, and external alarm reset signal
External output: Abnormalconcentrationsignal(forevery
stream, relay contact), system alarm signal (relay contact), measuring stream signal(binary,relaycontact),re-measure-ment signal (relay contact), liquid leakage signal(relaycontact),alarmbuzzersignal,and alarm light signal
nSTANDARDSPECIFICATIONSModel: CM505 Clean Room Gas Monitor
● SystemSpecificationsGas collection: Impinger methodAnalysis method: Ion chromatography Measurement:(1) Ammonia measurement:
Measurablecomponent: NH3Measuringrange: 0to50μg/m3Minimumdetectionlimit*: 0.01μg/m3Measurement cycle: Minimum 40 min (at overlap
measurement)(2) Cations measurement
Measurablecomponents: Na+, NH3, K+, Ca2+, Mg2+Measuringrange: 0to50μg/m3Minimumdetectionlimit*: 0.01μg/m3Measurement cycle: Minimum 40 min (at overlap
measurement)(3) Anion measurement
Measurablecomponents: Cl-, Br-, NO2-, NO3-, SO32-, SO42-,
PO43-, (SO2 amount is calculated from SO32- and SO42-)
PO43-measurementissubjecttosam-ple test
Measuringrange: 0to50μg/m3Minimum detection limit*: 0.02μg/m3forAcidgasand0.05μg/
m3 for PO43-Measurement cycle: Minimum 40 min (at overlap
measurement)(4) Fluoride/organic acids measurement
Measurablecomponents: F–, HCOO–, CH3COO–, Cl–Measuring range: 0 to 5μg/m3 for F– and Cl– 0to30μg/m3 for HCOO– and
CH3COO–
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UtilityPower supply: 100Vto120VAC,50/60Hzor200Vto
240VAC,50/60HzPower consumption: CM505; 0.5 kVA ForPersonalcomputer(notebookPC),
a power line in separate power source is required.
Wiring material: 3-wireshieldedcableofouterdiameter
12.5 to 14.5 mmGrounding: Independent grounding (grounding resist-
ance 100 ohm or less)
PureWater• ForExternalpurewaterinlettype
Purity: 18 Mohm/cm or morePressure: 0.2 to 0.3 MPaFlowrate: 1 to 2 L/min.Connection port: SUPER type Pillar Fitting,Tubesize: OD 6.35 mm, ID 4.35 mm
• ForPurewatersupplysystemPurity: 18 Mohm /cm or more
Water supply: Pure water (18 Mohm /cm or more)Operating temperature range: 5 °C to 40 °CPure water tank: 20 L come with low level sensor
Reagent(EluentandRegenerant)(1) Ammonia measurement
1 mmol/L nitric acid (HNO3), 0.2 ml/min.Supply frequency: Approx. once a month, replacement
(2) Cation measurement11 mmol/L Sulfuric acid (H2SO4), 0.2 ml/min.Supply frequency: Approx. once a month, replacement
(3) Anion measurement4.5mmol/Lsodiumcarbonate(Na2CO3), 0.2 ml/min.Supply frequency: Once a month, replacement
(4) Fluoride/organic acids measurement7 mmol/L of sodium hydroxide, 0.2 ml/min.Supply frequency: Once a month, replacement
(5) Boron measurementEluent:
1 mmol/L sulfuric acid plus 7.5 mmol/L mannitol, 0.5 ml/min.Supply frequency: Once every 12 days, replacement
Regenerant:25 mmol/L tetramethylammonium hydroxide plus 7.5 mmol/L mannitol, 0.5 ml/min.Supply frequency: Once every 12 days, replacement
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WasteWater• Chemicaleffluent
(1) Ammonia measurementNitric acid solution, approx. pH 5, 2.2 ml/min.
(2) Cation measurementSulfuric acid, approx. pH 4, 2.2 ml/min.
(3) Anion measurementSodium-carbonatesolution,approx.pH10,2.2ml/min.
(4) Fluoride/organic acids measurementSodium hydroxide solution, approx. pH 10, 2.2 ml/min.
(5) Boron measurementSulfuric acid, tetramethylammonium hydroxide and mannitol mixed solution approx. 3 ml/min.
• FordirectconnectiontofactorywastewaterlineEffluent: MixtureofChemicaleffluentandpure
waterdrainage(about1to2L/min.)Piping: Thewastewaterisnotpressurizedandso
thewastewaterpipemustbepositionedbelowtheanalyzer
Piping material: Corrosion-resistant material such as stain-
less steelConnection port: Rc 1/2
• ForPurewatersupplysystemFrequency of tank discharge: Once every two days, discharge from the
20 L tank.InstallationEnvironmentMustbeinstalledinthecleanroomorinaplacewhichisascleanaspossibleSamplegasisdischargeddownwardfromthebackoftheCM505.Anexhaustsystemmayberequiredseparately.Ambienttemperature: 10 °C to 30 °C. Temperature changes dur-
ingmeasurementshouldbeminimal.Ambienthumidity: 20 to 80 % RH, no vapor condensationAltitude: 2000mabovesealevelorlessOthers: Nodust,Novibration,Notilting,Noexpo-
suretodirectsunlight,Nodirectairblownfrom an air conditioner, No corrosive or explosiveatmosphere,Mustbefixedasan anti-seismic measure.
SampleGasconditionsUpper detection limit: 100 µg/m3Measuring port pressure: -0.05 MPa or moreFlowrate: 1or2L/min.(peranalyzer)Tube: Tobepreparedbycustomers TubematerialPE TubesizeOD6.0mm,ID4.0mm,length
up to 50 m.Theinsideofthetubemustbecleanedwithpure
water.
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GS 12Y04F03-01E
● CabinetSpecificationsConstruction: Stand-alonenon-closedtype(fixedtothe
floorwithanchorbolts)withfrontdoorandkey, for indoor installation
External dimensions: 860 (W) X 730 (D) X 1060 (H) mmMaterial: Body; Steel plate, Door; Steel plateCoating: EpoxyresinbakedfinishCoating color: Roof; Munsell N-3.5-0, semi-gloss, Front
and side plates; Munsell 2.5Y 7/4, semi-gloss
Weight: Approx. 150 to 180 kg depend on the specifications
• Purewatersupplysystemspecifications(comewithpurewatersupplysystem,20Lwatertank,20Leffluenttankontrolley)
External dimensions: 555 (W) X 840 (D) X 810 (H) mmWeight: approx.23kgexcludingwaterandefflu-
ent
● MainComponentUnitSpecifications• GasCollectionUnit
Stream selector valve (optional): 16-points selectionSelectionperiod: VariablePure water washing function: SettingforeverystreampossibleGas introduction pump: 2pumps,FlowrateAbout10L/min.Impinger: 2units(1analyzertype),or4units(2
Analyzertype)Gas collection pump: 1 or 2 units depend on the application,
Flowrate range 0.1 to 2 L/min. (practical flowrate1L/min.)
• IonChromatographUnitModel: Pi501Eluent feeding pump: 1setofdoubleplunger,activedamper
systemSuppressor: Used except Ammonia measurementSampling pump: With cleaning mechanism, 1 setOven: Temperature 45 °CElectrical conductivity detector: 1 unit, measuring range 0 to 5 mS/cmAutomatic switching valve: 1 unitMain column: 1 columnConcentration column: 1 columnDimensions: 370 (W) X 460 (D) X 230 (H) mm without
suppressor 410 (W) X 460 (D) X 230 (H) mm with
suppressorWeight: Approx. 24 kg without suppressor, Approx.
27 kg with suppressor
● Workstation(notebookPC)Tobepreparedbycustomer.Weightshouldbeunder10kg,whenitisputonCM505.Recommendedspecificationsare,
ItemOS
MIcrosoftWindows2000SP4,MicrosoftWindowsXPSP2
MicrosoftWindowsVistaBusinessEdition
PC IBMPC/ATcompatible
CPU PentiumII300MHzor higher 1GHzor higher
HDD 4 GB or more 15 GB or more for OS10 GB or more for ApplicationRAM 256 MB or more 1 GB or more
Language English or Japanese
Display800 x 600 VGA or higher,andbeviewablewithequaltoormorethan256colors
Serial port
OneRS-232Cportforconnectiontoeachanalyzer;oneportforthesingleanalyzereditionofPI500Workstation,andtwoforthedual-analyzeredition.
I/O: D-Sub9pinRS-232-Cport(male),2portsfor2analyzertype
UseUSB-SerialtransfercableatthecaseofinstallmoreportssuchasnotebookPC.
Therecommendedtransfercable: ELECOM CO., LTD. USB PC to Serial
CableUC-SGTCable: RS-232-Ccrosscable
● WorkstationSoftwarePIWSFor operation and display of CM505NumberofIonchromatograph: Choice of 1 or 2Languagetobedisplayed: Choice of English or JapaneseMedia of software: CD-ROM
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nPRODUCTMODELCODES● ModelCM505Clean-roomGasMonitor
Model BasicCode OptionCode Descriptions
CM505 - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - Clean-room Gas Monitor (with Impinger)Measurement -1
-2- - - - - - - - - -- - - - - - - - - -
1analyzertype2analyzertype
Anions -NN-A2
- - - - - - - - - -- - - - - - - - - -
NoneAnion measurement (with suppressor)
Cations -NN-C1-C2
- - - - - - - - - -- - - - - - - - - -- - - - - - - - - -
NoneAmmonia measurementCation measurement (with suppressor)
Display language -E-J
- - - - - - - - - -- - - - - - - - - -
EnglishJapanese
--- -N - - - - - - - - - - Always “-N”--- -N - - - - - - - - - - Always “-N”--- -N - - - - - - - - - - Always “-N”Option /EX
/W16-streams measurementWith pure water supply system *1
*1: Comewithpurewatersystem,water/effluenttankontrolley.
● ModelPi501ProcessIonChromatograph
Model BasicCode OptionCode Descriptions
PI501 - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - Process Ion ChromatographEL pump -P1 - - - - - - - - - - Always"-P1"Oven -V1 - - - - - - - - - - Always"-V1"Measurement -A1-A-B
-C1-N-A-C2-A-D-Y1-A-B
- - - - - - - - - -- - - - - - - - - -- - - - - - - - - -- - - - - - - - - -
Anion measurementAmmonia measurementCation measurementFluoride/organic acids measurementor Boron measurement
Display language -E-J
- - - - - - - - - -- - - - - - - - - -
EnglishJapanese
--- -N - - - - - - - - - - Always “-N”--- -N - - - - - - - - - - Always “-N”--- -N - - - - - - - - - - Always “-N”Option /T Withterminalboard
● ModelPIWSWorkstationSoftware
Model BasicCode OptionCode Descriptions
PIWS - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - Workstation software for Pi500Display language -E
-J- - - - - - - - - -- - - - - - - - - -
EnglishJapanese
Numberofanalyzer 12
- - - - - - - - - -- - - - - - - - - -
12
--- -0 - - - - - - - - - - Always"0"--- 1 - - - - - - - - - - Always “1”--- -N - - - - - - - - - - Always “-N”--- N - - - - - - - - - - Always “N”--- N - - - - - - - - - - Always “N”
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GS 12Y04F03-01E
nACCESSORIESANDSPARES1. Standardaccessories
Name Partnumber Qty Description
Ammonia
Eluent *1 --- Please purchase it from chemical company.
Standard solution *1 K9601LB 1 NH4+ 10 mg/L, 50 ml
System check solution *1 K9601LC 1 NH4+ 1 mg/L, 100 ml
CationEluent *1 --- Please purchase it from chemical company.Standard solutionSystem check solution *1 J9735BD 2
Standard solution 50mL (mg/L)Li+:0.5, Na+:2, NH4+:2, K+:5, Ca2+:5, Mg2+:5 (mg/L)
Anion
Eluent *1 --- Please purchase it from chemical company.
Standard solutionSystem check solution *1 K9601LG 2
Standard solution 50mL (mg/L)F-:5, Cl-:10, NO2-:15, Br-:10, NO3-:30, PO43-:30, SO42-:40 (mg/L)
Fluoride and
organic acid
Eluent *1 --- Please purchase it from chemical company.
Standard solution *1 --- Please purchase it from chemical company.
BoronEluent *1 --- Please purchase it from chemical company.
Standard solution *1 --- Please purchase it from chemical company.
Anchorboltset K9613MA 1
TUBEworkingjig K9613MC 1 Toolfortubeconnection
Tank 10 L K9603ZJ 1 or 2 *1 Eluent tank
Fuse S9517VK 2 3 A
Fuse A1288EF 2 1 A
Fuse L9019EF 2 or 4 *1 3 A, for Pi501
Fuse A1174EF 2 1.25 A
Ferrite core K9607MU 7 For CM505 power supply (2) and DO (5)
Ferrite core K9607MV 2 or 4 *1 Between PC and Pi501
Tank 20 L *2 K9603RF 1 For pure water
Accessories kit *2 K9601BG 1 For pure water
Insert tool for regenerant pump *3 J9734QY 1 For only Boron measurementUser's manualCM505 Clean-room Gas Monitor IM 12Y04F03-01E 1
*1: Dependonthesystemspecifications*2: Provided when pure water system is ordered*3: Providedwhenboronmeasurementsystemisordered
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2. Sparepartsandconsumables
Recom-mendedreplace-mentInterval
Item PartNumber
Qty
Ammonia Cation AnionFluorideand
organicacid
Boron
1 month Fluoride/organicacidmeasurement:filterunit*4 9933-11-102 2
3 months
Ammonia measurement: concentration column *1*2 K9601GA 1
Ammonia measurement: separation column *1*2 K9601FA 1
Cation measurement: concentration column *1*3 J9732AN 1
Cation measurement: separation column *1*3 J9732AX 1
Cation measurement: suppressor *1*3 J9732DV 1
Anion measurement: concentration column *1*3 J9732DX 1
Anion measurement: separation column *1*2 J9732DF 1Anion/fluoride/organicacid/boron measurement: suppressor *1*3 J9732DU 1 1 1Fluoride/organic acid measurement: concentration column *1*2 J9732QV 1
Fluoride/organic acid measurement: separation column *1*2 J9732QU 1
Boron measurement: concentration column *1*2 J9732QR 1
Boron measurement: separation column *1*2 J9732QS 1
Linefilter K9601DC 1 1 1 1 1
4 months Diaphragmforeffluentpump K9601BH 1*5 1*5 1*5 1*5 1
6 months
Plunger seal for eluent pump K9600HZ 2 2 2 2 2
Plunger seal for sample pump: for reagent line K9600NY 2 2 2 2 2
Plunger seal for sample pump: for wash line K9600NZ 2 2 2 2 2
Plunger seal for regenerant pump: for reagent line J9734QM 1
Plunger seal for regenerant pump: for wash line J9734QR 1
1 year
Rotor seal for concentration valve K9600QC 1 1 1 1 1Plungerforeluentpump(forammonia/anion/fluoride/organicacid/boron measurement) *1 K9600HY 2 2 2
Plunger for eluent pump (for cation measurement) *1 K9600HE 2 2
Check valve for eluent pump: pump inlet *1 K9600HA 1 1 1 1 1
Check valve for eluent pump: pump outlet *1 K9600GV 1 1 1 1 1
Plunger for sample pump *1 L9869DJ 2 2 2 2 2
Check valve for sample pump: pump inlet *1 K9600NG 1 1 1 1 1
Check valve for sample pump: pump outlet *1 K9600NB 1 1 1 1 1
Plunger for regenerant pump *1 J9734QV 1
Check valve for regenerant pump: pump inlet *1 J9734QK 1
Check valve for regenerant pump: pump outlet *1 J9734QJ 1
Gas collection pump *1 K9608GJ 1 1 1 1 1
Degassing module *1 K9603PB 1 1 1 1 1Cartridge for pure water supply system:Q Guard TL *6 QGARDTL01 1
*1: Replacementintervalmayvarydependingonoperatingcondition.Shouldbereplacedasneeded.*2: Shelflifeis6monthswhenstoredinacleanplace,outofdirectsunlight,attemperaturesbetween15and28°C.*3: Shelflifeis3monthswhenstoredinacleanplace,outofdirectsunlight,attemperaturesbetween15and28°C.*4: Usedtopreventcarbondioxidegasintheairfromenteringtheeluentforfluoridemeasurement.Requiresreplacement
onceamonth.ShouldbepurchaseddirectlyfromParkerHannifinCo..ListedpartnumberisthecataloguenumberofBolston Filter.
*5: Only with pure water supply system.*6: Only with pure water supply system. ShouldbepurchaseddirectlyfromNihonMilliporeK.K.ListedpartnumbersarethecataloguenumbersofNihonMillipore
K.K.
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GS 12Y04F03-01E
3. ReagentsReagentsshouldbepurchaseddirectlyfromKantoChemicalCo.,Inc.and/orWakoPureChemicalIndustries,Ltd.
Measurement Item Description Size PartNumber*1QuantityConsumed
Ammonia
Eluent HNO3, 1 mmol/L 10 L14701-84 (Kanto) 1bottle/month
Standard solution NH4+, 10 mg/L 50 ml38107-96 (Kanto) 1bottle/month
System check solution NH4+, 1 mg/L 100 ml38108-96 (Kanto) 1bottle/month
Cation
Eluent H2SO4, 10 mol/L 250 ml37993-13 (Kanto) 1bottle/month
Standard solution Mixed cation standard solution (mg/L)Li+: 0.5, Na+: 2, NH4+: 2, K+: 5, Ca2+: 5, Mg2+: 5
50 ml 07197-96 (Kanto)1bottleeach/monthSystem check solution
Anion
Eluent Na2CO3, 4.5 mmol/L 10 L38085-84 (Kanto) 1bottle/month
Standard solution Mixed anion standard solution (mg/L)F-: 5, Cl-: 10, NO2-: 15, Br-: 10, NO3-: 30, PO43-: 30, SO42-: 40
50 ml 01856-96 (Kanto)1bottleeach/monthSystem check solution
Fluorideandorganicacid
Eluent NaOH, 1 mol/L 500 ml 37847-08 (Kanto) 1bottle/month
Standard solution
Fluoride ion standard solution, 1000 mg/L 100 ml 14613-23 (Kanto) 1bottle/month
Sodium formate 25 g 37175-30 (Kanto) 1bottle/year
Sodium acetate 25 g 37093-30 (Kanto) 1bottle/year
Boron
Eluent H2SO4, 10 mol/L, for ion chromatography 250 ml37993-13 (Kanto) 1bottle/month
Eluent, regenerant D(–)-mannitol, M.W.=182.17 500 g 133-00845 (Wako) 1bottle/month
Regenerant 25% tetramethylammonium hydroxide 500 ml 206-15035 (Wako) 1bottle/month
Standard solution H3BO3 (analytical reagent grade), M.W.=61.83 500 g04232-00 (Kanto) 1bottle/month
*1: ProductnumbersofKantoChemicalCo.,Inc.orWakoPureChemicalIndustries,Ltd.
Unopenedreagentsarestablefor6months.
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nEXTERNALDIMENSIONS,INSTALLATIONSPACEANDEXTERNALINPUT/OUTPUT
730
1060
860
820
100
115
135
4-ø15 holes
380
165
185
710 8070
720 7070
↑Front side
Bottom (anchor bolt position)
Power cable inlet
Main beraker
* With pure water supply system (/W)** 16-streams measurement (/EX)
Drain tube inlet *
Sample inlet **Unit: mm
Wiring connectorfor water supplysystem *
Drain
Pure waterinlet173 90 85
135
CM505 top
CM505 front side
1000 860
1000
1000
1000
730
Maintenance spacePlease secure the installation space of the trolly separately for with pure water supply system (/W).
Band
Trolley
Cartridge for pure water
Pure water tank (20L)Drain tank (20L)
Unit: mmSwitch box
App
rox.
810
840555
Purewatersupplysystem(Optioncode:/W)
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GS 12Y04F03-01E
ExternalInput/OutputTerminalArrangement
#1#2#3#4#5#6#7#8#9
#10#11#12#13#14#15#16
Bit 0Bit 1Bit 2Bit 3Bit 4#1#2#3#4#5#6#7#8#9
#10#11#12#13#14#15#16
D/O (*2)
D/O (*2)
D/O Common
D/O Common
D/O (*2)
D/O (*2)
Bit 0Bit 1Bit 2Bit 3Bit 4#1#2#3#4#5#6#7#8#9#10#11#12#13#14#15#16
Bit 0Bit 1Bit 2Bit 3Bit 4#1#2#3#4#5#6#7#8#9#10#11#12#13#14#15#16
Streamnumber
369
121518212427303336394245485154576063666972757881848790939699
102105108111114117120123126129132135138141144
A BNo Connection
Normally Close (*1)No Connection
D/O (*2)
D/O (*2)
123456789
101112131415161718192021222324252627
Terminalnumber
#1#2#3#4#5#6#7#8#9#10#11#12#13#14#15#16
Streamnumber
258111417202326293235384144475053565962656871747780838689929598101104107110113116119122125128131134137140143
Terminalnumber
Streamnumber
147101316192225283134374043464952555861646770737679828588919497100103106109112115118121124127130133136139142
Terminalnumber
Terminal board sw
itch number
AA
Normally Open (*1)GNDGND
D/O (*2)
D/O (*2)
BB
Common+24V+24V
D/O Common
D/O Common
Measurement Strream Skip Input
Alarm InputAlarm Reset InputLeakage Water Alarm OutputAlarm Buzzer OutputAlarm Light OutputRetry Measurement Output
Alarm Output
Measurement Stream Bit Output
Stream Alarm Output
terminal board switch A 101 and 102Power Off
Without eventWith event
OpenOpenClose
*1 :*2 : Select either terminal board switch A or B
Power Off Open Common CloseFor A Without event Open Common Close
With event Close Common OpenPower Off Open Common Close
For B Without event Close Common OpenWith event Open Common Close
When power is turned off: Open Common Close
Contact input
ResistancebetweenA and B
200 Ω or less100 kΩ or more200 Ω to100 kΩ
ONOFF
No operation garanteed
Contact outputAlarm Buzzer, Alarm Light
Use the contact at 30V DC, 0.5A or less expect forAlarm Buzzer, Alarm Light.
Power OffWithout eventWith event
0VLess than +1V
+24VProtection circuit is not provided.
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● MeasurementStreamSkipInputUsed when any stream measurement is skipped.
● RetryMeasurementOutputOutputs from the relay contact when the same streamismeasuredagainduetoanabnormalityinthe measured result. (No output at overlap measure-ment)
● AlarmBuzzerOutputTheterminalforsoundingthebuzzerwhenanalarmis generated. Power of +24 V DC is applied. The buzzerisprovidedasstandard.
● AlarmLightOutputThe terminal for lighting a rotating warning light and the like when an alarm is generated. Power of +24 V DC is applied. Normally, the light is not mounted. The user should not use this terminal.
● LeakageWaterAlarmOutputWhen liquid leakage occurs in the CM505 (except within Pi501), an alarm is output from a relay contact.
● AlarmOutputWhen a high level alarm occurs, alarm is output from relay contacts (5 points).
● MeasurementStreamBitOutputMeasurementstreamsareexpressedandidentifiedwithbitsandareoutputfromrelaycontacts.Measurement
Stream Bit0 Bit1 Bit2 Bit3 Bit4
1 1 0 0 0 0
2 0 1 0 0 0
3 1 1 0 0 0
4 0 0 1 0 0
5 1 0 1 0 0
6 0 1 1 0 0
7 1 1 1 0 0
8 0 0 0 1 0
9 1 0 0 1 0
10 0 1 0 1 0
11 1 1 0 1 0
12 0 0 1 1 0
13 1 0 1 1 0
14 0 1 1 1 0
15 1 1 1 1 0
16 0 0 0 0 1
● StreamAlarmOutputTheabnormalconcentrationsignalforeachmeasure-ment stream is output from a relay contact.
Oct. 10, 2008-00
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All Rights Reserved. Copyright © 2007, Yokogawa Electric Corporation
GS 12Y04F03-01E Oct. 10, 2008-00
Clean-roomGasMonitorInquirySpecificationsForanyinquiriesconcerningtheYokogawaClean-roomGasMonitor,enterthecheckmarks(√)inrelevantboxes,andintheunderlinedparts,writetheprescribeditems.
1. General(1)Nameofyourfirm:________________________________________________________________________(2)Personincharge:_____________________Department:__________________Phone:_________________(3)Nameofthefactory:_______________________________________________________________________(4)Measuringpoint(s):________________________________________________________________________(5)Powersupply:___________VAC,___________Hz
2. Measuring Condition(1) Gastobemeasured:__________________________________(2)Numberofmeasuringpoints:____________________________Point(s)(3)Gasconcentration: ____________________________________µg/m3,(ppb) ____________________________________ µg/m3,(ppb) ____________________________________ µg/m3,(ppb) ____________________________________ µg/m3,(ppb) ____________________________________ µg/m3,(ppb)(4)Others:____________________________________________________________________________ _____________________________________________________________________________________ _____________________________________________________________________________________ _____________________________________________________________________________________
3. Location of Installation(1) Environment: □ In a clean room, □Sub-cleanroom,□ Outside a clean room(2)Ambienttemperature:__________to____________°C(3)Others:____________________________________________________________________________ _____________________________________________________________________________________ _____________________________________________________________________________________ _____________________________________________________________________________________
4.OtherRequirements:_____________________________________________________________________ _____________________________________________________________________________________ _____________________________________________________________________________________ _____________________________________________________________________________________ _____________________________________________________________________________________ _____________________________________________________________________________________ _____________________________________________________________________________________
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