ChemInform Abstract: Metal-Assisted Chemical Etching of Silicon

1
ChemInform 2011, 42, issue 14 © 2011 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim Inorganic chemistry Z 0100 DOI: 10.1002/chin.201114223 Metal-Assisted Chemical Etching of Silicon — [121 refs.]. — (HUANG*, Z.; GEYER, N.; WERNER, P.; DE BOOR, J.; GOESELE, U.; Adv. Mater. (Weinheim, Ger.) 23 (2011) 2, 285-308, http://dx.doi.org/10.1002/adma.201001784 ; MPI Mikrostrukturphys., D-06120 Halle/S., Germany; Eng.) — Schramke 14- 223

Transcript of ChemInform Abstract: Metal-Assisted Chemical Etching of Silicon

Page 1: ChemInform Abstract: Metal-Assisted Chemical Etching of Silicon

Inorganic chemistryZ 0100 DOI: 10.1002/chin.201114223

Metal-Assisted Chemical Etching of Silicon — [121 refs.]. — (HUANG*, Z.; GEYER, N.; WERNER, P.; DE BOOR, J.; GOESELE, U.; Adv. Mater. (Weinheim, Ger.) 23 (2011) 2, 285-308, http://dx.doi.org/10.1002/adma.201001784 ; MPI Mikrostrukturphys., D-06120 Halle/S., Germany; Eng.) — Schramke

14- 223

ChemInform 2011, 42, issue 14 © 2011 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim

Metal-assisted Chemical Etching - mocvd.ece.illinois.edumocvd.ece.illinois.edu/research/presentations/MacEtch_tutorial_MRS... · MacEtch Patent Portfolio • TF00067 metal-assisted

Metal-assisted Chemical Etching - mocvd.ece.illinois.edumocvd.ece.illinois.edu/research/presentations/MacEtch_tutorial_MRS... · MacEtch Patent Portfolio • TF00067 metal-assisted

Photo-assisted etching of silicon in chlorine- and bromine-containing plasmas€¦ ·  · 2016-05-19Photo-assisted etching of silicon in chlorine- and bromine-containing plasmas

Photo-assisted etching of silicon in chlorine- and bromine-containing plasmas€¦ ·  · 2016-05-19Photo-assisted etching of silicon in chlorine- and bromine-containing plasmas

Metal-assisted chemical Etching Wet Etch, Dry Etch, …mocvd.ece.illinois.edu/research/presentations/MacEtch...Wet Etch, Dry Etch, and now MacEtch Not your ordinary etching Metal-assisted

Metal-assisted chemical Etching Wet Etch, Dry Etch, …mocvd.ece.illinois.edu/research/presentations/MacEtch...Wet Etch, Dry Etch, and now MacEtch Not your ordinary etching Metal-assisted

Electrically Detected Magnetic Resonance of Donors and ......etching or by metal-assisted chemical etching. Further oxidation was used to reduce the wire cross section. Different EDMR

Electrically Detected Magnetic Resonance of Donors and ......etching or by metal-assisted chemical etching. Further oxidation was used to reduce the wire cross section. Different EDMR

Development of Nanosphere Lithography … of Nanosphere Lithography Technique with Enhanced Lithographical ... with dry etching ... etching (RIE), and metal-assisted chemical etching

Development of Nanosphere Lithography … of Nanosphere Lithography Technique with Enhanced Lithographical ... with dry etching ... etching (RIE), and metal-assisted chemical etching

Investigation of Metal-assisted Si Etching for Fabrication ... · PDF fileTechnical report, IDE 1056, October 2010 Investigation of Metal-assisted Si Etching for Fabrication of Nanoimprint

Investigation of Metal-assisted Si Etching for Fabrication ... · PDF fileTechnical report, IDE 1056, October 2010 Investigation of Metal-assisted Si Etching for Fabrication of Nanoimprint

Optimisation of ultrafast laser assisted etching in fused silica · Optimisation of ultrafast laser assisted etching in fused silica CALUM A. ROSS, 1,* DAVID G. MACLACHLAN,1 DEBADITYA

Optimisation of ultrafast laser assisted etching in fused silica · Optimisation of ultrafast laser assisted etching in fused silica CALUM A. ROSS, 1,* DAVID G. MACLACHLAN,1 DEBADITYA

Metal Assisted Chemical Etching (MacEtch)nano-cemms.illinois.edu/media/uploads/content/113/files/macetch... · Metal Assisted Chemical Etching (MacEtch) Lead Faculty Researcher: Placid

Metal Assisted Chemical Etching (MacEtch)nano-cemms.illinois.edu/media/uploads/content/113/files/macetch... · Metal Assisted Chemical Etching (MacEtch) Lead Faculty Researcher: Placid

GUIDEBOOK TO INDUSTRIAL ETCHING & MARKING · Etching/ Marking Etching/ Marking Etching/ Marking Etching/ Marking

GUIDEBOOK TO INDUSTRIAL ETCHING & MARKING · Etching/ Marking Etching/ Marking Etching/ Marking Etching/ Marking

2. Experimental method · 2019-11-08 · Effects of a photo-assisted electrochemical etching process removing dry-etching damage in GaN. Satoru Matsumoto1, Masachika Toguchi1, Kentaro

2. Experimental method · 2019-11-08 · Effects of a photo-assisted electrochemical etching process removing dry-etching damage in GaN. Satoru Matsumoto1, Masachika Toguchi1, Kentaro

Dry Etching - University of Minnesota 07 Dry Etching_Full.pdfDry Etching Advantages ... RIE = process in which chemical etching is accompanied by ionic bombardment (ie ion-assisted

Dry Etching - University of Minnesota 07 Dry Etching_Full.pdfDry Etching Advantages ... RIE = process in which chemical etching is accompanied by ionic bombardment (ie ion-assisted

Silver nanowires and nanoparticles from a millifluidic reactor-application to metal assisted silicon etching

Silver nanowires and nanoparticles from a millifluidic reactor-application to metal assisted silicon etching

Electroless deposition of Ag on the patterned Si wafer ... · Web viewMetal-assisted chemical etching of this substrate yielded pSi pillars, which reactive ion etching shaped into

Electroless deposition of Ag on the patterned Si wafer ... · Web viewMetal-assisted chemical etching of this substrate yielded pSi pillars, which reactive ion etching shaped into

Metal Assisted Chemical and Electrochemical Etching …cthomp.scripts.mit.edu/images/files/Metal-Assisted_Etching_of_Si... · Metal Assisted Chemical and Electrochemical Etching of

Metal Assisted Chemical and Electrochemical Etching …cthomp.scripts.mit.edu/images/files/Metal-Assisted_Etching_of_Si... · Metal Assisted Chemical and Electrochemical Etching of

Inverse Metal-Assisted Chemical Etching Produces Smooth High …mocvd.ece.illinois.edu/research/pubs/Nano Lett I-MacEtch.pdf · Inverse Metal-Assisted Chemical Etching Produces Smooth

Inverse Metal-Assisted Chemical Etching Produces Smooth High …mocvd.ece.illinois.edu/research/pubs/Nano Lett I-MacEtch.pdf · Inverse Metal-Assisted Chemical Etching Produces Smooth

Photoluminescence and cathodoluminescence from ...Secure Site ...produced by wet etching,11 electrochemical etching,12 laser ablation of silicon surface,13 and metal assisted dry etching

Photoluminescence and cathodoluminescence from ...Secure Site ...produced by wet etching,11 electrochemical etching,12 laser ablation of silicon surface,13 and metal assisted dry etching

Metal assisted chemical etching of silicon and the ... · PDF fileNano Res. 1 Metal assisted chemical etching of silicon and the behaviour of nanoscale silicon materials as Li-ion

Metal assisted chemical etching of silicon and the ... · PDF fileNano Res. 1 Metal assisted chemical etching of silicon and the behaviour of nanoscale silicon materials as Li-ion

Nonlithographic Patterning and Metal-Assisted Chemical ... · PDF fileNonlithographic Patterning and Metal-Assisted Chemical Etching for Manufacturing of Tunable Light-Emitting Silicon

Nonlithographic Patterning and Metal-Assisted Chemical ... · PDF fileNonlithographic Patterning and Metal-Assisted Chemical Etching for Manufacturing of Tunable Light-Emitting Silicon

Nanoanalysis of Gas Assisted Ion Etching of High Density ... · irradiation by gas assisted ion etching processes. The results clearly demonstrate the alterations in the surface morphology

Nanoanalysis of Gas Assisted Ion Etching of High Density ... · irradiation by gas assisted ion etching processes. The results clearly demonstrate the alterations in the surface morphology

Porosity control in metal-assisted chemical etching of ...rogersgroup.northwestern.edu/files/2012/nanotechnmacetch.pdfchemical and bio-sensing [9], thermoelectric modules [10], etc.

Porosity control in metal-assisted chemical etching of ...rogersgroup.northwestern.edu/files/2012/nanotechnmacetch.pdfchemical and bio-sensing [9], thermoelectric modules [10], etc.