Cathode R&D 04/12/06
7
Cathode R&D 04/12/06 • Saxet project in progress: 1. Tests of samples with thick lines are completed 2. Currently we are trying to reproduce results of samples with fine grids
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Cathode R&D 04/12/06. Saxet project in progress: Tests of samples with thick lines are completed Currently we are trying to reproduce results of samples with fine grids. Summary of previous results. Polarization Thin GaAs films with 4 m m 2D grid and 48 m m pitch. 5x10 14 cm -3. - PowerPoint PPT Presentation
Transcript of Cathode R&D 04/12/06
Cathode R&D 04/12/06• Saxet project in progress:
1. Tests of samples with thick lines are completed
2. Currently we are trying to reproduce results of samples with fine grids
Summary of previous resultsPolarization
Thin GaAs films with 4m 2D grid and 48m pitch
5x1016cm-3 5x1014cm-3
QE
Thin GaAs films with 4m 2D grid and 48m pitch
Summary of previous results
5x1016cm-3 5x1014cm-3
Samples with 50m metallic linesSample # Wafer Lines
38 Bulk GaAs 30nm W +200nmAu 50m pitch
39 5x1014cm-3
100nm GaAs
30nm W +200nmAu 100m pitch
40 Bulk GaAs 60nm W 100m pitch
41 5x1014cm-3
100nm GaAs
60nm W 100m pitch
43 5x1016cm-3
100nm GaAs
60nm W 100m pitch
QE
#38Bulk GaAsW+Au lines
#39Thin GaAs5x1014cm-3
W+Au lines
#40Bulk GaAsW lines
#41Thin GaAs5x1014cm-3
W lines
#43Thin GaAs5x1016cm-3
W lines
Polarization
#43Thin GaAs5x1016cm-3
W lines
#41Thin GaAs5x1014cm-3
W lines
#40Bulk GaAsW lines
#38Bulk GaAsAu+W lines
#39Thin GaAs5x1014cm-3
Au+W lines
Conclusions and current work
• Although hard to conclude the samples with lines have not given an indication of positive results
• Currently we are measuring gridded samples 18A and 19B that have given good results in the past
