Capacitive Interface Electronics for Sensing and Actuation
Transcript of Capacitive Interface Electronics for Sensing and Actuation
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B. E. Boser 1
Capacitive Interface Electronics
for Sensing and Actuation
Bernhard E. Boser
University of California, Berkeley
Capacitive Interface Electronics
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B. E. Boser 2
Outline
• Capacitive Sensors
– Applications
– Displacement sensors
• Readout electronics
– Sensor interface
– Circuit topologies
– Electronic noise
• Feedback
– Electrostatic force feedback
– Stability
– Sigma-delta conversion
• Conclusions
Capacitive Interface Electronics
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B. E. Boser 3
Applications
Capacitive Interface Electronics
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B. E. Boser 4
flexture
anchor
N Unit CellsFixed Plates
Accelerometer
Capacitive Interface Electronics
2 2
1mG
2 10kHz
2.1
Angs5pm trom40
ax
π
acceleration
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B. E. Boser 5
Gyroscope
Capacitive Interface Electronics
• Vibrate along drive axis with
oscillator @ fdrive
• Detect vibration @ fdrive
about sense axis with
accelerometer
20 fmtypx
Classical radius of
electron: 2.8 fm
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B. E. Boser 6
Capacitive Displacement Sensors
Gap closing Overlap
Capacitive Interface Electronics
x
xo
x xo
oo
o
xC x C
x x
o
o
o
x xC x C
x
0
1 1
o o x
dC x
C dx x
1 1
o o
dC x
C dx x
Cap closing actuator has higher sensitivity
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B. E. Boser 7
Capacitive Displacement Sensors
Gap closing
High sensitivity
Limited travel range
Nonlinear
Pull-in
Overlap
Capacitive Interface Electronics
x=20fm
xo=2mm
x=20fm
xo=20mm
20C 10 zF 10 Fo
Low sensitivity (large xo)
Large travel range
Linear (first order)
No pull-in (first order)
Co = 1pF Co = 1pF
21C 1 zF 10 Fo
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B. E. Boser 8
Alternative Geometries
Capacitive Interface Electronics
Gap Closing Design • high sensitivity
• small travel range
Overlap Sensor Design • low sensitivity
• large travel range
Dis
pla
cem
ent
Compromise
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B. E. Boser 9
Outline
• Capacitive Sensors
– Applications
– Displacement sensors
Readout electronics
– Sensor interface
– Circuit topologies
– Electronic noise
• Feedback
– Electrostatic force feedback
– Stability
– Sigma-delta conversion
• Conclusions
Capacitive Interface Electronics
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B. E. Boser 10
Capacitance to Voltage Conversion
Capacitive Interface Electronics
A A
x
Anchor
AA
x = 0
x > 0
t
L
N movable fingers
x0+x
sense capacitor Cs reference capacitor Cref
+Vs = 1V
-Vs = -1V
Vx =Vs C/Co = 10 nV
Cs1 = Co + C
Cs2 = Co - C
Co = 1 pF
C = 10 zF
• maximize C
• minimize Co
• maximize Vs
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B. E. Boser 11
Parasitics
Capacitive Interface Electronics
Cs1
Cs2
substrate shield
ParasiticElements
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B. E. Boser 12
Capacitive Transducer Interface
Capacitive Interface Electronics
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B. E. Boser 13
Interference
Capacitive Interface Electronics
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B. E. Boser 14
Differential Interface
Single-Ended Pseudo-Differential
Capacitive Interface Electronics
Interference common-mode signal
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B. E. Boser 15
Modulation
Capacitive Interface Electronics
• Low frequency acceleration signal
– Subject to low-frequency interference
E.g. 1/f noise
– Capacitors do not pass DC
• Solution: modulate signal before it can be corrupted
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B. E. Boser 16
Modulation in 2-Chip Sensors
Capacitive Interface Electronics
Reject drift in bond-wire capacitance
Sense Voltage Modulation
Ref: Lang et al, Cancelling low frequency errors in MEMS systems, 2009.
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B. E. Boser 17
Mechanical Modulation
Capacitive Interface Electronics
Ref: P. Lajevardi, V.P. Petkov, and B. Murmann, "A ΣΔ Interface for MEMS Accelerometers using Electrostatic Spring-
Constant Modulation for Cancellation of Bondwire Capacitance Drift," in Digest ISSCC 2012, pp. 196-197.
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B. E. Boser 18
Capacitive Interface Circuits
Continuous Time Sampled Data
Capacitive Interface Electronics
• Output modulated
• High valued bias resistor
• No bias resistor, direct interface to ADC
• Noise folding
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B. E. Boser 19
Noise Folding
Capacitive Interface Electronics
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B. E. Boser 20
“Boxcar” Sampling
Capacitive Interface Electronics
• ~ 10dB noise / power reduction possible
• sensitive to clock jitter & nonlinearity
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B. E. Boser 21
Outline
• Capacitive Sensors
– Applications
– Displacement sensors
• Readout electronics
– Sensor interface
– Circuit topologies
– Electronic noise
Feedback
– Electrostatic force feedback
– Stability
– Sigma-delta conversion
• Conclusions
Capacitive Interface Electronics
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B. E. Boser 22
Electrostatic Force Feedback
Benefits:
• Reduced sensitivity to transducer
nonlinearity
• Increased bandwidth (gyroscopes)
Challenges:
• Need accurate feedback force
• Stability
• Increased noise
Capacitive Interface Electronics
A ain Vout
F
S +
-
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B. E. Boser 23
Scale Factor
Openloop Feedback
Capacitive Interface Electronics
2 2s s
out
o or r
x
C
V Vx dC xV
dx C x
2
ADC output scale factor
ˆo r ox D x
Vs
xcell ADC out
o
s
VD
V
2
acceleration force
feedback force
1
2fb
dCV mx
dx
21ˆ2
fbdC Vx
dx m
• Final measurement depends on
absolute voltage
• Need precision reference for good
scale factor accuracy
• Feedback is nonlinear
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B. E. Boser 24
Stability
Challenges:
• 2nd order system
• High Q 180o phase lag at resonance
• Higher order resonances
• Additional loop delay (e.g. DAC)
Capacitive Interface Electronics
typical high
performance gyroscope
frequency response
Sense mode
“Parasitic” modes
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B. E. Boser 25
Feedback Actuator
Non-Collocated
separate electrodes for
sense and feedback
Collocated
same electrodes for
sense and feedback
Capacitive Interface Electronics
Frequency
(Hz)
Normalized
Magnitude
(dB)
Phase
(°)
Frequency
(Hz)
Normalized
Magnitude
(dB)
Phase
(°)
Frequency
(Hz)
Normalized
Magnitude
(dB)
Phase
(°)
Frequency
(Hz)
Normalized
Magnitude
(dB)
Phase
(°)
Stabilize with lead compensator?
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B. E. Boser 26
Sampled Data System Loop Gain
Capacitive Interface Electronics
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B. E. Boser 27
Frequency
(kHz)
Magnitude
(dB)
Phase
(°) Small But
Enough
Margin Huge Positive
Margins
Frequency
(kHz)
Magnitude
(dB)
Phase
(°) Small But
Enough
Margin Huge Positive
Margins
Positive Feedback
Capacitive Interface Electronics
stable
DC gain < 0
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B. E. Boser 28
Sigma-Delta A/D Conversion
Capacitive Interface Electronics
• Very low overhead: only comparator (and 1-bit DAC)
• Sensor acts as loop filter
• Or so it seems …
x x̂
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B. E. Boser 29
Broad-band Noise
Capacitive Interface Electronics
ONLY Electronic Noise
ONLY Quantization Noise
Quantization + Electronic Noise
Inp
ut
Noise
Frequency
Po
we
r
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B. E. Boser 30
Noise Filter with Feed-forward for Stability
Capacitive Interface Electronics
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B. E. Boser 31
Lead Compensator
Capacitive Interface Electronics
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B. E. Boser 32
Outline
• Capacitive Sensors
– Applications
– Displacement sensors
• Readout electronics
– Sensor interface
– Circuit topologies
– Electronic noise
• Feedback
– Electrostatic force feedback
– Stability
– Sigma-delta conversion
Conclusions
Capacitive Interface Electronics
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B. E. Boser 33
Conclusions
• Capacitive sensor interfaces can resolve
femto-meter displacements
• Challenges
– Transducer:
• Parasitic capacitance, resistance
• Interference pseudo differential interface
• Nonlinearity
– Electrostatic Force-Feedback
• Scale-factor sensitivity to absolute voltage
• Stability: 2nd order system, parasitic resonances
• Sigma-delta ADC: noise enhancement
Capacitive Interface Electronics