Baratron Absolute Capacitance...

600 SeriesSelection GuideBARATRON® ABSOLUTE CAPACITANCE MANOMETERS

Pressure M

easurement

& C

ontrol

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• Full Scale ranges as low as 0.02 mmHg (20 mTorr)– Allows for accurate measurement of process pressures as low as 0.2 mTorr

• Percent of Reading accuracy for more reliableoutput signal in lower scale of pressure range– Results in improved process yield

• Complete line of manometers which includestemperature regulated units up to 200°C andmanometers with relays to meet safetyrequirements– Single-source for capacitance manometers– Wide variety of application expertise

• Measures total pressure directly, independent of gascomposition– Eliminates the need for lookup tables

• Excellent long-term stability– Ensures repeatability in your pressure

measurement and therefore in your processpressure control

• All-Inconel® corrosion-resistant construction– Manometer stands up to the harshest process gas

• High overpressure rating (45 psia) improvesreliability

• CE Mark compliant – meets requirements forEuropean Union

600 Series Absolute CapacitanceManometersThe MKS 600 Series Baratron® Absolute CapacitanceManometers are designed for accurate, repeatable pressuremeasurements in demanding research or processenvironments. Sensor, electronics, and packagingenhancements combine to make the 600 Series manometersthe most stable low pressure measuring instrumentsavailable. Reliability is designed in and verified withextensive MTBF analysis and STRIFE (stressed life) testing.

Capacitance ManometersMKS Type 600 Series are stand-alone capacitancemanometers that require a ±15 VDC power supply andprovide a high level 0-10 VDC output. This signal can beinterfaced directly with an MKS pressure controller, an MKSpower supply/readout module, or other process controller.Pressure is determined by measuring the change incapacitance between the diaphragm and an adjacent dualelectrode. The radially-tensioned diaphragm provides verylow hysteresis, excellent repeatability, remarkably highresolution (0.001% F. S.), and the ability to measureextremely low pressures. The differential capacitance signalis converted into a useable output by signal conditioningcircuitry which uses the latest in surface mount electronicsfor improved environmental performance. The 600 Seriestransducers include a sensor that provides an increasedoverpressure rating of 45 psia, resulting in excellentreliability, even with frequent atmospheric pressure exposure.The sensors are of Inconel® all-welded construction forcompatibility with most corrosive process environments.

Capacitance Manometers

TTTTTypes 623, 624, & 625 (Ambient &ypes 623, 624, & 625 (Ambient &ypes 623, 624, & 625 (Ambient &ypes 623, 624, & 625 (Ambient &ypes 623, 624, & 625 (Ambient &TTTTTemperature-Controlled, Temperature-Controlled, Temperature-Controlled, Temperature-Controlled, Temperature-Controlled, Trip Prip Prip Prip Prip Point Roint Roint Roint Roint Relaelaelaelaelayyyyys)s)s)s)s)

The Types 623, 624, and 625 each have two trip point controlrelays for control system interfacing. The Type 623 operatesat ambient temperature, while the Types 624 and 625 areregulated at 45°C and 100°C, respectively. All threemanometers are offered in Full Scale ranges from 10 to 1000mmHg; the 624 and 625 are also available in 1 mmHg FullScale.

TTTTTypes 622 & 626 (Ambient Types 622 & 626 (Ambient Types 622 & 626 (Ambient Types 622 & 626 (Ambient Types 622 & 626 (Ambient Temperature)emperature)emperature)emperature)emperature)

The Types 622 and 626 are the most economical of the 600Series Baratron Capacitance Manometers. Thesemanometers use dual-voltage power supplies, and areavailable in Full Scale ranges from 1 to 1000 mmHg (Torr).The 622 has a terminal block connector; the 626 uses a 15-pin Type “D” connector.

The Types 627, 628, and 629 are temperature-controlledmanometers designed to reduce the effects of ambienttemperature fluctuations on the sensor and electronics. The627 is internally temperature regulated to 45°C; the 628 to100°C. Because it is controlled at a high temperature, the 628is commonly used to minimize contaminant buildup on thesensor in critical, harsh processes. The 627 and 628 includeoptional heater and at-temperature statuses. LED's andcorresponding semiconductor switches indicate whentemperature of the sensor is within the specified window. TheType 629 is offered in both 45°C and 100°C versions. The 629is available with an optional external zero input capability,which accepts a voltage equal and opposite to the zero offset,providing zero output at zero pressure input. The 627 and 629are available in ranges from 0.02 to 1000 mmHg; the 628 isavailable in ranges from 0.05 to 1000 mmHg Full Scale.

TTTTTypes 627, 628, & 629 (Types 627, 628, & 629 (Types 627, 628, & 629 (Types 627, 628, & 629 (Types 627, 628, & 629 (Temperature-Controlled)emperature-Controlled)emperature-Controlled)emperature-Controlled)emperature-Controlled)

The Baratron Type 631 pressure transducer, MKS' hightemperature design innovation, offers a 125°C, 150°C or200°C sensor and self-contained electronics for hightemperature process applications. The 631 includes optionalheater status and at temperature lights and semiconductorswitches to indicate to the user that the temperature of thesensor is within the specified window. In semiconductorprocesses such as LPCVD, a high temperature capacitancemanometer prevents contamination buildup.

TTTTType 631 (Type 631 (Type 631 (Type 631 (Type 631 (Temperature-Controlled up to 200°C)emperature-Controlled up to 200°C)emperature-Controlled up to 200°C)emperature-Controlled up to 200°C)emperature-Controlled up to 200°C)

Power Supply/Readout Modules

MKS has a wide offering of power supply/readout modulesrecommended for use with the 600 Series capacitancemanometers.

TTTTType PDR-D-1 Single-channel, 115 Vype PDR-D-1 Single-channel, 115 Vype PDR-D-1 Single-channel, 115 Vype PDR-D-1 Single-channel, 115 Vype PDR-D-1 Single-channel, 115 VoltoltoltoltoltTTTTType PDR-D-2 Single-channel, 230 Vype PDR-D-2 Single-channel, 230 Vype PDR-D-2 Single-channel, 230 Vype PDR-D-2 Single-channel, 230 Vype PDR-D-2 Single-channel, 230 Voltoltoltoltolt

The PDR-D-1 and PDR-D-2 are single-channel powersupplies with 4½-place digital displays, and are packagedin compact 1/8 DIN housings. The PDR-D-1 requires aninput power of 115 Volts; the PDR-D-2 requires 230 Volts forinternational voltage requirements. Both modules can beused with Type 622, 623, and 626 capacitance manometers.

TTTTType PR4000 Single and Dual-channelype PR4000 Single and Dual-channelype PR4000 Single and Dual-channelype PR4000 Single and Dual-channelype PR4000 Single and Dual-channel

The PR4000 is a versatile 4½-place digital LCD display/power supply unit available in both one and two-channelversions. Both units have two fully configurable relays for setpoint monitoring, RS-232 digital interfaces with optional RS-485 and IEEE-488 interfaces, 16-bit analog output, and autozero capability. The PR4000 can be used with Type 622,623, 624, 625, 626, 627, and 628 capacitance manometers.

TTTTType PDR2000ype PDR2000ype PDR2000ype PDR2000ype PDR2000

The PDR2000 is a low-cost, two-channel power supply/display capable of supporting most 600, 700, and 800Series transducers. It offers compact size (1/8" DIN), relaytrip points on user defined pressure values, and selectableengineering units. A scaling feature allows adjustment of thedisplay reading if non-standard ranges are used. It also hasa simple RS-232 interface for reading pressure values.

TTTTType 660 Single-channel,ype 660 Single-channel,ype 660 Single-channel,ype 660 Single-channel,ype 660 Single-channel,Microprocessor-basedMicroprocessor-basedMicroprocessor-basedMicroprocessor-basedMicroprocessor-based

The single-channel, microprocessor-based Type 660provides power supply and digital display for Type 622,623, 624, 626, and 627 capacitance manometers. It alsoprovides 4½-place digital display (not power) for Type 625and 628 capacitance manometers. It features four opencollector alarm trip points and a single-level menustructure for all setup functions. The 660 can be orderedwith 120, 240, 100, or 220 Volt power input, and with anoptional RS-232 interface. The 660 mounts in a compact1/8 DIN package.

Isolation SystemsCV7627CV7627CV7627CV7627CV7627

MKS Isolation Systems are designed to automaticallymaintain a process manometer at vacuum throughout aprocess cycle. The CV7627 consists of a Type 627 ProcessManometer, an HPS® Vacuum Products Group CvPneumatic Isolation Valve, and an R750 Mini-BaratronRelay Module. The system utilizes the R750 PressureRelay Module to monitor the process pressure andprovide a contact closure which is used to open acustomer supplied solenoid valve. The solenoid valvecloses the Cv valve any time the process pressureexceeds the Full Scale pressure of the manometer. Thisaction maintains the process manometer at vacuum.

Power Supply/Readout Modules

1 For higher ranges, consult Applications Engineering at (800) 227-8766.2 Some specifications may vary outside this temperature range. Contact Applications Engineering at (800) 227-8766 for further information.3 For digital versions, contact Applications Engineering at (800) 227-8766.

4 CF Fittings are available with high pressure ranges > 1000T , but is limitedby the bolt strength.

5 NW KF Fittings are only available on ranges up to 5000 Torr and require anHPS overpressure ring for the 2000 and 5000 Torr ranges.

Baratron®

CapacitanceManometers

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Specifications

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Power Supplies/Digital Readouts

*Subject to total power consumption of connected instrument(s) and PR4000 options

Dimensional Drawings

Dimensional Drawing —Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced).

Types 623A Type 624B and 625B

Type 627B and 628B Type 629B


Type 631A Type 622A

Types 626A Type CV7627

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Dimensional Drawings - Readouts

Type 660B

Type PR4000

Type PDR2000Type PDR-D-1 & PDR-D-2


Ordering Information

Bulletin 600Ser - 6/04© 2004 MKS Instruments, Inc.All rights reserved.

Specifications are subject to change without notice.

Baratron® is a registered trademark of MKS Instruments, Inc., Wilmington, MA. Inconel® is a registered trademark of Inco AlloysInternational, Inc., Huntington, WV. Swagelok® , VCR® and VCO® are registered trademarks of Swagelok Marketing Co., Solon,OH.

Global Headquarters90 Industrial WayWilmington, MA 01887-4610

Tel: 978.284.4000Tel: 800.227.8766 within U.S. onlyWeb: www.mksinst.com

631A

M

2

P

B

11T

E

Ordering Code Example: 631A11TBEM2P Code Configuration

Absolute Capacitance ManometersAmbient, terminal strip connector 622AAmbient 15-pin “D” connector 626AHeated at 45°C, 15-pin Type “D” connector 627BHeated at 100°C, 15-pin Type “D” connector 628BHeated at 45°C or 100°C, 9-pin Type “D” connector 629BHeated at 125°C, 150°C, or 200°C 631ACapacitance Manometers with Trip Point Relays:Ambient, terminal strip connector 623AHeated at 45°C, 15-pin ‘D’ connector 624BHeated at 100°C, 15-pin ‘D’ connector 625B

Pressure Ranges Full Scale (mmHg)0.02 (available only on 627B & 629B-45°C)* U2T0.05 (available only on 627B, 628B & 629B)* U5T0.1 (available only on 626A, 627B, 628B, & 629B)* 0.1T0.25 (available only on 626A, 627B, 628B, & 629B) RET1 (not available on 623A) 01T2 (not available on 623A) 02T10 11T20 (not available on 631A) 21T100 12T200 (available only on 623A, 627B, 628B & 629B) 22T500 (not available on 631A) 52T1000 13T2000 (available only on 624B, 625B, 627B, 628B & 629B) 23T5000 (available only on 624B, 625B, 627B, 628B & 629B) 53T10,000 (available only on 624B, 625B, 627B, 628B & 629B) 14T15,000 (available only on 624B, 625B, 627B, 628B & 629B) RBT20,000 (available only on 624B, 625B, 627B, 628B & 629B) 24T25,000 (available only on 624B, 625B, 627B, 628B & 629B) RCT

Fittings1/2” diameter tubulation (not available on 631A) ASwagelok 8 VCR, female BMini-CF, rotatable (not available on 631A) see Note 4 under specifications CNW 16 KF see Note 5 under specifications DNW 25 KF (not available on 631A) QSwagelok 8 VCO, female (not available on 631A) E2¾” CF, rotatable (not available on 631A) see Note 4 under specifications L1½” Tri Clover (available on 631A) not available on ranges >1000T M2” Tri Clover (available only on 631A) not available on ranges >1000T N

Accuracy (% of Reading)0.12 (standard on 624B, 627B, 629B (45°C) - 1 mmHg and higher) C0.15 (standard on 627B, 629B - 0.1, 0.05 and 0.25 mmHg; option on 622A, D 623A, & 626A) (Note: Not available on 622A & 626A 1 and 2 mmHg units.)0.25 (standard on 622A, 623A, 625B, 626A, 628B, 629B, & 631A; 0.02 mmHg on 627B E0.50 (standard on 628B - 0.02, 0.05, 0.25 mmHg)

Temperature (applicable only to Type 631A)125°C M150°C H200°C P

OptionsStandard configuration 1Optional temperature/heaters status switches (standard relay module trip 631A) 2Relay Module (with reverse actuation) 3

Connector15-pin ‘D’ connector with thread lock B15-pin ‘D’ connector with slide lock P

*The zero calibration of 0.1 mmHg and lower Full Scale capacitance manometers is position-dependent. In order to preserve the maximum level of zero adjustment, specify mounting position when ordering if other than vertical/port down. Contact MKS Customer Service for ordering information on displays, readouts, and accessories.

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