AUTOETCH SECTION SEVEN [email protected] … · 2017. 3. 28. · AUTOETCH SECTION SEVEN 7 .1...

AUTOETCH SECTION SEVEN

7 .1 TABLE OF REPLACEABLE PARTS

J.1e.m ~ 1.0. CQd~ Part Number Description ~ Where Used Mfr P/N .Mir. .Yru1r

626-0580-1 Power Transistor MJE700 5 810-0530-1 Motor Driver PCB C4x) MJE 700 002 101

627-2926-1 Photo Transistor OP915 2 853-4106-1 Entrance Lifter Assy (2x> OP-805 056 101 853-6614-1 Bulkhead Entrance Lifter Assy C2x)

631-0385-1 LM 555 Timer 3 810-0530-1 Motor Driver PCB (Ix) LM555CN 004 104 810-0530-2 Motor Driver PCB C1x) 810-0667-1 TCG Interface PCB (1x) 810-2795-1 Entrance Lifter PCB Ctx>

631-0386-? IC MTC6 5 810-0392-1 Serial 1/0 PCB C1x) 1LCT6A 006 104 810-0474-1 Power Driver PCB C16x) 810-0503-1 Match Control Interface PCB C3x)

631-0499-6 Hex Inverter 7406 5 810-0474-1 Power Driver PCB C6x) SN7406N 007 101 810-0530-1 Motor Driver PCB C1x) 103 810-0530-2 Motor Driver PCB (Ix)

631-0500-1 IC 75457 5 810-0474-1 Power Driver PCB C5x) SN75467 007 101

631-0545-5 IC 74LS05 5 810-0530-1 Motor Driver PCB C1x) SN74LS05 002 101 810-0530-2 Motor Driver PCB C1x)

631-0545-244 IC 74LS244 2 810-0392-1 Serial 1/0 PCB C1x) 74LS244 002 101 810-0670-1 Analog Output PCB (1x) SN74LS244N 007 103 810-0673-1 Combination PCB C1x) 74LS244 008 103

631-0681-1 Op Amp LM324 2 810-0503-1 Match Control Interface PCB C2x) LM324 009 101 810-0530-1 Motor Driver PCB (1x) 810-0530-2 Motor Driver PCB C1x> 810 .. 0670-1 Analog Output PCB (2x~ 810-2795-1 Entrance Lifter PCB (1x)

631-0715-1 Op Amp OP07 2 810-0667-1 810-2896-1

TCG Interface PCB ( 1 x) OP07EP 010 106 Convection Tube Interface PCB C1x)

810-4092-1 RF Interface PCB (3)

631-1104-1 Op Amp LF355BN 5 810-0668-1 RTD Interface PCB (3x) LF355BN 009 102 810-0670-1 Analog Output PCB (2x) 810-1915-3 Endpoint Detector 405 PCB (2x)

631-1128-1 12 Bi·t DAC AD7542JN 810-0670-1 Analog Output PCB (2x) AD7542JN 031 107

631-1144-1 8 Bit DAC AD558JN 2 810-0670-1 Analog Output PCB (Bx> AD558JN 031 107

531-2026-1 2114 RAM Chip 2 810-1316-1 Controller Drawer CPU PCB (1x) IP2114BPC N/L 103

638-0684-1 Torlod 2 810-0668-1 RTD Interface PCB C1x) F625-9-H 048 144 810-4092-1 Sol Id State RF Interface C2x) 853-4093-1 Drive Motor Entrance C1x) 853-4094-1 Drive Motor Sing le 6" C1xl 853-6611-1 Bulkhead Drive Motor Entrance (1x) 853-6612-1 Bulkhead Drive Motor Exit C1x>

638-6423-1 Transformer 853-6500-1 Power Distribution Box C1x) 241-8-24 062 156

642-1253-1 Varistor 853-6500-1 Power Distribution Box (3x) V130LA10A 003 102

644-0467-1 Relay (Electrode Insert) Conunon C6x) R10-E1-Z2-V700 012 105

644-0731-5 . Sol Id State Relay CSA) 853-0611-1 Controller Drawer (lx) 601-1401 011 102 853-6136-1 Bulkhead Controller Drawer (1x)

644-0731-10 Sol Id State Relay 853-6500-1 Power Distribution Box C3x) 601-1402 011 106

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'· I l.Wl ~ 1.0. QQd!il Part Numb!ilr Qescrlptlon .Q1¥ Where llsfild Mfr PIN .Mfr: 1rutc

644-5863-1 24VAC Relay 853-6500-1 Power Distribution Box Clx) HC2-AC24 054 150

644-5878-1 Relay 853-1201-1 Entrance Bottom Plate (1X) R1 O-E1-Z4-V700 012 151 853-1201-2 Exit Bottom Plate (1x)

644-6549-1 AC Contactor 853-6500-1 Power Distribution Box Clx) M104C02 055 152

-- - - - -· 645-0214-1 L !ml.t Mlcroswl.tch ... -··--·· ---···-- - -- - 2 Common C8x)_ .. BZ"".2RQ1"'.'.A2 __ 013 102

645-0217-1 Limit Mlcroswltch 2 Common (40X) 31 ISM706-T 013 102

660-1131-1 5V Power Supply 853-1772-1 Power Supply Clx) 585 014 109

660-1369-1 15V Power Supply 853-1133-1 Power Supply C Ix) 1A15D 014 109

660-1433-1 ±15 Volt Power Supply 853-1132-1 Power Supply (lx) 3K15D 014 109

660-4159-1 RF Power Supply (ENI 650Wl 853-4117-1 RF Generator (lx) ENl650W 048 144 853-6153-1 Bulkhead RF Generator (lx)

660-4160-1 RF Power Supply (ENI 1250W) 853-4117-2 RF Generator Clx) ENI 1250W 048 144 853-6153-2 Bulkhead RF Generator (Ix)

662-3955-1 IR LED 853-4106-1 Entrance Lifter C2x) OP-233 056 103 853-6614-1 Bulkhead Entrance Lifter (2x).

665-1116-1 CRT Module 853-0358-1 Operator Interface Assembly (Ix) DS3000-200 .. 015 110

('\ 668-0997-2 Molex Connector (2 pin Fl 4 Common (29x) 03-06-1022 016 128

~- ) 668-0997-3 Molex Connector (3 pin Fl Common C4xl 03-06-1031 016. 128

668-0997-4 Molex Connector (4 pin Fl 2 Common (9x) 03,-06-1041 016 128

668-0997-6 Molex Connector (6 pin Fl Common C6x) 03-06-1061 016 128

668-0997-9 Molex Connector (9 pin Fl 2 Cmmon C9x) 03-06-1.091 016 128

668-0997-12 Molex Connector (12 pin Fl Common C3x) 03-06-1121 016 128

668-0997-15 Molex Connector (15 pin Fl 4 . Common C4xl 03-06-1151 016 128

668-0997-24 Molex Connector C24 pin F> 4 Common (8x) 03-06-1241 016 128

668-0998-2 Molex Connector (2 pin M) 4 Common (23x) 03-06-2022 016' 128

668-0998-3 Molex Connector (3 pin Ml 4 Common (6xl 03-06-2031 016 128

668-0998-4 Molex Connector (4 pin Ml 4 Common (9x) 03-06-2041 016 128



668-0998-12 Molex Connector (12 pin Ml 4 Common C2x) 03-06-2121 016 128

668-0998-15 Molex Connector (15 pin Ml 4 Common C3xl 03-06-2151 016 128


668-1107-5 Hex Connector (5 pin Fl Common (6xl 126-218 035 129

668-1176-5 Hex Connector (5 pin Ml Common (4x) 126-217 035 129

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..l..:tmn ~ 1.1.2. QQd~ Part Number DescrlptlQn .Q.4 Where Used Mfr P/N Mir. Iru1r:

669-0676-1 Molex Pin (Male 24 ga.) 6 Common (307x) 02-05;..2132 016 104

669-0677-1 Molex Pin (female 24 ga.) 6 Common (341X) 02-06-1132 016 104

669-1244-1 Molex Pin (Male 18 ga.) 6 Common (75x> 02-06-2103 016 104

669-1245-1 Molex Pin (Female 18 ga.) 6 Common (93xl 02-06-1103 016 104

670-1270-19 Fuse - F1 (IA, Fast) 5 853-6500-1 Power Distribution Box (1xl AGC 1 018 Al I

670-1270-23 Fuse - F5 & F7 (2A, Fast) 5 853-6500-1 Power Dlsrtlbutlon Box C1xl AGC 2 018 Al I

670-1271-3 Fuse - 3A Slow Bl6w 5 853-2751-1 60HZ Power Supply (1xl 313003 057 153 853-2751-2 50HZ Power Supply Clxl

670-1271-8 Fuse - Controller Drawer 5 853-0611-1 Controller Drawer (Ix) r-DX4 018 Al I 853-0846-1 AC/DC Harness (Ix) 853-6136-1 Bulkhead Control !er Drawer Clxl

670-1697-1 Fuse - Indexer (.2A, Fast) 5 853-4093-1 Drive Motor Entrance (Ix) AGrJ./10 018 Al I 853-4094-1 Single Drive Motor 6" Clxl 853-6611-1 Bulkhead Drive Motor Entrance C1xl 853-6612-1 Bulkhead Drive Motor Exit Clxl

670-6418-10 Fuse - 10 Amp 853-6500-1 Power Distribution Box C1xl K>A 10 018 153

670-6578-1 Circuit Breaker - 30 Amp 853-6500-1 Power Distribution Box (1xl -· BQ3B030 058 152

670-6780-33 Fuse - 5 Amp 853-6500-1 Power D'lstrlbutlon Box (1x) ABC 5 018 153

670-6780-37 Fuse - 10 Amp 853-6500-1 Power Distribution Box C2xl ABC 10 018 153

670-6780-39 Fuse - 15 Amp 853-6500-1 Power Distribution Box (1xl ABC 15 018 153

670-6780-40 Fuse - 20 Amp 853-6500-1 Power Distribution Box (3xl ABC 20 018 153

676-0342-4 Pittman Motor (19.1 VD Cl 854-2028-1 Motor Gear Assembly (lxl GM8712-41 019 122

676-0504-3 Pittman Motor (12 VDC) 853-5062-1 Gap Adjust Housing (4xl GM9413-3 019 122

676-1677-1 Motor (24 VDCl 853-4093-1 Drive Motor Entrance C1x) GM9413 019 122 853-4094-1 Single Drive Motor 6" (Ix> 853-6611-1 Bulkhead Drive Motor Entrance (1xl 853-6612-1 Bulkhead Drive Motor Exit C1xl

677-2128-1 Fan Screen 2 Common (5xl 5502 063 157

685-1064-3 Capacitance Manometer CVGl 853-1415-1 Manometer Assembly C1xl Cl..MA-11 045 141

685-2677-1 Modem 860-1356-1 System Interface Clx) J-Cat 490533 036 134 860-1356-2 Bulkhead System Interface C1x)

685-4074-1 Indexer (Hine) 853-4073-1 Wafer Elevator - Send C1x) 36S 046 142 853-4073-2 Wafer Elevator - Receive (1xl

713-0032-1 Bushing 2 853-1"198-1 Gate Linkage Outer C1x) Same 001 100 853-1198-2 Gate Linkage Inner (Ix)

713-0032-2 Bushing 4 854-0445-1 Drive Shaft Outer Door C4x) Same 001 100 854-0445-2. Drive Shaft Inner Door C4x) 853-1198-1 Gate Linkage Outer C4x) 853-1198-2 Gate Linkage Inner C4x) 853-1201-1 Bottom Plate Entrance C2x) 853-1201-2 Bottom Plate Exit C2x)

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7 .1 TABLE Of REPLACEABLE PARTS -,

\ 1'

.llilm ful.s:;m.!.Q I .D. QQd~ Part Number Description .Q:4 Where Used Mfr P/N .Mfr. .'lru!J:

713-0038-1 Lexan Cover 853-0576-1 Entrance Load I ocl< ( 1 x) Same 001 100 853-0576-2 Exit Loadlock C1x>

713-0130-1 Gate Stop - Airlock 4 853-1198-1 Gate Linkage Outer C2x) Same 001 100 853-1198··2 Gate Linkage Inner (2X)

713-2055-1 . Wiper_ Bf()Ck .. 853-5048-1 Electrode 811 (1x) Same 001 100 . -- ----- ·--·---- - --··-·-· ·---- --- ---- - . ---

714-2622-1 Stop Switch 2 Common (9) Same 001 100

715-0040-1 ~/a fer Hof der 411/1 OOmm 1* 853-1154-1 Entrance Wafer Arm and Gear Same 001 100 (Entrance Arm) Assembly - 411/100mm (lx)

715-0040-2 Wafer Holder 411/100mm 1* 853-1154-2 Exit Wafer Arm and Gear Same 001 100 (Exit Arm) Assembly - 411/lOOmm C1x)

715-0102-1 Pin 4 853-1198-1 Loadlock Gate and Linkage (4x) Same 001 100 853-1198-2 Loadlock Gate and Linkage C4x)

715-2040-1 Shunt Cap 853-2029-1 Capaclfor Drive (lx) Same 001 100 853-6113-1 Bulkhead Capacitor Drive (1 x)

715-2138-1 Capacitor, Mod Air Var 853-2029-1 Capacitor Drive C1x) Same 001 100 853-6113-1 Bulkhead Capacitor Drive (l X)

715-2171-1 Wafer Holder 511/125mm 1* 853-1154-3 Entrance Wafer and G~ar Same 001 100 (Entrance Arm) Assembly - 5"/125mm (1x)

-,.~

()·2171-2 ~lafer Holder 511/125MM 1* 853-1154-4 Exit Wafer and Gear Same 001 100 (Exit Arm) Assembly - 511/125mm (lx)

715-2531-1 Gear Rack 853-6534-1 Gate LI nkage Dr Ive Cy I I ndar ( lx) Same 001 100

715-2542-1 Rack Gulde 2 853-1201-1 Bottom Plate Entrance (lx) Same 001 100 853-1201-2 Botfom Plate Exit (lx)

715-2624-1 Wafer Holder 611/150mm 1* 853-1154-7 Exit Wafer and Gear Same 001 100 (Entrance Arm) Assembly - 611/150mm ( 1x)

715-2624-2 . Wafer Holder 611/150mm 1* 853-1154-8 E>< It Wafer and Gear Same 001 100 (Exit Arm) Assembly - 611/150mm ( 1 x)

715-2732-1 Airlock Door 853-1198-1 Gate and Linkage Outer (1X) Same 001 100 853-1198-2 Gate and Linkage Inner C1Xl

715-2793-1 Threaded Rod 2 853-6037-1 Chamber Bottom (8x) Same 001 100

715-3366-1 Cyllnder Modifier 853-1201-1 Bottom Plate Entrance (lx) Same 001 100 853-1201-2 Bottom Plate Exit (lx)

715-3973-2 Wafer Lifter 853-5048-1 Electrode 811 ( lx) Same 001 100

715-4042-1 811 Anode 853-5048-1 Electrode 811 ( 1x) Same 001 100

715-7025-1 Anodized Aluminum Cathode 853-6710-2 Upper Electrode Assembly ( 1x) Same 001 100 853-6710-4 Upper Electrode Assembly C lx)

716-1700-1 Window 853-6116-1 Bu I I< head Reacfor Assy ( 1x) Same 001 100 853-6345-1 Reactor Assembly (1x)

716-1999-1 Window 853-6345-1 Reactor Assembly (1x) Same 001 100 .. ·

f

I * User Selected

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.l.llm &i.ldll.!..d 1.0. QQ'b ...

Part Number DescrlptlQn .Q.t.¥ Where Used Mfr P/N M.:f..t: .Y.ruJr:

716-6446-1 Cathode Diffuser 653-6710-1 Graphite Cathode C1x) Same 001 100 853-6710-2 Upper Electrode Assembly ( 1x) 853-6710-3 Upper Electrode Assembly (1x) 853-6710-4 Upper Electrode Assembly C1x>

716-6711-1 Graphite Cathode 853-6710-1 Graph lte Cathode ( 1>'> Same 001 100 853-6710-3 Upper Electrode Assembly (1x)

716-6721-1 Insulator Ring 853-6710-1 Graphite Cathode <1x) Same 001 100 853-6710-2 Upper Electrode Assembly (1x) 853-6710-3 Upper Electrode Assembly (1x) 853-6710-4 Upper Electrode Assembly (1x)

716-6753-1 Insulator 853-6710-1 Graphite Cathode C1x> Same 001 100 853-6710-2 Upper Electrode Assembly Clx) 853-6710-3 Upper Electrode Assembly C1x) 853-6710-4 Upper Electrode Assembly ( lx)

734-0228-1 0 Ring, 5.7511 ID 4 853-1198-1 Loadlock Gate Llnl<age Outer (1x) 2-359-CS70WV 021 111 853-1198-2 Loadlock Gate Linkage Inner (1x)

734-0229-1 0 Ring, 11" ID 3 853-0576-1 Eni"rance Loadlock (2x) 2-276-CS70WV 021 111 853-0576-2 Exit Loadlock (2x) 853-0610-1 Reactor Chamber C1x) 853-6116-1 Bulkhead Reactor Assembly (1x) 853-6345-1 Reactor Assembly C1x>

734-0230-1 0 Ring, 811 ID 853-0576-1 Entrance Loadlock Clxl 2-266 021 111 853-0576·-2 Exit Loadlock C1x)

734-0337-1 0 Ring, 1.438" ID 2 853-2103-1 CCL4 Tank C3x) 2-127-CS60\'/V 021 1 ..... 853-6313-1 lso Valve Actuator (1x) 853-6313-2 lso Valve Actuator C 1x)

734-0420-1 0 Ring, 1,131 11 ID 2 853-4109-1 Exit Point C1x) 2-024-V747-75 021 111 853-5048-1 EI ectroce 811 C 1 x) 853-6613-1 Exit Lifter Assembly C 1x)

734-0663-1 0 Ring, 1.7511 ID 2 853-1183-1 Loadlock Drive Cyllnder C2x) 2-224-V747-75 021 111 853-1201-1 Loadlock Bottom Plate Entrance C2xl 853-1201-2 Loadlock Bottom Plate Exit (2x)

734-0690-1 0 Ring, 211 ID 2 853-0341-1 Loadlock Isolation Valve Clxl 2-226 CS70 WV 021 111 853-6385-1 Chamber Manifold Assembly C2xl

734-1047-1 0 Ring, 11 11 ID 853-6116-1 Bulkhead Reactor Assembly C1x) 2-379 CS70 WV 021 111 853-6345-1 Reactor Assembly C1x)

734-1048-1 0 Ring, 6.7511 ID 853-6037-1 Chamber Bottom Assembly C1xl 2-364 CS70 WV 021 111

734-1169-1 0 Ring, 8.2511 ID 853-6116-1 Bulkhead Reactor Assembly C2x) 2-370 CS70WV 021 111 853-6345-1 Reactor Assembly (2x)

734-1422·-1 0 Ring, .68811 ID 853-5048-1 Electrode 811 C2x) 2-115 V747-75 001 100

734-1682-1 Belt, 1.42411 ID 853-4093-1 Drive Motor Entrance (1x) 2-127/622-70 034 127 853-6611-1 Bulkhead Drive Motor Entrance C1x)

734-1710-1 0 Ring, 2.511 ID 853-6116-1 Bulkhead Reactor Chamber Clx) 2-230·-CS70WV 021 111 853-6345-1 Reactor Assembly (lx)

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"--. ' ~ I .D. Code ~IIl ct Number Descr I pt LQn .Q.4 Where Used M.tr.J:LN .Mfr. .Y.rul1:

,r1•,

734-1849-1 0 Ring, 8,75 11 ID 853-5062-1 Gap Adjust Housing C1x> 2-269 cs1m1v 021 112 853-6710-1 Graphite Cathode (1x) 853-6710-2 Upper Electrode (1x) 853-6710-3 Upper Electrode Clx) 853-6710-4 Upper Electrode C1x)

734-2013-1 0 Ring, 5.87511 ID 853-6116-1 Bulkhead Reactor Chamber (2x) 2-257-CS70WY 021 111 853-6345-1 Reactor Assembly (2x)

- -13"4"2014"r 0 Ring, 5~25 11 -1D 1 853-6345-1 Reactor Chamber C 1 x> - - 2"'"252'-CS70WV - ------ 021 --nr ·-

734-2064-1 0 Ring, 411 ID 853-5048-1 Electrode 811 (1x) 2-155 V747-75 021 111

734-2215-1 0 Ring, 3.2511 ID 853-5048-1 Electrode 811 ( 1x) 2-152 V747-75 021 113

734-2290-1 0 Ring, .25 11 ID 2 853-6710-1 Graphite Cathode (2x) ... 2-010 CS70WV 021 111 8.53-6710-2 Upper Electrode (2x)

734-4046-1 0-Rlng, .79911 ID 853-4099-1 Top Plafo Left Front (1x) 117/622-70 042 139 853-6114-1 Bulkhead Top Plate 'Left Front C1x)

734-4049-1 0-Rlng, 3.87 11 ID 2. 853-4099-1 Top Plate Left Front (1x) 154/622-70 042 139 853-4100-1 Top Plate Right Front (1x) 853-6114-1 Bulkhead Top Pla1·e Left Front (1x) 853-6115-1 Bulkhead Top Plate Right Front (1x)

734-4051-1 0-Rlng, 6.487 11 ID 4 860-4105-1 860-4105-2

Top Plate Rear (4x) 165/622-70 042 139 Bulkhead Top Plates (4x)

734··4077-1 0 Ring, 1.23711 ID 2 853-4094-1 Drive Motor - Single C2x) 124/622-70 042 111

\ 853-6612-1 Bulkhead Exit Drive Motor (2x)

I ,I

_A-4132-1 0 Ring, 10.2511 ID 853-6116-1 Bulkhead Reactor (1x) Same 001 100 853-6345-1 Reactor Chamber C1x)

734-5271-1 0 Ring, .43811 ID 853-5048-1 Electrode 811 (2x) 2-111¥747-75 021 139

734-6041-1 0-Rlng, 811 ID 853-6037-1 Chamber Bottom (1x) cs0 043 111

734-6042-1 0-Rlng, 8.5811 ID 853-6037-1 Chamber Bottom (1x) CS858 043 111

734-6043-1 0-Rlng, 9.8811 ID 853-6037-1 Chamber Bottom C1 x) CS988 043 111

734-6338-1 Quadrlng Seal 2 853-1201-1 Entrance Bottom Plate C1x) 4010-514AD 059 127 853-1201-2 Exit Bottom Plate (1x)

734··6760-1 0-Rlng 7 ,511 ID 2 853-6710-1 Graphite Cathode C1x) 2-264-264 V14 021 127 853-6710-2 Upper Electrode C1x) 853-6710-3 Upper Electrode C1x) 8.53-6710-4 Upper Electrode C1xl

734-6767-1 0-Rlng 5.75" ID 853-6710-1 Graphite Cathode C1x) 162-V14 021 127 853-6710-2 Upper Electrode C1x) 853-6710-3 Upper E I ec·trode ( 1 x) 853-67'10-4 Upper Electrode C1xl

734-7260-1 0-Rlng 5/16 11 ID 2 853-6710-3 Upper Electrode C3xl 2-011-¥747-75 021 111 853-6710-4 Upper Electrode C3x)

739-0210-1 Te'flon Seal (Lifter) 4 853-5048-1 Electrode 811 (2x) R305-202 038 130

739-0211-1 Teflon Seal (Gate) 6 853-1183-1 Load lock Delve Cyl lnder C4x) R306-315x6758 038 130

I 1,

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I ,Q. (

.tWl .BS1ldlL!..d. Ct> Part Number Qescr I pt I on .Q.:1:¥ Where Used Mfr P/N .Mfr: .Y.ruJr:

739-0421-1 Teflon Seal 853-4109-1 Exit Point Clxl D305A-210 038 130 853-5048-1 Electrode 811 C1x) 853-6613-1 Bulkhead Exit Lifter C1x)

739-0422-1 Teflon Seal 4 853-4106-1 Entrance Lifter (1x) 305A-202 039 130 853-4109-1 Exit Point C2x) 853-5048-1 Electrode 811 (2x) 853-6613-1 Bulkhead Exit Lifter C2x) 853-6614-1 Bulkhead Entrance Lifter (1x)

739-0983-1 Teflon Seal 2 853-4106-1 Entrance Lifter C2x) D305A-212 N/L 130 853-6614-1 Bulkhead Entrance Lifter C2x)

739-0984-1 Teflon Seal 853-4106-1 Entrance Lifter C1x) D305A-212 N/L 130 853-6614-1 Bulkhead Entrance Lifter (1x)

739-0985-1 Teflon Seal 853-4106-1 Entrance Lifter Clx) D305A-222 N/L 130 853-6614-1 Bulkhead Entrance Lifter C1x)

739-1856-1 Teflon Seal (Gap Adjust) 853-5062-1 Gap Adjust Housing C2x) AR 142816(c) 039 131

746-0218-1 Bearing 2 853-1154-1 Entrance Arm 411 Clx> SFR188 050 146 853-1154-2 Exit Arm 411 Clx) 853-1154-3 Entrance Arm 511 Clx) 853-1154-4 Exit Arm 511 C1x) 853-1154-7 Entrance Arm 611 Clx> 853-1154-8 Exit Arm 611 ( 1x) 853-5062-1 Gap Adjust Housing C1x)

746-0219-1 Bearing 2 853-1198-1 Gate & Linkage Outer Door C2x) SR63D 050 853-1198-2 Gate & Linkage Inner Door C2x)

746-0220-1 Bearing 3 853-1201-1 Bottom Plate Entrance C3x) SR3 050 146 853-1201-2 Bottom Plate Exit C3x)

746-0221-1 Bearing 2 853-1198-1 Load I ock Gate LI nlrnge Outer (2x) 81-25 037 132 853-1198-2 Loadlock Gate Linkage Inner C2x)

746-1119-1 Bal I Nut 2 853-5062-1 Gap Adjust Housing C4x) R0308-2 060 154

746-1125-1 Thrust Bearing 4 853-2029-1 Capacitor Drive C1x) TRB411 & 064 146 853-5062-1 Gap Adjust Housing C1x) NTA411 853-6113-1 Capacitor Drive C1xl

746-1687-1 Bearing 4 853-4093-1 Drive Motor Entrance C4x) 7Y55-F2512 037 132 853-4094-1 Drive Motor Single C10x) 853-4099-1 Left Front Top Plate (10x) 853-4107-1 Right Rear Top Plate (4x) 853-6114-1 Bulkhead Left Top Plate C10x) 853-6118-1 Bulkhead Right Top Plate C4x) 853-6611-1 Bulkhead Entrance Drive Motor C4x) 853-6612-1 Bulkhead Exit Drive Mofor C10x)

750-1127-1 Chain 853-5062-1 Gap Adjust Housing C1x) 125 N/L 132

754-2607-1 Spring 853-1198-1 Gate and Linkage C1x) LE0240-031- 051 147 853-1198-2 Gate and Linkage C1xl 1000 SST

766-0215-1 Electronic Valve 3 Common C25xl EV0-3M-24V 022 114

766-0433-1 Electronic Valve Common (6X) EV-3-24 022 114

766-0434-1 Electronic Valve Common (6X)

766-0439-1 Needle Valve 2 Common C41X) MNV-1 022

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'I 7 .1 TABLE OF REPLACEABLE PARTS (

.l.tem ~ I ,O, Code Part Number [)ascription .Qi.¥ Where Used Mfr P/N Mfr: 1ru!J:

766-0716-1 Check Valve 853-0606-1 Gas Panel Assembly (3x)

766-2089-1 Isolation Drive Valve 853-2165-1 Isolation Valve Drive (1x) R-481-24 022 114 853-2165-2 Isolation Valve Drive (1x) 853-5902-1 Soft Pump Circuit (lx)

~----- - - 768-07 48-1--Pressure-Sw ltch--(80--psl-)----1----- 841-3944-1--Pneumat I cs-M x)- P117G-25KN-K121;--023-·J-15 2153

768•1063-1 Vacuum Switch (50 Torr) 841-3944-1 Pneumatics (lx) P117V-3N-K11LX- 023 115 853-3948-1 Dlfferentlal Seal (1x) 2156-1 -853-6116-1 Bulkhead Reactor Clx) 853-6141-1 Bulkhead Dlfferentlal Seal (Ix) 853-6345-1 Reactor Clx)

768-1063-3 Vacuum Sw Itch (724 Torr) 853-5903-1 Soft Pump Down (1x) . P117V-3N-K11LX- 023 115 853-5903-2 Soft Pump Entrance C1x) 2156-4

768-6970-1 Vacuum Switch (724 Torr) 853-1201-1 Bottom Plate Entrance (lx) P117V-3N•K11LX- 023 115 - 853-1201-2 Bottom Plate Exit C1x) 2156-6

770-0204-1 Air Cyl lnder (Door) 853-1183-1 Loadlock Drive Cyllnder (2x) A2 xl.5-NT-18-BK 040 135

770-0225-1 Cy! !oder 853-1201-1 Loadlock Bottom Plate (2x) H-7-X 040 135 853-1201-2 Loadlock Bottom Plate C2x) 715-3366-1 Cylinder Modifier (lx)

771-1207-1 Thermocouple Gauge Tube 853-1201-1 Loadlock Bottom Plate Entr. (lx) DV-23 024 116

" ) 853-1201-2 Loadlock Bottom Plate Exit (1xl 853-5903-1 Soft Pump Down (lx)

'------ 853-5903-2 Soft Pump Down Entrance (1x)

771-4104-1 Convectron Tube 853-3948-1 Differential Seal (1X) 275071 064 137 853-6141-1 Bulkhead Dlfferentlal Seal (1X)

796-0233-1 KF 25 Gasket 2 Common (10x) HPS 31-2704 026 118

796-0233-2 KF 40 Gasket Corrrnon (22x) HPS 31-2705 026 118

796-0233-3 KF 50 Gasket Common (4X) HPS 31-2706 026 118

796-0712-1 Nupro Air. Valve 2 Common (13x) SS-4BK TW-91NG 027 119

796-0712-4 Nupro Air Valve 839-2093-1 Gas Stablllzatlon Manifold ( 1 x) SS-43K-TW-10 027 119

796-0714-1 3 Way Valve 2 853-0606-1 Gas Panel (6x) SS-42X-VCR-4 066 158 853-2103-1 CCL4 Tank (2X)

796-0719-1 VCR Gasket 12 Common (74xl N1-4-VCR-2 028 119

796-1092-1 Ultra Torr Fitting 853-1201-1 Bottom Plate Entrance (1xl SS-4-UT-1:-2 028 119 853-1201-2 Bottom Plate Exit C1xl 853-3916-1 Bleed Valve (lx) 853-5903-1 Soft Pump Down C1xl 853-5903-2 Soft Pump Down Entrance (1xl

796-1179-1 Ultra Torr ,25 11 Union 860-1785-1 Gas Panel I ns1"al fat Ion C1xl SS-4-UT-6 028 119

796-1233-1 KF 25 Clamp Common C12x) K100C 052 148

796-1233-2 KF 40 Clamp 2 Common C7x) K150C 052 148

796-1233-3 KF 50 Clamp 3 860-2170-1 Vacuum System C2xl 16345 053 149 860-2197-1 Vacuum Pumpln Plasma Etcher C2xl 853-5939-1 Throttle Valve (2x)

Page 7-9 (Rev 4)

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AUTO ETCH SECTION SEVEN


' '-lli.m ~ 1.0. !&d§ Part Number D§scrlptlon .Q.1:¥ Where Used 1:1.f.r...fLN Mfr. .Y.n.dJ::

796-1936-1 2 Micron Ff lter (316 5/5) 3 853-0606-1 Gas Panel Assembly (6x) 55-4F-P4-2 027 119

796-5919-1 Throttle Valve 860-2170-1 Vacuum lnstal lat Ion C1x) MDV-015 045 141

797-0987-1 MFC CC2CLF3> 200 seem Tylan 1* 853-0606-1 Gas Panel 6260 200 5CCM 029 120

797-0989-1 MFC CCHF3> 200 seem Tylan 1* 853-0606-1 Gas Panel 6260 200SCCM 029 120

797-0990-1 MFC CC2F6> 200 seem Tylan 1* 8!?3-0606-1 Gas Panel #260 200 SCCM 029 120

797-0992-1 MFC CArl 200 seem Tylan 1* 853-0606-1 Gas Panel 6260 200 SCCM 029 120

797-0993-1 MFC COzl 200 seem Tylan 1* 853-0606-1 Gas Panel f/260 200 SCCM 029 120

797-0995-1 MFC CCF4) 200 seem Tylan 1* 853-0606-1 Gas Panel 6260 200 SCCM 029 120

797-2140-1 MFC CHel 200 seem Tylan 1* 853-0606-1 Gas Panel 11260 200 SCCM 029 120

797-2141-1 MFC CN2> 200 seem Tylan 1* 853-0606-1 Gas Panel f/260 200 SCCM 029 120

797-2142-1 MFC CCctF3> 200 seem Tylan 1* 853-0606-1 Gas Panel #260 200 SCCM 029 120

797-2143-1 MFC CSF6> 200 seem Tylan 1* 853-0606-1 Gas Panel #260 200 SCCM 029 120

797-2360-1 MFC CCct3F> 200 seem Tylan 1* 853-0606-1 Gas Panel ff260 200 SCCM 029 120

797-2361-1 MFC CC2ctF5l 500 seem Tylan 1* 853-0606-1 Gas Panel UFC 1000 200 SCCM 030 121

810-0392-1 Serial 1/0 PC Board 853-0611-1 Control !er Drawer Clx) Same 001 100 853-6136-1 Bu I k bead Contro 11 er Drawer C1xl

810-0474-1 Driver PC Board 853-0611-1 Controller Drawer C2xl Same 001 100 853-3136-1 Bulkhead Controller Drawer (2x)

810-0503-1 RF Match Control PCB 853-1142-1 RF Match Control Clx) Same 001 100

810-0530-1 Motor Driver PCB 853-1142-1 RF Match Control C2x) Same 001 100 853-1291-2 RTD Interface Clx)

810-0530-2 Motor Driver PCB 853-1242-1 Gap Drive Clxl Same 001 100

810··0667-1 TC Gauge PCB 853-0611-1 Controller Drawer C2x) Same 001 100 853-6136-1 Bulkhead Control !er Drawer C2x)

810-0668-1 RTD Interface PCB 853-1291-1 RTD Interface C1xl Same 001 100 853-1291-2 RTD Interface (!Xl

810-0670-1 Analog Out PCB 853-0611-1 Controller Drawer Clx) Same 001 100 853-6136-1 Bu I khead Centro 11 er Drawer Clx)

810-0673-1 Combination Board 853-0611-1 Control !er Drawer Clxl Same 001 100 853-6136-1 Bulkhead Controller Drawer (lx)

810-1314-1 Dig Ital 1/0 PCB 853-0611-1 Controller Drawer (1xl Same 001 100 853-6136-1 Bulkhead Controller Drawer Clx)

810-1314-2 Dig Ital 1/0 PCB 853-0611-1 Controller Drawer {1x) Scime 001 100 853-6136-1 Bulkhead Controller Drawer Clx)

* User Selected: For other optional mass flow controllers, see the List of Materials for the Gas Panel Assembly (853-0606-X) In the Assembly Drawings package,

Page 7-10 (Rev 4)

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..l.:t.run ful&m.!.d. I .D. CQd~ fart Number Description ~ Where Used Mfr P/N .Mf.r. Y.rul.r.

810-1314-3 Dig Ital 1/0 PCB 853-0611-1 Controller Drawer C1xl Same 001 100 853-6135-1 Bulkhead Controller Drawer ( 1xl

810-1316-1 CPU 7803 PCB 853-0611-1 Controller Drawer C1xl Same 001 100 853-5136-1 Bulkhead Controller Drawer (lxl

~~-- 810"'1317-_L_Analog __ ln PCB _____________ J_ 853-051.1-1 _ Centro 11 er Drawer .. Cl xl Same .. __ __________ OOL-1 853-5135-1 Bulkhead Controller Drawer (1x)

810-1984-1 MATROX - CRT Driver PCB 853-0511-1 Controller Drawer C1xl Same 001 100 853-5135-1 Bulkhead Controller Drawer C1x)

810-4092-1 RF I ntertace 853-4118-1 RF Interface Box Clx) Same 001 100 853-5350-1 Bulkhead RF Interface Box (1x>

810-4115-1 ES Memory PCB 853-0511-1 Controller Drawer (lxl Same 001 100 853-6135-1 Bulkhead Controller Drawer (1xl

839-1845-1 Brake Shoe Assembly 853-5062-1 Gap Adjust Housl_ng C1x> Same 001 100

839-2238-1 Blower/Pump 850-2115-1 Edwards Pump Package (1x) Same 001 100

850-2115-1 Edwards Pump Package 850-5330-1 490/590 Shipping Assembly (1x) Same 001 100 850-5330-2 -Bulkhead 490/590 Shipping (1xl

853-0341-1 Isolation Valve Drive 850-2170-1 Vacuum System lnstal latlon (2x) Same 001 100 850-2170-2 Bulkhead Vacuum System Inst. (2x)

() 853-0358-1 Operator Interface Ass'y 850-1787-1 Operator Interface Inst, C1x) Same 001 100 853-5031-1 Bulkhead Remote CRT (1x) 850-5550-1 Bulkhead Operator Interface (1x)

853-0575-1 Entrance Loadlock 853-5116-1 Bulkhead Reactor Chamber (tx) Same 001 100 853-5345-1 Reactor Assembly C1x)

853-0575-2 Exit Loadlock 853-5116-1 Bulkhead Reactor Chamber C Ix) Same 001 100 853-5345-1 Reactor Assembly(lx)

853-0577-1 Phase & Magnitude Detector 853-2030-1 RF Match Assembly Clx) Same 001 100 853-5117-1 Bulkhead RF Match Assembly ( 1 X)

853-0604-1 Alrlock Harness 853-1201-1 Bottom Plate Entrance (1xl Same 001 100

853 0604-2 Airlock Harness 853-1201-2 Bottom Plate Exit C1xl Same 001 100

853-1132-1 15V Power Supply 853-0511-1 Control !er Drawer C1x) Same 001 110 853-5136-1 Bu I khead Control I er Drawer (1xl

853-1133-1 30V Power Supply 853-0511-1 Controller Dral'{er C1x) Same 001 110 853-5135-1 Bulkhead Controller Drawer (1x)

853-1142-1 Match Control 853-2030-1 RF Match Reactor Chamber (1xl Same 001 100 853-6117-1 Bulkhead RF Match Reactor C1xl

853-1154-1 Entrance Wafer Arm and 1* 853-0576-1 Entrance Load I eek C-1 x) Same 001 100 Gear Assembly C4"/100mm)

853-1154-2 Exit Wafer Arm and Gear 1* 853-0575-2 Exit Loadlock C1x) Same 001 100 Assembly (411/100mm)

853-1154-3 Entrance Wafer Arm and 1* 853-0576-3 Entrance Loadlock C1XJ Same 001 100 Gear Assembly C5"/125nm)

,,,----.

* User Selected /

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J.ielll. ~ I .D. QQd~ Part Number Description ~ Where Used Mfr P/N .M.fJ: .Y.ru!r.

8.53-11.54-4 Exit Wafer Arm and Gear 1* 6.53-0.576-4 Exit Loadlock C1Xl Same 001 100 Assembly C.5"/125mm)

8.53-1242-1 Gap Drive Assembly 860-13.56-1 Interface Installation C1x) Same 001 100 860-1356-2 Bulkhead Interface Install. (1x)

853-1291-1 RTD Interface 860-1356-1 Interface Electronlcs (1x) Same 001 100 860-13.56-2 Bulkhead Interface C1x)

853-1372-1 RTD Temperature Assembly 853-.5048-1 Electrode 811 (1x) Same 001 100

853-1415-1 Baratron (Capacitance) 853-6116-1 Bulkhead Reactor Chamber (1x) Same 001 100 853-6345-1 Reactor Assembly (1x)

853-1772-1 5V Power Supply 853-0611-1 Controller Drawer C1x> Same 001 100 853-6136-1 Bulkhead Controller Drawer (1x)

853-2165-1 Isolation Drive Valve 860-2169-1 Pneumatic System C1x> Same 001 100 860-2169-2 Bulkhead Pneumatic System <1x)

853-2751-1 Power Supply, 60 Hz 853-6.500-1 Power Distributor Box (1x) Same 001 100

853-2751-2 Power Supply, 50 Hz 8.53-6.500-2 Power Distributor Box Ctx) Same 001 100

853-4093-1 Entrance Drive Motor 853-4103-1 Top Plate Rear (1x) Same 001 100

853-4094-1 Drive Motor, Slngle 611 8.53-4100-1 Top Plate Right Front (1x) Same 001 100

8.53-4106-1 Entrance Lifter 8.53-4103-1 Top Plate Rear (1x) Same 001 100

853-4109-1 Exit Point 853-4107-1 Top Plate Right Rear C1x> Same 001 100

8.53-4118-1 RF Interface 860-.5070-1 RF Generator (lx) Same 001 100

853-5048-1 811 Electrode Assembly 853-6037-1 Chamber Bottom C1x) Same 001 100

853-5062-1 Gap Adjust Housing Ass'y 853-6116-1 Bulkhead Reactor Assembly C1x> Same 001 100 853-634.5-1 Reactor Assembly Clx)

853-5683-1 Master Module (Spec I fy 860-2111-1 Operational Kit C1x> Same 001 100 Mach I ne S/N) 860-2111-2 Bulkhead Operational Kit ( 1x)

853-5684-1 Recipe Module 2 860-2111-1 Operational l<lt C1x) Same 001 100 860-2111-2 Bulkhead Operatlonal Kit C1x)

853-6313-1 lso Valve, Actuating· 853-0341-1 Airlock lsolatlon Valve ( 1x) Same 001 100 853-6385-1 Reaction Chamber C1x)

853-6313-2 lso Valve, Actuating 853-6385-1 Chamber Manlfold C1x) Same 001 100

853-6.534-1 Gate Drive Cyllnder 853-1201-1 Bottom Plate Entrance (1x) Same 001 100 853-1201-2 Bottom Plate Exit C1x>

853-6534-2 Gate Drive Cyl lnder 853-1201-1 Bottom Plate Entrance Clx) Same 001 100 853-1201-2 Bottom Plate Exit .(1x)

853-6769-1 Main Bleed Valve 860-2170-1 Vacuum System C1x) Same 001 100 860-2170-2 Bulkhead Vacuum System (Ix)

8.54-2028-1 Gap Drive Motor Ass•y 8.53-2029-1 Gap Drive Assembly C2x) Same 001 100 853-6113-1 Bulkhead Gap Drive Assembly (2x)

920-1662-1 Hose Clamp 2 Common C46) .5000-2 022 114

950-5924-1 Alumtnum Tape 4ft 853-6116-1 Bulkhead Reacfor Assembly (4ft) 12G7 061 1.55 853-634!5-1 Reactor Assembly C4ft)

tt User Selected

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AUTOETCH SECTION SEVEN [email protected] … · 2017. 3. 28. · AUTOETCH SECTION SEVEN 7 .1...

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