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atCHALMERS UNIVERSITY OF TECHNOLOGY

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MICROWAVE ENGINERING AT CHALMERS

At Chalmers University of Technology more than a hundred employees are engaged in research related to microwaves such as devices, subsystems, systems, and applications at frequencies ranging from below 1 GHz extending to beyond 1THz. External partners in the Gothenburg area employ at least 5000 people in large companies such as Ericsson, RUAG, Saab Microwave Systems, Emerson Rosemount TankRadar, Huawei as well as numerous small, startup, companies.Internationally, there is an increasing number of cooperating companies see page 22. In this leaflet we present the departments and the specia-lized centers, where the work is performed. Some examples of current research projects are also shown. Good research work is always based on a solid educatio-nal effort. Chalmers offers competitive master and graduate programs in the field of microwave, photonics and space engineering.

THE WILLIAM CHALMERS LEGACY

Chancellery member William Chalmers (1748-1811) had amassed a considerable fortune from the East India Company’s trade with other countries, in cluding China, during the latter half of the 18th century. Inspired by fellow Freemason Pehr Dubb, he left his entire estate to Sahl-grenska Hospital in Gothenburg and for the founding of an “industrial school for poor children who had learned to read and write”. The Freemasons’ Orphanage Trustees in Gothenburg were assigned the task of administering the will and after several years of discussions regarding a framework for the school, the Chalmers School of Arts and Crafts was finally opened on November 5, 1829. The principal of the school was Carl Palmstedt. During the first year the school had three teachers and 10 students. Over the years the school expand ed and eventu-ally became a university with 2,700 employees and almost 10,000 students.

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CONTENTS:

Dept. of Signals and Systems ...................................................... 5Dept. of Microtechnology and Nanoscience .............................6Dept. of Earth and Space Science ............................................. 8Advanced Receiver Development ............................................... 9Biomedical Electromagnetics ..................................................... 10Emerging Microwave Technologies ......................................... 11High-Efficiency Power Amplifiers .............................................. 12Low-Noise HEMTs and Amplifiers ........................................... 13Metamaterials and -Surfaces ..................................................... 14Microwave Wide-Bandgap Technology .................................. 15MIMO Antennas ............................................................................ 16MMIC Design: Frequency Generation .................................... 17MMIC Design: Multifunctional Circuits ................................... 18Terahertz Technology .................................................................... 19Ultra Wide Band Antennas (UWB) .......................................... 20Microwave and Millimetrewave Measurements Capability 21GigaHertz Centre .......................................................................... 22Chalmers Antenna Systems VINN Excellence Centre ....... 23Nanofabrication Laboratory ........................................................ 24Myfab ................................................................................................ 25PhD and Postdoc Programmes ................................................ 26Master’s Programme in Wireless, Photonics, and Space Engineering ....................... 27

Dept. of Signals and SystemsThe Department of Signals and Systems performs micro-wave research within two research groups, i.e. the Antenna group and the Biomedical Electromagnetics group. Their la-boratory resources cover an anechoic chamber for tradional radiation pattern measurements, and a reverberation cham-ber for measuring performance of wireless terminals and stations such as mobile phones.

ANTENNA GROUPAreas of research:– MIMO antennas– UWB antennas and antenna arrays– Metamaterials and -surfacesStaff: 17

Contact:Prof. Per-Simon Kildal, Chalmersper-simon.kildal@chalmers.se

BIOMEDICAL ELECTROMAGNETICS GROUP

– Microwave imaging for biomedical applications– Microwave hyperthermia for cancer treatment

Contact:Assoc. Prof. Andreas Fhagerandreas.fhager@chalmers.seHomepage: www.chalmers.se/s2/EN

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TERAHERTZ AND MM-WAVE LABORATORYAt the Terahertz and Millimetre Wave Laboratory we conduct research on new materials, devices and circuits for appli ca- tions in the microwave, millimetre wave and terahertz fre quen -cy region. Our research finds applications in radio astrono-my, atmospheric science, radar sensors, THz-imaging systems, and future wireless communication systems.Areas of research:– Terahertz semiconductor devices and circuits– Low noise superconducting devices– Agile materials and microwave components– Terahertz metrology and applicationsStaff: 20Contacts:Prof. Jan Stake jan.stake@chalmers.se

Homepage:www.chalmers.se/mc2/EN/laboratories/thz-millimetre-wave

Dept. of Microtechnology and NanoscienceMICROWAVE ELECTRONICS LABORATORYThe focus is on applications of research in high frequency devices and integrated circuits. Our most important labo-ratory resources cover a dedicated III-V process line and a world-class microwave measurement equipment for fre-quencies up to and beyond 300 GHz.Areas of research:– Terahertz semiconductor devices and circuits– Ultra-low noise devices– Agile materials and microwave components– Terahertz metrology and applicationsStaff: 45Contacts:

Prof. Herbert Zirath herbert.zirath@chalmers.seProf. Jan Grahn jan.grahn@chalmers.seHomepage:www.chalmers.se/mc2/EN/laboratories/ microwave-electronics

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Dept. of Earth and Space SciencesADVANCED RECEIVER DEVELOPMENT GROUPThe Group for Advanced Receiver Development (GARD) works on technologies and instruments for Radio Astro-nomy and Environmental Science. Our receivers are based on latest advances in physics and technology. The work comprises material and thin-film technology, fabrication of components, system integration. Constant improvement in instruments’ performance provides deeper knowledge about Universe and better understanding of our planet- Earth.Staff: 14

Contact:Prof. Victor Belitskyvictor.belitsky@chalmers.seHomepage:www.chalmers.se/rss/EN/research/research-groups/advan-ced-receiver

Advanced Receiver DevelopmentInstrumentation for Environmental Science and Astronomy – from GHz to THz

– R&D on terahertz sensors, amplifiers, thin-film and micromachining technologies

– Complete millimetre and THz receiver systems (100 GHz– 2 THz)

– In-house fabrication of THz mixers based on super- conducting electronics using thin film technology

– In-house micromachining of all copper waveguides for SubMM Waves and THz

– In-house cryogenic Low Noise Amplifiers development

Applications

– Environmental science and atmospheric research, e,g PHOCUS, Odin

– Radio astronomy ground based (APEX, ALMA) or space borne (HERSCHEL)

Contact:

Prof. Victor Belitsky victor.belitsky@chalmers.se

SondRad 557 GHz receiver on PHOCUS rocket

SHeFI receiver (100 GHz–1.4 THz) on APEX telescopeMicromachined 1.32 THz waveguides for APEX T2 receiver

ALMA band 5 cartridge

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Biomedical ElectromagneticsResearch aiming at developing diagnostic and treatment tools based on microwave technology for application to breast cancer detection, stroke diagnostics and hyper ther-mia treatment of cancer tumors. Activities span from design and development of algorithms and systems to clinical trials.

Contact:Assoc. Prof. Andreas Fhager andreas.fhager@chalmers.se

Startup company: Medfield Diagnostics AB, www.medfielddiagnostics.com Diagnosing stroke. Microwave system developed in collaboration with

the company Medfield Diagnostics for stroke diagnostics. The system consists of measurement electronics and a wearable antenna array

Breast cancer detection. Prototype antenna system where active microwave imaging is investi-gated

Microwave hyperthermia. System for phase and amplitude control of a micro wave based system for microwave hyperthermia. The clinical system under development is intended for treatment of tumors in the head and neck region

Ferroelectrics and multiferroics in agile microwave devices– Varactors– Tuneable filters, matching networks, phase shifters, delay lines

– Voltage-controlled oscillators (VCO) using ferroelectric varactor

– Tuneable film bulk acoustic resonators (FBAR), FBAR base filters, VCOs

– Gas sensorsPassive microwave components in RFICs and MMICs

Contact:Prof. Spartak Gevorgian spartak.gevorgian@chalmers.se

Emerging Microwave Technologies

4” multiproject silicon wafer with integra-ted tuneable microwave ferroelectric and passive components developed at the Chalmers Nanofabrication Laboratory

VCO based on tuneable ferroelectric delay line

Multiferroic Bismuth Ferrite film over interdigital gold electrodes for sensor applications

High Q-factor parallel-plate ferroelectric varactors

Silicon substrate integrated Bragg reflector used in tuneable FBARs based on paraelectric phase ferroelec-trics. Q-factor more then 350 at 5.4 GHz, tuning more

than 3%

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High-Efficiency Power Amplifiers– High efficiency and wideband power amplifier design techniques– Transmitter architectures for future wireless applications– Integration of analog and digital techniques for lineariza- tion and efficiency enhancement

Applications:- Radio base-stations and point-to-point radio links- Advanced radar transmitters

Contact:Assoc. Prof. Christian Fagerchristian.fager@chalmers.se

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Vector−switched GMP

Without linearizationGeneralized Memory Polynomial(GMP)

Wideband and efficient 1-3 GHz digitally controlled dual-RF input power amplifier

Wideband modulated measure-ments of a high efficiency trans mitter architecture

Pre-distortion linearization of a Doherty power amplifier using our proposed Vector-Switched mode-ling approachHighly efficient RF pulse width modulated class E power amplifier

– InP HEMTs for ultra-low noise– Emerging InAs HEMTs for ultra-low power

– Cryogenic ultra low-noise amplifiers with best performance in class

– Cryogenic InP HEMT MMIC process up to 200 GHz

Highlights:– InP HEMT 4–8 GHz cryogenic hybrid LNA with record noise performance of 1.2 K (Schleeh IEEE EDL 33, 664, 2012)– First demonstration of InAs/AlSb HEMT cryogenic hybrid LNA (Moschetti IEEE MWCL 22,144, 2012)– Demo of 0.5-13 GHz InP HEMT MMIC LNA with 3 K noise temperature (Schleeh IEEE TMTT 60, 206, 2013)– Design, production and delivery of 30 cryogenic ultra-sensitive LNAs for European Space Agency Cooperation: Low Noise Factory (www.lownoisefactory.com)

Contacts: Prof. Jan Grahn jan.grahn@chalmers.se

Assoc. Prof. Piotr Starski piotr.starski@chalmers.se

Low-Noise HEMTs and Amplifiers

Cryogenic 4-8 GHz InP HEMT LNA design

Cryogenic 24-40 GHz InP HEMT MMIC

Cross-section of 130 nm InP HEMT

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– Artificial surfaces (AMC, EBG, soft and hard) – Wideband low- loss low- cost gap waveguides – Gap waveguide based packaging technology – EM modeling and method developments

Applications: – Millimetre and submillimetre wave systems – Radio links, car radar

Contacts: – Prof. Per- Simon Kildal per- simon.kildal@chalmers.se – Dr. Rob Maaskant rob.maaskant@chalmers.se

Meta-Materials and -Surfaces

11–20 GHz demonstrator of ridge gap waveguide (left). Computed field distribuons at different frequen-cies. Waves are seen to follow ridge between 11 and 20 GHz. No metal contact is needed between textured surface and smooth lid. This is advantageous for applications above 30 GHz

Ridge gap waveguide 180° hybrid power divider

Groove gap waveguide filter

Packaging of microstrip filter

Exploring wide bandgap semiconductor technologies in microwave applications by developing processes, devices, models, characterization methods, and integrated circuits.Contact:Assoc. Prof. Niklas Rorsman niklas.rorsman@chalmers.se

Microwave Wide-Bandgap Technology

GaN HEMT: Two 3”-GaN HEMT wafers processed at Chalmers

WBG microwave varactors: SiC varactors for load mo-

dulation and reconfigurable circuits with a tuning range

of 5:1 and a breakdown greater than 100 V

WBG MMICs: A fully integrated X-band tranceiver realized in theChalmers GaN MMIC process

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MIMO Antennas– Measurements in reverberation chamber – Emulation of Rayleigh fading environments – EM modeling including processing and modulation – Efficiency, radiated power, receiver sensivity, diversity gain, capacity, throughput Applications: – General multiport antenna arrays – Mobile phones and other wireless terminals and stations Contacts: – Adj. Prof. Jan Carlsson jan.carlsson@sp.se – Prof. Per- Simon Kildal per- simon.kildal@chalmers.se

Measurement set- up for passive measurements in reverberation chamber

Measurement set- up for active throughput measurements of WLAN system in two connected reverberation chambers

Computed fading field in reverberation chamber, and high performance shielded chamber for sensitive measurements of actve terminals

– Low phase noise voltage controlled oscillators with wide tuning– Frequency multipliers for millimetre-wave frequency generationApplications:– Communication systems, radars, etc.– Sources for millimetre wave and submillimetre-waveContact:Prof. Herbert Zirath herbert.zirath@chalmers.seStartup company:Gotmic AB, www.gotmic.se

MMIC Design: Frequency Generation

V-band frequency source based on 7 GHz InGaP HBT VCO and an mHEMT _8 multiplier

Wideband frequency tripler designed for 20-30GHz VCOflip-chip based E-band source

Low phase noise VCOs : -118 dBc/Hz @100 kHz off-set for a 7GHz VCO, 10-13GHz VCO with phase noise

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MMIC Design: Multifunctional CircuitsFully integrated RF-frontends for millimetre-wave application based on active devices (FET and HBT types, III-V and Si)Applications:– 52 GHz, 60 GHz, E-band, 120 GHz, 220 GHz communication– Remote sensing for 118, 183, 220, 340 GHzContact:Prof. Herbert Zirath herbert.zirath@chalmers.seStartup company:Gotmic AB, www.gotmic.se

60 GHz RX/TX chip-set 60 GHz module Packaged 220 GHz receiver MMIC

220 GHz antenna integrated receiver: antenna+3-stage LNA+mixer+frequency multiplier

Terahertz Technology– Terahertz sources such as Schottky varactor and Hetero- structure Barrier Varactor frequency multipliers– Terahertz detectors and heterodyne mixers based on Schottky diode technology and Hot Electron Bolometers (HEB).– Semiconductor materials and devices for high frequency applications– Graphene electronics– THz imaging and measurement techniques

Contact:Prof. Jan Stake jan.stake@chalmers.se

Startup company:Wasa Millimeter Wave AB www.wmmw.se

170 GHz Schottky diode frequency doubler Microwave graphene field effect transistor Integrated high power terahertz diode multiplier (HBV)

Herschel Space Observatory, courtesy D.Ducros, ESA

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Ultra Wide Band Antennas (UWB)– Beam- forming arrays and array feeds – Multiband antennas– Co- design with low noise amplifiers (LNA) – Cryogenic technology in collaboration with Onsala Space Observatory (OSO)

Applications: – Square-kilometre Array (SKA) radio telescopes – VLBI2010 radio telescopes – Satcom terminals, radio links – Medical imaging

Contacts: – Assoc. Prof. Jian Yang, jian.yang@chalmers.se – Assoc. Prof. Marianna Ivashina, marianna.ivashina@chalmers.se – Prof. Per- Simon Kildal, per- simon.kildal@chalmers.se Setup for measuring system noise temperature of

eleven antenna with LNAs in cryostat at OSO

Four differential LNAs integrated on rear side of

ground plane of eleven antenna

1.2–13 GHz compact log-periodic folded-dipole antenna developed for SKA. It is named the eleven antenna because it consists of parallel dipoles in eleven configuration, directivity is 11 dBi, RL > 11 dB, and more than decade bandwidth (11>10)

Microwave and Millimetre waveMeasurements CapabilityState-of-the-art microwave and millimetre wave measure-ment laboratory for both devices and circuits

Measurement capabilities:– On-wafer characterization from DC to 325 GHz– Network analyzers from 3 Hz to 325 GHz– Large signal characterization with waveforms measurements and load/source pull, both active and passive.– Phase noise and 1/f noise characterization– Spectrum analysis up to 220 GHz– Fourier Transform Spectroscopy up to 8 THz– Coherent tunable sources up to 1 THz– FIR laser sources up to 3.5 THz– Characterization of modulated signals (fast oscilloscopes, arbitrary wave generators, etc)– Thermal characterization including IR microscope– Assembly lab including wire bonder and flip chip

Contacts:Dr. Mattias Ferndahl mattias.ferndahl@chalmers.seDr. Serguei Cherednichenko serguei@chalmers.se 24 GHz loadpull setup with thermal

probe station On-wafer measurement setup

Noise parameter measurements setup

Oscillator noise measurement setup

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GigaHertz CentreAn international consortium between Chalmers and leading companies for bringing research advances in microwave engineering and components faster to industry

Research projects:– Energy-efficient MIMO transmitters– GaN HEMT MMIC design & characterization– GaN HEMT oscillators– Extremely low noise InP HEMT MMICs and THz GaAs Schottky diode integrated circuits

System targets: – Cellular radio base stations – Microwave/mm-wave radio links– Defense radar systems– Sources and receivers for space applications

Contact:Centre Director Prof. Jan Grahn jan.grahn@chalmers.se, www.chalmers.se/ghz

Partners:

COMHEAT

Chalmers Antenna SystemsVINN Excellence CentreChase is a ten- year agreement between Chalmers, compa ny partners, and the Swedish Governmental Agency for Innova-tion Systems (VINNOVA), to carry out research and innova-tion in antenna systems technologies.

Partners: Arkivator, Bluetest, Elekta Instrument AB, Ericsson AB, Food Radar Systems AB, Gapwaves AB, Kapsch Trafficom AB, Medfield Diagnostics AB, Micropos Medical AB, Qamcom Techn. AB, RUAG Space AB, Smarteq Wireless AB, Volvo Car Corp., Västra Götalandsregionen, Chalmers, SP Techn. Research Inst. of Sweden, Royal Inst. of Techn., Telenor A/S

Present joint projects: – Gap waveguide frontend demonstrator – Microwave hyperthermia – Sensor systems – Multi-antenna techn. for wireless access & backhaul – Antenna Systems for V2X Communication – Next Generation Array Antennas – Capacity Optimization of LTE Wireless Systems Using OTA Testing with Statistical User-Data

Contact: Dr Staffan Sjödin, staffan.sjodin@cit.chalmers.se www.chalmers.se/s2/cha- en/chase

MIMO Terminal

Microwave tomography

Reverberation chamber

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Nanofabrication LaboratoryThe Myfab node at Chalmers, the Nanofabrication Labora-tory, is a world-class university cleanroom for research and fabrication of micro and nano-technology. The laboratory is operated by MC2 as an open facility for external as well as internal academic and industrial interests.

The processing techniques include thin film deposition, wet and dry etching, oxidation, thermal treatments, and various advanced analysis methods. Special emphasis is placed on lithography where several optical systems and two electron-beam lithography tools are available.

Contact info:

Dr. Peter Modh, Head of Nanofabrication Laboratorypeter.modh@chalmers.se

Jeol Ebeam system capable of 4 nm spot size

MBE system for advanced epitaxiThe lab staff, ready to help with processing issuesSpectroscopic ellipsometer for multilayer film characterization

Myfab – access to successMyfab is the Swedish national research infrastructure for micro and nano fabrication. The infrastructure includes 600 instru-ments, and has 600 scientists and over 80 companies active in academic research and product development.

Through Myfab you gain access to Sweden’s most advan-ced and comprehensive micro and nano technology research equipment, in the precisely controlled process environments of cleanroom facilities at MC2 at Chalmers University of Techno-logy in Gothenburg, Ångström Laboratory at Uppsala University and Electrum Laboratory at KTH Royal Institute of Technology in Stockholm. These three nodes share common resources, knowledge and opportunities. Our highly skilled personnel is available to assist you or to provide training in using cleanroom tools. Myfab will give you the opportunity to develop and realize your own unique micro and nano vision.

Contact:Thomas Swahn, Director Myfab thomas.swahn@chalmers.sewww.myfab.se

REALIZE YOUR NANOVISION

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We encourage international graduate students and post-docs to join our research groups. From experience it is verified to be rewarding for them as well as for us. Half of the PhD students with us are international. For research programmes, see this brochure.

PhD courses (also for master students): – Empirical Modeling of Microwave Devices Teaches methods for empirical device modeling, i.e. for development of small and large signal models from mea surements and physical understanding of dominant device mechanisms.

– Microwave Network Analysis, Filtering, and Matching Teaches advanced methods of analysis and design for non-distributed and distributed microwave networks.

– Numerical Simulation of Semiconductor Devices Provides deep theoretical background and broad know- ledge about the benefits and different areas of applica- tions for physics-based simulation of semiconductor devices (TCAD).

– High-Speed Transistors Focus is on the physical understanding of how materials, processing, and component design affect the electrical

PhD and Postdoc Programmes

characteristics of a semiconductor device. Emphasis is on the transistors (MESFET, HEMT, BJT, HBT, and MOSFET).

– Nonlinear Microwave Circuits & Simulation Techniques It covers transient and steady-state methods for compu - ting the response of nonlinear circuits. The outcome is thorough understanding of how a modern nonlinear microwave simulator works.

Contacts: Prof. Herbert Zirath, herbert.zirath@chalmers.se Prof. Jan Stake, jan.stake@chalmers.se Assoc. prof. Hans Hjelmgren, hans.hjelmgren@chalmers.se

The programme starts with five compulsory courses. Through semi-compulsory courses, students can specialize in wireless, photonics or space engineering, or a combina-tion thereof. To provide opportunities to study related fields, there is also a wide range of elective courses.

Engineering students specializing in Microwave Engineering will learn to analyze and design passive and active microwa-ve components and circuits (directional couplers, amplifiers, antennas, mixers, etc.) for different applications, including radar and wireless communication systems. A solid physical understanding is reached through a combination of lectures, assignments, projects, and laboratory exercises. There is also a close connection to local and worldwide companies in microwave engineering.

Microwave courses:– Microwave Engineering– Active Microwave Circuits– Antenna Engineering– Design of Monolithic Microwave Integrated Circuits (MMIC)– Mm-Wave and THz TechnologyContact: Assoc. Prof. Hans Hjelmgren, hans.hjelmgren@chalmers.se

Master’s Programme in Wireless, Photonics, and Space Engineering

A balanced frequency quadrupler (x4) designed in the MMIC course by a former master student (Mor-teza Abbasi)

Happy engineering students show their microwave radio link system.

Year 1 Year 2

Electromag-netic Waves

&Components

MicrowaveEngineering

Space Science

andTechniques

Fundamentalsof

Photonics

Wireless andPhotonics System

Engineering

Master’s Thesis

Remote Sensing

Active Micro-wave Circuits

Wirelesslink project

SatellitePositioning

SatelliteCommunic.

Fiber OpticalCommunic.

Opto-electronics

Mm-wave &THz Techn.

Design ofMMIC

Semiconduct. Devices

AntennaEngineering

LaserEngineering

Radar Systems

andApplications

Semi-compulsory courses, select 3–7 of 12

Study period 1 & 2 Study period 3 & 4 Study period 1 & 2 Study period 3 & 4

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CHALMERS Chalmers University of Technology conducts research and education in the main engineering sciences as well as in technology related mathematical and natural sciences. Researchers, graduate engineers and architects, engineers, technicians and ship’s officers receive their education at Chalmers. Chalmers has about 10 000 students.

The pursuit of new knowledge and improved technology has charac-terised Chalmers since its foundation in 1829 in accordance with the testament of William Chalmers, director of the Swedish East India Company. Our driving force is inspired by the joy of discovery and the desire for learning. Behind all that Chalmers accomplishes, the hope persists for particpating in sustainable development – both nationally and globally.

Two thirds of the university’s budget relate to research and about a thousand research projects are conducted on an ongoing basis, many of them at the forefront of international development. Research and education are conducted in close contact with industry and society to meet the demands of the world around.

TWO CAMPUSES – Chalmers has two pleasant university campuses in Göteborg. Campus Johanneberg close to the city centre and Campus Lindholmen on the North bank of the river Göta Älv.

MAJOR RESEARCH INFRASTRUCTURES – Onsala Space Observatory is a Swedish National Research Facility for advanced radio astronomy, located 45 kilometers south of Göteborg. The Observatory is also involved in the APEX projects, a new radio telescope in Chile. The Nanofabrication Laboratory is a state-of-the-art cleanroom and a European transnational access facility.

THREE SCIENCE PARKS – Chalmers Science Park houses research departments of major enterprises. Chalmers Innovation houses newly-started innovative high technology companies, mainly emenating from research and study programmes at Chalmers. At Lindholmen Science Park, a unique and growth-oriented interplay is being developed within the areas of mobile data communications, intelligent vehicles and transport systems as well as media and design.

CLOSE CO-OPERATION WITH UNIVERSITY OF GOTHENBURGParticularly within mathematical sciences, environmental and informa-tion technology research and education.

Chalmers University of Technology, SE-412 96 Gothenburg, Sweden, +46 31 772 1000, www.chalmers.se

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