ASTC Advanced Sensor Technologies · Company Profile and Products AST°C AST ENGINEERING INC....

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“ We Measure the Temperature " THERMOCOUPLE / PROFILE TC / SPIKE TC / WAFER TC / GLASS TC SHEATHED TC / INDUSTRIAL TC QUARTZ WARE / CERAMIC PARTS / SiC PARTS INSTRUMENTS Company Profile and Products A ° C T S AST ENGINEERING INC. Advanced Sensor Technologies

Transcript of ASTC Advanced Sensor Technologies · Company Profile and Products AST°C AST ENGINEERING INC....

Page 1: ASTC Advanced Sensor Technologies · Company Profile and Products AST°C AST ENGINEERING INC. Advanced Sensor Technologies. AST Engineering Inc. started business 14 years ago as an

“ We Measure the Temperature "

THERMOCOUPLE / PROFILE TC / SPIKE TC / WAFER TC / GLASS TC SHEATHED TC / INDUSTRIAL TCQUARTZ WARE / CERAMIC PARTS / SiC PARTS INSTRUMENTS

Company Profile and Products

A °CTS AST ENGINEERING INC. Advanced Sensor Technologies

Page 2: ASTC Advanced Sensor Technologies · Company Profile and Products AST°C AST ENGINEERING INC. Advanced Sensor Technologies. AST Engineering Inc. started business 14 years ago as an

AST Engineering Inc. started business 14 years ago as an engineering firm specializing in temperature measurements. Under the slogan, "AST always be with you”, AST Engineering

has been providing the best products and services to its customers.

AST Engineering has great experience in developing products.Temperature measurement is critical in Semiconductor and LCD Manufacturing. AST has

developed various instrumented TC substrates- wafers from 2” to 18” and to 6 generation LCD. We provide these TC substrates to some of the largest related equipment

manufactures in the world. They are satisfied with AST quality, delivery, price and our superior services.

For profile and spike thermocouples used in diffusion furnaces, we have long experience in manufacturing, swapping, and recalibration services for various custom and standard

models. Manufactures include TEL, KE, ASM, Centrotherm, BTU and so on.

With AST Engineering as your partner in thermocouple products, you’ll be provided with the highest quality products in the most economical way with fast and reliable services.

Company Introduction

A °CTS AST ENGINEERING INC. Advanced Sensor Technologies

Page 3: ASTC Advanced Sensor Technologies · Company Profile and Products AST°C AST ENGINEERING INC. Advanced Sensor Technologies. AST Engineering Inc. started business 14 years ago as an

Account &Management

Production Q.C. Project TeamSales/

OverseasResearch &

Development

PresidentAdvisor

•Planning•Project

Purchase AccountManagement

FabricationManufacturing

Quality Control Test Calibration

PlanningProject

Domestic SalesOverseas Sales

Innovation ResearchingDevelopment

Corporate Organization

Customer satisfaction is our top priority!

EfficiencyAST will provide one whole set of profile and spike thermocouples, fabricated per our Customer’s specification. Whole qualification sets can be shipped in approximately 2 weeks after we receive the drawings from our customer.

QualityTo provide the best quality thermocouples in the industry, we have developed manufacturing, calibration, and quality control protocols which exceed industry standard.

Swapping Service We can provide the quickest repair service since all the returned units will be replaced with new units. The returned units will be repaired and stocked for the next shipment. Parts replacement will be shipped in the same day.

Terms and conditionsWe are flexible, and open to discuss terms and conditions regarding payment, delivery, etc. We are willing to accommodate all customer requirements.

A °CTS AST ENGINEERING INC. Advanced Sensor Technologies

Page 4: ASTC Advanced Sensor Technologies · Company Profile and Products AST°C AST ENGINEERING INC. Advanced Sensor Technologies. AST Engineering Inc. started business 14 years ago as an

AST TCTM

Thermocouples for general purposes like MI sheathed TC

ASTAFERTM

Thermocouple instrumented wafer

ASTLASSTM

Thermocouple instrumented glass

ASTPROTM

Thermocouple for furnace profiling

ASTCONTM

Thermocouple for control of the furnace heater

ASTHI-TEMPTM

Thermocouple for measuring high temperatures over 2100℃

ASTEMPTM

Instruments & software: ASTAFERTM

. For taking data and temperature uniformity on wafer

Products

A °CTS AST ENGINEERING INC. Advanced Sensor Technologies

Page 5: ASTC Advanced Sensor Technologies · Company Profile and Products AST°C AST ENGINEERING INC. Advanced Sensor Technologies. AST Engineering Inc. started business 14 years ago as an

ASTAFERTM:TC Wafer and Instruments.Applications:

Can easily see and take temperature uniformity on the wafer inside of chamber.

Using a thermocouple wafer, it’s possible to find real-time wafer temperature data.

Software is developed by AST, with data logger from National Instrument! It shows reliable and accurate temperature data.

Provides actual temperature and uniformity of the wafer.

In-situ monitoring of the wafer & plate heater temperature while in the process chamber.

Calibration & Evaluation:Hot Plate, Chuck, Process Chamber & Equipment.

Application process & equipment:Diffusion Furnace, CVD, Photo, EDS, RTP, and others!

Specifications:

Thermocouple types Base Metal Wire: K, R, S ±1.1℃ or ± 0.4 % of reading valued.

Number of module channels: 20 + α (same as the thermocouple point on the TC wafer Probe).

Si Wafer: 4”, 5”, 6”, 8”, 12” and 18” (other substrates available).

Windows base program, 24 Bit ADC up to 0.02 ℃measurement sensitivity.

ADC – National Instrument made.

Data function: temperature reading, max, min, average, graph and 2D/3D and Map display.

ASTAFERTM:Broad range of temperatures for in-situ measurement of real time wafer temperature

A °CTS AST ENGINEERING INC. Advanced Sensor Technologies

Page 6: ASTC Advanced Sensor Technologies · Company Profile and Products AST°C AST ENGINEERING INC. Advanced Sensor Technologies. AST Engineering Inc. started business 14 years ago as an

AST THERMOCOUPLTM: Mineral insulated TC

MI Metal sheathed Thermocouples

Thermocouples used in thin film heaters.We have long experience in manufacturingservices for various custom-tailored andstandard models for companies includingAMAT, Lam Research, Novellus etc.

A °CTS AST ENGINEERING INC. Advanced Sensor Technologies

Page 7: ASTC Advanced Sensor Technologies · Company Profile and Products AST°C AST ENGINEERING INC. Advanced Sensor Technologies. AST Engineering Inc. started business 14 years ago as an

ASTPROTM: Profile TC and Spike TC

A °CTS AST ENGINEERING INC. Advanced Sensor Technologies

Page 8: ASTC Advanced Sensor Technologies · Company Profile and Products AST°C AST ENGINEERING INC. Advanced Sensor Technologies. AST Engineering Inc. started business 14 years ago as an

Head Office:

6-1. 55thMASORO, SINDUN MYEON, ICHEON CITY, GYEONGGI DO, SOUTH KOREA ,17304H.P. (+82)10-5116-0211, TEL. (+82)31-632-0211, FAX. (+82)31-632-0212EMAIL: [email protected]

CONTACT

A °CTS AST ENGINEERING INC. Advanced Sensor Technologies

OVERSEAS:

USA, EUROPE, and SOUTHEAST TERRITORY :

Fab-Fab-Finder, Inc.19925 Stevens Creek Blvd. Suite 100Cupertino, California USA 95014Office: 408-725-7522, Fax: 408-725-7517Email: [email protected] AsiaEmail: [email protected] USA