External Use

Applied TechEdge™ Prizm™

External Use 2

Achieve Metrology Integrity

Metrology Challenges

CD-SEM issue diagnosis can be difficult and time consuming.

Fab managers rely upon accurate CD-SEM measurements and data to meet industry challenges.

Quick issue detection can dramatically minimize production yield loss

External Use 3

Extract and Analyze All That Data

TechEdge Prizm Masters Data Management

Browser-enabled

CD SEM tool reporting

Interactive analysis

Recipe, Process issue identification and diagnosis

Fleet matching

Applied TechEdge Prizm

4External Use

Why Choose TechEdge Prizm?

Increases Productivity

• Reduce process development time by months

• Minimizes lot hold time and lithography re-work

Improves Cost of Ownership

• Enables faster improvement of Cpkof CD-SEMs

• Reduces time to market

• Reduces product scrap and re-work

• ROI in Year 1 of 200% - 500%

Accelerates Yield Ramp

Quick Problem Identification

Current Methods EstimateWith TechEdge Prizm

External Use 5

Make Informative Data-Driven Decisions

Key Features

Real-time data analysis

Fast retrieval of SEM images and wafer maps to speed diagnosis

Long term storage for data and images (≤10 yrs.)

Software, hardware, integration to the CD-SEMs, and support service

Identify abnormal data, get more information, and quickly take action

External Use 6

Prizm Drives Rapid Analysis and Response

Select data type and range for analysis and populate chart.

Analyze image for cause. This shows a process excursion.

Roll cursor over wafer map measurementsites to show SEM images.

1

Click onabnormal CD data to get wafer map.

5

SEM image displayed.

2

3

4

Excursion  | Target CD

Data and images are key!

External Use 7

CHALLENGES

• New Applied VeritySEM 4i CD-SEM systems• New techniques being introduced (e.g. Design Based

Metrology)• Introduction of new processes (<35nm) • Diagnosing CD issues was difficult and time consuming,

taking up to 8 hours per report

CUSTOMER TYPE 300mm Leading Logic/Foundry

Customer Experienced 500% ROI

RESULTS

• Prizm accelerated qualification of CD-SEM recipes by >10X

• Lithography and etch process engineers accelerated their development cycle by 2 months

• The estimated customer value exceeds $10M, with an ROI > 500% with a payback of < 1 year

External Use